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Clustered VLSI
Defects
Good chips
Faulty chips
Defects
Wafer
Unclustered defects
Wafer yield = 12/22 = 0.55
Copyright 2001, Agrawal & Bushnell
Yield Parameters
(+ x )
( Ad /) x
= ------------- .
--------------------- ()
(1+
Ad /) +x
where xis!the
gamma
function
= 0, p (x ) is a delta function (maximum clustering)
= , p (x ) is Poisson distribution (no clustering)
Copyright 2001, Agrawal & Bushnell
Yield Equation
Y = Prob ( zero defect on a chip ) = p (0)
Y = ( 1 + Ad / )
- Ad
Determination of DL
Modified Yield
Equation
Three parameters:
Fault
Y ( T ) = (1 + TAf / ) -
Assuming that tests with 100% fault coverage
(T =1.0) remove all faulty chips,
Y = Y (1) = (1 + Af / )
Copyright 2001, Agrawal & Bushnell
-
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Defect Level
Y ( T ) - Y (1)
DL ( T ) =
Y (T )
( + TAf )
= 1
( +ofAf
) Af is the
Where T is the fault coverage
tests,
average number of faults on the chip of area A,
is the fault clustering parameter. Af and are
determined by test data analysis.
Copyright 2001, Agrawal & Bushnell
Example: SEMATECH
Chip
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Vector number
Copyright 2001, Agrawal & Bushnell
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Vector number
Copyright 2001, Agrawal & Bushnell
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Model Fitting
Chip fallout vs. fault coverage
Y (1) = 0.7623
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Computed DL
Defect level in ppm
237,700 ppm ( Y =
76.23%)
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Summary
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Problems to Solve
1.
2.
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Solution 1
Defect level, DL, is given on Slide 9, as follows:
DL = 1 [( + Taf)/( + Af)]
where T is the fault coverage, Af is the average number of
faults on a chip of area A, and is a fault clustering
parameter. Further manipulation of this equation leads to
the following result:
(1 DL)1/ = ( + Taf)/( + Af)
or
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Solution 2
Defect level, DL, as given on Slide 9, is:
DL(T) = 1 [( + Taf)/( + Af)]
Substituting,
Fault density, f = 1.45 faults/sq. cm
Fault clustering parameter, = 0.11
Chip area = 1 cm2
Fault Coverage, T = 95%
We get,
DL(T) = 0.00522 or 5,220 parts per million
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