MEMS

Micro-Electo-Mechanical Systems
-The Future Technology, but Todays choice

by

PRAKASH

Aim of My Presentation
To familiarize what the MEMS
TECHNOLOGY is all about
To explain about general view of Building
Blocks of MEMS
Applications of the MEMS in various
fields.
MEMS roles in Sensors

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Outline of My Presentation
Introduction
Preparation Process of MEMS

(Fabrication Process)
Applications of MEMS
(Fields where MEMS Used)
MEMS role in Sensors
Conclusion

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Introduction
What is MEMS Technology?
MEMS technology is based on a number of
tools and methodologies, which are used to
form small structures with dimensions in the
micrometer scale
MEMS is a technique of combining Electrical
and Mechanical components together on a
chip, to produce a system of miniature
dimensions...
By miniature means dimensions less than
the thickness of human hair!!!
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MEMS
=
MEMS
MEMS

Micro - Small size, microfabricated structures

Electro - Electrical signal /control ( In / Out )
Mechanical - Mechanical functionality (Out/ In )
Systems - Structures, Devices, Systems controls

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Other Names For MEMS

Same game but different names
USA MEMS
Europe Microsystem technology
Japan - Micromachines
What is the size of MEMS?
They range in size from the sub micron level to
the millimeter level, and there can be any
number, from a few to millions, in a particular
system.

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MEMS Materials
Materials are the basic things required to
develop MEMS
Metals
Polymers
Ceramic materials
Semiconductors
Composite materials
Gallium Arsinide
Titanium Nickel
Piezoelectric Materials
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Why MEMS?
Miniaturization with no loss of functionality
Improved reproducibility, reliability and

accuracy
Low power and Fast actuation techniques
Improved Sensitivity
Significantly lower manufacturing costs
Small inertial mass
MEMS may be the ONLY solution
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Faster, Smaller, Numerous..

From the figure we can see the revolution of MEMS
The cost of the chip will be less than a dollar when

mass production is done.

log (people per computer)

Streaming Data
to/from the
Physical World

year

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MEMS PROCESS
Same as the process steps used for making
conventional mechaical process

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Building Blocks In MEMS

There are three main building blocks in MEMS

DEPOSITION PROCESS
The ability to deposit thin films of material
LITHOGRAPHY
is typically the transfer of a pattern to a

photosensitive material by selective

exposure to a radiation source such as
light

ETCHING PROCESS
Wet etching where the material is

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dissolved when immersed in a chemical

solution
Dry etching where the material is
sputtered or dissolved using reactive ions
or a vapor phase etchant
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Micro Machining Technology:

Process of shaping silicon or other

materials to realise 3-D mechanical in

miniature form and the mechanical
devices that are compatible with the micro
electronic devices

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Types of Micromachining:
BULK Micromachining:

SURFACE Micromachining:

LIGA Process:

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Technical Limitations
Imprecise fabrication methods
Expensive and complex packaging
CAD Design tool inaccuracies

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Pictures of MEMS

MEMS Applications

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MEMS Applications
Micro-engines
Micro Reactors, Vibrating Wheel
Inertial Sensors
Virtual Reality Systems
Accelerometers
Airbag Accelerometer
Pressure Sensors
Air Pressure Sensors
Optical MEMS
Pill Camera
Fluidic MEMS -Cartridges for Printers
Bio MEMS
-Blood Pressure Sensors
MEMS Memory Units
-Flash Memory

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iPod Touch: Techno Sensitiveness

The two key elements of

MEMS are:
MEMS sensor, the silicon
mechanical
element
which
senses
the
motion;
Interface chip, the IC
which
converts
the
motion measured by the
sensor into an analog or
digital signal.
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MEMS Memory [Nanochip]

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MEMS driven Storage Devices

TB to PB device capacities
Massively
parallel data

transfer rates
Very fast file access times
Improved reliability
Smaller size and weight
Device costs less than
today's devices
Excellent
fit
for
applications to enterprise

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Sensors in our body

Mechanoreceptors (feel)
Auditory system
Visual System
Olfactory System (Nose)

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Bio MEMS Application

An implantable
blood pressure
sensor
developed by
CardioMEMS

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Sight for the blind

MEMS based array that may be
inserted in the retina of a blind person
to provide partial sight

Smart PILL
Implanted in the body
Automatic drug delivery (on demand)

http://mmadou.eng.uci.edu/

Role of MEMS in Sensors

Applications
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Sensor
What is Sensor?
A device used to measure a physical quantity (such

as temperature) and convert it into an electronic

signal of some kind (e.g a voltage), without
modifying the environment.

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What can be
sensed?
N

Commonly sensed
parameters are :
Pressure
Temperature
Flow rate
Radiation
Chemicals
Pathogens

2AxisMagneticSensor

2AxisAccelerometer

LightIntensitySensor
HumiditySensor
PressureSensor
TemperatureSensor

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Comparison between
conventional and MEMS based
sensor
Mass
Size
Power
Cost

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Conventional
1587.5 gm
15x8x5 cm
35 W
High

MEMS based
10 gm
2x2x0.5 cm
~1mW
Low

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Types of Sensors
Mechanical Sensors
Optical Sensors
Thermal Sensors
Chemical and Biological Sensors

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Mechanical Micro sensors

Strain Gauges
Accelerometers
Gyroscopes (Rotation rate)
Pressure Sensors
Microphones
Tactile Sensors (sensory

feedback)
Biological Sensors (cochlear
implants)

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Accelerometers
Used in deploying airbags, navigation,
activity detection for pacemakers.

Sensors in Automobiles

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Optical Sensors
Direct Sensors

(Light Electronic Signal)

Photo emissive
Photo conductive
Indirect Sensors

(Light Intermediate energy Electronic signal)

Pyro electric detectors
Bolo meters
Biological Light Sensors

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Thermal Sensors
Thermo mechanical (dimension)
Thermo resistive (resistance)
Acoustic (sound)
Biological

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Medical & Homeland Security

Biocavity laser
Decontamination

foam
Smart pill
Sensors for missile

systems
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Chemical Bio Sensors

Electronic nose

can sense a large

number of gases

Electronic tongue

can sense a
variety of liquids

Chemical Lab on a Chip

Used to detect chemicals in gas, liquids
and DNA

Parameters Monitored in Marine

Science

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Temperature,
pressure, light
transmission,
tidal and current
Velocity

Dissolved gases
(like oxygen),
pH, metals,
pesticides

Plant pigments
(chlorophyll),
plankton cells

Seabed
characteristics,
Seismic signal

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Where are these MEMS devices

attached ?
The MEMS devices, in
marine
sensing maybe attached to:
Ships
Floating devices (buoys)
in the sea
Fixed sea structures (like
oil rigs)
Sea bed using links
AUVs

AUV ( Autonomous underwater vehicle

)
AUVs are unmanned

AUV

underwater vehicles for

real time monitoring in the
oceans.

AUVs can be equipped

with Lab on a Chip, a set

of sensors developed on a
single chip, using MEMS.

These Lab on a Chip

devices can sense a large

number of chemical
pollutants simultaneously.

Lab on a Chip

Hydrophones

Just as microphones collect sounds in air, hydrophones

are small devices that detect sounds in water.

The sources of sounds in water maybe ships,
earthquakes, waves or marine animals.

Digital Mammal Tags

These are tiny devices

attached to animals like

whales, sharks, dolphins etc..
Provides vital data about the
animal and its surroundings
A tag houses
Pressure sensor(s)
Temperature sensor(s)
Hydrophone (sound sensor)
Radio transmitter for data
collection at remote
locations.

MEMS in Military Operations

An array of MEMS sensors spread on the ocean

floor could detect the presence of enemy

submarines.

MEMS sensors (pressure sensors, accelerometers

etc.) are being used in anti-torpedo weapons on

submarines and ships.

MEMS sensors in torpedoes are responsible for

Detonating the torpedo at the right time
Hitting the target in a crowded environment
Prevent any premature explosion

Future
As with all emerging technologies, the

MEMS industry had been predicted to

revolutionize technology and our lives.
It has the potential to change our daily
life as much as computer
NEMS also playa a major role for our
future life

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Conclusion
MEMS promises to be an effective technique of
producing sensors of high quality, at lower costs.
The medical, wireless technology, biotechnology,
computer, automotive and aerospace industries
are only a few that will benefit greatly from MEMS.
This enabling technology promises to create
entirely new categories of products
MEMS will be the indispensable factor for
advancing technology in the 21st century

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References
http://www.pcmag.com/encyclopedia_term/0,2

542,t=microelectromechanical+systems&i=46
791,00.asp
http://www.scribd.com/mems/
http://www.memsnet.org/mems/what-is.html
http://www.wikipedia.org

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Thank u
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