Sei sulla pagina 1di 4

ARTICLE IN PRESS

Journal of Magnetism and Magnetic Materials ] (]]]]) ]]]–]]]

Patterning self-assembled FePt nanoparticles


Min Chena,b,*, David E. Niklesa, Huaqin Yina,1, Shoutao Wanga, J.W. Harrella,
Sara A. Majetichb
a
Center for Materials for Information Technology, The University of Alabama, Tuscaloosa, AL 35487-0209, USA
b
Department of Physics, Carnegie Mellon University, Pittsburgh, PA 1213-3890, USA

Received 30 September 2002

Abstract

We describe a potential way to extend the ordered domain of self-assembled FePt nanoparticles. The FePt particles,
with an average diameter of 3 nm, were prepared by simultaneous thermal decomposition of Fe(CO)5 and chemical
reduction of Pt(acac)2 and then were dispersed in a mixture of hexane and octane. When self-assembling on a plain
silicon wafer, FePt nanoparticles formed ordered hexagonal arrays in a range of tens to a few hundred nanometers. A
silicon wafer with patterned holes of a photoresist film, made using UV-lithographing technique, was used as a template
to direct the stacking direction of the FePt nanoparticles. The FePt dispersion was dropped on the patterned holes of
the photoresist film. After being heat-treated at 100 C for 30 min under vacuum condition, the photoresist was stripped
out by dipping the sample in acetone. The patterned disks, with an average diameter of 2.0 mm and a height of 250 nm,
of self-assembled FePt nanoparticles were examined using SEM and Auger mapping. Their magnetic properties were
measured using AGM. The Auger electrons of neither Fe LMM nor Pt MNN could be detected from the sample, which
indicated the adsorption of oleic acid and oleylamine on the surface of FePt nanoparticles. The coercivity of patterned
FePt significantly increased with the annealing temperature above 600 C.
r 2003 Elsevier B.V. All rights reserved.

PACS: 61.46.+w; 75.50.Tt; 75.50.Bb; 75.50.Ss; 81.07.Lk; 81.16.Dn

Keywords: FePt nanoparticles; UV-lithography; Coercivity; Patterned magnetic media

1. Introduction magnetocrystalline anisotropies. Since being de-


monstrated by Sun et al. [1], the uniform nanoscale
Sputter-deposited FePt thin films have been FePt particles from chemical method have drawn
widely studied for the ultrahigh density magnetic great interest during recent years. Such magnetic
hard media because of their large uniaxial nanoparticles can self-assemble into ordered per-
iodical arrays, which are promising candidates for
*Corresponding author. IBM T.J. Watson Research Center, a new generation of magnetic high-storage media
Nanoscale Material Devices (19-141), P.O. Box 218 1101, [2]. However, the self-assembly of FePt nanopar-
Kitchawan Rd., Yorktown Heights, NY 10598, USA.
E-mail address: mchen30@us.ibm.com (M. Chen).
ticles on a plain Si wafer only gave the ordered
1
Current address: Seagate Technology, 7801 Computer domain in the range of tens to a few hundred
Avenue S, Minneapolis, MN 55435, USA. nanometers in diameters [3,4]. It is reported that a

0304-8853/03/$ - see front matter r 2003 Elsevier B.V. All rights reserved.
doi:10.1016/S0304-8853(03)00449-9
ARTICLE IN PRESS

2 M. Chen et al. / Journal of Magnetism and Magnetic Materials ] (]]]]) ]]]–]]]

patterned template could affect the stacking The Si substrate was first cleaned with acetone
direction of the nanocrystals. When nanocrystals and isopropane by sonication for 5 min, and then
were grown normal to a pattern of holes, a pave was pre-baked at 115 C for 1 min. The negative
FCC crystal was formed [5]. We initially report photoresist (R1805) was applied on the Si wafer
here to restrict the self-assembly of FePt nano- using photoresist spinner (mode R481). The spin
particles on patterned holes of a polymer film on a rate of 5000 rpm and time of 40 s corresponds to
silicon wafer to increase the ordered domains. the thickness of 500 nm for photoresist R1805.
Patterned holy arrays were transferred from an
antidote mask into the film using contact photo-
2. Experiment lithography with Quintel Contact/Proximity Mask
Aligner. The antidote presented here was about
Iron pentacarbonyl, platinum acetylacetonate, 2.0 mm in diameter with a separation of 1.5 mm.
1,2-hexadecanediol, octyl ether, oleic acid, and After being exposed by UV light, the photoresist
oleyl amine were purchased from Aldrich. Etha- was developed using developer S351. The Si wafer
nol, hexane and octane were purchased from with patterned image on the photoresist film was
Fisher Scientific. A negative photoresist R1805 washed using water, spin-dried and used as
(containing propylene glycol monomethyl ether template for the self-assembly of FePt nano-
acetate) and developer S351 (containing sodium particles.
hydroxide) were purchased from Shipley, Co., The diluted FePt dispersion was slowly dropped
Inc., MA. The carbon-coated copper grids were on patterned Si wafer. The solvents were allowed
purchased from Structure Probe Inc. to evaporate in 10–15 min. The Si wafer with
Sun’s synthetic procedure to prepare FePt self-assembled FePt on patterned holes of photo-
nanoparticles was used here [1]. 200 mg of resist was then heat-treated at 100 C for 30 min
Pt(acac)2 was combined with 390 mg of 1,2- under vacuum condition (vacuum pressure is
hexadecanediol and 20 ml of dioctylether in a B3  110 7 Torr). Finally, the photoresist was
three-neck flask and dissolved at 100 C under N2 stripped off by dipping the Si wafer into the
protection. After the Pt(acac)2 completely dis- acetone for 30 min and sonicating for 5 min. AFM
solved, 0.10–0.13 ml of Fe(CO)5, 0.16 ml of oleic and SEM were used to examine the quality of
acid and 0.17 ml of oleylamine were added to the patterned self-assembly of FePt nanoparticles.
above mixture solution. The Fe(CO)5, oleic acid
and oleylamine were dispensed using 1 ml capacity
syringes. Under nitrogen gas protection, the 3. Results and discussion
mixture solution was heated to 286 C (the boiling
temperature of dioctylether). After being refluxed A TEM image of the self-assembled FePt
for 30 min, the reaction mixtures were allowed to nanoparticles is shown in Fig. 1, which shows
cool to room temperature. The particles precipi- the ordered hexagonal arrays; however, the size
tated after adding 40 ml ethanol. The mixture was of the ordered domain is usually about tens to
centrifuged for 10 min and the supernatant liquid a few hundred nanometers in diameter [3,4].
was removed. A mother FePt dispersion was made The primary purpose to self-assemble FePt nano-
by dispersing B100 mg of dried particles in 10 ml particles on the patterned Si wafer is to increase
of mixture solvents of (1:1) hexane and octane, the ordered domain. In addition, magnetic pat-
containing 0.05 ml of oleic acid and 0.05 ml of terned media are the promising candidates for a
oleylamine. The diluted FePt dispersion (contain- new generation of high storage of perpendicular
ing about 2.5 mg of nanoparticles in 1 ml of magnetic recording.
mixture of hexane and octane) was dropped onto Two different kinds of patterned substrates have
a Si(1 0 0) wafer, containing its native oxide. The been tried; (a) patterned holes of silicon wafer, and
solvent was allowed to slowly evaporate to give a (b) patterned holes of photoresist film on smooth
self-assembled film. silicon wafer. If FePt nanoparticles directly
ARTICLE IN PRESS

M. Chen et al. / Journal of Magnetism and Magnetic Materials ] (]]]]) ]]]–]]] 3

Fig. 2. Patterned self-assembled FePt nanoparticles on a silicon


wafer.

layers [7], it indicates that the adsorbed oleic


acid and oleylamine on the particle surface might
block the Fe or Pt Auger electrons from being
detected.
Fig. 1. Hexagonal arrays of self-assembled FePt nanoparticles Magnetic measurement was done using AGM.
on C-coated Cu grid. After being annealed for 30 min, the coercivity of
the patterned self-assembled FePt particles in-
creased to 2980 Oe at 600 C, 4160 Oe at 650 C,
self-assembled on the patterned-dot-Si wafer, it and 12400 Oe at 700 C.
was difficult to remove those particles on the holes.
However, if FePt nanoparticles first self-assembled
on the silicon supported patterned holes of 4. Conclusion
photoresist film which could be easily stripped
off from the silicon wafer by acetone, the dish-like The self-assembly of FePt nanoparticles was
patterned FePt dots were finally left on the Si patterned on a silicon wafer in order to increase
wafer, as shown by SEM image in Fig. 2. The the ordered domain. A silicon wafer with pat-
section analysis of AFM shows that the patterned terned holes of a photoresist film was used as a
FePt dots have an average diameter of 2 mm and a template to direct the stacking direction of the
height of 250 nm. Unfortunately, the surfaces of FePt nanoparticles. The patterned disks of self-
the FePt dots are rough. assembled FePt nanoparticles have an average
The Auger electron spectroscopy was used to diameter of 2.0 mm and a height of 250 nm.
map the patterned FePt dots on silicon wafer using Unfortunately, the surface of the patterned dish-
Kratos Auger/XPS/SEM Spectrometer. However, like FePt dots was not smooth due to the limit of
no signal was recorded for Auger electron of either UV-lithographing technique. The Auger mapping
Fe LMM or Pt MNN even though Ar+ was used indicated the adsorption of oleic acid and oleyla-
to etch the sample surface. Three Auger electron mine on the surface of FePt nanoparticles. The
peaks for Fe LMM are in the range of 600–700 eV coercivity of patterned FePt significantly increased
[6]. The position of the main Auger electron peak with the annealing temperature above 600 C. The
for Pt MNN is around 1970 eV [6]. As the escape patterned media with ordered self-assembled FePt
depths of Auger electrons for Fe LMM and arrays might be a good candidate for future high
Pt MNN are both the order of a few atomic storage of magnetic recording.
ARTICLE IN PRESS

4 M. Chen et al. / Journal of Magnetism and Magnetic Materials ] (]]]]) ]]]–]]]

Acknowledgements [2] D. Weller, A. Moser, L. Folks, M.E. Best, W. Lee, M.F.


Toney, M. Schwickert, J.-U. Thiele, M.F. Doerner, IEEE
Trans. Magn. 36 (2000) 10.
This work was supported by the NSF Materials
[3] M. Chen, D.E. Nikles, Nano Letters 2 (2002) 211.
Research Science and Engineering Center award [4] J.W. Harrell, S. Wang, D.E. Nikles, M. Chen, Appl. Phys.
number DMR-9809423. Lett. 79 (2001) 4393.
[5] A.V. Blaaderen, R. Rael, P. Wiltzins, Nature 385 (1997)
321.
References [6] D. Briggs, M.P. Sead (Eds.), Practical Surface Analysis,
Vol. 1, Wiley, New York, 1990.
[1] S. Sun, C.B. Murray, D. Weller, L. Folks, A. Morser, [7] G.E. McGuire, Auger Electron Spectroscopy Reference
Science 287 (2000) 1989. Manual, Plenum Press, New York, 1979.

Potrebbero piacerti anche