Finite Element Analysis

of MEMS
Balaji VRT

Introduction to MEMS
Micro-electromechanical systems (MEMS) is a
technology that combines computers with tiny
mechanical devices such as sensors, valves, gears,
mirrors, and actuators embedded in semiconductor
chips.

Courtesy: Poonwil1 - Own work, CC BY-SA 3.0,

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Introduction to FEA
Architecture Design

Feasibility analysis

Basic Architecture
Interface Architecture

Architecture Feasibility
Interface Feasibility
Environmental feasibility

Various parts, features

Part Interface
Subassembly interface
Engineering Design Drawing to manufacture

Introduction to FEA

How can the FEM Help the Design

Engineer?

Easily applied
to complex,
irregularshaped objects Applicable to
composed
steady-state,
of several
time
different
dependent and
materials and
eigenvalue
having
problems.
complex
boundary
conditions.

Applicable to
linear and
nonlinear
problems.

Can solve a
wide variety of
problems

Generalpurpose FEM
software
packages are
available

Can be
coupled to
CAD programs
to facilitate
solid modeling
and mesh
generation

Discretization
Complicated shapes to simplified primitive
shapes
Follow continuum
Simply put, the various points of the
structure can be converted to closely
placed points connected by these
primitive shaped ELEMENTS.
Formulating these elements to ensure
continuum of the degree required for the
purpose

Need for FEM in Microsystems and

MEMS
Development of micro systems takes between four and
ten years
A lot of products or product ideas will never be produced
No sufficient tool support available
Traditional design methods take a long time and cost
intensive
New methods and tools necessary
FEA is one of the tools that can be effectively used for
MEMS /Micro system design

General MEMS Process

MEMS Require Multi Physics

solutions
Out

Thermal

Electrical

Electromagnetic

Mechanical

Thermal

Heat conduction

Seeback effect,
Pyroelectricity

Radioactive heat
transport

Thermal
Expansion

Electrical

Joule Heating,
Peltier Effect

Electrical
Conduction,
Polarization

Optical
recombination

Piezo electricity

Optical carrier
generation

Induction EM
waves

Radiation
pressure

Piezo-resistance

Photo Elasticity

Transfer forces

In

Eddy Current
Electromagneti
heating, radiation
c
heat loss
Mechanical

Friction

Micro tools for Surgery

Microneedles
Formulation systems
Implantable systems

Stent implant
Stent implant procedure is a widely used procedure that
is performed for patients with cardiovascular disease.
The procedure involves inserting a balloon into your
heart to open the heart artery narrowed by plaque. It
also involve placement of a stent to keep the vessel
open.

Stent Implant procedure

An invasive procedure that starts with an angiography
test to determine the number and exact location of
blockages
Stents are inserted through a catheter to the treatment
site in the coronary artery

Stent Implant procedure

An invasive procedure that starts with an angiography test to determine the
number and exact location of blockages
Stents are inserted through a catheter to the treatment site in the coronary
artery
A tiny deflated balloon is then inserted inside the blockage and once inside, will
be inflated
Another tiny deflated balloon with a stent mounted on it will be inserted to the
blockage. The balloon will be inflated and it will expand the stent that
surrounds it.
Most people are able to return to work and their normal routines after about a
week from the procedure. Stents help prevent arteries from becoming narrow
or blocked again in the months or years after angioplasty. However, making
lifestyle changes can help prevent plaque/fatty material from building up in
arteries again

Basic simulations on Stents