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Optics
Fiber positioning applications
Add/Drop Multiplexer (ADM)
Fiber filters (BGF)
Optical switches
Adaptive optics
Tunable lasers
Aerospace/space
Life science/medical
Instrumentation
XYZ tables
Interferometers
Micropositionering
AFM microscopy
Piezoelectric positioning stage
Stepper piezoelectric integrated nanomotion
Wafer and mask positioning/alignment
Translation stage
Active damping
Linear multilayer piezoelectric actuators are constructed by up to 100 ceramic layers, co-fired to a monolithic ceramic,
typically with a height up to 2-3mm. Linear multilayer piezoelectric actuators can be made very small, e.g. 1mm × 1mm
× 0.2mm, or very large, e.g. 70mm × 35mm × 3mm. Further, they can be custom designed in regards to ceramic mate-
rial, layer thickness, oprating voltage, geometries (squares, rings, rectangles, chamfered, etc.), electrode materials and
electrode design.
Stacked multilayer piezoelectric actuators are made of two or several linear actuators glued together. The purpose of the
stacking is to obtain more displacement than can be achieved by a single linear actuator. Noliac offers a high degree of
flexibility as a wide range of actuator dimensions can be made from a defined number of linear actuator plates or rings.
The actuators are usually grinded on top and bottom surfaces (perpendicular to the direction of expansion) in order to
obtain flat and parallel surfaces for mounting. The actuators may be mounted either by mechanical clamping or gluing.
The actuators must only be stressed axially. Tilting and The actuators without preload are sensitive to pulling forces. It is recommended
shearing forces must be avoided. to apply a pre-load in order to optimize the performances of the actuators.
Stacked actuators are manufactured with top and bottom insulating ceramic end plates.
If glued it is important to ensure a very thin glue line between the actuator and the substrate.
It is recommended that a pressure, e.g. 2 - 5 MPa, is applied during the curing process.
To avoid significant loss of performance, the mounting of the actuators should avoid mechanical
clamping and/or gluing on the sides of the actuator.
During manufacturing or handling, minor chips on the end-plates can appear. Minor chips cannot
be avoided, but such chips do not affect performance.
Electrical connection
External electrodes
The external electrodes are screen printed silver as standard.
Other materials, e.g. gold or silver/palladium are available on
request. The positive electrode is indicated by a black spot.
+
V Electrical connection to the external electrodes can be achieved by
- mechanical contacts, soldering, gluing with electrically conductive
glues or wire bonding.
Mechanical connections
Mechanical connections can be arranged by e.g. copper springs
contacted to the external electrodes. It is recommended to use
external electrodes of gold in order to eliminate oxidation of the
electrodes.
Soldering
Soldering electrical wires to the screen-printed silver electrode
V makes an excellent and time-stable connection. In order to avoid
- + challenges with wetting the solder on the silver surface, always
clean the external electrodes with a glass brush or steel wool.
Bending multilayer piezoelectric actuators are co-fired ceramic actuators with ceramic layers and
internal electrodes configured as to generate a bending mode. Bending multilayer piezoelectric
actuators can be custom designed in regards to layer thickness, oprating voltage, geometries and
electrode design. Bending multilayer actuators may be stacked in order to multiply force or stroke.
Mounting
Bending plate actuators may be mounted 0.5
either by mechanical clamping or gluing. 3.0
Bending plate actuators are not machined on
top and bottom surfaces and as such may have
small variations in the surface. For this reason
a mechanical clamping should be done with
moderate force, approximately 5 times the
specified blocking force.
Control instructions V
Bending actuator plates can be controlled by: - +
Control instructions
Bending ring actuators can be controlled by:
Shear loading
Length
Adhesive
CSAP Adhesive
CSAP
Axial loading
The force must be applied on the full surface of the actuator in
order to ensure a good load distribution. In particular when apply-
ing the pressure, the contact surfaces have to be sufficiently flat
or compliant.
Activation direction
- Insulation layers
CSAP
S
+ Insulation layers
It can be necessary to insulate the contact surfaces from the rest
of the structure. This can be achieved by adding inactive ceramic
plates in the structure, or polyimide film insulator.
Adhesive
CSAP
CSAP Adhesive Adhesive
Electrical connection
External electrodes
Since shear plate actuators can be used with bipolar symmetrical
electrical supply, both electrodes are identical. The direction of
operation is indicated by the chamfers.
Sign convention Sign convention: A positive voltage on one electrode leads to a rela-
tive displacement of this electrode towards the chamfered edge.
Electrical connection to the external electrodes can be achieved
by mechanical contacts, soldering, gluing with electrically
conductive glues or wire bonding.
Mechanical connections
Mechanical connections can be arranged by e.g. copper springs
contacted to the external electrodes. Shear plate actuators are
provided with gold plated electrodes for optimal electrical contact
and to avoid oxidation of the electrodes. For demanding applica-
tions, it might be necessary to have both contacts gold plated.
Free stroke @
diameter (ID)
temperature
Capacitance
Length (L)/
Width (W)/
Width max
@ nominal
resonance
Height (H)
frequency
Maximum
operating
Unloaded
oprating
oprating
Material
nominal
Stacked
voltage
voltage
Names
Linear
Plates
Outer
Inner
Rings
(Wm)
x x CMAP04 5 +/- 0.1 5 +/- 0.1 3 +/- 0.05 150 4.8 1000 250 200 NCE57 >300k
x x CMAP07 5 +/- 0.1 5 +/- 0.1 2 +/- 0.05 200 3.1 1000 100 200 NCE57 >500k
x x CMAP08 7 +/- 0.15 7 +/- 0.15 2 +/- 0.05 200 3.2 1960 220 200 NCE57 >500k
x x CMAP09 10 +/- 0.2 10 +/- 0.2 2 +/- 0.05 200 3.2 4000 440 200 NCE57 >500k
x x CMAP10 3 +/- 0.1 3 +/- 0.1 2 +/- 0.05 200 1.8 290 25 200 NCE46 >500k
x x CMAP11 5 +/- 0.1 5 +/- 0.1 2 +/- 0.05 200 2 800 75 200 NCE46 >500k
x x CMAP12 2 +/- 0.1 2 +/- 0.1 2 +/- 0.05 120 2.8 160 36 200 NCE57 >500k
x x SCMAP01 3 +0.3/-0.1 3 +0.3/-0.1 4.8 4 – 30 +/- 0.2 or 1%* 60 2.3 – 33 360 450 - 6300 125 NCE59 >250 k - >35 k
x x SCMAP02 5 +0.3/-0.1 5 +0.3/-0.1 5.8 4 – 50 +/- 0.2 or 1%* 60 2.7 – 64 1000 1400 - 33300 125 NCE59 >250 k - >22 k
x x SCMAP03 3 +0.3/-0.1 3 +0.3/-0.1 4.8 5 – 30 +/- 0.2 or 1%* 150 4.2 - 39 360 100 - 950 150 NCE57 >200 k - >35 k
x x SCMAP04 5 +0.3/-0.1 5 +0.3/-0.1 6.8 5 – 50 +/- 0.2 or 1%* 150 4.6 - 73 1000 238 - 3800 150 NCE57 >200 k - >22 k
x x SCMAP05 7 +0.35/-0.15 7 +0.35/-0.15 8.9 4 – 70 +/- 0.2 or 1%* 150 2.9 - 100 1960 390 - 13250 150 NCE57 >250 k - >16 k
x x SCMAP06 3 +0.3/-0.1 3 +0.3/-0.1 4.8 4 – 30 +/- 0.2 or 1%* 200 2.8 - 39 360 29 - 400 150 NCE57 >250 k - >35 k
application in order to avoid bending and buckling during mounting and operation
Actuator specifications
x x SCMAP07 5 +0.3/-0.1 5 +0.3/-0.1 6.8 4 – 50 +/- 0.2 or 1%* 200 2.9 - 71 1000 100 - 2300 150 NCE57 >250 k - >22 k
** For stacks higher than 10mm, it may be necessary to add a support within the
x x SCMAP08 7 +0.35/-0.15 7 +0.35/-0.15 8.9 4 – 70 +/- 0.2 or 1%* 200 3 - 103 1960 209 - 7100 150 NCE57 >250 k - >16 k
x x SCMAP09 10 +0.4/-0.2 10 +0.4/-0.2 11.9 4 – 100 +/- 0.2 or 1%* 200 3 - 149 4000 418 - 20500 150 NCE57 >250 k - >11 k
x x SCMAP10 3 +0.3/-0.1 3 +0.3/-0.1 4.8 4 – 30 +/- 0.2 or 1%* 200 1.7 - 24 290 24 - 350 150 NCE46 >250 k - >35 k
x x SCMAP11 5 +0.3/-0.1 5 +0.3/-0.1 6.8 4 – 50 +/- 0.2 or 1%* 200 1.9 - 46 800 71 - 1700 150 NCE46 >250 k - >22 k
x x SCMAP12 2 +0.3/-0.1 2 +0.3/-0.1 3.8 4 – 20** +/- 0.2 or 1%* 120 2.4-21 160 34 - 310 150 NCE57 >250 k - >52 k
x x CMAR01 6 +/- 0.2 2 +/- 0.1 2 +/- 0.05 200 2.7 1000 100 200 NCE57 >500k
x x CMAR02 8 +/- 0.25 3 +/- 0.1 2 +/- 0.05 200 2.7 1700 170 200 NCE57 >500k
x x CMAR03 12 +/- 0.4 6 +/- 0.2 2 +/- 0.05 200 2.8 2670 350 200 NCE57 >500k
x x CMAR04 15 +/- 0.45 9 +/- 0.3 2 +/- 0.05 200 2.8 4530 500 200 NCE57 >500k
x x CMAR05 20 +/- 0.6 12 +/- 0.4 2 +/- 0.05 200 3 8000 825 200 NCE57 >500k
* Whichever is largest
x x SCMAR01 6 +0.4/-0.2 2 +0.1/-0.3 7.9 4 – 60 +/- 0.2 or 1%* 200 2.6 - 74 1000 95 - 2750 150 NCE57 >250k - >18k
x x SCMAR02 8 +0.45/-0.25 3 +0.1/-0.3 10 4 – 80 +/- 0.2 or 1%* 200 2.6 - 100 1700 162 - 6300 150 NCE57 >250k ->14k
x x SCMAR03 12 +0.6/-0.4 6 +0.2/-0.4 14.1 4 – 120 +/- 0.2 or 1%* 200 2.7 - 157 2670 333 - 19600 150 NCE57 >250k - >9 k
x x SCMAR04 15 +0.65/-0.45 9 +0.3/-0.5 17.2 4 – 150 +/- 0.2 or 1%* 200 2.7 - 197 4530 475 - 35150 150 NCE57 >250k - >7 k
x x SCMAR05 20 +0.8/-0.6 12 +0.4/-0.6 22.3 4 – 200 +/- 0.2 or 1%* 200 2.9 - 282 8000 784 - 77600 150 NCE57 >250k - >6 k
14
Blocking force
diameter (OD)
Nominal oper-
Free stroke @
diameter (ID)
temperature
Capacitance
Length (L)/
Width (W)/
length (Lc)
@ nominal
resonance
Chamfers/
Height (H)
frequency
Maximum
operating
Unloaded
Clamping
oprating
Material
Bending
nominal
Stacked
voltage
Names
Linear
Plates
Outer
Shear
Inner
Rings
Specifications on Noliac Actuators
x x CMBP04 32 +/- 0.65 7.8 +/- 0.15 0.7 +/- 0.1 200 +/- 475 0.75 2 × 160 +/- 15% 150 NCE57 >275 Lc=3.5 mm
x x CMBR07 40 +/- 1.2 8 +/- 0.25 0.7 +/- 0.1 200 +/- 185 13 2 × 800 +/- 15% 150 NCE57 >1.8 k
x x CMBR08 40 +/- 1.2 8 +/- 0.25 1.25 +/- 0.1 200 +/- 115 39 2 × 1,740 +/- 15% 150 NCE57 >3.4 k
x x CMBR09 40 +/- 1.2 8 +/- 0.25 1.8 +/- 0.1 200 +/- 83 56 2 × 2,740 +/- 15% 150 NCE57 >4.8 k