Applications of electron beam

- Gaurav Kumar
- 16122009
What is electron beam ?

Electron beam, stream of electrons generated by heat (thermionic

emission), bombardment of charged atoms or particles
(secondary electron emission), or strong electric fields (field
emission).

Electron beams are used chiefly in research, technology, and

medical therapy to produce X rays and images on television
screens, oscilloscopes, and electron microscopes.
Generation of electron beams in a Linear
Accelerator

1. Production of Electrons
Electrons are produced in an electron gun. A hot cathode emits
electrons, which are accelerated towards an anode.
A negatively charged focusing electrode narrows the electrons
into a fine beam which then passes through the aperture in the
anode.
2. Acceleration of Electrons
Upon entering the waveguide, the electrons are accelerated by a
magnetic field generated by microwaves. These microwaves are
produced in either a klystron or a magnetron and are supplied to the
waveguide.

3. Beam Transport
The length of waveguides capable of generating high megavoltage photon
beams (> 6 MV) makes a straight beam treatment head unfeasible.
High energy linacs use a beam transport system to deliver the electrons to
the treatment head. This is accomplished using strong electromagnets which
bend the beam through 270 degree.
Applications of electron beam

1. Electron Microscope
2. Furnaces
3. Welding
4. Lithography
5. Surface treatments
Electron microscope

An electron microscope is a microscope that uses a beam of

accelerated electrons as a source of illumination. As the
wavelength of an electron can be up to 100,000 times shorter
than that of visible light photons, electron microscopes have a
higher resolving power than light microscopes and can reveal the
structure of smaller objects.

Two common types are the

• Scanning electron microscope (SEM
• Transmission electron microscope (TEM).
SCANNING ELECTRON MICROSCOPE (SEM)

The SEM produces images by probing the specimen with a focused

electron beam that is scanned across a rectangular area of the
specimen (raster scanning).

When the electron beam interacts with the specimen, it loses energy.
The lost energy is converted into alternative forms such as heat,
emission of low-energy secondary electrons and high-energy
backscattered electrons, light emission or X-ray emission, all of which
provide signals carrying information about the properties of the
specimen surface, such as its topography and composition.

Generally, the image resolution of an SEM is lower than that of a

TEM.
Scanning electron microscope (SEM
TRANSMISSION ELECTRON MICROSCOPE (TEM)

Transmission electron microscopy is a microscopy technique in

which a beam of electrons is transmitted through a specimen to form
an image.
An image is formed from the interaction of the electrons with the
sample as the beam is transmitted through the specimen.
The image is then magnified and focused onto an imaging device,
such as a fluorescent screen.

Transmission electron microscopes are capable of imaging

at a significantly higher resolution than light microscopes,
owing to the smaller de Broglie wavelength of electrons.
Furnaces

The rapid increase of temperature at the location of impact can

quickly melt a target material. In extreme working conditions, the
rapid temperature increase can even lead to evaporation, making
an electron beam an excellent tool in heating applications, such
as welding.

An electron-beam furnace (EB furnace) is a type of vacuum

furnace employing high-energy electron beam in vacuum as the
means for delivery of heat to the material being melted
Electron-beam welding

Electron-beam welding (EBW) is a fusion welding process in

which a beam of high-velocity electrons is applied to two materials
to be joined.

The work pieces melt and flow together as the kinetic energy of
the electrons is transformed into heat upon impact.

EBW is often performed under vacuum conditions to prevent

dissipation of the electron beam.
Electron-beam lithography

Lithography, meaning to write, is a method of printing originally

based on the immiscibility of oil and water.

The printing is from a stone (lithographic limestone) or a metal plate

with a smooth surface.

Lithography uses simple chemical processes to create an image

Electron-beam lithography is the practice of scanning a focused
beam of electrons to draw custom shapes on a surface covered
with an electron-sensitive film called a resist (exposing).

• The electron beam changes the solubility of the resist,

enabling selective removal of either the exposed or non-
exposed regions of the resist by immersing it in a solvent
(developing).

• The purpose, as with photolithography, is to create very small

structures in the resist.

• The primary advantage of electron-beam lithography is that it

can draw custom patterns (direct-write) with sub-10 nm
resolution..
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