PRESENTED BY:

JOVIT JOSE
2

AE S5
ROLL NO: 24
MPTC MALA

High temperature measurements are needed in

industrial applications .

High temperature sensors capable of operating in

harsh environments are needed to prevent disasters .

Most existing temperature sensors do not satisfy the

needs.

A contactless passive sensing device(Hybrid MEMS) is

described for high temperature measurements.

A telemetric system used electronics in the safe zone

MEMS stands for Micro Electro-Mechanical

Systems.
Micro electro mechanical systems (MEMS) are
small integrated devices or systems that combine
electrical and mechanical components. They range
in size from the sub micrometer (or sub micron)
level to the millimeter level.

1.

Pressure Sensors

2.

Accelerometers

3.

Inertial Sensors

4.

Micro engines

5.

Some other applications

MICRO ELECTRONICS

MICRO STRUCTURES

MICRO ACTUATORS

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MICRO SENSORS

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 Combination

of ceramic and silicon MEMS is

Hybrid MEMS

The

passive Hybrid MEMS for high temperature

measurements consist of
Interdigitated

capacitor
Planar Inductor
The

hybrid sensor behaves as an LC resonant circuit.

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Image of the hybrid telemetric MEMS.

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Microscope image of interdigitated

capacitor

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Bent Beam structure.

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Equivalent model of the interdigitated capacitor and

an impedance
diagram measured at 270 C [(a) modulus and (b)
phase].

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Impedance module of the interdigitated capacitor

measured at different
Temperatures(100 Cto 330 C.)

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Obtained by 2 fabrication methods

THICK FILM TECHNOLOGY
PHOTOLITHOGRAPHIC TECHNOLOGY

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Microscope image of the inductor A1 realized by

thick-film deposition on alumina.

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Microscope image of the inductor B1 realized by

photolithography

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methods
1)

3-Resonances Method

2)

Min-Phase Method
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Modulus and phase of the impedance measured

from the terminals of the readout inductor.

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1)

3-Resonances method requires the

measurement of fra, frb, and fa.

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2)

Min-Phase method measures a frequency fo.

Impedance of the terminals of the readout inductor is

also measured.

Capacitive value of the sensor is related to the frequency

at which the phase, in a short frequency interval, is at its
minimum value.

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An IR heater of 500 W is provided to rise temperature

upto 350 C.

Pt100 thermo resistance measure the internal

temperature at different points.

PC is connected to multimeter , impedance analyser

through IEEE-488 bus.

PC is also connected to power control.

It monitors the temperature inside and controls it.

Two MEMS sensors are placed, one to impedance

analyzer, one for telemetric measurement.

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Modules of hybrid sensor measured using

impedance analyzer at different temperatures.

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Phase of hybrid sensor measured using

impedance analyzer at different temperatures

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Observed that increase in temperature generates a

decrease of the values of the resonant frequencies, since
the sensor capacitance value increases.

Capacitances measured using 2 methods shows a quasi

linear relationship.

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Fig. 5.2. Capacitance sensor values directly measured

and compared with the Min-Phase and 3-Resonances
calculated values.

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Temperature values measured with the Pt100 and

compared with the Min-Phase and 3-Resonances
calculated values.

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Advantages:
Small size
Stable characterization
Suitable for transmitting high energy for short distances
Eliminates the need for physical contacts, active elements, or
power supplies, which cannot withstand harsh environments
Low cost
Limitation:

The maximum operating temperature is limited by the

maximum operating limit of nickel.

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1. Industrial applications such as

Process control
Safety evaluation
Reliability prediction
Product liability
Quality control
Efficiency monitoring
Predictive maintenance
2. Harsh and complex environments which are enclosed and
hermetically sealed

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Passive wireless sensor is capable of operating in harsh

environments for high-temperature measurements.

The values measured by the two techniques have

demonstrated good agreement with the reference values.

Inductive telemetric systems offer solutions to specific

applications for contactless measurement.

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Passive Hybrid MEMS for High-Temperature Telemetric

Measurements Daniele Marioli, Member, IEEE, Emilio Sardini,
Member, IEEE, and Mauro Serpelloni
Y. Wang, Y. Jia, Q. Chen, and Y. Wang, A passive wireless
temperature sensor for harsh environment applications

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