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Overview
Introduction to Glucose Biosensor
Microcantilevers
Design and Optimization Fabrication
element in close proximity with sensing system specific to analyte. Glucose Biosensor: Biological Recognition Element-Glucose Oxidase Analyte-Glucose
Glucose Biosensor
Reaction:
Glucose Oxidase
Glucose + Application:
Gluconic Acid +
1.Lab on chip Technology 2.Reduce work load, reduction in time 3.Portable Device
Why Microcantilevers?
1. Their ability to be fabricated into a multi-element sensor array 2.High sensitivity (300Hz/2.89pg)and specificity Can detect trace amount in parts per billion and parts per trillion 3.Low cost.
deflection.
Piezoresistive method-Measures strain induced resistive change produced upon adsorption of biomolecule.
Vibrational Sensing-By measuring change in
vibrational frequency
Piezoelectric method-Measures shift in resonance frequency due to adsorption of biomolecule.
microactuator is used to drive the plate into resonance. Microcantilever has its own natural frequency as
K-Spring Constant M-Mass of cantilever When Biomolecule adsorbs on surface of microcantilever, it changes K,M and thus frequency. Now this frequency shift can be measured with piezoresistive microsensor.
Biomolecule: This will cause stress on microcantilever and thus strain is induced.Strain will cause change in piezoresistance and thus change in resistance is given by,
This change in resistance is measured by
Wheatstones bridge.
Design Of Microcantilever
Design Of Structure:
1.Microcantilever 2.External Piezoelectric Element 3.Piezoresistors at root of microcantilever 4.At the free end of Microcantilever,a small area of gold coated to capture glucose molecule. 5.Immobilization of Glucose oxidase is done at free end of microcantilever.
have different resonant frequencies as well as unique frequency shifts. Shape A:f=49Hz
Sensitivity=frequency
mass Sensitivity depends on: 1.Effective mass of cantilever at free end 2.Clamping width at fixed end
Optimization..
f=41Hz
f=36Hz
f=69Hz
f=31Hz
Optimization Continued
To improve sensitivity:
1.Reduce effective mass at the end of the cantilever 2.Increase clamping width Shape F:f=506Hz Advantage:Uniform stress distribution Disadvantage: Insufficient area to capture bioparticles of interest.So trapezoidal shape is taken. Shape G:f=150Hz
frequency shift is also increased but at higher modes smaller amplitude of vibration is present. So , Original resonance frequency:264.93kHz New resonance frequency:1311kHz maximum frequency shift=300Hz Mass of particle=0.285pg So, Sensitivity= 300Hz/0.285pg=1.051018 s-1kg-1
FABRICATION
The SOI wafer
Ion Implantation to
form
Piezoresistive element Boron,
Energy~30KeV,
Dose ~10^14 /cm
Photolithography
etching
to
exposed
Electron beam deposition of Ti(~5 nm) Rate of deposition ~ 3 A/s, Pressure ~ 2 x 10 Torr, Emission current ~ 0.1 0.2 A Electron beam deposition of Au(~150nm) Rate of deposition ~ 10A/s
REFERENCES :
1.L.G. Carrascosa, M. Moreno, M. A lvarez, L.M. Lechuga.,Nanomechanical biosensors: a new sensing tool. 2. Kyung Wook Weea,b, Ghi Yuun Kanga, Jaebum Parka, Ji Yoon Kanga, Dae Sung Yoona, Jung Ho Parkb, Tae Song Kima, Novel electrical detection of label-free disease marker proteins using piezoresistive self-sensing micro-cantilevers. 3.Sumio Hosaka a, Takafumi Chiyoma a, Ayumi Ikeuchi a, Haruki Okano b, Hayato Sone a, Takashi Izumi c Possibility of a femtogram mass biosensor using a self-sensing cantilever. 4.S. Morshed & B.C. Prorok, Tailoring Beam Mechanics Towards Enhancing Detection of Hazardous Biological Species.
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8.K.W. Weea, G.Y.K, J Parka, J.Y. Kanga, D.S. Yoona, J.H. Parkb, T.S.K. (2004) Novel electrical detection of label-free disease marker protein using piezoresistive self-sensing microcantilevers. Biosensors and Bioelectronics 20:1932-38 9.R.C. Jaeger (1997) Introduction to Microelectrical Fabrication. Addison-Wesley 10.F Laermer and A Urban (2003) Developments and applications of silicon deep reactive ion etching. Microelectronics Engineering. 67-68, 349-355 11.M Madou (2001) Fundamentals of Microfabrication. CRC Press.