Scanning Electron

Microscopy (SEM)
Transmission Electron
Microscopy
(TEM)
HUMA TARIQ
PRESENTED
BY
AYESHA IHSAN
 Contents
Microscopy and its types
SEM - Introduction
Instrumentation
Working principle
E-beam and specimen interaction
Composition analysis by SEM
TEM Introduction
Working principle
TEM Example
Advantages
Limitations
Contrast and similarities of SEM and TEM

 What is Microscopy?
Microscopy is the technical field of
using microscopes to view samples
and objects that cannot be seen with
the unaided eye.
 TYPES OF MICROSCOPY

Optical Microscopy
Uses visible light to sharply magnify
the samples.
Electron microscopy
Uses a beam of electrons to create an
image of the specimen.

Scanning electron Transmission electron

microscopy microscopy
SCANNING ELECTRON MICROSCOPY

It is non-destructive analytical technique.

It produces very high-resolution magnified
images of a sample surface, revealing
details about less than 1 to 5nm in size.
It is used primarily.
To observe the surface morphology
To calculate accurate size and other dimensions
To investigate surface properties, (whether
surface is porous/non-porous)
To compute analytical composition of samples
 INSTRUMENTATION
Electron gun: Generate
electron beams
Lenses: To control and
focus electron beam path.
Sample chamber:
Chamber to place sample
Detector: Detect different
types of signals
Vacuum chamber: Help
to avoid blocking of beam
path.(Ultra high vacuum,
WORKING PRINCIPLE
1. A beam of electrons is
produced at the top of
the microscope by an
electron gun.
2. This beam is directed
toward the anode which
is positively charged.
But there is a hole right
between the anode so
once the electrons gets
directed toward the
anode they will go right
through it.
 WORKING PRINCIPLE
4. These electrons should be arranged
together like a strong beam, and for
that to happen we need a condenser
lens which is this magnetic lens.
5. After that the electron beam passes
through the condenser lens it move
toward the scan coils, which allows
the beam to be scanned over the
surface of the sample .
6. As a result of the electron-sample
interaction, a number of signals are
produced. These signals are then
detected by appropriate detectors
INTERACTION OF ELECTRON
BEAM WITH THE SPECIMEN
There are three basic type of
signals which are being
measured by the SEM ,that
are.
Secondary electrons are
the signals that are emitted
from the near surface.
Back scattered electrons
are the signals that are
obtained as a result of elastic
scattering to the specimen.
X-Ray photons
 SECONDARY ELECTRONS

Secondary electrons are low energy

electrons formed by inelastic scattering and
have energy of less than 50eV.
They are produced when an incident
electron beam hit the atoms of the
specimen which absorbs the electron and
give of their own electron.
The excited electron moves towards the
surface of the sample undergoing elastic
and inelastic collisions until it reaches the
surface, where it can escape if it still has
sufficient energy.
These electrons are then collected by
secondary electron detector.
SECONDARY ELECTRONS
(COATING)
To increase the yield of Secondary electron
emitted from the specimen, heavy metals
such as gold or platinum are routinely used
to coat specimens (sputter). An extremely
thin layer is applied (~10 nm).
Non-conductive specimens are often coated

to reduce surface charging that can block

the path of secondary electron and cause
distortion of signal level and image form.
 SEM IMAGE

Figure show an SEM

micrograph of bulk
sample
Mn0.6Zn0.4Fe2O4
(sintered at 1100oC.)
BACKSCATTERED ELECTRONS

Backscattered electrons
consist of high-energy
electrons originating in
the electron beam, that
are reflected or back-
scattered out of the
specimen interaction
volume.
The production of
backscattered electrons
varies directly with the
 COMPOSITIONAL ANALYSIS BY SEM

SEM micrograph of Al-

Cu alloy is shown
having brighter Cu
region with respect to
aluminium
 X-RAY PHOTONS
An incoming high-energy electron dislodges
an inner-shell electron in the target, leaving a
vacancy in the shell
An outer shell electron then jumps to fill the
vacancy
A characteristic x-ray (equivalent to the
energy change in the jump) is generated.
The energy released from an electron
replacement event produces a photon with an
energy exactly equal to the drop in energy.
 EDX
EDX also called Energy Dispersive X-
ray Spectroscopy (EDX), is a technique
based on the collection and energy
dispersion of X-rays created when high
energy electrons bombard a sample.
The data generated by EDX analysis
consist of spectra showing peaks
corresponding to the elements making
up the true composition of the sample
being analysed.
 EDX
EDX analysis was carried out on a thin evaporated layer on top
of a nickel / iron alloy.
The layer contained a mixture of barium, strontium and oxygen,

with a small amount of magnesium.

The Y-axis shows the counts (number of X-rays received and

processed by the detector) and the X-axis shows the energy

level of those counts excitation and a sample
.
INFORMATION OBTAINED FROM SEM

Topography:
The surface features of an object or how it looks, its texture and
direct relation between these features and materials properties.
Morphology:
The shape and size of the particles making up the object and
direct relation between these structures and materials properties.
Composition:
The elements and compound that the object is composed of and
the relative amounts of them, direct relation between these
composition and materials properties.
Crystallographic Information:
How the atoms are arranged in the object and direct relation
between these arrangements and materials properties.
MISSION ELECTRON MICROS
 What is a TEM?
Transmission electron microscopy (TEM)
is a microscopy technique whereby a
beam of electrons is transmitted through
an ultra thin specimen, interacting with
the specimen as it passes through.
An image is formed from the interaction
of the electrons transmitted through the
specimen. the image is magnified and
focused onto an imaging device, such as
a fluorescent screen, on a layer of
photographic film.
TEM
 LIGHT SOURCE
TEMs use electrons as "light source"
and their much lower wavelength
makes it possible to get a resolution
a thousand times better than with a
light microscope
ELECTROMAGNETIC LENS SYSTEM

After leaving the electron source, the

electron beam is tightly focused using
electromagnetic lens and metal
apertures. The system only allows
electrons within a small energy range to
pass through, so the electrons in the
electron beam will have a well-defined
energy
 IMAGING SYSTEM
The imaging system consists of another
electromagnetic lens system and a Screen
The electromagnetic lens system contains
two lens systems, one for refocusing the
electrons after they pass through the
specimen, and the other for enlarging the
image and projecting it onto the screen.
The screen has a phosphorescent plate
which glows when being hit by electrons.
Image forms in a way similar to photography.
 TEM works like a slide projector. A projector shines
a beam of light which transmits through the slide.
The patterns painted on the slide only allow certain
parts of the light beam to pass through. Thus the
transmitted beam replicates the patterns on the
slide, forming an enlarged image of the slide when
TEMs work the same way
falling on the screen.
except that they shine a
beam of electrons (like
the light in a slide
projector) through the
specimen (like the slide).
However, in TEM, the
transmission of electron
beam is highly dependent
on the properties of
material being examined.
Such properties include
 TEM IMAGE
A TEM image of the polio virus. The polio
virus is 30 nm in Size.
Source:
 ADVANTAGES
Transmission Electron Microscope is
used,
To find the shape and size of
nanomaterials
To give high resolution image
For calculation of d-spacing
To find composition of samples
For elemental analysis
To find crystallinity of samples.
 LIMITATIONS
There are a number of drawbacks to the TEM technique.
Many materials require extensive sample preparation to
produce a sample thin enough to be electron transparent,
which makes TEM analysis a relatively time consuming
process with a low throughput of samples.
The structure of the sample may also be changed during
the preparation process.
Also the field of view is relatively small, raising the
possibility that the region analyzed may not be
characteristic of the whole sample.
There is potential that the sample may be damaged by
the electron beam, particularly in the case of biological
materials.
 CONCLUSION
Thus Transmission Electron
Microscopy has attired and helped
the various fields of science and is
now inevitable tool for the
development of mankind.
DIFFERENCES BETWEEN SEM AND
TEM