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a兲
Present address: National Institute of Standards and Technology, Gaithers-
II. DEVICE FABRICATION AND PARAMETER
burg, MD 20899; FAX: 301 975 8069; electronic mail: EXTRACTION
david.gundlach@nist.gov
b兲
Present address: 3M, St. Paul, MN 55114. Discrete pentacene TFTs 关the chemical structure of pen-
c兲
Present address: Intel, Hudson, MA. tacene is shown in Fig. 1共a兲兴 were fabricated using BC and
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024509-2 Gundlach et al. J. Appl. Phys. 100, 024509 共2006兲
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024509-3 Gundlach et al. J. Appl. Phys. 100, 024509 共2006兲
WCi
ID = 共VGS − VT兲VDS , 共2兲
L
where W is the transistor channel width, L is the transistor
channel length, is the field-effect mobility, VT is the thresh-
old voltage, and Ci is the capacitance per unit area of the gate
insulator.
In the saturation regime, VDS ⬎ 共VGS − VT兲, ID is given by
WCi
ID = 共VGS − VT兲2 , 共3兲
2L
where all terms remain as previously defined.
The field-effect mobility in the linear regime was ex-
tracted from the transconductance 共gm = ID / VGS, for small
and constant VDS兲 of the device. If W, L, and Ci are known
the field-effect mobility in the linear regime is calculated FIG. 2. Output characteristics 共ID-VDS兲 at VGS = −60 V for TC pentacene
TFTs with Au, Cu, Ni, and In contacts. The device dimensions are L
from the relationship = 35 m, W = 220 m, and SiO2 gate insulator thickness of 290 nm. Note
Lgm 1 that ID has been scaled 共⫻103兲 for the device with In contacts.
= . 共4兲
WCi VDS
The field-effect mobility in the linear regime was extracted at of the contact metal. This is shown in Fig. 2, where we have
large VGS 共VGS = −40– −60 V兲 to obtain a value that better plotted the output characteristics 共ID − VDS for VGS = −60 V兲
approximates that of the mobile charger in the OTFT chan- for TC pentacene TFTs with Au, Cu, Ni, and In contacts. Au
nel. contacts are shown to provide the best performance then Cu
In the saturation regime 共VDS ⬎ VGS − VT兲, mobility was and Ni. OTFTs with In contacts have substantially reduced
extracted from the transfer characteristics 共ID − VGS character- drain current 共ID is scaled by 103 in Fig. 2兲 which may be
istics兲 plotted as 冑ID − VGS. The mobility is calculated using expected given its low work function. A feature to note in
Eq. 共3兲 by solving for , Fig. 2 is the curvature at small VDS for the OTFTs with Cu
冉 冊
2L 冑ID
2 and Ni contacts. This indicates significant parasitic contact
= . 共5兲 effects. Assuming ideal conditions 共pristine metals and no
WCi VGS in-gap interface states or contact chemistry兲 the output char-
The threshold voltage was determined from the intercept of acteristic for the OTFT with the Ni contacts should be simi-
the fitting line used to extract the mobility in the linear re- lar to that for the OTFT with the Au contacts. As shown in
gime 共ID − VGS characteristics兲 or the intercept of the fitting Fig. 2, however, a simplistic energy-band diagram only pro-
line used to extract the mobility in the saturation regime vides a guide for selecting contact metals and the use of a
共冑ID − VGS characteristics兲.38 metal with a high work function does not guarantee efficient
charge 共hole兲 injection and improved pentacene TFT perfor-
III. INFLUENCE ON OTFT PERFORMANCE OF THE mance. The significant reduction of ID for the OTFT with In
CONTACT METAL, DEVICE DESIGN, AND contacts may be considered to be consistent with the forma-
PROCESSING tion of an injection barrier at the semiconductor-contact in-
terface as predicted using a simplistic energy-band diagram,
Historically simplistic energy-band diagrams have been however, the effect on the electrical characteristics of the
used as a convenient starting point for selecting the source
film forming properties of the deposited metal, such as the
and drain contact metal. Specifically, the selection is based
tendency of In to “ball-up” on pentacene, should be fully
mainly on the alignment of the Fermi level 共EF兲 关given by
considered before attributing the reduction of ID entirely to
the work function of the metal 共 M 兲兴 to the relevant charge
the expected injection barrier.
transport level of the organic semiconductor while assuming
a constant vacuum level 共Evac兲. Pentacene has a reported Photoemission spectroscopy 共PES兲 studies reveal that
carrier gap EG of 2.24– 2.5 eV, and an electron affinity EA of the contact formation between organic materials and metals
approximately 4.9 eV.39 Thus efficient hole injection for ac- is complex. Dipole layer formation is observed at the inter-
cumulation mode p-channel operation might be expected face which can result in a significant energy barrier 共Bh兲
when a metal with a high work function, such as Au, is used even when the work function is matched to the relevant con-
to form the source and drain contacts. Similarly, a metal with duction level.40 For example, recent studies of pentacene de-
a low work function, such as calcium 共Ca兲, might be ex- posited on Au show that dipole layer formation results in an
pected to form a poor hole injecting contact but an efficient injection barrier of 0.5– 0.85 eV,40–42 and can be as large as
electron injecting contact for accumulation mode n-channel 1 eV for Au deposited on pentacene.42 The conditions used
operation. in PES studies, however, do not reflect those used in OTFT
In practice we observe that the device performance and fabrication. Thus the contact properties of OTFTs can differ
operation only partly depend on the reported work function substantially from what is predicted from PES studies. An
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024509-4 Gundlach et al. J. Appl. Phys. 100, 024509 共2006兲
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024509-5 Gundlach et al. J. Appl. Phys. 100, 024509 共2006兲
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024509-6 Gundlach et al. J. Appl. Phys. 100, 024509 共2006兲
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024509-7 Gundlach et al. J. Appl. Phys. 100, 024509 共2006兲
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024509-8 Gundlach et al. J. Appl. Phys. 100, 024509 共2006兲
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024509-9 Gundlach et al. J. Appl. Phys. 100, 024509 共2006兲
not V⬘GT, where V⬘GT = V⬘GS − VT兲. This might account for
some of the offset. The effective field-effect mobility for the
two device designs differ by less than 25% at large VGT
supporting our initial assumption that the effective field-
effect mobility of charge in the channel is similar for both
device designs. The effective field-effect mobility extracted
for the TC design at large VGT is similar to that extracted
from the characteristics of the discrete devices biased in the
linear regime 关see Fig. 8共b兲兴. In contrast, the effective field-
effect mobility for the BC design is nearly twice as large as
that extracted for the BC TFT with the longest L when biased
in the linear regime, and is similar to that extracted in the
saturation regime 共see Fig. 7兲.
A dependence of mobility on VGT similar to that in
a-Si: H TFTs is commonly observed in OTFTs. A density of
FIG. 11. Effective field-effect mobility vs VGT for BC and TC pentacene
TFTs with Au source and drain contacts. states consisting of a broad distribution of localized trap
states within the mobility gap and localized tail states near
the mobility edge can be expected for polycrystalline organic
tion of a nearly uniform sheet density of charge in the chan-
thin films; making the apparent dependence of mobility on
nel for VDS = −5 V is valid only for very large VGT. Width
VGT consistent with a multiple trap and release 共MTR兲 model
normalized R p vs VGT for TC OTFTs is plotted in Fig. 10共b兲.
like that used to describe charge transport in a-Si: H TFTs.51
R P is shown to vary superlinearly with VGT 共approximately
Initially the charge induced by the applied gate voltage fills
VGT−2兲. Interestingly, the fitting lines used to extract R p for
deep states. With increasing gate voltage the Fermi level is
TC devices converge to L ⬃ −40 m 共LT ⬃ 20 m兲, which is
moved into the tail states 共near the mobility edge兲 where the
nearly the same LT extracted for the BC design. In compar-
majority of the induced charge is still trapped. Given this, the
ing the dependence of R p on bias for the two device designs
mobility in Fig. 10 represents a lower limit for mobile
it is apparent that for the BC device design R p is dominated
charge. A more detailed analysis of charge transport and mo-
by a Schottky-like barrier formed at the source contact when
bility requires the extraction of the dependence of mobility
VDS is below the diode turn-on voltage. Phrased in different
on temperature which is outside the scope of these contact
way, this difference in the bias dependence for small VDS
studies.
indicates that the expected Schottky-like barrier at the metal/
semiconductor interface of the source contact does not domi-
nate device performance for the TC device design 共see de- V. DEVICE SCALING
tailed discussions in Sec. VII兲. Above the diode turn-on
voltage the bias dependence of R p is similar for the two Rsh and width normalized R P from Sec. V for each de-
device designs. In this bias range R p is most likely dominated sign were used calculate Rch and R P for OTFTs with L = 10
by the resistance associated with charge transport through the and 30 m and W = 100 m. Rch is dependent on the device
high resistance region between the contact interface or edge aspect ratio 共W / L兲, while R p is only dependent on W 共and
in the TC and BC device designs, respectively, and the field- VDS for BC OTFTs兲. The calculated values are plotted vs VGT
accumulated “intrinsic” channel 共see detailed discussions in in Figs. 12共a兲 and 12共b兲 for the BC and TC device designs,
Sec. VII兲. It is also worth noting that R p was similar in mag- respectively.
nitude and had the same bias dependence as that shown in Figure 12共a兲 shows that for L = 10 and 30 m R p is
Figs. 10共a兲 and 10共b兲 when extracted from BC and TC pen- larger than the Rch over the entire range of VGT. This indi-
tacene TFTs fabricated without VP-OTS treated gate dielec- cates that the device performance is contact limited even for
tric. long channel length BC devices 共L ⬎ 30 m兲. In contrast,
Fig. 12共b兲 shows that R p and Rch are comparable for L
C. Effective field-effect mobility of charge in the = 30 m and R p is larger than Rch for L = 10 m 共becoming
OTFT channel comparable to Rch only for large VGT兲. This indicates that TC
device performance is contact limited for L ⬍ 10 m. The
The effective field-effect mobility for the charge in the calculated results in Figs. 12共a兲 and 12共b兲 are consistent with
channel of the OTFT was extracted for different VGT from the current-voltage characteristics of TC and BC OTFTs and
the slope of the fitting lines used to determine width normal- the decrease in the extracted extrinsic mobility for decreasing
ized R P, where the slope corresponds to Rsh and is given by L 关see Figs. 7 and 8共b兲兴.
Rsh =
共WRch兲
L
= 冋 1
Ci共VGS − VT兲
, 册 共11兲
Due to limitations in our shadow-mask design we are not
able to experimentally verify our expectation that TC OTFTs
are contact limited for L ⬍ 10 m. TC OTFTs with Au con-
for both device designs is plotted versus VGT in Fig. 11. tacts typically do not show significant contact effects, but to
Neglecting the offset the mobility show a similar dependence the best of our knowledge TC devices patterned by shadow
on VGT. Importantly, the data have not been corrected for the mask have not been reported on for L ⬍ 20 m. Recently TC
reduction in VGT due to RS 共data are plotted as a function VGT pentacene TFTs with photolithographically defined Au con-
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024509-10 Gundlach et al. J. Appl. Phys. 100, 024509 共2006兲
FIG. 13. 共a兲 Output characteristics at VGT = −18 V for BC pentacene TFTs
FIG. 12. R P and Rch vs VGT for 共a兲 BC and 共b兲 TC pentacene TFTs with Au
with Pd contacts having dimensions of L = 2, 10, 20, and 100 m, W
source and drain contacts. Resistances are calculated for W = 100 m, and
= 270 m, and SiO2 gate insulator thickness of 333 nm. 共b兲 Extrinsic satu-
L = 10 and 30 m.
ration 共open circles兲 and linear 共open triangles兲 regime field-effect mobility
vs L for the BC pentacene TFTs with Pd contacts.
tacts have been reported where the output characteristics for
devices with L = 4 m show significant contact effects. The
characteristics of TC pentacene TFTs processed in parallel when compared to the characteristics shown in Fig. 5共b兲. The
with L = 20 m showed negligible contact effects.52 extrinsic field-effect mobility is plotted vs L in Fig. 13共b兲 for
In this section we have shown that the extrinsic perfor- the devices biased in the linear and saturation regimes. The
mance degradation due to contact effects limits device scal- trend is similar to that shown in Fig. 7, but the devices with
ing. This is of technological significance since contact effects Pd contacts have higher extrinsic field-effect mobility in both
are often neglected and it is assumed that OTFT circuit speed regimes. The extrinsic field-effect mobility of the device with
can be increased by simply reducing L 共according to theory L = 100 m extracted in the linear regime is as large as
the cutoff frequency for an ideal FET is proportional to 0.71 cm2 / V s; significantly larger than that of the longest
/ L2兲. The results reported above place practical limits on channel length BC device with Au contacts and among the
device scaling and highlight the importance of improving highest reported to date for any OTFT biased in the linear
charge injection. regime.11,15,19 The data in Fig. 13 are consistent with our
observations that BC pentacene TFTs with Pd contacts have
better extrinsic performance when the charge injection is not
VI. PENTACENE TFTS WITH PALLADIUM SOURCE limited by an oxide layer.
AND DRAIN CONTACTS
Width normalized R p vs VGT for BC OTFTs with Pd
The output characteristics 共VGT = −18 V兲 for BC penta- contacts is plotted on a logarithmic scale in Fig. 14 for dif-
cene TFTs with Pd contacts having dimensions of L = 2, 10, ferent VDS 共for comparison we use the same scale as in Fig.
20, and 100 m and W = 270 m are plotted in Fig. 13共a兲. 10兲. The dependence of R p on VDS is similar to that shown
Like the characteristics for the BC devices with Au contacts for the devices with Au bottom contacts, but R p is a factor of
ID varies nonlinearly with VDS for small VDS indicating the 2–4 lower. extracted from Rsh was greater than 1 cm2 / V s
presence of a Schottky-like barrier. A qualitative comparison at large VGT, which is approximately 20% larger that ex-
of the Figs. 13共a兲 and 5共a兲, however, reveals that the contact tracted for the BC design using Au contacts 共see Fig. 11兲. We
effects are less pronounced for the devices with Pd contacts. speculate that the lower R p and higher result from an im-
Additionally, ID shows better scaling with L 共not shown兲 provement in the pentacene film microstructure at the Pd
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024509-11 Gundlach et al. J. Appl. Phys. 100, 024509 共2006兲
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024509-12 Gundlach et al. J. Appl. Phys. 100, 024509 共2006兲
worth noting that an injection barrier at the contacts also cessful in describing injection for OTFTs; mainly when used
results in a deviation from the ideal power law behavior to describe the extreme cases, i.e., those of negligible and
given in Eqs. 共2兲 and 共3兲. large injection barriers.62,63 For the latter case, a diffusion-
The resulting charge distributions for the barriers and limited thermionic emission model has been shown to be
designs studied are consistent with those reported in Ref. 55. insufficient to describe the temperature dependence. More
Specifically, our simulations show that for both designs and accurate numerical modeling requires the use of a realistic
regardless of the injection barrier the sheet carrier density is density of states for the semiconductor bulk and interface
nearly identical in the middle of the TFT channel for a given regions 共to include polarization effects near critical inter-
VGS above threshold. In the vicinity of the contacts the faces兲, and unambiguously separating the temperature depen-
charge density increases for the case of no injection barrier. dence of the injection process at the contact from that of the
Not surprisingly, a depletion region is formed when contacts charge transport process in the channel. Not investigated in
with an injection barrier are formed to the semiconductor of these preliminary modeling studies, but worthy of consider-
the TFT. The depletion region forms between the field- ation are 共1兲 the dependence of the threshold voltage and
accumulated channel 共at the SiO2 interface and extending saturation current on the organic semiconductor film thick-
under the contact兲 and the contact metal for the TC TFT. In ness 关which can be related to inherent 2D effects in the TC
BC TFTs the depletion region forms above the contact and design; similar to those reported for a-Si: H TFTs 共Ref. 64兲兴
along the contact edge to the channel. Thus the accumulated and 共2兲 the dependence of the extrinsic device performance
charge in the channel of the TFT is separated from the con- on the gate dielectric thickness as related to the charge and
tact edge by the depletion region. The charge distribution for electric field distribution in the device 共reduced gate dielec-
the BC TFT is strongly dependent on the device bias 共VGS tric thickness can be expected to have a beneficial influence
and VDS兲 and the width of the depletion region decreases on charge injection, and thus , VT, and S兲.
with increasing charge density in the channel 共increasing
VGS兲. VIII. SUMMARY
The actual film topography 共molecular terraces, voids, or
We have investigated parasitic contact effects for OTFT
apparent grain boundaries兲, metal diffusion, and the large
device designs of technological interest and using different
contact area can be expected to contribute to the improved
contact metals. Charge injection is shown to be dependent on
contact characteristics of TC OTFTs. Should tunneling
choice of the contact metal in a nontrivial way. The device
mechanisms be considered the above deviations from the
operation and performance are shown to be dominated by
formation of an abrupt interface and the possible formation
effects related to the device design and processing, and sim-
of in-gap interface states resulting from the metal deposition
plistic energy-band diagrams are shown to be of limited use
process might favor the improved injection experimentally for selecting contact metals. The electrical characteristics of
observed in TC pentacene TFTs. Conversely, the disrupted devices with asymmetric metals for the source and drain con-
film growth 关on top of the contact and extending up to 2 m tacts show that charge injection at the source contact domi-
into the channel, see Fig. 4共b兲兴 and the contact surface con- nates the extrinsic device performance. Importantly, we show
tamination resulting from processing can be expected to con- that parameters used to describe the device performance and
tribute to the degraded contact characteristics experimentally operation, such as VT and , are strongly dependent on the
observed in BC pentacene TFTs. Additionally, the possible contacts and may not reflect the channel properties of the
formation of extended regions of disorder near the contact device. R P in TC and BC pentacene TFTs was determined to
may also give rise to a low- or field-dependent-mobility re- be similar to Rch and scaling studies show that OTFT perfor-
gion between the contact edge and the “intrinsic” channel of mance may be contact limited in either device design for
the device which dominates the device performance. Varia- L ⬍ 10 m. These studies are in close agreement with
tions of these cases were studied in Refs. 56 and 57 for those reported simultaneously by Necliudov et al.18 and
OTFTs having contacts with and without injection barriers Klauk et al.19 Preliminary 2D DDM simulations show that
and it was shown that the incorporation of low-mobility re- BC TFT performance is more strongly affected by the for-
gions near the contacts or a field-dependent mobility for the mation of a Schottky barrier than TC TFT performance. Tun-
entire semiconductor thin film can 共even when injection bar- neling mechanisms, film morphology and microstructure,
riers are not present兲 severely limit charge injection and en- contact contamination and chemistry, and in-gap trap states
hance the nonlinearity observed in the output characteristics were not included in our preliminary simulations but are ex-
for small VDS. pected to play a critical role in determining the charge injec-
Given the above deviations from an ideal and abrupt tion efficiency and dominant injection mechanism for fabri-
contact-semiconductor interface the formation of contacts cated devices. Our results for BC devices with Pd contacts
which exhibit some nonideal Schottky-like behavior can be indicate that the film microstructure at the contacts affects
expected for either design, but such behavior is likely to be the charge injection.
more pronounced in BC TFTs. The details of the contact
formation process and resulting interface remain poorly un-
ACKNOWLEDGMENTS
derstood and hinder the development of a microscopically
accurate charge injection model for OTFTs. Theoretical Financial support at the time of this study was provided
models developed to describe injection into molecular by the Defense Advanced Research Program Agency and the
solids59–61 共specifically diodes兲 have been only partly suc- Naval Surface Warfare Center, Dalgren Division, and is
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024509-13 Gundlach et al. J. Appl. Phys. 100, 024509 共2006兲
30
gratefully acknowledged. The authors wish to thank D. Ober- Y. Y. Lin, D. J. Gundlach, S. F. Nelson, and T. N. Jackson, IEEE Electron
Device Lett. 18, 606 共1997兲.
hoff and K. P. Pernstich, ETH Zürich, Laboratory for Solid 31
D. J. Gundlach, C. C. Kuo, S. F. Nelson, and T. N. Jackson, 57th Device
State Physics, Zürich, Switzerland for useful discussions dur- Research Conference Digest, June 1999, pp. 164–165.
ing the preparation of this manuscript. 32
D. J. Gundlach, C.-C. Kuo, C. D. Sheraw, J. A. Nichols, and T. N. Jack-
son, Proc. SPIE 4466, 54 共2001兲.
1 33
C. D. Dimitrakopoulos and P. R. L. Malenfant, Adv. Mater. 共Weinheim, D. Knipp, R. A. Street, A. Völkel, and J. Ho, J. Appl. Phys. 93, 347
Ger.兲 14, 99 共2002兲. 共2002兲.
2 34
G. Horowitz, Adv. Mater. 共Weinheim, Ger.兲 10, 365 共1998兲. H. Klauk, D. J. Gundlach, J. A. Nichols, and T. N. Jackson, IEEE Trans.
3
D. J. Gundlach, Y. Y. Lin, T. N. Jackson, S. F. Nelson, and D. G. Schlom, Electron Devices 20, 1258 共1999兲.
35
IEEE Electron Device Lett. 18, 87 共1997兲. H. Klauk, J. R. Huang, J. A. Nichols, and T. N. Jackson, Thin Solid Films
4
D. J. Gundlach, H. Klauk, C. D. Sheraw, C.-C. Kuo, J.-R. Huang, and T. 366, 272 共2000兲.
36
N. Jackson, Tech. Dig. - Int. Electron Devices Meet. 1999, 111. D. J. Gundlach, Y.-Y. Lin, D. G. Schlom, and T. N. Jackson, Appl. Phys.
5
P. Baude, D. A. Ender, M. A. Haas, T. W. Kelley, D. V. Muyres, and S. D. Lett. 74, 3302 共1999兲.
Theiss, Appl. Phys. Lett. 82, 3964 共2003兲. 37
S. M. Sze, Physics of Semiconductor Devices 共Wiley, New York, 1981兲.
6
C. D. Sheraw et al., Appl. Phys. Lett. 80, 1088 共2002兲. 38
D. Schroeder, Semiconductor Material and Device Characterization
7
M. G. Kane et al., IEEE Electron Device Lett. 21, 534 共2000兲. 共Wiley, New York, 1990兲.
8 39
F. Eder, H. Klauk, M. Halik, U. Zschieschang, G. Schmid, and C. Dehm, E. A. Silinsh and V. Čápek, Organic Molecular Crystals: Interaction,
Appl. Phys. Lett. 84, 2673 共2004兲. Localization, and Transport Phenomena 共AIP, New York, 1994兲.
9 40
Y.-Y. Lin, D. J. Gundlach, and T. N. Jackson, Mater. Res. Soc. Symp. N. Koch, A. Kahn, J. Ghijsen, J.-J. Pireaux, J. Schwartz, R. L. Johnson,
Proc. 413, 413 共1996兲. and A. Elschner, Appl. Phys. Lett. 82, 70 共2003兲.
10
F. Garnier, Chem. Phys. 227, 253 共1998兲. 41
P. G. Schroeder, D. B. France, J. B. Park, and B. A. Parkinson, J. Appl.
11
D. J. Gundlach, L. L. Jia, and T. N. Jackson, IEEE Electron Device Lett. Phys. 91, 3010 共2002兲.
22, 571 共2001兲. 42
N. J. Wilkins, L. Yan, and Y. Gao, Appl. Phys. Lett. 80, 4384 共2002兲.
12
R. Schroeder, L. A. Majewski, and M. Grell, Appl. Phys. Lett. 84, 1004 43
D. J. Gundlach and T. N. Jackson 共unpublished兲.
共2004兲. 44
J. H. Kang and X.-Y. Zhu, Appl. Phys. Lett. 82, 3248 共2003兲.
13
S. M. Baier, N. C. Cirillo, Jr., S. A. Hanka, and M. S. Shur, U.S. Patent 45
N. Koch, A. Elschner, J. Schwartz, and A. Kahn, Appl. Phys. Lett. 82,
No. 4,638,341 共20 January 1987兲. 2281 共2003兲.
14
S. Luan and G. W. Neudeck, J. Appl. Phys. 72, 766 共1992兲. 46
A. B. Chwang and C. D. Frisbie, J. Appl. Phys. 90, 1342 共2001兲.
15
P. V. Pesevanto, R. J. Chesterfield, C. R. Newman, and C. D. Frisbie, J. 47
R. A. Street and A. Salleo, Appl. Phys. Lett. 81, 2887 共2002兲.
Appl. Phys. 96, 7312 共2004兲. 48
Field-effect mobility was taken from Fig. 10 for 共VGT = −20 V兲.
16
P. V. Necliudov, M. S. Shur, D. J. Gundlach, and T. N. Jackson, 2001 49
P. V. Necliudov, M. S. Shur, D. J. Gundlach, and T. N. Jackson, J. Appl.
International Semiconductor Device Research Symposium Conference Di-
Phys. 88, 6594 共2000兲.
gest, 2001, pp. 345–348. 50
17 VT was extracted in the linear region, varied by ±2 V, and showed some
D. J. Gundlach, Ph. D. thesis, Pennsylvania State University, 2001.
18 dependence on VDS.
P. V. Necliudov, M. S. Shur, D. J. Gundlach, and T. N. Jackson, Solid- 51
M. Shur and M. Hack, J. Appl. Phys. 55, 3831 共1984兲.
State Electron. 47, 259 共2003兲. 52
19 C.-C. S. Kuo and T. N. Jackson, 61st Device Research Conference Digest,
H. Klauk, G. Schnmid, W. Radlik, W. Weber, L. Zhou, C. D. Sheraw, J. A.
June 2003.
Nichols, and T. N. Jackson, Solid-State Electron. 47, 297 共2003兲. 53
20
J. Zaumseil, K. W. Balwin, and J. A. Rogers, J. Appl. Phys. 93, 6117 J. Wang, D. J. Gundlach, C. C. Kuo, and T. N. Jackson, 41st Electronic
共2003兲. Materials Conference Digest, June 1999, Vol. 16.
54
21
G. B. Blanchet, Y.-L. Loo, J. A. Rogers, F. Gao, and C. R. Fincher, Appl. I. Kymissis, C. D. Dimitrakopoulos, and S. Purushothaman, IEEE Trans.
Phys. Lett. 82, 463 共2003兲. Electron Devices 48, 1060 共2001兲.
55
22
T. W. Kelley and C. D. Frisbie, J. Vac. Sci. Technol. B 18, 632 共2000兲; K. T. Li, J. W. Balk, P. P. Ruden, I. H. Campbell, and D. L. Smith, J. Appl.
Seshadri and C. D. Frisbie, Appl. Phys. Lett. 78, 993 共2001兲. Phys. 91, 4312 共2002兲.
56
23
L. Bürgi, H. Sirringhaus, and R. H. Friend, Appl. Phys. Lett. 80, 2913 A. Bolognesi, A. Di Carlo, and P. Lugli, Appl. Phys. Lett. 81, 4646
共2002兲. 共2002兲.
57
24
J. A. Nichols, D. J. Gundlach, and T. N. Jackson, Appl. Phys. Lett. 83, T. Li, P. P. Ruden, I. H. Campbell, and D. L. Smith, J. Appl. Phys. 93,
2366 共2003兲. 4017 共2003兲.
58
25
K. P. Puntambekar, P. V. Pesavento, and C. D. Frisbie, Appl. Phys. Lett. I. G. Hill, Appl. Phys. Lett. 87, 163505 共2005兲.
59
83, 5539 共2003兲. V. I. Arkhipov, E. V. Emelianov, Y. H. Tak, and H. Bässler, J. Appl. Phys.
26
R. J. Chesterfield, J. C. Mckeen, C. R. Newman, C. D. Frisbie, P. C. 84, 848 共1998兲.
60
Ewbank, K. R. Mann, and L. L. Miller, J. Appl. Phys. 95, 6396 共2004兲. J. C. Scott and G. G. Malliaras, Chem. Phys. Lett. 299, 115 共1999兲.
61
27
J. Takeya, C. Goldmann, S. Haas, K. P. Pernstich, B. Ketterer, and B. J. C. Scott, J. Vac. Sci. Technol. A 21, 521 共2003兲.
62
Batlogg, J. Appl. Phys. 94, 5800 共2003兲. L. Bürgi, T. J. Richards, R. H. Friend, and H. Sirringhaus, J. Appl. Phys.
28
C. Goldmann, S. Haas, C. Krellner, K. P. Pernstich, D. J. Gundlach, and B. 94, 6129 共2003兲.
63
Batlogg, J. Appl. Phys. 96, 2080 共2004兲. B. H. Hamadani and D. Natelson, J. Appl. Phys. 97, 064508 共2005兲; Proc.
29
Y. Y. Lin, D. J. Gundlach, S. F. Nelson, and T. N. Jackson, IEEE Trans. IEEE 93, 1306 共2005兲.
64
Electron Devices 44, 1325 共1997兲. J. Shaw and M. Hack, J. Appl. Phys. 65, 2124 共1989兲.
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