BS EN ISO 14644-3

Cleanrooms & associated controlled environmentsPart 3: Metrology and test methods

DIS

BS EN ISO 14644-3 Metrology & Test Methods

Current Status 1. DIS was issued by ISO in September 02 2. UK comments to BSI to be made by end December 02 3. LBI/30 will consider all UK comments by end January 03 4. BSI vote to CEN/ISO by end February 03 5. DIS is valid and can be referred to and used until it is superseded. 6. Likely time when revised DIS will be available mid 2004

BS EN ISO 14644-3 Metrology & Test Methods

14644-1:1999 Classification of air cleanliness 14644-2:2000 Specifications for testing and monitoring to prove continued compliance with -1 14644-3:DIS Metrology and test methods 14644-4:2001 Design, construction & start-up 14644-5:FDIS Operations 14644-6:CD Vocabulary/terminology 14644-7:FDIS Separative devices 14644-8:CD Classification of Airborne Molecular Contamination

BS EN ISO 14644-3 Metrology & Test Methods

Current Status of BS 5295 BS 5295 Part 0: General Introduction Current BS 5295 Part 1: Classification - Withdrawn BS 5295 Part 2: Design - Withdrawn BS 5295 Part 3: Operation - Current BS 5295 Part 4: Compliance - Withdrawn

BS EN ISO 14644-3 Metrology & Test Methods

Current Status of BS 5295 BS 5295 Part 0: General Introduction Current BS 5295 Part 1: Classification - 14644-1/3 BS 5295 Part 2: Design - 14644-4 BS 5295 Part 3: Operation - Current BS 5295 Part 4: Compliance - 14644-2 Some of BS5295 Part 1 is not addressed currently and PD6609:2000 is being revised to bridge the gap.

BS EN ISO 14644-3 Metrology & Test Methods

This part of BS EN ISO 14644 may be used for the characterisation of a cleanroom as described and specified in other parts of BS EN ISO 14644. Not all cleanroom parameter test procedures are shown. Other standards may be considered to be applicable The annexes to this document are informative. Ie they are not compulsory, but form a recommendation for compliance with the standard. Consequently, throughout the document references are made to or as agreed between customer and supplier

BS EN ISO 14644-3 Metrology & Test Methods

SUMMARY OF ESSENTIAL CONTENTS: 1. Scope - ISO standard text and also states that alternative methods can be used based on agreement between customer and supplier. 2. Normative - Reference to standards Reference 3. Terms and - Helps understanding, and Definitions allows document to exist alone 4. Testing - Recommended tests with procedures Procedures and apparatus

BS EN ISO 14644-3 Metrology & Test Methods

Item 4 forms the crux of this section of the standard. Recommended tests are listed in table 1. Each test has a procedure in Annex B and a corresponding set of apparatus in Annex C. The section of the standard referencing the test is also given. Selecting and scheduling of these tests is discussed in Annex A.

BS EN ISO 14644-3 Metrology & Test Methods Annex A

ANNEX A (Informative) Choice of recommended tests of an installation and the sequence in which to carry them out A1 Recommended test procedures Choice of tests Table A1: Test checklist for installation properties Table A2: Test checklist for sequencing

The checklists are useful in that they can be taken from the standard and used as a tool.

BS EN ISO 14644-3 Metrology & Test Methods Annex A Test Selection & Sequence Checklist
Choose

which tests are required Put them in a logical order for your application Where not applicable put N/A Review the schedule of tests

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods B1Airborne Particle Count (for classification) B2Ultrafine Particle Count (for characterisation) B3Macro Particle Count (for characterisation) B4Airflow Test B5Pressure Difference Test B6Installed Filter Leakage Test B7Flow Visualisation B8Airflow Direction Test B9Temperature Test B10 Humidity Test B11 Electrostatic & Ion Generator Test B12 Particle Deposition Test B13 Recovery Test B14 Containment Leak Test

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods Each section comprises items on: Principle - what and why

Recommended test procedure - how

Recommended apparatus - with what

Test report - detailed results

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods B1Airborne Particle Count (for classification) Airborne test for size distributions with thresholds between 0.1 and 5 microns to certify or verify cleanliness classification

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods B2Ultrafine Particle Count (for characterisation) Airborne test for particles with size distribution thresholds less than 0.1 micron for characterisation of the cleanroom

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods B3Macro Particle Count (for characterisation) Airborne tests for particles with size distribution thresholds greater than 5 microns for characterisation of the cleanroom

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods B4Airflow Test Tests to evaluate airflow velocity, uniformity of airflow velocity and supply air volume depending on classification. Airflow velocity and uniformity tests are described for use principally in unidirectional systems. Air volume tests are described for unidirectional, non unidirectional or supply air duct systems. NB Political correctness avoids terms such as laminar and turbulent flow systems

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods B5Air Pressure Difference Test Verification of capability of installation to maintain the specified PD between it and its surroundings.

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods B6Installed Filter Leakage Test Particle Counter and Photometer tests are both described Photometer method for ISO 5 and less (ie typically nonunidirectional), and for MPPS Filters with penetrations > 0.005% (H14 and lower to BS EN 1822) Acceptance criteria is 0.01% for all grades. DPC method more sensitive unidirectional systems. Evaluation of scan rate and allowable particle counts is based on BS EN 1822 part 4 and DIN 24184.

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods B6Installed Filter Leakage Test Note error on B6.3.5 formula for scan rate Sr <= Cc.Ps.K.Dp.Fs/Np is equivalent to Sr = 472 Cc.Ps.K.Dp/Np Units should be (cm/s)

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods B7Flow Visualisation Tests to demonstrate airflow characteristics in the installation. Techniques described are by thread, tracer injection or image processing (CFD)

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods B8Airflow Direction Test Tests to demonstrate airflow directional characteristics in the installation. Techniques described are by thread, tracer injection or image processing (CFD)

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods B9Temperature Test Tests to demonstrate temperature characteristics in the installation. Techniques described are for general or more exacting measurement requirements.

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods B10 Humidity Test Tests to demonstrate the humidity characteristics of the installation using measurements of dew point or relative humidity Humidity tests should be performed in conjunction with the temperature test.

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods B11 Electrostatic & Ion Generator Test Tests to evaluate the level of electrostatic charge and dissipation rate in the installation.

Techniques for the measurement of surface voltage and resistance as well as ioniser performance are suggested

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods B12 Particle Deposition Test Tests to evaluate the level of particulates that can be deposited on work or surfaces in the installation.

Techniques using witness plates or a fall out photometer are suggested.

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods B13 Recovery Test Test to evaluate the capability of the clean air system to recover from a particle generating event principally in non-unidirectional applications.

BS EN ISO 14644-3 Metrology & Test Methods Annex B

ANNEX B (Informative) - Test Methods B14 Containment Leak Test Test to evaluate the intrusion of contaminated air from surrounding areas using DPC or Photometer methods.

BS EN ISO 14644-3 Metrology & Test Methods Annex C

Annex C (Informative) - Test Instruments Describes test apparatus that should be used for the corresponding recommended tests in Annex B. There is a recommendation that apparatus should be subject to agreement between the customer and the supplier. The information provided is not limiting, it represents a sensible minimum requirement. Ie Equipment that becomes available through improvements in measurement technology are not restricted by this Annex. Equally alternate equipment may be suitable and may be used subject to agreement.

BS EN ISO 14644-3 Metrology & Test Methods Annex C

Annex C (Informative) - Test Instruments - example C1. Discrete Particle Counter (DPC). C2. Condensation Nucleus Counter (CNC). C3. Microscope, Cascade Impactor, DPC, Time of Flight. C4. Anemometers - Thermal, Ultrasonic, Vane, Pitot, Hood. C5. Manometers - Electronic, Inclined, Mechanical. C6. Photometer, DPC, Aerosol Generator, C7. Anemometers, Tracers, Aerosol generator. C8. Anemometers, Tracers, Aerosol generator. C9. Liquid in Glass thermometer, Electronic thermometer. C10. Humidity meters; Capacitive, Hair. C11. Voltmeter, Ohmmeter, Charged plate monitor. C12. Microscope, Fall-out Meter. C13. Discrete Particle Counter (DPC). C14. Discrete Particle Counter (DPC), Photometer, Aerosol Generator.

BS EN ISO 14644-3 Metrology & Test Methods

UK public comments on this section to BSI need to be made in written form and in an approved format by end December 02 otherwise they will not be considered.

This presentation has been prepared and delivered by:-

Wander ter Kuile McLeod Russel UK Ltd c/o Vokes Ltd Henley Park Guildford Surrey, GU3 2AF UK

tel 01483 207236 fax 01483 235384 e-mail wander.ter.kuile@vokes.com