Spectroscopic Ellipsometry

Introduction to Spectroscopic Ellipsometry

Ellipsometry is:

Precise Accurate Well known Non-destructive Analytical technique It is used for a variety of measurements: Thickness of films. Optical properties Dielectrics Refractive index Organics Crystallinity Semiconductors Uniformity Metal layers Modeling of surface Thickness Measurement Range roughness
Metals 0.1 nm 50 nm Non-Metals 0.1 nm 0.01 mm

http://www.jawoollam.com/tutorial_1.html

Spectroscopic Ellipsometry Setup

Multiple Wavelengths

Unpolarized Light 5. Detector

1. Light Source
2. Linear Polarizer

Linearly Polarized Light

4. Analyzer

3. Compensator
Sample

Elliptically Polarized Light

Light Source
1. The light source consists of wavelengths in the

following regions

Ultraviolet

185nm 260nm

Visible

0.4nm 0.7nm

Infrared

0.7nm 1.1m

http://www.flame-detection.net/flame_detector/flame_detection_school/flame_spectrum.htm

Components and Functions

2. Polarizer - produces light in a special state of

polarization at the output 3. Compensator - used to shift the phase of one component of the incident light

Depending on orientation, it transforms the ellipse of polarization

4. Analyzer second polarizer that detects the linearly

polarized light reflected off the sample 5. Detector

http://www.nanofilm.de/fileadmin/cnt_pdf/technology/Ellipsometry_principle__150dpi_s.pdf

SE Advantages
No contact with the films is required for the analysis

of films
Technique does not require a reference or standards Analysis is less sensitive to the fluctuations of light

intensity
Thickness measurement speed 1 300 sec/Location

https://www.filmetrics.com/metals

Single Wavelength Ellipsometry

Used in Imaging Ellipsometry Commonly a HeNe laser with the wavelength of

632.8 nm

Advantages:

Laser can focus on a specific spot Lasers have a higher power than broad band light sources

http://www.eas.asu.edu/nanofab/capabilities/metrology.html

Single Wavelength Ellipsometry Setup

One Wavelength

Unpolarized Light 5. Detector

1. Light Source
2. Linear Polarizer

Linearly Polarized Light

4. Analyzer

3. Compensator
Sample

Elliptically Polarized Light

Imaging Ellipsometry
Combines SWE with Microscopy High Lateral Resolution

Possible to see tiny samples surface defects Inhomogenities

to detect various properties of samples

Advantages: Provides film thickness and refractive index Provides a real time contrast image of the sample Ability to restrict ellipsometric analysis to a particular region of interest within the field-of-view The signal provided is spatially resolved to show the details of the sample
http://www.soem.ecu.edu.au/physics/physics_facilities.htm

Imaging Ellipsometry Setup

Unpolarized Light CCD Camera

Linearly Polarized Light Laser Light Source Linear Polarizer Compensator Analyzer

Objective

Sample
Elliptically Polarized Light

Two New Components

Thanks