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The mechanical response of Lead Zirconate Titanate (PZT) in thin film form has been investigated by microscale uniaxial tension experiments of PZT stacks. Due to the difficulty in fabricating individual freestanding PZT films, thin film stacks were fabricated in combinations of Silicon Oxide (SiO2), Titanium (Ti), Platinum (Pt) and PZT.
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Sem.org SEM XI Int Cong s068p01 Mechanical Properties PZT Films Their Composites RF MEMS
The mechanical response of Lead Zirconate Titanate (PZT) in thin film form has been investigated by microscale uniaxial tension experiments of PZT stacks. Due to the difficulty in fabricatin…