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Chapter 4 PN and Metal-Semiconductor Junctions

4.1 Building Blocks of the PN Junction Theory


– V +
I
Donor ions

N P
N-type
P-type I
diode
symbol

V
Reverse bias Forward bias

PN junction is present in perhaps every semiconductor device.

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-1
4.1.1   Energy Band Diagram of a PN Junction
N-region P-region
Ef is constant at
(a) Ef
equilibrium
Ec

Ec Ef
Ec and Ev are known
(b)
Ev relative to Ef
Ev
Ec

(c) Ef Ec and Ev are smooth,


Ev the exact shape to be
determined.
Neutral Depletion Neutral
N-region layer P-region
A depletion layer
Ec
exists at the PN
(d) Ef junction where n  0
Ev and p  0.

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-2
4.1.2   Built-in Potential

(a)
N-type P-type
NNd d NNa a

Ec
bi
(b)
q
Ef
Ev

V
bi
(c)

xN 0 xP x

Can the built-in potential be measured with a voltmeter?


Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-3
4.1.2   Built-in Potential

 q A kT kT N c
N-region n  N d  Nce  A ln
q Nd
2
ni  q B kT kT N c N a
P-region n   Nce B ln 2
Na q ni

kT  N c N a Nc 
bi  B  A   ln  ln 

q  ni
2
Nd 

kT N d N a
bi  ln 2
q ni

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-4
4.1.3  Poisson’s Equation
Gauss’s Law:
a A
ar e

E (x)   E (x + x)
s: permittivity (~12o for Si) 
: charge density (C/cm3)

x

x

Poisson’s equation

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-5
4.2 Depletion-Layer Model
(a)
N
4.2.1  Field and Potential in the Depletion Layer
N N P
d a

(b) Neutral Region Depletion Layer Neutral Region


On the P-side of the
N P depletion layer,  = –qNa
xnN 0 xpP
 dE  qN a
dx s
qNd
(c) xpP qN a qN a
x E ( x )   x  C  ( x  x)
xnN
–qNa s 1
s P

 E On the N-side,  = qNd

(d) qN d
E ( x)  ( x - xN )
x
s
xnN 0 xpP
V
bi

(e) Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-6
(a)
N Nd Na P
4.2.1  Field and Potential in the Depletion Layer 

(b) N eut ra l Re gion D eple tion La yer N e utral R egi on

N P
–xnN 0 xpP

The electric field is continuous at x = 0.

qN
Nda |xP| = Nd|xP|
(c) xp
of the junction is depleted more? x
Which side –x
n
–qN a

A one-sided junction is called a N+P junction or P+N junction


 E

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-7
qNd
(c) xp
4.2.1  Field and Potential in the Depletion Layer
x n
–qN
x
a

 E On the P-side,
qN a
V ( x)  ( xP  x ) 2
2 s
(d)

xn 0 xp x
N P

bi
V
Arbitrarily choose the
(e) voltage at x = xP as V = 0.
x
xnN xpP
On the N-side,
Ec
qN d
 bi , built-in potential V ( x)  D  ( x  xN )2
(f)
Ef 2 s
Ev
qN d
 bi  ( x  xN )2
2 s

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-8
(a)
N Nd Na P
4.2.2  Depletion-Layer Width

(b) N eut ra l Re gion D eple tion La yer N e utral R egi on

N P
–xnN 0 xpP
V is continuous at x = 0 
2 sbi  1 1 
xP  xN  Wdep    
q  Na Nd 
qN
If Na >> Nd , as in a P+N junction,
d
(c) xp
2 sbi x
Wdep 
qN d
–xxn N
–qN a
|x P||xN|N d Na  0

What about a N+P junction?  E


1 1 1 1
Wdep  2 s bi qN where   
N N d N a lighter dopant density
(d)
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-9
–xn 0 xp x
EXAMPLE: A P+N junction has Na=1020 cm-3 and Nd
=1017cm-3. What is a) its built in potential, b)Wdep , c)xN ,
and d) xP ?

Solution:
kT N d N a 10 20  1017 cm 6
a) bi  ln 2
 0.026V ln 20 6
1V
q ni 10 cm
1/ 2
2 sbi  2 12  8.85 10 1  14

b) Wdep    19
  0.12 μm
 1.6 10 10
17
qN d 

xN  Wdep  0.12 μm
c)
xP  xN N d N a  1.2  104 μm  1.2 Å  0
d)

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-10
4.3 Reverse-Biased PN Junction
V
+ –

N P

Ec 2 s (bi  | Vr |) 2 s  potential barrier


qbi
Wdep  
qN qN
Ec Ef
Ef Ev

Ev
(a) V = 0 1 1 1 1
  
Ec
N N d N a lighter dopant density
qbi + qV Efp
• Does the depletion layer
qV Ev
Ec
Efn
widen or shrink with
increasing reverse bias?
Ev
(b) reverse-biased

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-11
4.4 Capacitance-Voltage Characteristics

N Nd Na P

Conductor Insulator Conductor


Wde p

Reverse biased PN junction is s


Cdep A
a capacitor. Wdep

• Is Cdep a good thing?


• How to minimize junction capacitance?

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-12
4.4 Capacitance-Voltage Characteristics

1/C dep 2 Capacitance data


2
1 Wdep 2(bi  V )
 
Cdep
2
A 2 s
2
qN S A2

Slope = 2/qN sA2

Vr
– bi Increasing reverse bias

• From this C-V data can Na and Nd be determined?

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-13
EXAMPLE: If the slope of the line in the previous slide is
2x1023 F-2 V-1, the intercept is 0.84V, and A is 1 m2, find the
lighter and heavier doping concentrations Nl and Nh .

Solution:
N l  2 /( slope  q s A2 )
 2 /(2 10 23  1.6 10 19  12  8.85 10 14  10 8 cm 2 )
 6  1015 cm 3

q 2 0.84
kT N h N l ni kTbi 10 20 0.026
bi  ln 2
 N h  e  e  1 .8  1018
cm 3

q ni Nl 6  1015

• Is this an accurate way to determine Nl ? Nh ?


Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-14
4.5 Junction Breakdown
I

Forward Current
V B, breakdown
voltage
V
R
Small leakage
Current
A
P N

R C
A
3.7 V
IC
Zener diode
B
D

A Zener diode is designed to operate in the breakdown mode.

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-15
4.5.1  Peak Electric Field

Neutral Region
increasing
reverse bias
N+ Na P
0 xp
1/ 2
(a)  2qN 
E
Ep  E(0)    (bi  | Vr |)
Ep  s 
increasing reverse bias

 sEcrit 2
x VB   bi
xp 2qN
(b)

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-16
4.5.2  Tunneling Breakdown

Dominant if both sides of


a junction are very heavily
doped.
Filled States - Empty States
Ec

Ev H / εp
JGe
I

V
  6
Ep Ecrit 10 V/cm
Breakdown

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-17
4.5.3  Avalanche Breakdown 
• impact ionization: an
Ec
energetic electron generating
original
electron electron and hole, which can
Efp also cause impact ionization.
Ev
• Impact ionization + positive
feedbackavalanche breakdown
sEcrit 2
electron-hole VB 
pair generation 2qN

Ec 1 1 1
Efn VB   
N Na Nd

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-18
4.6 Forward Bias – Carrier Injection

VV=0
=0 Forward
Forward biased
biased
V
I=0 – +

Ec N P
 qbi
- Ec
Ef qbi –qV
Ev
Ef n qV Efp
Ev

Drift and diffusion cancel out +

Minority carrier injection

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-19
4.6 Forward Bias –
Quasi-equilibrium Boundary Condition
 ( Ec  E fn ) / kT  ( Ec  E fp ) / kT ( E fn  E fp ) / kT
n ( xP )  N c e  Nce e
( E fn  E fp ) / kT
 nP 0 e  nP 0 e qV / kT

EEcc

EEfnfnfn • The minority carrier


EEfpfp densities are raised
EEv v by eqV/kT
• Which side gets more
xx carrier injection?
xN0 x0 P
N P

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-20
4.6 Carrier Injection Under Forward Bias–
Quasi-equilibrium Boundary Condition

2
ni qV
n(xP )  nP 0 e 
qV kT kT
e
Na
2
ni qV
p (xP)  p N 0 e 
qV kT kT
e
Nd

n( xP )  n( xP )  nP 0  nP 0 (e qV kT
 1)
p( x N )  p ( x N )  p N 0  p N 0 (e qV kT
 1)

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-21
EXAMPLE: Carrier Injection
A PN junction has Na=1019cm-3 and Nd=1016cm-3. The applied
voltage is 0.6 V.

Question: What are the minority carrier concentrations at the


depletion-region edges?

Solution: n ( xP )  nP 0e  10  e0.6 0.026  1011 cm -3


qV kT

p( x N )  p N 0 e qV kT  10 4  e 0.6 0.026  1014 cm -3

Question: What are the excess minority carrier concentrations?


n( xP )  n( xP )  nP 0  1011  10  1011 cm -3
Solution:
p( x N )  p( x N )  p N 0  1014  104  1014 cm -3

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-22
4.7 Current Continuity Equation

J p ( x) J p ( x  x) p
A  A  A  x 
q q 
aA
a re
Jp (x) Jp ( x +  x )
J p ( x  x)  J p ( x) p
 q
p x 

Volume = A·x
dJ pp
 q
dx 
x

x

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-23
4.7 Current Continuity Equation
dJ p p
 q Minority drift current is
dx  
negligible;
d2p p Jp= –qDpdp/dx
qD p 2  q
dx p

d p
2
p p d 2 n n
  2 2
 2
dx 2
D p p L p dx Ln

Lp and Ln are the diffusion lengths

L p  D p p Ln  Dn n

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-24
4.8 Forward Biased Junction-- Excess Carriers

P + N
d 2 p p
2
 2
xP dx Lp
-x N
0
x p()  0
p( x N )  p N 0 (e qV / kT  1)
x / Lp  x / Lp

p ( x)  Ae  Be
 x  xN  / L p
p( x)  p N 0 (e qV / kT  1)e , x  xN

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-25
4.8 Excess Carrier Distributions

1.0

P-side N-side
N a = 1017 cm -3 Nd = 2 1017 cm-3
0.5
nP ' ex /L n pN '  e–x /L p

– 3L n –2L n –Ln 0 L p 2L p 3L p 4Lp

  x  xN  / L p

p ( x )  p N 0 (e qV / kT
 1)e , x  xN
n( x )  nP 0 (e qV / kT  1)e  x  xP  / Ln , x  xP
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-26
EXAMPLE: Carrier Distribution in Forward-biased PN Diode

N-type P-type
Nd = 5  cm-3 Na = 101 7 cm -3
Dp =12 cm 2/s Dn=36.4 cm2 /s
p = 1  s n = 2  s

• Sketch n'(x) on the P-side.


2
ni 1020 0.6 0.026
n( xP )  nP 0 (e qV kT
 1)  (e qV / kT
 1)  17 e  1013 cm 3
Na 10
1013cm-3
N-side P-side
n’ ( = p’ )


p´ ( = n’ ) 2
x
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-27
EXAMPLE: Carrier Distribution in Forward-biased PN Diode

• How does Ln compare with a typical device size?

Ln  Dn n  36  2 10 6  85 μm

• What is p'(x) on the P- side?

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-28
4.9 PN Diode I-V Characteristics
Jtotal
Jtotal Jn = Jtotal – Jp
Jp = Jtotal – Jn

JnP JnP
JpN JpN
x
P-side 0 N-side P-side 0 N-side

dp( x) Dp  x  xN  Lp
J pN   qD p q p N 0 (e qV kT
 1)e
dx Lp

dn( x) D
J nP  qDn  q n nP 0 (e qV kT
 1)e  x  xP  Ln

dx Ln
 Dp Dn  qV

Total current  J pN ( x N )  J nP ( xP )  q p q n P 0 ( e kT
 1)
 L N0 Ln 
 p 
 J at all x
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-29
The PN Junction as a Temperature Sensor

I  I 0 (e qV kT
 1)

 Dp D 
I 0  Aqni  
2
 n
L N 
 p d Ln N a 

What causes the IV curves to shift to lower V at higher T ?

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-30
4.9.1   Contributions from the Depletion Region
n  p  ni e qV / 2 kT
Net recombination (generation) rate :
ni qV / 2 kT
(e  1)
 dep

qniWdep
I  I 0 (e qV / kT
 1)  A (e qV / 2 kT  1)
τ dep

Space-Charge Region (SCR) current
qniWdep
I leakage  I 0  A
τ dep Under forward bias, SCR current is an extra 
current with a slope 120mV/decade

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-31
4.10 Charge Storage

1013 cm -3 QI
N-side P-side

n' I  Q s
Q  I s
p’ 2
x

What is the relationship between s (charge-storage time)


and  (carrier lifetime)?

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-32
4.11 Small-signal Model of the Diode
I
1 dI d d
G   I 0 (e qV / kT
 1)  I 0 e qV / kT
R dV dV dV
V R C
q kT
 I 0 (e qV / kT )  I DC /
kT q
What is G at 300K and IDC = 1 mA?

Diffusion Capacitance:
dQ dI kT
C s   sG   s I DC /
dV dV q

Which is larger, diffusion or depletion capacitance?

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-33
Part II: Application to Optoelectronic Devices
4.12 Solar Cells
•Solar Cells is also known
as photovoltaic cells.
•Converts sunlight to
electricity with 10-30%
conversion efficiency.
•1 m2 solar cell generate
about 150 W peak or 25 W
continuous power.
•Low cost and high
efficiency are needed for
wide deployment.

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-34
4.12.1   Solar Cell Basics

I
Short Circuit
Dark IV
Eq.(4.9.4)
light
N P I
sc
0.7 V
- 0 V

Ec Solar Cell
IV
Eq.(4.12.1)
Ev   –I
sc Maximum
+ power-output
(a)

I  I 0 (e qV kT
 1)  I sc

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-35
Direct-Gap and Indirect-Gap Semiconductors 
•Electrons have both particle and wave properties.
•An electron has energy E and wave vector k.

direct-gap semiconductor indirect-gap semiconductor

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-36
4.12.2   Light Absorption
             
Light intensity (x)  e -x
α(1/cm): absorption 
coefficient
1/α :  light penetration 
depth
hc
Photon Energy (eV) 

1.24
 ( m)

A thinner layer of direct-gap semiconductor can absorb most
of solar radiation than indirect-gap semiconductor. But Si…
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-37
4.12.3 Short-Circuit Current and Open-Circuit Voltage

If light shines on the N-type


semiconductor and generates
Jp (x)
holes (and electrons) at the
Jp ( x +  x )
rate of G s-1cm-3 ,
p
d 2 p p G
Volume = A·x 2
 2 
dx Lp Dp
x

x
If the sample is uniform (no PN junction),
d2p’/dx2 = 0  p’ = GLp2/Dp= Gp

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-38
Solar Cell Short-Circuit Current, Isc
Assume very thin P+ layer and carrier generation in N region only.
Isc G
p()  L   pG
2
p
Dp
P+ N p(0)  0
0
x  x / Lp
p( x)   p G (1  e )
P'
dp( x) Dp  x / Lp
 pG J p  qD p q  p Ge
dx Lp
0 Lp x I sc  AJ p (0)  AqL p G
G is really not uniform. Lp needs be larger than the light
penetration depth to collect most of the generated carriers.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-39
Open-Circuit Voltage
•Total current is ISC plus the PV diode (dark) current:
ni2 D p qV / kT
I  Aq (e  1)  AqL p G
N d Lp
•Solve for the open-circuit voltage (Voc) by setting I=0
(assuming e qVoc / kT  1) 2
ni D p qVoc / kT
0 e  LpG
N d Lp

kT 2
Voc  ln( p GN d / ni )
q

How to raise Voc ?


Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-40
4.12.4  Output Power
A particular operating point on the
solar cell I-V curve maximizes the
output power (I V).

Output Power  I sc  Voc  FF

•Si solar cell with 15-20% efficiency


dominates the market now
•Theoretically, the highest efficiency (~24%) can be obtained with
1.9eV >Eg>1.2eV. Larger Eg lead to too low Isc (low light
absorption); smaller Eg leads to too low Voc.
•Tandem solar cells gets 35% efficiency using large and small Eg
materials tailored to the short and long wavelength solar light.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-41
4.13  Light Emitting Diodes and Solid-State Lighting

Light emitting diodes (LEDs)
• LEDs are made of compound semiconductors such as InP
and GaN.
• Light is emitted when electron and hole undergo radiative
recombination.

Ec

Radiative  Non-radiative 
recombination recombination 
through traps
Ev

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-42
Direct and Indirect Band Gap

Trap

Direct band gap Indirect band gap


Example: GaAs Example: Si
Direct recombination is efficient Direct recombination is rare as k
as k conservation is satisfied. conservation is not satisfied
Modern Semiconductor Devices for Integrated Circuits (C. Hu)
4.13.1  LED Materials and Structure

1.24 1.24
LED wavelength (  m)  
photon energy E g ( eV )

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-44
4.13.1  LED Materials and Structure
compound semiconductors
Lattice 
  Egg(eV)
E (eV ) Wavelength 
(μm) Color constant 
binary semiconductors:
(Å)
 - Ex: GaAs, efficient emitter
InAs 0.36 3.44   6.05
infrared
ternary semiconductor :
InN 0.65 1.91   3.45
 - Ex: GaAs1-xPx , tunable Eg (to 
InP 1.36 0.92  5.87 vary the color)
GaAs 1.42 0.87 Red
   red 5.66
  yellow
Yellow
GaP 2.26 0.55  Green
   blue
5.46 quaternary semiconductors:
  violet
Blue
- Ex: AlInGaP , tunable Eg and 
AlP 3.39 0.51 5.45
lattice constant (for growing high 
GaN 2.45 0.37 3.19 quality epitaxial films on 
AlN 6.20 0.20 UV 3.11
inexpensive substrates)

Light-emitting diode materials

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-45
Common LEDs
Spectral  Material 
Substrate Example Applications
range System

Infrared InGaAsP InP Optical communication

Infrared Indicator lamps. Remote 
GaAsP GaAs
-Red control

Optical communication. 
Red- GaA or 
AlInGaP High-brightness traffic 
Yellow GaP
signal lights

High brightness signal  AlInGaP 
Green- GaN or 
InGaN lights.  Quantun Well
Blue sapphire
Video billboards

GaN or 
Blue-UV AlInGaN
sapphire Solid-state lighting

Organic 
Red-
semicon- glass Displays
Blue
ductors

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-46
4.13.2 Solid-State Lighting
luminosity (lumen, lm): a measure of visible light energy
normalized to the sensitivity of the human eye at
different wavelengths

Compact Tube Theoretical limit at


Incandescent White  Theoretical limit
fluorescent fluorescent peak of eye sensitivity
lamp LED (white light)
lamp lamp ( λ=555nm)

17 60 50-100 90-? 683 ~340

Luminous efficacy of lamps in lumen/watt

Organic Light Emitting Diodes (OLED) :
has lower efficacy than nitride or aluminide based compound semiconductor LEDs.

Terms: luminosity measured in lumens. luminous efficacy, 

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-47
4.14  Diode Lasers
4.14.1 Light Amplification
(a) Absorption (d) Net Light
Absorption

(b) Spontaneous (e) Net Light


Emission Amplification
Light amplification requires 
population inversion: electron 
(c) Stimulated
occupation probability is 
Emission
larger for higher E states than 
lower E states.

Stimulated emission: emitted photon has identical frequency and 
directionality as the stimulating photon; light wave is amplified.

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-48
4.14.1 Light Amplification in PN Diode

Population inversion
is achieved when
qV  E fn  E fp  E g

Equilibrium, V=0

Population inversion, qV > Eg

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-49
4.14.2   Optical Feedback and Laser

Laser threshold is reached (light


P+ intensity grows by feedback)
light when
out
R1  R2  G  1
Cleaved N+
crystal •R1, R2: reflectivities of the two
plane
ends
•G : light amplification factor (gain)
for a round-trip travel of the light
through the diode

Light intensity grows until R1  R2  G  1 , when the light intensity


is just large enough to stimulate carrier recombinations at the same
rate the carriers are injected by the diode current.

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-50
4.14.2   Optical Feedback and Laser Diode
• Distributed Bragg
reflector (DBR) reflects 
light with multi-layers of 
semiconductors.
•Vertical-cavity surface-
emitting laser (VCSEL) is 
shown on the left.
•Quantum-well laser has 
smaller threshold current 
because fewer carriers 
are needed to achieve 
population inversion in 
the small volume of the 
thin small-Eg well. 
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-51
4.14.3 Laser Applications
Red diode lasers: CD, DVD reader/writer
Blue diode lasers: Blu-ray DVD (higher storage density)
1.55  m infrared diode lasers: Fiber-optic communication

4.15 Photodiodes
Photodiodes: Reverse biased PN diode. Detects photo-
generated current (similar to Isc of solar cell) for optical
communication, DVD reader, etc.
Avalanche photodiodes: Photodiodes operating near
avalanche breakdown amplifies photocurrent by impact
ionization.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-52
Part III: Metal-Semiconductor Junction

Two kinds of metal-semiconductor contacts:

• Rectifying Schottky diodes: metal on lightly


doped silicon

•Low-resistance ohmic contacts: metal on


heavily doped silicon

Modern Semiconductor Devices for Integrated Circuits (C. Slide 4-53


Hu)
 Bn Increases with Increasing Metal Work Function

Vacuum level, E0

Si = 4.05 eV  M : Work Function


 qM of metal

qBn  Si : Electron Affinity of Si


Ec

Ef

Theoretically,
Ev Bn=M – Si

Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-54


4.16 Schottky Barriers
Energy Band Diagram of Schottky Contact

Depletion
Metal layer Neutral region

q Bn
Ec
Ef
N-Si • Schottky barrier height, B ,
Ev is a function of the metal
Ec
material.

P-Si • B is the most important


Ef
parameter. The sum of qBn
q Bp Ev
and qBp is equal to Eg .

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-55
Schottky barrier heights for electrons and holes

Bn + Bp  Eg

Bn increases with increasing metal work function

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-56
Fermi Level Pinning

Vacuum level, E0 • A high density of


energy states in the
Si = 4.05 eV
 q bandgap at the metal-
M semiconductor interface
pins Ef to a narrow
qBn Ec
range and  Bn is
+ 
Ef typically 0.4 to 0.9 V

• Question: What is the


Ev
typical range of Bp?

Modern Semiconductor Devices for Integrated Circuits (C. Slide 4-57


Hu)
Schottky Contacts of Metal Silicide on Si

Silicide: A silicon and metal compound. It is conductive 
similar to a metal.

Silicide-Si interfaces are more stable than metal-silicon


interfaces. After metal is deposited on Si, an annealing step is
applied to form a silicide-Si contact. The term metal-silicon
contact includes and almost always means silicide-Si contacts.

Silicide ErSi1.7 HfSi MoSi2 ZrSi2 TiSi2 CoSi2 WSi2 NiSi2 Pd2Si PtSi
BnBn (V) 0.28 0.45 0.55 0.55 0.61 0.65 0.67 0.67 0.75 0.87
BpBp (V) 0.55 0.49 0.45 0.45 0.43 0.43 0.35 0.23

Modern Semiconductor Devices for Integrated Circuits (C. Slide 4-58


Hu)
Using C-V Data to Determine  B

qbi qbi  q Bn  ( Ec  E f )
qBn
Ec
Nc
Ef  q Bn  kT ln
Nd
Ev 2 s (bi  V )
Wdep 
qN d
qBn q(bi + V) s
C A
qV Wdep
Ec
Ef
Question:
How should we plot the CV
Ev data to extract bi?

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-59
Using CV Data to Determine  B

1/C2
1 2(bi  V )

C 2
qN d  s A2

qBn qbi
V Ec
bi Ef

Once bi is known, can


E
be determined using v

Nc
qbi  qBn  ( Ec  E f )  qBn  kT ln
Nd
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-60
4.17 Thermionic Emission Theory
vthx
-
q( B  V) Ec
q B
N-type Efm qV Efn
V Metal Silicon

Ev

x
3/ 2
 2mn kT 
n  N c e  q ( B V ) / kT  2 2  e  q ( B V ) / kT
 h 
vth  3kT / mn vthx   2kT / mn
1 4qmn k 2 2  q B / kT qV / kT
J S M   qnvthx  3
T e e
2 h
 J 0 e qV / kT , where J o  100e  q B / kT A/cm2

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-61
4.18 Schottky Diodes

Forward 
biased
V = 0

V
Reverse bias Forward bias
Reverse 
biased

Modern Semiconductor Devices for Integrated Circuits (C. Slide 4-62


Hu)
4.18 Schottky Diodes

I 0  AKT 2 e  q B / kT
4qmn k 2
K 3
 100 A/(cm 2
 K 2
)
h
I  I S  M  I M  S  I 0 e qV / kT  I 0  I 0 (e qV / kT  1)
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-63
4.19 Applications of Schottly Diodes
I I Schottky
Schottky diode I  I 0 (e qV / kT  1)
I 0  AKT 2 e  q B / kT
BB PN junction
PN junction
diode

V
V

• I0 of a Schottky diode is 103 to 108 times larger than a PN


junction diode, depending on B . A larger I0 means a smaller
forward drop V.
• A Schottky diode is the preferred rectifier in low voltage,
high current applications.
Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-64
Switching Power Supply

PN Junction Schottky
rectifier Transformer rectifier
100kHz
110V/220V Hi-voltage Hi-voltage Lo-voltage 50A
DC MOSFET AC AC 1V DC
AC inverter
utility
power

feedback to modulate the pulse width to keep Vout = 1V

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-65
4.19 Applications of Schottky diodes

Question: What sets the lower limit in a Schottky diode’s


forward drop?

• Synchronous Rectifier: For an even lower forward drop,


replace the diode with a wide-W MOSFET which is not
bound by the tradeoff between diode V and leakage current.

• There is no minority carrier injection at the Schottky


junction. Therefore, Schottky diodes can operate at higher
frequencies than PN junction diodes.

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-66
4.20 Quantum Mechanical Tunneling

Tunneling probability:

8 2 m
P  exp( 2T 2
(VH  E ) )
h

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-67
4.21 Ohmic Contacts

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-68
4.21 Ohmic Contacts
Silicide N+ Si
2 s Bn
Wdep  Bn
Bn – V
qN d - -
- - Ec , Ef Efm V
Ec , Ef

Tunneling
probability: Ev
 H Bn Nd Ev
Pe x x

T  Wdep / 2   sBn / 2 qN d
4
H   s mn / q
h
1  H ( Bn V ) /
kT / 2mn e
Nd
J S M  qN d vthx P  qN d
2

Modern Semiconductor Devices for Integrated Circuits (C. Slide 4-69


Hu)
4.21 Ohmic Contacts

1 H Bn / N d
 dJ S  M  2e H Bn / Nd
Rc     e Ω  cm 2
 dV  qvthx H N d

Modern Semiconductor Devices for Integrated Circuits (C. Slide 4-70


Hu)
4.22 Chapter Summary

Part I: PN Junction

kT N d N a The potential barrier


bi  ln 2 increases by 1 V if a 1 V
q ni
reverse bias is applied

2 s  potential barrier
depletion width Wdep 
qN

junction capacitance s
Cdep A
Wdep

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-71
4.22 Chapter Summary

• Under forward bias, minority carriers are injected


across the jucntion.

• The quasi-equilibrium boundary condition of


minority carrier densities is:
n( x p )  nP 0 e qV kT

p ( x N )  p N 0 e qV kT

• Most of the minority carriers are injected into the


more lightly doped side.

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-72
4.22 Chapter Summary

• Steady-state • Minority carriers


continuity equation: diffuse outward  e–|x|/Lp
and e–|x|/Ln
d 2 p p p • Lp and Ln are the
  2
dx 2
D p p L p diffusion lengths

I  I 0 (e qV kT
 1)
L p  D p p
 Dp Dn 
I 0  Aqni  2

L N 
 p d Ln N a 

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-73
4.22 Chapter Summary

Charge storage: Q  I s

Diffusion capacitance: C   sG

kT
Diode conductance: G  I DC /
q

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-74
4.22 Chapter Summary
Part II: Optoelectronic Applications
Solar cell power  I sc  Voc  FF
•~100um Si or <1um direct–gap semiconductor can absorb most of solar
photons with energy larger than Eg.

•Carriers generated within diffusion length from the junction can be


collected and contribute to the Short Circuit Current I sc.
•Theoretically, the highest efficiency (~24%) can be obtained with 1.9eV
>Eg>1.2eV. Larger Eg lead to too low Isc (low light absorption); smaller Eg
leads to too low Open Circuit VoltageVoc.
•Si cells with ~15% efficiency dominate the market. >2x cost reduction
(including package and installation) is required to achieve cost parity with
base-load non-renewable electricity.

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-75
4.22 Chapter Summary
LED and Solid-State Lighting

•Electron-hole recombination in direct-gap semiconductors such as GaAs


produce light.
•Tenary semiconductors such as GaAsP provide tunable E g and LED color.
•Quatenary semiconductors such as AlInGaP provide tunable E g and lattice
constants for high quality epitaxial growth on inexpensive substrates.
•Beyond displays, communication, and traffic lights, a new application is
space lighting with luminous efficacy >5x higher than incandescent lamps.
White light can be obtained with UV LED and phosphors. Cost still an issue.
•Organic semiconductor is an important low-cost LED material class.

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-76
4.22 Chapter Summary
Laser Diodes

•Light is amplified under the condition of population inversion – states at


higher E have higher probability of occupation than states at lower E.
•Population inversion occurs when diode forward bias qV > E g.
•Optical feedback is provided with cleaved surfaces or distributed Bragg
reflectors.
•When the round-trip gain (including loss at reflector) exceeds unity, laser
threshold is reached.
•Quantum-well structures significantly reduce the threshold currents.

•Purity of laser light frequency enables long-distance fiber-optic


communication. Purity of light direction allows focusing to tiny spots and
enables DVD writer/reader and other application.

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-77
4.22 Chapter Summary

Part III: Metal-Semiconductor Junction


I 0  AKT 2 e  qB / kT
•Schottky diodes have large reverse saturation current, determined by the
Schottky barrier height B, and therefore lower forward voltage at a given
current density.

•Ohmic contacts relies on tunneling. Low resistance contact requires


low B and higher doping concentration.

4
(  B  s mn / qN d )
Rc  e h
Ω  cm 2

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-78
 Bn Increases with Increasing Metal Work Function

Vacuum level, E0

Si = 4.05 eV
 q
M
Ideally,
Bn=M – Si
q Bn Ec

Ef

Ev

Modern Semiconductor Devices for Integrated Circuits (C. Hu) Slide 4-79

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