SEM microscope

By:
Doug, Holly & Oleg
 Scanning Electron Microscope
vs.
Optical Microscope
Advantages
Disadvantages
Continuously variable
magnification Cost

High resolution More knobs

Vacuum
Depth of focus
Sample limitations
Elemental analysis
attachments
Scanning Electron Microscope
(simplified drawing)

tungsten filament (electron source)

e- electrostatic lens (F = qE)

accelerating voltage anode

electromagnetic lenses (F = q v x B)
(condenser lenses)

electromagnetic lens (objective lens)

& deflector coils (raster scan)

SE detector (scintillator & PMT)

sample
 Signal Generation

In (Probe)
Focused mono-energetic electron beam

Out (Signal)
Imaging
Backscattered electrons
Secondary electrons
Analysis
X-rays
Characteristic x-rays
Bremsstrahlung x-rays (background noise)
Auger electrons
 Topographic contrast

surface

same penetration depth

shorter exit distance, longer exit distance,

higher signal lower signal
SEM general info
 SEM General info
Mount the sample on the holder
Paint the conductive path
 SEM General info
Load the sample into the SEM
 SEM general info

Vacuum pump 4
minutes
Turn on filament
current & accelerating
voltage
Fiddle with the knobs
 Sample Prep
Low C steel Quenched from 1700
High C steel degF
Unknown C steel Anneal to 900 degF
Furnace cooled from
1700 degF
High C (optical 600x)

High C (SEM 400x)

High C (SEM 3000x)

Low C (600x optical)

Low C (SEM 400x)

Low C (SEM 3000x)

Unknown (optical 600x)

Unknown C (SEM 400x)

Unknown (SEM 3000x)

 Low C vs High C (SEM 200x)

Low Carbon

Plastic

High Carbon
 Low C
(3000x vs 10000x)