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IIT video lectures on VLSI Technology by Prof. Santiram Kal (Prof. S.

Kal)

Video Lecture Series from IIT Professors :

VLSI Technology by Prof. Santiram Kal (Prof.


S.Kal) sir

Prof. Santiram Kal obtained his Ph.D. degree in Engineering Electronics and Electrical Communication Engineering from Indian Institute of Technology in 1983. He has been working as a Professor in Engineering Electronics and Electrical Communication Engineering at Indian Institute of Technology, Kharagpur. His research interests are: microelectronics & VLSI design; MEMS; VLSI process technology, ASICs; integrated silicon micro-sensors; advanced salicide technology; Si-Ge, Si-Ge-C materials & devices; process & device simulation; microwave integrated circuits.

1. Introduction to VLSI Technology 2. Design and Technology Overview of VLSI - I 3. Design and Technology Overview of VLSI - II 4. Yield and cost Estimation of VLSI Chips 5. Defects, Contamination & Clean Room Requirements 6. Wafer Cleaning Technology 7. Oxidation of Silicon 8. Reaction Kinetics of Oxide Growth in Silicon

9. Oxidation Techniques, Growth Rate & Characterization 10. Lithography Process 11. Photoresists 12. Optical Lithography Techniques 13. Exposure Tools and Optical Effects in Lithography 14. Advanced Lithography Techniques (X-ray,Ion-Beam,E-Beam) 15. Etching 16. 17. Dry & Plasma Etching 18. 19. Impurity Diffusion in Semiconductors 20. Diffusion Theory and Diffusion Systems 21. Impurities in Silicon and Diffusion Profile 22. Evaluation of Diffused Layers in Semiconductors 23. Ion Implantation : Range Theory and Stopping Mechanism 24. Ion Implantation Theory and Channeling 25. Ion Implant Machine 26. High Energy High Dose Implantation 27. Epitaxy Techniques and Classifications 28. Vapor Phase and Liquid Phase Epitaxy 29. VPE Growth Kinetics and MBE 30. Defects in Epitaxy Growth, Selective Epitaxy 31. Chemical Vapor Deposition (CVD): APCVD, LPCVD

32. CVD Techniques: PECVD, RTCVD, UHVCVD 33. Metal CVD and MOCVD 34. Materials for Contacts and Interconnects in VLSI 35. Metallization Techniques - I : Physical Evaporation 36. Metallization Techniques - II : Sputtering 37. Metallization Problems and Failure Mechanisms 38. Silicides and Copper Metallization 39. Isolation Technology in VLsI 40. Advanced Isolation Technology in VLSI 41. Bipolar VLSI Process Technology 42. 43. MOS VLSI Process Technology 44. Advanced VLSI MOS/CMOS Process 45. CMOS/BiCMOS Process Technology 46. VLSI Assembly & Packaging : Chip and Wire Bonding 47. VLSI Packaging Technology

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