Sei sulla pagina 1di 14

Piezo actuators Advantages of piezoelectric actuators:

Noliac Group develops and • Very precise movement


manufactures piezoceramic • Compact
actuators of high quality • High force
and tailored for custom • Low energy consumption
specifications. The actuators
• Quick response time (μs range)
are offered in a wide range
• No EMI (ElectroMagnetic Interference)
of sizes and geometries.

www.noliac.com Piezo actuators Ver1001 1


piezo
actuators Piezo actuator applications

Optics
Fiber positioning applications
Add/Drop Multiplexer (ADM)
Fiber filters (BGF)
Optical switches
Adaptive optics
Tunable lasers

Aerospace/space

Vibration control and cancellation


Thrusters (valve and pumps)
Structural health monitoring
Active trailing edge
Fuel injection
Valves

Life science/medical

Piezo valves for drug dispensers


Medical transducers
Droplet generation
Scalers (dental)
Micro-pumps

Instrumentation

XYZ tables
Interferometers
Micropositionering
AFM microscopy
Piezoelectric positioning stage
Stepper piezoelectric integrated nanomotion
Wafer and mask positioning/alignment
Translation stage
Active damping

www.noliac.com Piezo actuators Ver1001 2


piezo
actuators Linear and stacked actuators

Linear multilayer actuators


Typical outline of linear plate actuators (CMAP) Typical outline of linear ring actuators (CMAR)

Symbol Parameter Unit Symbol Parameter Unit


L Length excluding external mm OD Outer diameter excluding mm
connections external connections
W Width mm ID Inner diameter mm
H Height mm H Height mm

Linear multilayer piezoelectric actuators are constructed by up to 100 ceramic layers, co-fired to a monolithic ceramic,
typically with a height up to 2-3mm. Linear multilayer piezoelectric actuators can be made very small, e.g. 1mm × 1mm
× 0.2mm, or very large, e.g. 70mm × 35mm × 3mm. Further, they can be custom designed in regards to ceramic mate-
rial, layer thickness, oprating voltage, geometries (squares, rings, rectangles, chamfered, etc.), electrode materials and
electrode design.

www.noliac.com Piezo actuators Ver1001 3


piezo
actuators Linear and stacked actuators

Stacked multilayer actuators


Typical outline of stacked plates (SCMAP) Typical outline of stacked rings (SCMAR)

Symbol Parameter Unit Symbol Parameter Unit


L Length excluding external mm OD Outer diameter excluding mm
connections external connections
W Width mm ID Inner diameter mm
H Height mm H Height mm

Stacked multilayer piezoelectric actuators are made of two or several linear actuators glued together. The purpose of the
stacking is to obtain more displacement than can be achieved by a single linear actuator. Noliac offers a high degree of
flexibility as a wide range of actuator dimensions can be made from a defined number of linear actuator plates or rings.

www.noliac.com Piezo actuators Ver1001 4


piezo Wire options for linear and
actuators stacked actuators

  Option A Option B Option C


Type 28 AWG Teflon 28 AWG Teflon Custom
Length 200 +/- 10 mm 200 +/- 10 mm To be defined
Position Middle of the actuator Middle of the actuator To be defined
Direction Perpendicular to the height Toward top To be defined

www.noliac.com Piezo actuators Ver1001 5


piezo Mount and connect
actuators linear and stacked actuators

The actuators are usually grinded on top and bottom surfaces (perpendicular to the direction of expansion) in order to
obtain flat and parallel surfaces for mounting. The actuators may be mounted either by mechanical clamping or gluing.

The actuators must only be stressed axially. Tilting and The actuators without preload are sensitive to pulling forces. It is recommended
shearing forces must be avoided. to apply a pre-load in order to optimize the performances of the actuators.

For linear actuators it is recommended not to use a


metal plate on top and bottom in order to avoid short The force must be applied on the full surface of the actuator in order to assure
circuit. a good load distribution.

Avoiding short circuit can either be achieved by:


• Adding Kapton foil on the metallic surfaces.
• Having inactive ceramic plates between the actuator and the metal plate.

Stacked actuators are manufactured with top and bottom insulating ceramic end plates.

If glued it is important to ensure a very thin glue line between the actuator and the substrate.
It is recommended that a pressure, e.g. 2 - 5 MPa, is applied during the curing process.

Epoxy glues are well suited for gluing piezoceramics.

To avoid significant loss of performance, the mounting of the actuators should avoid mechanical
clamping and/or gluing on the sides of the actuator.

During manufacturing or handling, minor chips on the end-plates can appear. Minor chips cannot
be avoided, but such chips do not affect performance.

www.noliac.com Piezo actuators Ver1001 6


piezo Mount and connect
actuators linear and stacked actuators

Electrical connection
External electrodes
The external electrodes are screen printed silver as standard.
Other materials, e.g. gold or silver/palladium are available on
request. The positive electrode is indicated by a black spot.
+
V Electrical connection to the external electrodes can be achieved by
- mechanical contacts, soldering, gluing with electrically conductive
glues or wire bonding.

Mechanical connections
Mechanical connections can be arranged by e.g. copper springs
contacted to the external electrodes. It is recommended to use
external electrodes of gold in order to eliminate oxidation of the
electrodes.

Soldering
Soldering electrical wires to the screen-printed silver electrode
V makes an excellent and time-stable connection. In order to avoid
- + challenges with wetting the solder on the silver surface, always
clean the external electrodes with a glass brush or steel wool.

Soldering material must contain Ag.

Gluing wire contacts


Electrical connection can also be arranged by gluing wires to the
external silver electrodes. Noliac recommends a two component
soft epoxy glue with minimum 75% silver content and a curing
temperature below 150ºC to avoid depolarization of the PZT. Gluing
is recommended as alternative to soldering the wires when the PZT
is working at high frequency or the PZT is subjected to high thermal
variations from the environment. It is recommended to use exter-
nal electrodes of silver in order to archive good electrical contact
between glue and electrode.

Wire bonding contacts


Electrical connection can be done by wire bonding to the external
gold electrodes. Noliac recommends external gold electrodes as
gold generates only a thin oxide layer, which has
to be penetrated in the wire bonding friction process and thereby
ensures a better mechanical and electrical contact.

www.noliac.com Piezo actuators Ver1001 7


piezo
actuators Bending actuators

Bending multilayer actuators


Typical outline of bending plate (CMBP) Typical outline of bending ring (CMBR)

Symbol Parameter Unit Symbol Parameter Unit


L Length excluding external mm OD Outer diameter excluding mm
connections external connections
Lc Clamping length mm ID Inner diameter mm
W Width mm H Height mm
H Height mm

Bending multilayer piezoelectric actuators are co-fired ceramic actuators with ceramic layers and
internal electrodes configured as to generate a bending mode. Bending multilayer piezoelectric
actuators can be custom designed in regards to layer thickness, oprating voltage, geometries and
electrode design. Bending multilayer actuators may be stacked in order to multiply force or stroke.

www.noliac.com Piezo actuators Ver1001 8


piezo Mount and connect bending
actuators plate actuators

Mounting
Bending plate actuators may be mounted 0.5
either by mechanical clamping or gluing. 3.0
Bending plate actuators are not machined on
top and bottom surfaces and as such may have
small variations in the surface. For this reason
a mechanical clamping should be done with
moderate force, approximately 5 times the
specified blocking force.

If mounted with glue it should be emphasized


that the gluing contact surface is restricted to 0.5
cover only the inactive part of the bender in 3.0
order not to reduce the stroke of the bender.
 
Glue-line
Epoxy glues are well suited for gluing piezocer-
amics and several alternatives exists.

Control instructions V
Bending actuator plates can be controlled by:  - +

Differential voltage control


In this mode the bending can be controlled
both upwards and downwards. Apply +100V to
the positive electrode (indicated by the black
dot), -100V to the negative electrode and a
voltage Vin to the middle electrode such as
–100V < Vin< 100V. 
  V
- +
If 0V < Vin< 100V, the plate will bend down with +100V -100V

the black spot facing up.  Vin +/-  100V

If –100V < Vin< 0V, the plate will bend up with the


black spot facing up.

Single side voltage control


In this mode, the bending can be controlled
for one side only, i.e. bending up with the black
dot facing up.  Apply 0V to the negative and
0V 0V
middle electrode, and up to 200V to the
0V < Vin < 200V
positive electrode.

www.noliac.com Piezo actuators Ver1001 9


piezo
actuators Mount and connect bending ring actuators

Mounting 0,5 0,5 0,5 0,5


Bending ring actuators may be mounted either
1 1 1 1
by mechanical clamping or gluing.
 
Mechanical clamping
A mechanical clamping should be done with Example of mechanical clamping
moderate force, as low as possible to avoid
unwanted clamping and thus reduce the
maximum stroke.
1 1 1 1
Epoxy Epoxy
Gluing glue glue

Epoxy glues are well suited for gluing piezo


ceramics and several alternatives exists. Please Ring support
contact us if you need support on selection of Example of gluing
appropriate glue for your application.  
 
Important remark:
Mounting of bending ring actuators at their outer 1 1
Epoxy
diameters needs some flexibility at the contact glue
line to avoid unwanted clamping that will reduce
the bender's efficiency. Therefore mechanical
clamping should be done with moderate forces
and if the ring is glued, a flexible epoxy should
be used.

Control instructions
Bending ring actuators can be controlled by:

Differential voltage control


In this mode the bending can be controlled both
upwards and downwards. Apply +100V to the
positive electrode (indicated by the black dot),
-100V to the negative electrode and a voltage Vin
to the middle electrode such as –100V < Vin< 100V. 
-100V -100V < Vin < +100V +100V
 
If 0V < Vin< 100V, the ring will bend down with the
black spot facing up. 
 
If –100V < Vin< 0V, the ring will bend up with the
black spot facing up.

Single side voltage control  0V 0V 0 < V < +200V


In this mode, the bending can be controlled
for one side only, i.e. bending up with the black
dot facing up.  Apply 0V to the negative and
middle electrode, and up to 200V to the
positive electrode.

www.noliac.com Piezo actuators Ver1001 10


piezo
actuators Shear actuators

Shear monolayer actuators Mount and connect shear actuators


Typical outline of shear plate (CSAP)
Mounting
Shear plate actuators present electrodes on top and bottom
Height
surfaces. They may be mounted either by mechanical clamping or
Width gluing.

Shear loading

Length
Adhesive
CSAP Adhesive
CSAP
Axial loading

Clamping and gluing options

In case of clamping, axial stress on shear plate actuators must be


controlled. Too low pressure can lead to slippage whereas too high
pressure can damage the ceramic. With the appropriate contact
surface and in the case of low shear force, a pressure of 1 to 3
MPa can be recommended.
 
Sign convention:
A positive voltage on one electrode leads to a
relative displacement of this electrode towards CSAP
the chamfered edge. This displacement is re-
corded as positive.
- +
PS PS
+ -
In comparison with single linear actuators,
shear actuators are adapted for small transverse Activation in the case of clamping
displacements where space is a constraint. They
offer short response times (high resonance fre- If clamping is used, the stiffness of the loading mechanism in the
quency) for a minimum cost. actuation direction shall be as low as possible in order not to hin-
der the movement of the actuator.

Uneven and even loading

 
The force must be applied on the full surface of the actuator in
order to ensure a good load distribution. In particular when apply-
ing the pressure, the contact surfaces have to be sufficiently flat
or compliant.

www.noliac.com Piezo actuators Ver1001 11


piezo
actuators Mount and connect shear actuators

 
Activation direction

- Insulation layers
CSAP

S
+ Insulation layers

Method for complete electrical insulation

It can be necessary to insulate the contact surfaces from the rest
of the structure. This can be achieved by adding inactive ceramic
plates in the structure, or polyimide film insulator.

Adhesive
CSAP
CSAP Adhesive Adhesive

Preferred gluing layout


 
If glued it is important to ensure a very thin glue line between the
shear plate actuators and the substrate. This is generally ensured
by using low viscosity glue. A pressure, e.g. 2 - 3 MPa, should be
applied during the curing process.
 
Epoxy glues are well suited for gluing piezoceramics however
several alternatives exist. 

Electrical connection
 
External electrodes
Since shear plate actuators can be used with bipolar symmetrical
electrical supply, both electrodes are identical. The direction of
operation is indicated by the chamfers.

Sign convention Sign convention: A positive voltage on one electrode leads to a rela-
tive displacement of this electrode towards the chamfered edge.
 
Electrical connection to the external electrodes can be achieved
by mechanical contacts, soldering, gluing with electrically
conductive glues or wire bonding.
 
Mechanical connections
Mechanical connections can be arranged by e.g. copper springs
contacted to the external electrodes. Shear plate actuators are
provided with gold plated electrodes for optimal electrical contact
and to avoid oxidation of the electrodes. For demanding applica-
tions, it might be necessary to have both contacts gold plated.

www.noliac.com Piezo actuators Ver1001 12


13
Blocking force
Nominal oper-
diameter (OD)

Free stroke @
diameter (ID)

Tol.: +/− 15%

Tol.: +/− 20%

Tol.: +/− 15%


ating voltage

temperature
Capacitance
Length (L)/

Width (W)/

Width max

@ nominal

resonance
Height (H)

frequency
Maximum
operating

Unloaded
oprating

oprating

Material
nominal
Stacked

voltage

voltage
Names
Linear
Plates

Outer

Inner
Rings

(Wm)

mm Tol. mm Tol. max mm Tol. V µm N nF ◦C NCE Hz


x x CMAP01 3 +/-  0.1 3 +/- 0.1 2 +/- 0.05 60 2.6 360 500 125 NCE59 >500k
x x CMAP02 5 +/-  0.1 5 +/- 0.1 2 +/- 0.05 60 2.8 1000 1460 125 NCE59 >500k
x x CMAP03  3 +/-  0.1 3 +/- 0.1 3 +/- 0.05 150 4.4 360 105 200 NCE57 >300k


x x CMAP04 5 +/-  0.1 5 +/- 0.1 3 +/- 0.05 150 4.8 1000 250 200 NCE57 >300k

www.noliac.com Piezo actuators Ver1001


x x CMAP05 7 +/-  0.1 7 +/- 0.15 2 +/- 0.05 150 3.1 1960 410 200 NCE57 >500k
x x CMAP06 3 +/-  0.1 3 +/- 0.1 2 +/- 0.05 200 2.9 360 30 200 NCE57 >500k
Specifications on Noliac Actuators

x x CMAP07 5 +/-  0.1 5 +/- 0.1 2 +/- 0.05 200 3.1 1000 100 200 NCE57 >500k
x x CMAP08 7 +/-  0.15 7 +/- 0.15 2 +/- 0.05 200 3.2 1960 220 200 NCE57 >500k
x x CMAP09 10 +/-  0.2 10 +/- 0.2 2 +/- 0.05 200 3.2 4000 440 200 NCE57 >500k
x x CMAP10 3 +/-  0.1 3 +/- 0.1 2 +/- 0.05 200 1.8 290 25 200 NCE46 >500k
x x CMAP11 5 +/-  0.1 5 +/- 0.1 2 +/- 0.05 200 2 800 75 200 NCE46 >500k
x x CMAP12 2 +/-  0.1 2 +/- 0.1 2 +/- 0.05 120 2.8 160 36 200 NCE57 >500k
x x SCMAP01 3 +0.3/-0.1 3 +0.3/-0.1 4.8 4 – 30 +/- 0.2 or 1%* 60 2.3 – 33 360 450 - 6300 125 NCE59 >250 k - >35 k
x x SCMAP02 5 +0.3/-0.1 5 +0.3/-0.1 5.8 4 – 50 +/- 0.2 or 1%* 60 2.7 – 64 1000 1400 - 33300 125 NCE59 >250 k - >22 k
x x SCMAP03  3 +0.3/-0.1 3 +0.3/-0.1 4.8 5 – 30 +/- 0.2 or 1%* 150 4.2 - 39 360 100 - 950 150 NCE57 >200 k - >35 k
x x SCMAP04 5 +0.3/-0.1 5 +0.3/-0.1 6.8 5 – 50 +/- 0.2 or 1%* 150 4.6 - 73 1000 238 - 3800 150 NCE57 >200 k - >22 k
x x SCMAP05 7 +0.35/-0.15 7 +0.35/-0.15 8.9 4 – 70 +/- 0.2 or 1%* 150 2.9 - 100 1960 390 - 13250 150 NCE57 >250 k - >16 k
x x SCMAP06 3 +0.3/-0.1 3 +0.3/-0.1 4.8 4 – 30 +/- 0.2 or 1%* 200 2.8 - 39 360 29 - 400 150 NCE57 >250 k - >35 k

application in order to avoid bending and buckling during mounting and operation
Actuator specifications

x x SCMAP07 5 +0.3/-0.1 5 +0.3/-0.1 6.8 4 – 50 +/- 0.2 or 1%* 200 2.9 - 71 1000 100 - 2300 150 NCE57 >250 k - >22 k

** For stacks higher than 10mm, it may be necessary to add a support within the
x x SCMAP08 7 +0.35/-0.15 7 +0.35/-0.15 8.9 4 – 70 +/- 0.2 or 1%* 200 3 - 103 1960 209 - 7100 150 NCE57 >250 k - >16 k
x x SCMAP09 10 +0.4/-0.2 10 +0.4/-0.2 11.9 4 – 100 +/- 0.2 or 1%* 200 3 - 149 4000 418 - 20500 150 NCE57 >250 k - >11 k
x x SCMAP10 3 +0.3/-0.1 3 +0.3/-0.1 4.8 4 – 30 +/- 0.2 or 1%* 200 1.7 - 24 290 24 - 350 150 NCE46 >250 k - >35 k
x x SCMAP11 5 +0.3/-0.1 5 +0.3/-0.1 6.8 4 – 50 +/- 0.2 or 1%* 200 1.9 - 46 800 71 - 1700 150 NCE46 >250 k - >22 k
x x SCMAP12 2 +0.3/-0.1 2 +0.3/-0.1 3.8 4 – 20** +/- 0.2 or 1%* 120 2.4-21 160 34 - 310 150 NCE57 >250 k - >52 k
x x  CMAR01 6 +/-  0.2 2 +/- 0.1 2 +/- 0.05 200 2.7 1000 100 200 NCE57 >500k
x x  CMAR02 8 +/-  0.25 3 +/- 0.1 2 +/- 0.05 200 2.7 1700 170 200 NCE57 >500k
x x  CMAR03 12 +/-  0.4 6 +/- 0.2 2 +/- 0.05 200 2.8 2670 350 200 NCE57 >500k
x x  CMAR04 15 +/-  0.45 9 +/- 0.3 2 +/- 0.05 200 2.8 4530 500 200 NCE57 >500k
x x  CMAR05 20 +/-  0.6 12 +/- 0.4 2 +/- 0.05 200 3 8000 825 200 NCE57 >500k

* Whichever is largest
x x SCMAR01 6 +0.4/-0.2 2 +0.1/-0.3 7.9 4 – 60 +/- 0.2 or 1%* 200 2.6 - 74 1000 95 - 2750 150 NCE57 >250k - >18k
x x  SCMAR02 8 +0.45/-0.25 3 +0.1/-0.3 10 4 – 80 +/- 0.2 or 1%* 200 2.6 - 100 1700 162 - 6300 150 NCE57 >250k ->14k
x x  SCMAR03 12 +0.6/-0.4 6 +0.2/-0.4 14.1 4 – 120 +/- 0.2 or 1%* 200 2.7 - 157 2670 333 - 19600 150 NCE57 >250k - >9 k
x x  SCMAR04 15 +0.65/-0.45 9 +0.3/-0.5 17.2 4 – 150 +/- 0.2 or 1%* 200 2.7 - 197 4530 475 - 35150 150 NCE57 >250k - >7 k
x x  SCMAR05 20 +0.8/-0.6 12 +0.4/-0.6 22.3 4 – 200 +/- 0.2 or 1%* 200 2.9 - 282 8000 784 - 77600 150 NCE57 >250k - >6 k
14
Blocking force
diameter (OD)

Nominal oper-

Free stroke @
diameter (ID)

Tol.: +/− 15%

Tol.: +/− 20%


ating voltage

temperature
Capacitance
Length (L)/

Width (W)/

length (Lc)
@ nominal

resonance

Chamfers/
Height (H)

frequency
Maximum
operating

Unloaded

Clamping
oprating

Material
Bending

nominal
Stacked

voltage
Names
Linear
Plates

Outer
Shear

Inner
Rings

mm Tol. mm Tol. mm Tol. V µm N nF Tol. ◦C NCE Hz


x x CMBP01 21 +/-  0.45 7.8 +/-   0.15 0.7 +/-  0.1 200 +/-  195 1.2 2 × 110 +/- 15% 150 NCE57 >730 Lc=3.5 mm
x x CMBP02 21 +/- 0.45 7.8 +/- 0.15 1.25 +/- 0.1 200 +/- 120 3.7 2 × 220 +/- 15% 150 NCE57 >1300 Lc=3.5 mm
x x CMBP03 21 +/- 0.45 7.8 +/- 0.15 1.8 +/- 0.1 200 +/- 85 5.5 2 × 330 +/- 15% 150 NCE57 >1880 Lc=3.5 mm


Specifications on Noliac Actuators

x x CMBP04 32 +/- 0.65 7.8 +/- 0.15 0.7 +/- 0.1 200 +/- 475 0.75 2 × 160 +/- 15% 150 NCE57 >275 Lc=3.5 mm

www.noliac.com Piezo actuators Ver1001


x x CMBP05 32 +/- 0.65 7.8 +/- 0.15 1.25 +/- 0.1 200 +/- 345 2.25 2 × 320 +/- 15% 150 NCE57 >490 Lc=3.5 mm
x x CMBP06 32 +/- 0.65 7.8 +/- 0.15 1.8 +/- 0.1 200 +/- 210 4.3 2 × 480 +/- 15% 150 NCE57 >705 Lc=3.5 mm
x x CMBP07 50 +/- 1 7.8 +/- 0.15 0.7 +/- 0.1 200 +/- 1270 0.4 2 × 250 +/- 15% 150 NCE57 >100 Lc=3.5 mm
x x CMBP08 50 +/- 1 7.8 +/- 0.15 1.25 +/- 0.1 200 +/- 850 1.6 2 × 500 +/- 15% 150 NCE57 >180 Lc=3.5 mm
x x CMBP09 50 +/- 1 7.8 +/- 0.15 1.8 +/- 0.1 200 +/- 635 2.9 2 × 750 +/- 15% 150 NCE57 >265 Lc=3.5 mm
x x CMBR01 20 +/- 0.6 4 +/- 0.15 0.7 +/- 0.1 200 +/- 47 9 2 × 180 +/- 15% 150 NCE57 >6.9 k
x x CMBR02 20 +/- 0.6 4 +/- 0.15 1.25 +/- 0.1 200 +/- 28 16 2 × 400 +/- 15% 150 NCE57 >12.8 k
x x CMBR03 20 +/- 0.6 4 +/- 0.15 1.8 +/- 0.1 200 +/- 20 22 2 × 670 +/- 15% 150 NCE57 >18.4 k
x x CMBR04 30 +/- 0.9 6 +/- 0.2 0.7 +/- 0.1 200 +/- 108 11 2 × 470 +/- 15% 150 NCE57 >3.7 k
x x CMBR05 30 +/- 0.9 6 +/- 0.2 1.25 +/- 0.1 200 +/- 70 29 2 × 940 +/- 15% 150 NCE57 >6 k
x x CMBR06 30 +/- 0.9 6 +/- 0.2 1.8 +/- 0.1 200 +/- 48 39 2 × 1,470 +/- 15% 150 NCE57 >8 k
Actuator specifications

x x CMBR07 40 +/- 1.2 8 +/- 0.25 0.7 +/- 0.1 200 +/- 185 13 2 × 800 +/- 15% 150 NCE57 >1.8 k
x x CMBR08 40 +/- 1.2 8 +/- 0.25 1.25 +/- 0.1 200 +/- 115 39 2 × 1,740 +/- 15% 150 NCE57 >3.4 k
x x CMBR09 40 +/- 1.2 8 +/- 0.25 1.8 +/-  0.1 200 +/- 83 56 2 × 2,740 +/- 15% 150 NCE57 >4.8 k

3.5 MPa axial load without loss of performance.


x x CSAP01 2 +/- 0.1 2 +/- 0.1 0.5 +/-  0.05 +/- 320*** 1.5**** 133 +/- 20% 200 NCE51 1,750 0.2 mm × 45°
x x CSAP02 5 +/- 0.1 5 +/- 0.1 0.5 +/-  0.05 +/- 320*** 1.5**** 830 +/- 20% 200 NCE51 1,750 0.5 mm × 45°

**** From −Vmax to +Vmax. Stroke measured under up to


x x CSAP03 10 +/- 0.2 10 +/- 0.2 0.5 +/-  0.05 +/- 320*** 1.5**** 3320 +/- 20% 200 NCE51 1,750 1 mm × 45°

*** At ambient temperature


Electrodes and wires
x x External electrodes Screen printed Ag, Ag/Pd or Au
x x External electrodes Fired on Ag, Ag/Pd or Au
x External electrodes Screen-printed Ag and soldered bus wire (option: glued connections)
x External electrodes Au on Ni, plated
x x x x Wires None as standard
x x x x Wires 28 AWG × 200 mm (+/- 20 mm) teflon if height ≥ 1.2 mm
x x x Wires 30 AWG × 200 mm (+/- 20 mm) teflon if height <1.2mm.

Potrebbero piacerti anche