Unavailable
Unavailable
Unavailable
Ebook685 pages6 hours
High Density Plasma Sources: Design, Physics and Performance
Rating: 0 out of 5 stars
()
Currently unavailable
Currently unavailable
About this ebook
This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications.
This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development.
This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing. The book is a balanced presentation in that it gives both a theoretical treatment and practical applications. It should be of considerable interest to scientists and engineers working on plasma source design, and process development.
Unavailable
Related to High Density Plasma Sources
Related ebooks
Molecular Beam Epitaxy: Applications to Key Materials Rating: 0 out of 5 stars0 ratingsPlasma Scattering of Electromagnetic Radiation: Theory and Measurement Techniques Rating: 0 out of 5 stars0 ratingsHigh Tc Superconductors: Electronic Structure Rating: 0 out of 5 stars0 ratingsOptical Pulses - Lasers - Measuring Techniques Rating: 0 out of 5 stars0 ratingsPhotonics in Switching Rating: 0 out of 5 stars0 ratingsPropulsion Re-Entry Physics: Proceedings Rating: 0 out of 5 stars0 ratingsScientific American Supplement, No. 613, October 1, 1887 Rating: 0 out of 5 stars0 ratingsAdvances in Supercapacitor and Supercapattery: Innovations in Energy Storage Devices Rating: 0 out of 5 stars0 ratingsFinite Theory of the Universe, Dark Matter Disproof and Faster-Than-Light Speed Rating: 0 out of 5 stars0 ratingsHandbook on Plasma Instabilities Rating: 0 out of 5 stars0 ratingsNitro-Explosives: A Practical Treatise Rating: 0 out of 5 stars0 ratingsGasdynamics of Explosions and Reactive Systems: Proceedings of the 6th Colloquium Held in Stockholm, Sweden, 22-26 August 1977 Rating: 0 out of 5 stars0 ratingsElectric Propulsion Development Rating: 0 out of 5 stars0 ratingsExtreme Space Weather Rating: 0 out of 5 stars0 ratingsPure Intelligence: The Life of William Hyde Wollaston Rating: 0 out of 5 stars0 ratingsKinetic Theory: Irreversible Processes Rating: 0 out of 5 stars0 ratingsCloud Chamber Photographs of the Cosmic Radiation Rating: 0 out of 5 stars0 ratingsExiguous Rating: 5 out of 5 stars5/5Focusing of Charged Particles V2 Rating: 0 out of 5 stars0 ratingsInventor, Engineer, and Physicist Nikola Tesla Rating: 0 out of 5 stars0 ratingsPrinciples of Laser Dynamics Rating: 0 out of 5 stars0 ratingsPaleomagnetism: Continents and Oceans Rating: 4 out of 5 stars4/5Ring Current Investigations: The Quest for Space Weather Prediction Rating: 0 out of 5 stars0 ratingsGeneral Photobiology Rating: 0 out of 5 stars0 ratingsRocket Science: From Fireworks to the Photon Drive Rating: 0 out of 5 stars0 ratingsBuilding Reusable Rockets Rating: 0 out of 5 stars0 ratingsPlasma Diagnostics: Surface Analysis and Interactions Rating: 0 out of 5 stars0 ratingsEnergy Shield: Moving from Science Fiction to Science Fact Rating: 0 out of 5 stars0 ratingsElectrostatic Propulsion Rating: 0 out of 5 stars0 ratings
Chemistry For You
Dr. Joe & What You Didn't Know: 177 Fascinating Questions & Answers about the Chemistry of Everyday Life Rating: 0 out of 5 stars0 ratingsOrganic Chemistry I For Dummies Rating: 5 out of 5 stars5/5Chemistry For Dummies Rating: 4 out of 5 stars4/5Organic Chemistry I Essentials Rating: 4 out of 5 stars4/5General Chemistry Rating: 4 out of 5 stars4/5The Secrets of Alchemy Rating: 4 out of 5 stars4/5Painless Chemistry Rating: 0 out of 5 stars0 ratingsHalf Lives: The Unlikely History of Radium Rating: 4 out of 5 stars4/5Monkeys, Myths, and Molecules: Separating Fact from Fiction in the Science of Everyday Life Rating: 4 out of 5 stars4/5Toxic Legacy: How the Weedkiller Glyphosate Is Destroying Our Health and the Environment Rating: 5 out of 5 stars5/5Mendeleyev's Dream Rating: 4 out of 5 stars4/5The Chemistry Book: From Gunpowder to Graphene, 250 Milestones in the History of Chemistry Rating: 5 out of 5 stars5/5Chemistry: a QuickStudy Laminated Reference Guide Rating: 5 out of 5 stars5/5Stuff Matters: Exploring the Marvelous Materials That Shape Our Man-Made World Rating: 4 out of 5 stars4/5Nuked: Echoes of the Hiroshima Bomb in St. Louis Rating: 0 out of 5 stars0 ratingsTIHKAL: The Continuation Rating: 4 out of 5 stars4/5Elementary: The Periodic Table Explained Rating: 0 out of 5 stars0 ratingsOil: A Beginner's Guide Rating: 4 out of 5 stars4/5The Nature of Drugs Vol. 1: History, Pharmacology, and Social Impact Rating: 5 out of 5 stars5/5Is That a Fact?: Frauds, Quacks, and the Real Science of Everyday Life Rating: 3 out of 5 stars3/5Chemistry All-in-One For Dummies (+ Chapter Quizzes Online) Rating: 0 out of 5 stars0 ratingsAn Introduction to the Periodic Table of Elements : Chemistry Textbook Grade 8 | Children's Chemistry Books Rating: 5 out of 5 stars5/5ACS Organic Chemistry: ACS Examination in Organic Chemistry, Practice Questions Rating: 0 out of 5 stars0 ratingsPIHKAL: A Chemical Love Story Rating: 4 out of 5 stars4/5A to Z Magic Mushrooms Making Your Own for Total Beginners Rating: 0 out of 5 stars0 ratingsCollege Chemistry Rating: 4 out of 5 stars4/5Chemistry: Concepts and Problems, A Self-Teaching Guide Rating: 5 out of 5 stars5/5
Reviews for High Density Plasma Sources
Rating: 0 out of 5 stars
0 ratings
0 ratings0 reviews