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2gh
drop
_
. If instead
drag resistance is accounted for, impact velocity gets slightly smal-
ler: details are furnished in Appendix B.
The struck target body is assumed to have a at surface and to
be so massive as compared to the device to be considered a rigid
body. The amplitude of sensor vibrations thus turns out to be
slightly overestimated, and drop features (like, e.g. drop height)
leading to failure accordingly under-estimated. Regardless of this
approximation, results to follow provide an objective classication
of drop severity for the MEMS.
It is nally worth emphasizing that, while the package/die
bounces off the target, the sensor is shaken and the magnitude of
the displacement eld results to be as great as the polysilicon lm
thickness. Therefore, in the simulations nite strain effects have
been fully taken into account.
3. Analytical estimation of the maximum acceleration felt by
the sensor
Drop severity can be estimated through the maximum acceler-
ation experienced by the sensor after the impact. A reference value
of this acceleration is (see [19]):
v
6
drop
R
m
1m
2
t
Et
1m
2
d
E
d
_ _ _ _
2
5
_
1
where v
drop
is the velocity of the falling device when it strikes the
target; m is the mass of the whole device; E
t
and E
d
are the target
and device Youngs moduli; m
t
and m
d
the target and device Poissons
Fig. 8. Effect of damping on the stress envelopes at spring end cross-sections. Top row: naked die drop; bottom row: package drop. (a and c) top drops and (b and d) bottom
drops.
Fig. 9. Experimentally determined effect of package on failure occurrence.
344 A. Ghisi et al. / Microelectronics Reliability 49 (2009) 340349
ratios; R is a characteristic size of the falling device. In Eq. (1) the
target surface has been assumed at, whereas the device is viewed
as an homogeneous, spherical-like body.
This approach has been already shown to be ineffective for reli-
ability assessment of MEMS (see e.g. [14]), since both the package
and the die are not spherical in shape. Furthermore, it does not al-
low to distinguish among the falling orientations of the device.
According to [14,8,9] and to the forthcoming results, it turns out
that the only effective way to establish an objective criterion for
drop severity is to look at the impact-induced stress eld inside
the sensor, since this stress eld is the real cause of the MEMS
failure.
4. Results
The geometry of the studied device is shown in Figs. 2 and 3. As
far as package is concerned, a layered plate supports die and I.C.,
which are both wrapped around by the mold compound. Twin uni-
axial accelerometers are supported by the die and protected from
the external environment by the cap; each sensor is constituted
by a movable seismic plate, connected to the die via two suspen-
sion springs. MEMS failure, which is obviously linked to its layout,
is expected to be affected by the slenderness of the suspension
springs. While the shape of these springs is designed to enhance
in the working regime the sensitivity of the accelerometer to the
out-of-plane (i.e. along axis x
3
, see Fig. 3) acceleration, excessive
deformation and therefore possible localized failures can be caused
by impact-induced severe shaking of the seismic plate.
To fully assess the effect of packaging on failure of the transla-
tional accelerometer, both a package and a naked die are assumed
to strike the target, falling from a drop height h
drop
150 cm.
In case of packaged sensor subject to a bottom drop, Fig. 4
shows the history of acceleration a
3
in the sensing direction x
3
,
as experienced by the center of gravity of the seismic plate. Fig. 5
instead shows the evolution of the relative displacements (again
in the sensing directions) between the four plate corners and the
die/cap surfaces; results are here reported for both the damped
and the undamped case. Damping has been accounted for in the
simulations through a viscous term in the equations of motion of
the sensor; according to the product datasheet, a rate-independent
quality factor Q = 1.5 was adopted. In Fig. 5 the two horizontal
(dashed) lines represent the maximum relative displacement each
point of the plate can experience, corresponding to the situations
in which the plate corners get in contact with die Du
3
1:8 lm or cap Du
3
15:9 lm surfaces.
If we assume that, after the impact against target, plate vibra-
tions are linked to exural oscillation of the two suspension
springs, it results that the fundamental sensor deformation mode
has period T
u
7:7 ls. This value is very similar to the period asso-
ciated with the acceleration peaks showed in Fig. 5b; almost the
same period of oscillations can be recognized in Fig. 5a, even
though damping here partially shadows uctuations beyond
t 20 ls. The difference between T
u
and the period of oscillations
in Fig. 5 is related to the eccentricity of the center of mass of the
seismic plate with respect to the spring longitudinal axes. The rst
deformation mode of the sensor thus displays a coupling between
exural and torsional spring vibrations, leading to a slightly differ-
ent vibration period. In fact, tilting of the seismic plate, which
causes the coupled exural/torsional deformation mode of the
springs, can be recognized in Fig. 5 by looking at the different evo-
lution of the relative displacements at corners A and D, and at cor-
ners B and C. Higher-frequency vibrations can be seen in the
history plots: these vibrations are linked to higher order deforma-
tion modes of the springs, since the seismic plate is massive en-
ough to behave almost rigidly under the impact loadings (even if
it is modeled as a deformable body, whose elastic properties are
collected in Table 2).
Histories of acceleration a
3
and of relative displacements Du
3
at
plate corners have been obtained also in all the other cases inves-
tigated, but they are not reported here for brevity. The major out-
come, in terms of post-impact maximum acceleration peaks are
gathered in Fig. 6, where a comparison among the drop congura-
tions is reported. These results offer a very low content of informa-
tion as for the denition of a critical acceleration peak threshold,
beyond which MEMS failure should be expected.
If the maximum acceleration felt by the sensor is estimated
according to Eq. (1), results on the order of a 10
5
g are obtained:
they turn out to be two orders of magnitude smaller than those
collected in Fig. 6. As already emphasized above, this formula ap-
pears not able to account for wave propagation phenomena inside
the package/die and therefore it is not able to assess how danger-
ous an impact could be for MEMS.
By looking, inside the suspension springs, at the so-called stress
envelopes, which represent the time evolution of the maximum
and minimum principal stresses, an unambiguous way to dene
MEMS failure can be established. Because of the sensor layout,
in the studied drop congurations the stress eld turns out to be
highly localized around the end cross-sections of the suspension
springs; for this reason, Figs. 7 and 8 show the stress envelopes
at the end cross-sections of both springs. Specically, in Fig. 7
the effect of package on the stress envelopes is shown for each
Fig. 10. Comparison between post-impact vertical displacements of the striking surfaces of package and naked die: (a) top drops and (b) bottom drops.
A. Ghisi et al. / Microelectronics Reliability 49 (2009) 340349 345
drop conguration, both when damping is allowed for and not. In
Fig. 8 results are organized so as to understand the effect of damp-
ing. In these plots the horizontal dashed lines represent the exper-
imentally determined strength of polysilicon, which amounts for
this device to r
t
4 GPa . From these plots it can be assessed that
damping slightly affects the results, since the maximum tensile
stress peaks are attained a few ls after the impact, while damping
effectively reduces the envelope size at later instants. In these
graphs the fundamental period of vibration is T
r
15 ls, which
is different from the previously mentioned T
u
. The difference be-
tween the two periods is due to the fact that stress envelopes
are relevant to a whole spring cross-section: therefore, local uc-
Fig. 11. Top drop. Snapshots of the impact-induced deformed sensor conguration up to 25 ls: (left) packaged MEMS; (right) naked die supported MEMS. Die and cap are
shown in light blue, the seismic plate is shown in green, and suspension springs are shown in violet. (For interpretation of the references in colour in this gure legend, the
reader is referred to the web version of this article.)
346 A. Ghisi et al. / Microelectronics Reliability 49 (2009) 340349
tuations at each material point are shadowed by the sectional
effects.
From these plots it also emerges that in the studied cases pack-
aging increases the tensile stress state in the suspension springs;
this increment is marginal in the top drop conguration, whereas
it looks detrimental of the sensor impact-carrying capacity in the
bottom drop conguration. In fact, if the naked die falls the maxi-
mum tensile stress never exceeds the characteristic tensile
strength of polysilicon; on the contrary, if the whole package falls,
soon after impact against the target, the polysilicon tensile
strength is exceeded and failure, according to our criterion, occurs.
This outcome agrees well with the experimental data reported in
Fig. 9 in terms of percentage of devices broken by laboratory drop
tests: these results show that packaging actually increases failure
Fig. 12. Bottom drop. Snapshots of the impact-induced deformed sensor conguration up to 25 ls: (left) packaged MEMS; (right) naked die supported MEMS. Die and cap are
shown in light blue, the seismic plate is shown in green, and suspension springs are shown in violet.
A. Ghisi et al. / Microelectronics Reliability 49 (2009) 340349 347
occurrence. In the experimental campaign devices either packaged
or supported by a bare die were subjected to drops from the same
h
drop
150 cm considered in the numerical simulations. Post-mor-
tem inspection of the broken devices revealed that the typical fail-
ure mode actually consists of cracking at the end cross-sections of
the suspension springs, see also [9]. To explain this outcome, unex-
pected on the basis of the maximum acceleration peaks shown in
Fig. 6, Fig. 10 depicts macro-scale results in terms of post-impact
vertical displacement of the package/die surface striking the target.
These plots allow to determine t
impact
, namely the time interval
during which the striking surface remains in contact with the tar-
get while compressive stress waves start traveling inside the pack-
age/die. In case of top drops (Fig. 10a), t
impact
is not substantially
affected by the presence of the package. On the contrary, for bot-
tom drops (Fig. 10b), package is associated with an increase of
t
impact
, which means that the elastic energy stored in the device be-
cause of the travelling compressive stress waves, increases too;
consequently, the bounce off the target, and the shaking of the sen-
sor turns out to be more severe.
This rationale is conrmed by Figs. 11 and 12, where lateral
views of the time-evolving congurations of the sensor, as ob-
tained from meso-scale analyses, are represented. In case of top
drops (Fig. 11), the sensor dynamics and, specically, spring deec-
tion/torsion do not signicantly differ in the die and package cases:
therefore, failure is only marginally inuenced by packaging. In
case of bottom drop of the whole package, the seismic plate is soon
pushed towards the cap and, after striking the cap surface, it
bounces off and continuously vibrates in the cavity between die
and cap. On the contrary, in case of bottom drop of the naked die
the elastic energy stored in the die is not sufcient to cause impact
of the seismic plate against the cap surface. Since we have assumed
an elastic-perfectly brittle behavior of the sensor, the larger the
deformation of the suspension springs the higher the stress peaks
at their end cross-sections. This further justies the detrimental ef-
fect of packaging on the impact-carrying capacity of the MEMS in
case of bottom drops.
A comparison between results in Fig. 6 and graphs in Fig. 7 fur-
ther shows that the maximum acceleration does not constitute an
objective indicator of drop severity. In fact, in case of die drops the
value of a
max
3
associated with a bottom drop is about twice that
associated with a top drop; on the contrary, Fig. 7 shows that the
tensile stress envelope slightly exceeds the adopted reference ten-
sile strength r
t
of polysilicon in case of a top drop (Fig. 7a),
whereas it does not approach r
t
in case of a bottom drop
(Fig. 7b). Fig. 10 again allows to understand this unexpected result:
t
impact
is by far longer in case of a top drop of the bare die, and the
elastic energy stored within this interval inside the die causes a
more severe bounce off the target. Furthermore, in the packaged
case a
max
3
results to be grater in case of a top drop (see Fig. 6),
whereas the maximumpeak of the tensile stress envelope is higher
in the bottom drop case (see Fig. 7a and b). According to our crite-
rion, the maximum acceleration thus furnishes a wrong classica-
tion of drop severity.
5. Concluding remarks
In this work the effect of packaging on the failure of a uni-axial
polysilicon MEMS accelerometer available on the market, subject
to accidental drops have been explored. By considering the multi-
ple length-scales involved in MEMS failure, a multi-scale nite ele-
ment procedure has been proposed: at the macro-scale, drop
features like drop height and falling orientation are fully accounted
for to dene how sensor is loaded; at the meso-scale the links be-
tween the drop-induced loading and the failure occurrence are
elucidated.
Sensor failure has been assumed to occur as soon as a character-
istic tensile strength of the polysilicon is attained anywhere in the
MEMS bulk. Because of sensor layout, the stress eld gets always
amplied at the end cross-sections of the suspension springs, inde-
pendently of the falling orientation and of the presence of the
package. Therefore, the drop-induced failure mode is very localized
in these regions.
It has been shown that packaging is not always benecial in
enhancing the sensor impact-carrying capacity. In case of top
drops, when sensor is falling upside-down (i.e. when the top sur-
face of the package or of the naked die strikes the target surface),
packaging does not affect much MEMS failure. On the contrary,
in case of bottom drops (i.e. when the bottom surface of the pack-
age or of the naked die strikes the target surface) packaging
strongly increases the occurrence of failure. This detrimental effect
has been shown to be linked to the post-impact compressive defor-
mation of the whole package, which stores enough elastic energy
to render the bounce off the target much more severe for the
sensor.
In future works we will further investigate the effect of packag-
ing on MEMS failure by coupling the proposed numerical scheme
with stochastic micro-scale simulations. Moreover, the effect of
tilting, i.e. the effect of a skewed impact of the device against the
at target, will be also allowed for.
Acknowledgements
The support of EU NoE Design for Micro & Nano Manufacture
(Patent DfMM), contract No. 509255 is gratefully acknowledged.
A.G. wishes to thank Cariplo Foundation for the nancial support
of the project Innovative models for the study of the behaviour of sol-
ids and uids in micro/nano electro-mechanical systems. F.F. is grate-
ful to STMicroelectronics, as part of this work has been developed
while the author was a visiting student working at STMicrolectron-
ics BU in Singapore. S.M. gratefully acknowledges the nancial sup-
port of Italian MIUR through PRIN-Con2005 programme Interfaces
in innovative micro and nano structured materials and devices.
Appendix A. Homogenized elastic properties of polysilicon
Fundamentals of the procedure to obtain the overall elastic
properties of polysilicon at the meso-scale are here discussed.
According to homogenization theory, the size of the material
representative volume (RV) rst needs to be dened, ensuring
that the orientation of the axes of elastic symmetry of each sili-
con grain can be treated as a continuous-like eld. Such details
of homogenization theory will not be discussed here; readers
are referred to, e.g. [20,15]. As a rule of thumb, Cho & Chasiotis
[16] suggested that the RV should contain at least a few hun-
dreds of grains to be representative; this obviously constitutes
a sufcient condition. Since the suspension springs of the MEMS
under study contain only a few grains along their in-plane thick-
ness, the aforementioned requirement is not satised. Hence, the
homogenized elastic properties of polysilicon can be adopted
only to model the structural behavior of the whole MEMS at
the meso-scale [8,9].
By assuming a random orientation in the x
1
x
2
plane of the
axes of elastic symmetry of silicon grains, the polysilicon lm con-
stituting the movable parts of the MEMS turns out to behave as a
transversely isotropic material, the axis of transverse isotropy
being the direction x
3
of epitaxial growth (see Fig. 3). As standard
practice in homogenization procedures, Voigt- and Reuss-like
bounds on the effective elastic properties are respectively obtained
via [15,8,9]:
348 A. Ghisi et al. / Microelectronics Reliability 49 (2009) 340349
S
e
1
2p
_
2p
0
T
T
e
S
m
T
e
d#
S
1
r
1
2p
_
2p
0
T
T
r
S
1
m
T
r
d#
A:1
where
T
stands for transpose; S is the matrix of homogenized elastic
moduli, which links at the meso-scale the stress and strain vectors
(respectively r and e) through r Se; S
m
is the matrix of elastic
moduli of the single FCC grain in its privileged reference frame; T
e
T
r
is the orthogonal mapping that denes the variation of strain
(stress) components due to rotation fromthe local privileged crystal
reference frame to the overall x
1
x
2
one.
As already pointed out in [15,8], because of the small deviation
from elastic isotropy of FCC crystals, bounds (A.1) turn out to be
tight for polysilicon. In-plane Youngs modulus E
11
E
22
and Pois-
sons ratio m
12
actually result to be bounded by, respectively:
E
e
158:7 GPa , E
r
147:1 GPa ; m
e
0:18, m
r
0:22. Results of
the simulations here presented have been obtained by adopting
the relevant average values gathered in Table 2.
Appendix B. Dynamics of a falling object: drag effects
The dynamics of a falling object, whose size is far smaller than
the displacement its center of mass is experiencing, is governed by
the differential equation:
dv
dt
g 1
v
2
V
2
_ _
B:1
Here: t is time; v is the velocity of the falling object, assumed to be a
rigid body; g = 9.81 m/s
2
is the gravity acceleration. The last term at
the right-hand side of Eq. (B.1) accounts for the interaction between
the moving object and the surrounding air (treated as a non-dense
uid); accordingly, V is [21]:
V
2mg
.
air
AC
d
B:2
where m is the mass of the falling object; .
air
% 1:2 kg=m
3
is the air
density at room temperature; A is the projected frontal area of the
falling body; C
d
is the drag coefcient (C
d
1:28 for plates).
Keeping as reference a drop height h
drop
150 cm, in case of
drops in vacuum (drag resistance null) any body strikes the target
surface with velocity v
drop
5:425 m=s. In case of drops in air,
assuming the body is not rotating during ight, results in terms
of velocity v
drop
at impact for MEMS either supported by a bare
die or packaged are reported in Table 3. It results that drag forces
reduce v
drop
by about 20% and 8% with respect to v
drop
, when the
naked die or the whole package is respectively falling.
To effectively compare failure indicators for MEMS and for ease
of presentation, we have always assumed that device strikes the
target with velocity v
drop
. According to the results of Table 3, the
drop height h
drop
should be appropriately increased to achieve
the stress levels in the suspension springs reported in this paper.
At any rate, it clearly emerges that in case of drops in air from an
assigned height, the presence of package leads to worse loading
conditions for the MEMS; in fact, drops of a bare die, which is light-
er in weight, are characterized by a smaller impact velocity, and
therefore by tensile stress peaks of a smaller amplitude if com-
pared to those relevant to package drops.
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Table 3
Effect of drag resistance on the impact velocity v
drop
5:425 m=s.
v
drop
vdropvdrop
vdrop
%
Bare die 4.331 20.17
Package 4.988 8.06
A. Ghisi et al. / Microelectronics Reliability 49 (2009) 340349 349