10 Vacuum Measurement

Vacuum Measurement
Rough and Medium Vacuum

Gauges and Controllers
Active Vacuum Gauges
Controllers for
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High and Ultra High Vacuum

Gauges and Controllers
Beam Flux Monitor
Cables
Contents
Introduction Page 10-3 to 10-9

Criteria for the selection of vacuum gauges Page 10-3
Vacuum pressure ranges Page 10-3
Conversion of pressure units Page 10-3
Product overview Page 10-4 to 10-5
Glossary Page 10-6
Typical measuring ranges of different vacuum gauges Page 10-7
Measuring methods Page 10-7 to 10-9
Rough and Medium Vacuum Gauges and Controllers Page 10-10 to 10-18
Active Vacuum Gauges Page 10-19 to 10-31
Controllers for Active Vacuum Gauges Page 10-32 to 10-36
High and Ultra High Vacuum Gauges and Controllers Page 10-37 to 10-48
Beam Flux Monitor Page 10-49 to 10-50
Cables Page 10-51 to 10-54
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10-2 www.vacom-vacuum.com
Vacuum Measurement Instrumentation
VACOM provides reliable vacuum measurement instruments for a wide range of applications between atmosphere and ultra high vacuum:
technologically leading products, a comprehensive catalogue range, as well as OEM versions of own metrology products.
In addition, VACOM offers
 Professional guidance - we support you in choosing the right instruments
 Instruments and other system components from one source
 Quick processing of quotes and orders
 Short delivery times
 In-house technical service
Call our customer consultants on work days from 7.30 a.m to 5.30 p.m CET: +49 (0)3641 4275-0, or e-mail to: info@vacom-vacuum.com
Criteria for the selection of vacuum gauges
Measurement range
Which measurement method offers an appropriate measurement range? Is one single method sufficient or is it necessary to
combine different methods? Are combination gauges applicable?
Accuracy, reproducibility, response time

What measurement accuracy does the vacuum application require? Which measuring method offers sufficient accuracy? What
reproducibility and response time of the sensor is necessary?
Composition of the process media

Are correction factors for gas-type dependent measurements necessary and known? Is the gas composition variable?
Process conditions and environmental conditions

To which process media or conditions is the sensor exposed? (media: corrosive, hazardous, oxidizing / deoxidizing, etc.; process
conditions: contaminating or coating, low / high temperatures, high voltages, magnetic fields, glow discharges and other plasmas, fast
pressure rise or pressure shock, etc.).
Is a protection of the gauge in front of the inlet port necessary, by means of a baffle, a valve, a bent tube etc.?
Which requirements result from environmental conditions? (vibration resistance, protection against contaminants and water,
mechanical robustness, climatical and geographical conditions, ionizing radiation, etc.) Is there a danger of ignitable gas mixtures?
Are explosion-proof gauges required?
Bakeout capability
What temperature stability is required for the gauge and the gauge cable? Need temperature sensitive parts to be removable?
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Readings display
Is a pressure display required? If yes, is an active gauge with integrated display appropriate or a separate display unit for one or more
gauges?
Process control, data logging

Which setpoints, analog outputs, PC or fieldbus interfaces need to be available?
Signal transmission
Which type of signal needs to be transmitted over which cable lengths and in which quality?
Vacuum pressure ranges
Conversion of pressure units
1 Pa = 0.01 mbar = 0.0075 Torr 1 micron = 1 mTorr = 0.133 Pa = 1.33E-3 mbar

1 mbar = 100 Pa = 1 hPa = 0.1 kPa = 0.75 Torr 1 psi = 6895 Pa = 69 mbar = 51.7 Torr
1 Torr = 1 mmHg = 133 Pa = 1.33 mbar 1 atm = 760 Torr = 1013 hPa = 1013 mbar = 14.7 psi
www.vacom-vacuum.com 10-3
Product overview
Rough and medium vacuum gauges and controllers
Active vacuum gauges
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Controllers for active vacuum gauges
High and ultra high vacuum gauges and controllers
Beam Flux Monitor
Features of active vacuum gauges
Possible combinations of active or passive vacuum gauges and controllers
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Features of vacuum gauge controllers and meters
Glossary
Absolute pressure
indicates the pressure relative to absolute vacuum. I.e. absolute vacuum = 0 mbar absolute, atmospheric pressure = 1013 mbar
absolute (under normal conditions). The absolute pressure of a gas is defined as the force of the gas particles per surface unit.
Relative pressure (or gauge pressure)

indicates the pressure relative to atmospheric pressure. I.e. absolute vacuum = -1013 mbar gauge, atmospheric pressure = 0 mbar
gauge. Overpressure is indicated with a positive sign.
Differential pressure
indicates the difference in pressure between two measuring points.
Vacuum
Means that the absolute pressure of a gas within a system is smaller than the ambient air pressure. Some technical vacuum
applications require a low pressure of just a few mbar, other applications reach pressures below 10-9 mbar absolute. This is a
thousandth of a billionth of the normal atmospheric pressure and points out the complexity of vacuum measurement.
Vacuum gauge, vacuum measurement instrument, vacuum meter

Electronic or mechanical instrument for measuring vacuum pressure (sometimes also called manometer). Due to physical constraints,
there exists no measuring method that covers the whole range of technically used vacuum (atmospheric pressure to < 10-12 mbar).
For different pressure ranges are different gauge types available, limited by physical effects, with different accuracies. The most
sensitive vacuum gauges measure absolute pressures of less than 10-12 mbar (15 decades smaller than atmospheric pressure).
In general a vacuum measurement instrument comprises a pressure transducer (electronic or mechanical), measurement and control
electronics (if applicable), a reading display (electronic or mechanical), and further optional functionalities.
Passive vacuum gauge

Transducer which turns the measurand (vacuum pressure) into a voltage or electric current according to its characteristic curve.
Passive vacuum gauges are used in virtually all cases together with an external measurement and control electronics unit
(refer to "controller"). Both are connected with a measurement or gauge cable.
Active vacuum gauge

Device containing a pressure transducer (passive gauge) and a measurement and control electronics. Active gauges provide analog
data, e.g. as a 0 … 10 V or 4 … 20 mA output signal, or digital data via interfaces like RS232 or ProfiBus. Digital interfaces
additionally allow control of various gauge functions through a programmable logic control. Partially, setpoint relays for process
10 control, digital control inputs, status outputs or readings displays are integrated into the gauge, or available as an option.
Controller
a) Device containing measurement and control electronics for a passive gauge, which interprets and processes the transducer signal.
The electronics supply the transducer with power, controls the measuring circuit, and determines the readings. Usually a readings
display is contained. In many cases, data interfaces (analog and/or digital), digital control inputs and outputs, as well as setpoint relays
for process control are integrated or optionally available.
b) Device which supplies active gauges with power and displays their output signal in pressure units (mbar, Pa, Torr, etc.). In many
cases, data interfaces (analog and/or digital), digital control inputs and outputs, as well as setpoint relays for process control are
integrated or optionally available.
Gas-type independent measurement

Direct pressure measurement which uses the force that gas particles exert on a surface. Pressure is defined as force per surface unit
(in SI units: 1 N/m2 = 1 Pa). According to the kinetic gas theory, the force depends on the number of gas particles per volume
(particle density), but is independent of the molar mass of the particles. I.e. the gas type does not affect the measurement. Typical
gauges: Bourdon gauge, diaphragm gauge.
Gas-type dependent measurement

Indirect pressure measurement which doesn't use the force, but another physical property of the gas which depends on the particle
density and therefore indirectly on the pressure. E.g. thermal conductivity or ionization. However, these properties not only depend on
the particle density, but also on the gas type. To obtain comparability of the readings of different gas-type dependent gauges, they are
usually calibrated for nitrogen, since nitrogen is the main component (approx. 80%) of normal air. Typical gauges: thermocouple gauge,
Pirani gauge, convection Pirani gauge, ionization gauge.
Exponential notation
1.0E-3 mbar = 1.0 x 10-3 mbar.
Typical measuring ranges of different vacuum gauges
Measuring methods
Bourdon gauge
Simple mechanical vacuum gauge. A thin metal spiral tube is closed at one end and
connected to the vacuum system at the other end. Outside the tube is either normal
atmospheric pressure or a defined absolute pressure, dependent on the model. The
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inside of the tube is evacuated together with the vacuum system. Depending on the
pressure difference between inside and outside, the tube bends to a certain extent in the
way of a spiral spring. By means of a lever system, the bend is transferred to a
calibrated indicator needle and scale which displays the pressure of the vacuum system.
Diaphragm vacuum gauges

A diaphragm is exposed to a pressure difference between its two sides. One side is
exposed to the vacuum, the other side is exposed to normal air pressure (in the case of
a relative pressure gauge) or a defined reference pressure (e.g. < 10-6 mbar absolute in
Bourdon gauge
the case of an absolute pressure gauge). The pressure difference leads to a deformation
of the diaphragm. The extent of the deformation is a measure for the pressure.
Diaphragm gauges generate a linear transducer signal, because the force on the
diaphragm is directly proportional to the pressure. This principle can be used for vacuum
as well as for high pressure. Two common technical designs are the piezo-resistive and
the capacit-ance diaphragm gauge. Both types require periodic zero adjustments for
accurate measurements.
Piezo-resistive diaphragm vacuum gauges

contain a diaphragm with a piezo-resistive element. The specific resistance of the
element changes with deformation of the diaphragm. The resolution reaches usually
approx. 0.1% full scale (F.S.), i.e. the usable span is 3 pressure decades. Common
piezo-resistive vacuum gauges offer 1300 … 1500 mbar F.S. (well above air pressure).
Their longterm and temperature stability as well as their resolution is inferior to
capacitive diaphragm vacuum gauges, in return they are significantly lower-priced.
Measuring methods (continued)
Capacitance diaphragm vacuum gauges

The diaphragm acts as one of the two plates of a plate-type capacitor. The capacity
changes with deformation of the diaphragm. The lower measurement limit is approx.
0.01% full scale, i.e. the usable span is 4 pressure decades. Capacitive vacuum gauges
are available in different versions with 0.1 to 1000 mbar F.S. (or Torr F.S.). The 0.1 mbar
F.S. versions require complex temperature control of the gauge in order to reach a lower
measurement limit of 10-5 mbar absolute.
Heat loss vacuum gauges

Heat loss gauges are absolute pressure gauges which are used extensively for medium
vacuum measurement, some types also for rough vacuum measurement. They are
comparatively cheap, easy to install and are proven in a multitude of applications. The
basic principle uses the fact that the thermal conduction of the residual gas depends on
its particle density and thus on the pressure. The characteristics of such gauges are not
linear, instead they flatten to the lower and the upper measurement limits. Therefore Capacitance diaphragm gauge
accuracy and reproducibility fall off at the measurement limits. In addition, the
measurement is gas-type dependent, since different gases show different thermal
conductivity coefficients. Heat loss vacuum gauges are usually calibrated for air or
nitrogen. For use with other gases correction factors need to be applied.
Thermocouple vacuum gauges

Two thin wires of different noble metals cross each other and are welded at the
cross-point. This welded point forms a thermocouple. One of the wires is heated by
means of a constant current. The resulting temperature of the thermocouple as well as
its thermo-electrical voltage depends on the residual gas density. Thus the
thermoelectrical voltage is a measure for the vacuum. Thermocouple gauges are robust
and inexpensive. They measure between 0.001 mbar and approx. 20 mbar (absolute).
Pirani vacuum gauges

A heated thin wire within the vacuum is part of an adjusted Wheatstone bridge circuit.
Due to thermal conduction of the residual gas, more or less energy is dissipated from the
wire, depending on the gas density. The heating power required for maintaining a
constant wire temperature (approx. 150 °C) serves as a measure for the gas pressure. Thermocouple gauge
Pirani gauges are employed for the measurement range 5 x 10-4 mbar to atmospheric
pressure. However, starting from approx. 10 mbar upwards, uncontrolled convection
10 effects impair the accuracy and reproducibility increasingly. Above 1 mbar the gas-type
dependency increases and can lead to strongly incorrect readings for gases other than
air or nitrogen.
Convection-enhanced Pirani vacuum gauges

Convection effects, which are problematic in the case of standard Pirani gauges, can be
exploited in a defined way by means of a special sensor design. The sensor wire is
mounted along the axis of a small tube which has to be installed horizontally. A thermal
resistor wire coiled around the tube leads to an improved compensation of the ambient
temperature in the bridge circuit. Both features together improve the accuracy and
reproducibility of the gauge in the rough vacuum range and also at the lower end of the
measurement range. The measurement range is extended down to 10-4 mbar. However,
the gas-type dependency of the measurement method remains.
Wheatstone bridge circuit
Measuring methods (continued)
Ionization vacuum gauges

To measure high and ultra high vacuum, ionization vacuum gauges are most commonly
used. The residual gas inside the gauge is ionized by electron impact, the ions are
attracted towards a cathode where they are neutralized. The ion current via the cathode
is proportional to the absolute pressure. The measurement is gas-type dependant,
because gases show specific ionization probabilities. Therefore each particular
composition of the residual gas requires a correlating calibration or at least a correction
factor. Ionization vacuum gauges are mainly built in two designs, with cold cathode or
with hot cathode.
Cold cathode ionization vacuum gauges

The internal volume of the gauge is penetrated by the magnetic field of a permanent
magnet. A high voltage of 2 ... 3 kV is applied between the rod-shaped anode and the
cylindrical cathode. Electrons, which are produced by spontaneous emission, are
accelerated on spiral paths through electric and magnetic field and ionize the residual
gas. Ions are collected by the cathode, electrons by the anode, and the pressure
dependant discharge current is measured. The measurement range is approximately
10 -9 to 10-2 mbar. Under clean vacuum conditions, cold cathode gauges are low-
maintenance and long-living. Attention should be paid to the drifting characteristics. The
gauges show a pumping effect due to cathode sputtering and gas gettering, resulting in
an initially lower pressure inside the gauge than in the vacuum chamber. The gettered
gases remain in the gauge, and after some operating time the gauge measures a higher
pressure. Also, the magnetic field can potentially interfere with other system components
or processes. Depending on the particular gauge design, it is possible that switching the
gauge on is problematic at high vacuum (< 10-6 mbar), if the gas discharge ignites Inverted magnetron gauge
poorly due to the low gas density. The common technical design is the inverted
magnetron, also called inverted Penning gauge.
Hot cathode ionization vacuum gauges

The electrons which are necessary for ionizing the residual gas are emitted from a hot
cathode. Sometimes a second hot cathode exists as a spare filament. The most common
design is the Bayard-Alpert gauge with a measurement range from 10-11 ... 10-9 to 10-2
mbar. Another design according to the so-called extractor method has a range from
10-13 to 10-4 mbar.
The hot filament (potential approx. 30 V) of the Bayard-Alpert type is located outside a
cylindrical wire grid anode (potential approx. 180 V). Electrons are accelerated towards 10
the anode, penetrate the cylinder grid and ionize the residual gas. Ions are collected from
another electrode inside the anode grid (the collector wire, potential 0 V), and the ion
current is measured. Hot cathode gauges show high measurement stability because the
emission current from the filament is controlled electronically to a constant value, and Bayard-Alpert gauge
sputtering and pumping effects are negligible. To a certain extent, a degas function can
work against gauge contamination. There exist neither magnetic fields nor problems with
switching on at high vacuum. Voltages are low enough to make unwanted gas
discharges inside the gauge improbable. Oxide coated filaments have a long life cycle
and are stable to inrush of air. The measurement range depends largely on the design of
the anode grid and the collector wire. The more delicate the structure is, the lower the
measurement range ends, because the so-called X-ray limit is reduced. The X-ray limit
describes a pressure-independent collector current which is generated when
"bremsstrahlung" (retardation radiation) hits the collector wire and releases electrons.
Bremsstrahlung is mainly produced during collisions of electrons with the anode grid.
Combined vacuum gauges

Many vacuum processes require the application of two or more vacuum measuring
methods in order to meet the required measurement range and/or accuracy. For such
applications different combination gauges were developed that combine two or three
measurement methods in one single device.
Typical combinations are Pirani + capacitive (THERMOVAC TTR 100), inverted
magnetron + Pirani (PENNINGVAC PTR 90) and Bayard-Alpert + Pirani (ATMION®). The
ATMION® wide range vacuum gauge offers a measurement range of 13 decades (10-10
mbar to air pressure), while the combination of the hot cathode sensor with an always
active Pirani sensor enables a safe, fully automated gauge operation.
ATMION® wide range vacuum gauge

(Bayard-Alpert / Pirani) at the load lock
chamber of a thermal annealing system
Rough and Medium Vacuum Gauges and Controllers
RFM Bourdon Gauge
Bourdon gauge, standard version and stainless steel version (corrosion resistant), rough vacuum
Visual monitoring of roughing lines and evacuation processes

Relative pressure manometer with absolute pressure scale
(ambient pressure = 1000 mbar; vacuum = 0 mbar)
Two versions: RFM (standard) and RFMC (corrosion resistant)
Technical data
Measurement range < 10 ... 1020 mbar
Measuring method Bourdon tube gauge
Units mbar
Standard Temperature range (operation) -40 … +60 °C
txtAbstand Max. media temperature RFM: 60 °C
RFMC: 200 °C
Materials in vacuum RFM: copper alloy
RFMC: stainless steel 316L
Housing RFM: plastics (black), size 80 mm
RFMC: stainless steel, size 63 mm
Protection category RFMC: IP 65
Scope of delivery vacuum gauge
Order code Description Vacuum D H

Corrosion resistant connection
txtAbstand
RFMG RFM, standard G 1/4” B 80 115
RFMK RFM, standard DN16KF 80 115
RFMCG RFM, stainless steel G 1/4” B 63 86
RFMCK RFM, stainless steel DN16KF 63 86
txtAbstand
10 RFM-I Bourdon Gauge with Analog Output
Bourdon gauge, stainless steel version (corrosion resistant), rough vacuum, linear analog output
Visual and electronic monitoring of roughing lines and evacuation processes

A non-contact electronic rotary position sensor converts the position of the needle into a
4 … 20 mA analog output signal
Relative pressure manometer with absolute pressure scale
(ambient pressure = 1000 mbar; vacuum = 0 mbar)
Technical data
Measurement range < 10 ... 1000 mbar | < 1000 … 1E+5 Pa | < 10 … 750 Torr
Measuring method Bourdon tube gauge, rotary position sensor (non-contact) on the
txtAbstand needle shaft
Units mbar
Analog outputs linear, 4 … 20 mA, 2-wire
Temperature range (operation) -40 … +60 °C
Max. media temperature 100 °C
Materials in vacuum stainless steel 316L
Housing stainless steel, nominal size 63 mm
Protection category IP 54
Power supply 12 … 30 VDC, max. 1 W
Electrical connectors cable, 2 m, loose ends (DC in, analog out)
txtAbstand Scope of delivery vacuum gauge
Order code Description Vacuum D H l

connection b
RFM-I-063-CG RFM-I, stainl. st., analog output G 1/4” B 63 86
RFM-I-063-CK RFM-I, stainl. st., analog output DN16KF 63 86
DVR 2 Capacitance Diaphragm Gauge
Battery-operated vacuum gauge, rough vacuum, internal ceramic transducer
Gas-type independent measurement

Fully electronic
Long-term stable
Fast (analog) trend indication, precise (digital) reading
Corrosion resistant ceramic diaphragm
Splash-proof
High electromagnetic interference resistance
Battery-operated with a durable lithium battery
Programmable Auto switch-off
txtAbstand ATEX version on request
Technical data
Measurement range 1 ... 1080 hPa | 1 ... 1080 mbar | 1 ... 810 Torr
Measuring method diaphragm (Al2O3, capacitive, absolute pressure)
Accuracy < ± 1 hPa ±1 digit | < ± 1 mbar ±1 digit | < ± 0.75 Torr ±1 digit
Temperature coefficient < ± 0.07 hPa / K |< ± 0.07 mbar / K | < ± 0.05 Torr / K
Measurement rate automatic, 3 s, 1 s, 1/3 s
Units hPa, mbar, Torr (switchable)
Display LCD, digital and analog
Temperature range (operation) 10 ... 60 °C
Max. media temperature 80 °C at the pressure transducer
txtAbstand Materials in vacuum aluminium oxide, stainless steel, chemically resistant fluoro
elastomer, PBT / PPS
Housing plastics
Power supply internal lithium battery, 9 V, 1.2 Ah
Vacuum connection flange DN16KF with stepped screw-in hose nozzle DN6/DN10
Scope of delivery vacuum gauge, battery
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VB-682902 DVR 2
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VB-612220 Replacement battery 9 V Lithium 1.2 Ah
VB-900216 DKD calibration of a new DVR 2
VB-900217 DKD re-calibration of a DVR 2
DCP 3000 Capacitance Diaphragm Gauge
Vacuum gauge, rough vacuum, 1 to 4 external ceramic transducers, analog and digital display, serial
interface, connector for vent valve
Gas-type independent and long-term stable measurement

Optional venting function
Connection for up to 4 diaphragm gauges and 1 venting valve
Self-configuring (device identification)
Fast (analog) trend indication, precise (digital) reading
Corrosion resistant ceramic diaphragm gauges
Splash-proof (controller and gauges)
Internal data logger
Technical data
Measurement channels 4
Measurement range 0.1 ... 1080 hPa | 0.1 ... 1080 mbar | 0.1 ... 810 Torr
Measuring method diaphragm (Al2O3, capacitive, absolute pressure)
Resolution 0.1 hPa | 0.1 mbar | 0.1 Torr
txtAbstand Accuracy ±1 hPa | ±1 mbar | ± 0.75 Torr
Temperature coefficient < ± 0.07 hPa / K |< ± 0.07 mbar / K | < ± 0.05 Torr / K
Units hPa, mbar, Torr (switchable)
Display graphical LCD, multilingual, analog plus digital (5 digits) for one
channel (channel selectable) or digital for all 4 channels
simultaneously
Interfaces RS232C
Temperature range (operation) 10 … 40 °C
Max. media temperature 80 °C (short-time)
Materials in vacuum Al2O3, PPS, chemically resistant fluoro elastomer, PP, aluminium
Housing plastics (support clip detachable)
Protection category DCP 3000: IP 42 (front side)
txtAbstand
VSK 3000: IP 54
Power supply 18 … 30 VDC, 3.4 W
Electrical connectors 2 x VACUU.BUS (gauges and vent valve), D-Sub 9 pin (RS232),
10 socket (DC in)
Vacuum connection flange DN16KF, fitting for hose DN 8/10 mm, hose nozzle SW
6/10 mm
Connectable gauges VSK 3000 (diaphragm gauge)
Connectable vent valves vent valve 24 VDC with VACUU.BUS connector
Scope of delivery Controller, 1 gauge VSK 3000 with cable 2 m, wall power supply
90 ... 264 VAC / 24 VDC (EU, UK, US, AU)
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VB-683170 DCP 3000
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VB-636657 VSK 3000 (transducer for DCP 3000)
txtAbstand
VB-682920 VACUU.CONTROL PC software
VB-612552 Extension cable VACUU.BUS, 2 m
VB-636656 Y-adapter VACUU.BUS, 1 x plug, 2 x socket
VB-674217 VB M-B venting valve VACUU.BUS, DN16KF / G1/4" I
VB-612566 Valve cable VACUU.BUS for venting valve VB M-B, 2 m
VB-900214 DKD calibration of a new DCP 3000
VB-900215 DKD re-calibration of a DCP 3000
txtAbstand
HPM 4/6 Thermocouple Vacuum Gauge Meter
Battery-operated, handheld vacuum gauge, rough and medium vacuum, for a DV series passive
thermocouple gauge tube
Hand-held display and control unit for budget-priced thermocouple gauge tubes DV-4 and DV-6
Switch with 3 positions (DV-6 / OFF / DV-4)
Calibration with a potentiometer for DV-4 and DV-6, respectively
Calibration reference tubes (NIST traceable) available
mbar and Torr versions available
Rugged carrying case included
Technical data
txtAbstand Measurement channels 1
Measurement range with DV-4: 0.01 … 20 mbar | 0.01 ... 20 Torr
with DV-6: 0.001 ... 1.3 mbar | 0.001 … 1 Torr
Display LCD, 3 ½ digits
Temperature range (operation) -20 … +50 °C
Housing plastics, hand-held
Power supply 9 VDC, 11 mA (one 9 V battery)
Electrical connectors 9 V block, coiled cable with connector (gauge)
Connectable gauges DV-4 series (20 Torr) and DV-6 series (1000 mTorr)
Scope of delivery control unit w. coiled gauge cable, 9 V battery, carrying case.
txtAbstand Please order vacuum gauges separately.

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HPM-4-6-mbar HPM 4/6, unit mbar
HPM-4-6-torr HPM 4/6, unit Torr
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DIGITAL VT Thermocouple Vacuum Gauge Meter
Vacuum gauge, rough and medium vacuum, for a DV series passive thermocouple gauge tube
Long-living controllers for budget-priced passive thermocouple gauges

High stability and reliability under demanding conditions
Easy installation and operation
Adjustment of VAC and ATM via two potentiometers at the front panel
Calibration Reference Tubes (NIST traceable) available
txtAbstand Two versions with different measurement ranges (VT-4 and VT-6)
Technical data
Measurement range VT-4: 0.01 ... 20 Torr
VT-6: 1 ... 1000 mTorr
Accuracy VT-4: ±(30 % of reading + 0.02 Torr)
txtAbstand VT-6: ±(15 % of reading + 1 mTorr)
Temperature coefficient VT-4: ±(1 % of reading +2 mTorr) / °C
VT-6: ±(1 % of reading + 0.2 mTorr) / °C
Units VT-4: Torr
VT-6: mTorr
Display LED, 3 digits, green
txtAbstand
Housing plastics, 1/8 DIN, for panel mounting
Power supply 4.5 ... 5.3 VDC, 155 mA
Electrical connectors terminal clamp (DC in, gauge)
Connectable gauges DV-4 series (20 Torr) and DV-6 series (1000 mTorr)
Scope of delivery control unit, wall power supply (US adapter, cable 2 m)
90 ... 240 VAC / 5 VDC, gauge cable 2.5 m
(other lengths on request).
Please order gauges separately

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55-288DV4 DIGITAL VT-4 (20 Torr)
10 55-288DV6 DIGITAL VT-6 (1000 mTorr)
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12-01-164 EU adapter for included wall power supply
12-01-165 UK adapter for included wall power supply
DV Series Thermocouple Gauge Tubes
Passive heat loss gauge tubes, rough and medium vacuum
Two versions with different measurement ranges (DV-4 and DV-6)

Corrosion resistant
Stable calibration
Temperature compensated
Gauges are matched and interchangeable without calibration adjustments
Rugged under demanding conditions
Inexpensive
DV-6S: designed for outdoor use, vibration and shock applications (cryogenic tanks etc.),
with protective cap
Technical data
Measurement range DV-4: 0.01 ... 20 Torr
DV-6: 1 ... 1000 mTorr
txtAbstand Measuring method heat loss (thermocouple)
Most sensitive range DV-4: 0.2 ... 5 Torr
DV-6: 10 ... 200 mTorr
Accuracy see DIGITAL VT
Mounting position any
Heat loss sensor noble metal thermocouple
Materials in vacuum nickel-plated steel, stainless steel, glass, noble metal
Electrical connectors special connector
txtAbstand Display and control units HPM 4/6, DIGITAL VT, GP 307
Scope of delivery gauge tube (gauge cables see control units)
DV-4
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DV-4D DV-4 Standard 1/8” NPT 10
DV-4R DV-4 Rugged 1/8” NPT
DV-4D-KF-16 DV-4 DN16KF
txtAbstand DV-4D-KF-25 DV-4 DN25KF
DV-34 DV-4 Stl. steel 1/8" NPT
DB-16D Calibration reference DV-4 none
DV-6
Order code Description Vacuum connection

DV-6 DV-6 1/8" NPT
DV-6S DV-6 (w. protect. cap) 1/8" NPT
DV-36 DV-6 Stl. steel 1/8" NPT
DV-6-KF-16 DV-6 DN16KF
DV-6-KF-25 DV-6 DN25KF
DV-6-VCR DV-6 VCR
DV-6-CF DV-6 DN16CF
DV-20 DV-6 Glass 3/8" O.D.
DB-20 Calibration reference DV-6 none
VGC-301 Convection Vacuum Gauge Controller
Vacuum controller, rough and medium vacuum, for a passive convection-enhanced Pirani gauge, analog
output, setpoints, serial interfaces
Budget-priced, compact controller

Extensive functions
Measurement range of 7 decades
All functions and gauge adjustment programmable via 4 front keys (menu-driven)
Analog output configurable
Compatible with Granville-Phillips® series 275 controllers and gauges
txtAbstand
Technical data
Measurement range 0.01 ... 1.33E+5 Pa | 1E-4 ... 1333 mbar | 1E-4 ... 1000 Torr
Resolution 0.01 Pa | 1E-4 mbar | 1E-4 Torr
Units Pa, mbar, Torr (switchable)
Display graphical LCD with backlight, 2 to 4 digits
txtAbstand Display update rate 0.5 s
Analog outputs switchable:
non-linear 0.375 ... 5.659 V
linear 0 ... 10 V, scaleable
log-linear 1 ... 8 V (1 V / decade)
Setpoint relays 2 relays (SPDT), 1 A max. at 30 V
Interfaces RS232 and RS485
txtAbstand Housing aluminium, 1/8 DIN, for panel mounting
Power supply 100 ... 240 VAC (50/60 Hz) or 12 ... 30 VDC (approx. 4.5 W)
Electrical connectors IEC plug (AC), 2 pin terminal (DC in), D-Sub 9 pin (gauge),
D-Sub 9 pin (I/O connector), 6 pin terminal (relays)
Connectable gauges CVG-101, GP 275
Scope of delivery controller, mains cable 1.5 m (EU)
(please order gauge and gauge cable separately)
10 Order code Description Vacuum

lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
connection
H
D
VGC301A-EU VGC-301
Accessories
Order code Description Length (m)lbl04par

lbl14par
lbl13par
lbl12par
llbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
bl03par
CB421-1-10F Cable for CVG-101 3
CB421-1-25F Cable for CVG-101 7.5
CB421-1-50F Cable for CVG-101 15
CVG-101, CVG-102 Convection-enhanced Pirani Gauges
Passive heat loss gauge with convection enhancement, rough and medium vacuum
Budget-priced, rugged gauge

Wide measurement range (7 decades)
Good accuracy and repeatability
Improved accuracy compared to standard Pirani gauges due to convection enhancement and
improved temperature compensation
Short response time
Best accuracy at horizontal mounting position
txtAbstand Replaceable without previous calibration
Compatible with Granville-Phillips® series 275 controller and gauges
Replacement gauge for CVM-201 and GP Mini-Convectron®
Technical data
Measuring method heat loss (Pirani) with convection enhancement
Accuracy (typical) ± 2 % of reading (500 ... 1000 mbar)
± 10 % of reading (1E-3 ... 500 mbar)
txtAbstand Temperature range (operation) 0 ... 50 °C
Max. bakeout temperature 150 °C (without cable)
Mounting position horizontal (recommended)
Heat loss sensor gold plated tungsten wire
Materials in vacuum Au on W, stainless steel, glass, Ni, PTFE
Housing stainless steel with plastics enclosure
Display and control units VGC-301, GP 275, GP 307, GP 350, GP 370
Scope of delivery gauge (gauge cable see control units)
Order code Description Vacuum connection Hlbl05par

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H
CVG101GA CVG-101 1/8” NPT / 1/2” tube 25.4
CVG101GB CVG-101 DN16KF 33
CVG101GC CVG-101 DN25KF 33 10
CVG101GD CVG-101 DN40KF 33
CVG101GE CVG-101 DN16CF 27.4
CVG101GF CVG-101 DN40CF 21.6
CVG101GG CVG-101 1/4” VCR, female 47.2
CVG101GH CVG-101 1/2” VCR, female 44.5
Accessories

lbl14par
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lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
lbl04par
connection
H
CK431-01 Mating connector for CVG-101
Replacement gauge for CVM-201 and Mini Convectron® modules

lbl14par
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lbl12par
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lbl10par
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CVG102GA CVG-102 1/8” NPT / 1/2” tube 25.4
CVG102GB CVG-102 DN16KF 33
CVG102GC CVG-102 DN25KF 33
CVG102GD CVG-102 DN40KF 33
CVG102GE CVG-102 DN16CF 27,4
CVG102GF CVG-102 DN40CF 21.6
CVG102GG CVG-102 1/4” VCR, female 47.2
CVG102GH CVG-102 1/2” VCR, female 44.5
GP 275 Convectron® Convection-enhanced Pirani Gauges
Passive heat loss gauge with convection enhancement, rough and medium vacuum
Industry standard, rugged

improved temperature compensation
Short response time
txtAbstand Best accuracy at horizontal mounting position
Replaceable without previous calibration
Compatible with VGC-301 and CVG-101
Replacement gauge for GP Mini-Convectron® and CVM-201
Technical data
± 10 % of reading (1E-3 ... 500 mbar)
Max. bakeout temperature 150 °C (without cable), or 105 °C (with cable)
Materials in vacuum Au on W, stainless steel, glass, Kovar®, Al2O3, NiFe, polyimide
Housing stainless steel, plastics (connector enclosure)
Display and control units VGC-301, GP 275, GP 307, GP 350, GP 370
Scope of delivery gauge (gauge cable see control units)

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H
275071 275 Convectron® 1/8” NPT / 1/2” tube
275203 275 Convectron® DN16KF
10 275196 275 Convectron® DN25KF
275316 275 Convectron® DN40KF
275256 275 Convectron® DN16CF
275238 275 Convectron® DN40CF
275186 275 Convectron® 1/4” VCR, female
275282 275 Convectron® 1/2” VCR, female
Replacement gauge for CVM-201 and Mini Convectron® modules

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H
275810 Mini-Convectron® gauge 1/8” NPT / 1/2” tube
275816 Mini-Convectron® gauge DN16KF
275813 Mini-Convectron® gauge DN16CF
275814 Mini-Convectron® gauge DN40CF
275811 Mini-Convectron® gauge 1/4” VCR, female
275864 Mini-Convectron® gauge 1/2” VCR, female
ZSE60F Digital Precision Pressure Switch Module
Active relative pressure diaphragm gauge (piezo), rough vacuum and positive pressure, two Open
Collector outputs, digital display, low leak rate
Small, budget-priced relative pressure switch

Stainless steel diaphragm for gas-type independent measurement
Versatile use between rough vacuum and 1 bar positive pressure
Leak rate compatible with high vaccum requirements
Two transistor setpoint outputs and either an analog output or an auto reference input
Transistor outputs with adjustable setpoints, switchable output modes (inverted or non-inverted),
and further options "hysteresis mode" or "window comparator mode"
Auto reference is a potential free input for a reed contact or an electronic signal generator
Auto reference is used to adjust the transistor setpoints in the case of strong fluctuations of the
txtAbstand pressure source
Technical data
Measurement range -100 … +100 kPa (relative to atmosphere)
Measuring method diaphragm (stainless steel, piezo resistive, relative pressure)
Resolution 0.1 kPa | 1 mbar
Accuracy display: ±2 % F.S. max. ±1 digit
analog out: ±5 % F.S.
Reproducibility setpoints: ±0.2 % F.S. max. ±1 digit
Temperature coefficient ± max. 3 % F.S.
Response time max. 2.5 ms (with deactivated anti chatter function)
Units kPa, bar, psi, mmHg, inHg, kgf/cm² (user selectable)
txtAbstand version …-M: kPa (non-changeable)
Display LED, 3½ digits, red; one status LED per setpoint
Display update rate 0,2 s
Analog outputs either linear output, 1 ... 5 V, or
auto reference input (without analog output)
Setpoint relays NPN or PNP open collector (O.C.), 2 outputs;
NPN: max. 30 VDC / 80 mA; PNP: max. 80 mA, max. 1 V
Operating elements 3 front keys (UP / SET / DOWN)
Leak rate 1E-10 Pa·m3/s | 1E-9 mbar·l/s | 7.5E-10 Torr·l/s
10
Materials in vacuum stainless steel 304 and ASTM630
Housing plastics
txtAbstand Protection category IP65
Power supply 12 … 24 VDC, max. 55 mA (no load)
Electrical connectors 5-wire oil-resistant cable (DC in, analog I/O, transistors)
Scope of delivery pressure switch with connection cable, 3m
Order code Vacuum In- / outputs H

l
connection b
ZSE60F-A2-22L 1/4" VCR 2 x NPN O. C., 1 x analog output
ZSE60F-A2-30L 1/4" VCR 2 x NPN O.C., 1 x auto-reference input
ZSE60F-A2-62L 1/4" VCR 2 x PNP O.C., 1 x analog output
ZSE60F-A2-70L 1/4" VCR 2 x PNP O.C., 1 x auto-reference input
ZSE60F-B2-22L 1/4" Swagelok 2 x NPN O. C., 1 x analog output
ZSE60F-B2-30L 1/4" Swagelok 2 x NPN O.C., 1 x auto-reference input
ZSE60F-B2-62L 1/4" Swagelok 2 x PNP O.C., 1 x analog output
ZSE60F-B2-70L 1/4" Swagelok 2 x PNP O.C., 1 x auto-reference input
HPM 760S Piezo Vacuum Transducer
Active piezo-resistive diaphragm gauge, rough vacuum, temperature compensated
Gas-type-independent measurement
Rugged, corrosion resistant (ss diaphragm)
Silicon sensor chip with integrated piezo transducer, sealed vacuum reference, temperature
compensation network and resistive bridge circuit
High accuracy and stability
E. g. for process control, etc.
Zero and span adjustable at the gauge
Versions with linear voltage or current output available
Technical data
Measurement range 13.3 … 1.33E+5 Pa | 0.13 … 1330 mbar | 0.1 ... 1000 Torr
Measuring method diaphragm (stainless steel, piezoresistive, absolute pressure,
temp. compensated)
txtAbstand Accuracy 0.25 % F.S.
Response time <2s
Analog outputs linear, either 0 … 10 V, 0 … 5 V, 4 ... 20 mA or 2 ... 10 mA
Materials in vacuum stainless steel 316L
Power supply 15 ... 30 VDC, 15 mA at 24 VDC (no load)
Electrical connectors 4-pin connector (DC in, analog out)
Display and control units THPS 760 Plus
(for 0 … 10 V analog output version only!)
Scope of delivery gauge, 4-pin terminal connector
Order code Vacuum connection Analog output lbl14par

lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
H
txtAbstand HPM-760S-01-A 1/8" NPT 0 ... 5 VDC
HPM-760S-01-B DN16KF 0 ... 5 VDC
HPM-760S-01-C DN25KF 0 ... 5 VDC
HPM-760S-01-D VCR4 0 ... 5 VDC
10 HPM-760S-02-A 1/8" NPT 0 ... 10 VDC
HPM-760S-02-B DN16KF 0 ... 10 VDC
HPM-760S-02-C DN25KF 0 ... 10 VDC
HPM-760S-02-D VCR4 0 ... 10 VDC
HPM-760S-03-A 1/8" NPT 2 ... 10 mA
HPM-760S-03-B DN16KF 2 ... 10 mA
HPM-760S-03-C DN25KF 2 ... 10 mA
HPM-760S-03-D VCR4 2 ... 10 mA
HPM-760S-04-A 1/8" NPT 4 ... 20 mA
HPM-760S-04-B DN16KF 4 ... 20 mA
HPM-760S-04-C DN25KF 4 ... 20 mA
HPM-760S-04-D VCR4 4 ... 20 mA
CERAVAC CTR 100 Capacitance Diaphragm Gauges
Active ceramic diaphragm gauges, temperature compensated, rough and medium vacuum, serial
interface
Multi-purpose gauge with aluminium oxide diaphragm for gas-type independent measurement
Excellent accuracy and reproducibility, high resolution
Short response time
Corrosion resistant, applicable for corrosive processes
Compared to metal diaphragms reduced sensor-to-sensor variation, improved long-term stability,
reduced diaphragm reset time
Push-button for zero-adjustment
Applicable as reference gauge for the verification of other gauges corresponding to DIN/ISO 9000
Technical data
Measurement range 4 versions:
133 Pa | 1.33 mbar | 1 Torr (1E-4 … 1 Torr);
txtAbstand 1.33E+4 Pa | 133 mbar | 100 Torr (0.01 … 100 Torr);
1.33E+5 Pa | 1330 mbar | 1000 Torr (0.1 … 1000 Torr)
Measuring method diaphragm (Al2O3, capacitive, absolute pressure, temperature
compensated)
Resolution 0.003 % F.S.
Accuracy 0.2 % of reading
Temperature effect on zero 0.015 % F.S. / °C (1 Torr F.S.)
0.005 % F.S. / °C (10, 100, 1000 Torr F.S.)
Temperature effect on span 0.01 % of reading / °C
Response time 30 ms
Analog outputs linear, 0 ... 10 VDC
txtAbstand Interfaces RS232-C
Max. bakeout temperature 110 °C at the flange
Materials in vacuum Al2O3, stainless steel 316L, glass ceramics, AgTiCu brazing
solder, Vacon 70
Protection category IP30
Power supply 14 … 30 VDC (< 1 W) 10
Electrical connectors D-Sub 15 pin (DC in, analog/digital I/O, RS232)
Display and control units MVC-3 A, MVC-3 B, MVC-3 C
Scope of delivery gauge
Order code Vacuum connection Measurement range Hlbl05par

lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
H
CC0 1/2" tube 1 Torr 44
CC3 1/2" tube 1000 Torr 44
CCC0 DN16CF-R 1 Torr 44
CCK0 DN16KF 1 Torr 44
CCV0 VCR8 1 Torr 44
CCV1 VCR8 10 Torr 44
CERAVAC CTR 91 Capacitance Diaphragm Gauges (45 °C)
Active ceramic diaphragm gauges, temperature controlled, rough to high vacuum
Multi-purpose gauge with aluminium oxide diaphragm for gas-type independent measurement
Heated gauge with excellent temperature stability
Excellent accuracy and reproducibility, high resolution, fast response
Corrosion resistant, applicable for corrosive processes
Compared to metal diaphragms reduced sensor-to-sensor variation, improved long-term stability,
reduced diaphragm reset time
Potentiometer for zero-adjustment
Applicable as reference gauge for the verification of other gauges corresponding to DIN/ISO 9000
Technical data
Measurement range 5 versions:
13.3 Pa | 0.133 mbar | 0.1 Torr (1E-5 … 0.1 Torr);
txtAbstand
1.33E+4 Pa | 133 mbar | 100 Torr (0.01 … 100 Torr);
1.33E+5 Pa | 1330 mbar | 1000 Torr (0.1 … 1000 Torr)
Measuring method diaphragm (Al2O3, capacitive, absolute pressure, temperature
controlled to 45 °C)
Resolution 0.0025 % F.S. (0.1, 1 Torr F.S.)
0.0015 % F.S. (10, 100, 1000 Torr F.S.)
Accuracy 0.15 % of reading
Temperature effect on zero 0.005 % F.S. / °C (0.1 Torr F.S.)
0.0025 % F.S. / °C (1, 10, 100, 1000 Torr F.S.)
Temperature effect on span 0.01 % of reading / °C
Response time 100 ms (0.1, 1 Torr F.S.) 30 ms (10, 100, 1000 Torr F.S.)
Analog outputs linear, 0 ... 10 VDC
txtAbstand
Max. bakeout temperature 90 °C at the flange (not operating)
Materials in vacuum Al2O3, stainless steel 316L, glass ceramics, AgTiCu brazing
solder, Vacon 70
10 Power supply 15 VDC or 18 … 26,4 VDC (4 ... 19 W)
Electrical connectors D-Sub 15 pin (DC in, analog out)
Order code Vacuum connection Measurement range Hlbl05par

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H
CCT-1 1/2" tube 0.1 Torr 47
CCT0 1/2" tube 1 Torr 47
CCTC-1 DN16CF-R 0.1 Torr 49
CCTC0 DN16CF-R 1 Torr 49
CCTK-1 DN16KF 0.1 Torr 49
CCTK0 DN16KF 1 Torr 49
CCTV-1 VCR8 0.1 Torr 76
CCTV0 VCR8 1 Torr 76
THERMOVAC TTR 91 / TTR 96 Pirani Gauge
Active heat loss gauge, rough and medium vacuum, optional setpoints
Compact and rugged design

Stable vacuum measurement with large operating temperature range due to optimized
temperature compensation
Robust against overpressure
Replaceable sensor unit
Shared push-button for adjustment of ATM and HV
Two push-buttons for setpoint adjustment (optional)
Technical data
Measurement range 0.05 ... 1E+5 Pa | 5E-4 … 1000 mbar | 4E-4 … 750 Torr
txtAbstand Measuring method heat loss (Pirani), temperature compensated
Resolution 1% of reading
Accuracy ± 15 % of reading (1E-3 … 100 mbar);
± 50 % of reading (< 1E-3 mbar; > 100 mbar)
Reproducibility 2 % of reading (1E-3 … 100 mbar)
Response time 80 ms
Analog outputs log-linear, 1.9 ... 10 V
Setpoint relays 2 relays, 30 VDC / 0,5 A (optional)
Max. bakeout temperature 80 °C at the flange (horizontal position)
250 °C at the flange (CF with long tube only)
Heat loss sensor tungsten (TTR 91, 91 S), nickel (TTR 96 S)
txtAbstand
Materials in vacuum stainless steel, glass, Ni, NiFe, W or Ni
Power supply 14 ... 30 VDC (< 1 W)
Electrical connectors RJ45 (DC in, analog out, optional relays)
Display and control units MVC-3 A, MVC-3 B, MVC-3 C, DISPLAY ONE

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H 10
LH-230035 TTR 91 DN16KF 15
LH-230036 TTR 91 DN16CF-R 14
LH-230037 TTR 91 DN16CF-R long 115
LH-230038 TTR 91 1/8” NPT 29
LH-230040 TTR 91 S (2 setpoints) DN16KF 15
LH-230041 TTR 91 S (2 setpoints) DN16CF-R 14
LH-230042 TTR 91 S (2 setpoints) DN16CF-R long 115
LH-230043 TTR 91 S (2 setpoints) 1/8” NPT 29
LH-230045 TTR 96 S (2 setpoints) DN16KF 15
LH-230046 TTR 96 S (2 setpoints) DN16CF-R 14
LH-230047 TTR 96 S (2 setpoints) DN16CF-R long 115
LH-230048 TTR 96 S (2 setpoints) 1/8” NPT 29
CVM-211 Convection-enhanced Pirani Gauge Module
Active heat loss gauge with convection enhancement, rough and medium vacuum, digital display,
setpoint
Simple, budget-priced and rugged gauge

Short response time
txtAbstand Best accuracy at horizontal mounting position
Setpoint and gauge adjustment programmable via 3 position push button
Analog output either non-linear or log-linear
Compatible with GP Mini-Convectron® basic modules
Technical data
txtAbstand Accuracy (typical) ± 2 % of reading (500 ... 1000 mbar)
± 10 % of reading (1E-3 ... 500 mbar)
Units bar / mbar (Torr version on request)
Display LED, 2 to 3 digits, red
Analog outputs a) non-linear 0.375 to 5.659 V DC, or
b) log-linear 1 to 8 V DC
Setpoint relays 1 relay (SPDT), 30 VDC / 1 A
Max. bakeout temperature 70 °C
Materials in vacuum Au on W, stainless steel, glass, Ni, PTFE
Housing stainless steel with plastics enclosure
Power supply 11 … 30 VDC (< 5 W)
10 Electrical connectors D-Sub 9 pin (DC in, analog/digital I/O, relay)
(log-linear versions only!)
Order code Vacuum connection Analog output Hlbl14par

lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
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H
CVM211GBA-B-L DN16KF log-linear 33
CVM211GBA-B-NL DN16KF non-linear 33
CVM211GEA-B-L DN16CF log-linear 37
CVM211GEA-B-NL DN16CF non-linear 37
Accessories

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connection
H
PS-12VDC-SUBD9 Wall pow. sup. 100-230 VAC(EU)/12 VDC
PS402-A Battery adapter for 2 x 9 V batteries
CVM-201 Convection-enhanced Pirani Gauge Module
Active heat loss gauge with convection enhancement, rough and medium vacuum, digital display,
setpoints, serial interfaces
Gauge with extensive functions

All functions and gauge adjustment programmable via front keys (menu-driven)
Detachable electronics, replaceable gauge tube
Short response time
Best accuracy at horizontal mounting position
txtAbstand
Analog output configurable
Compatible with GP Mini-Convectron® modules
Technical data
± 10 % of reading (1E-3 ... 500 mbar)
Units Pa, mbar, Torr (user selectable)
Display graphical LCD with backlight, 2 to 4 digits
Analog outputs switchable:
txtAbstand non-linear 0.375 ... 5.659 V
linear 0 ... 10 V, scaleable
log-linear 1 ... 8 V (1 V / decade)
Setpoint relays 2 relays (SPDT), 30 VDC / 1 A
Operating elements 4 front keys
Max. bakeout temperature 150 °C (gauge only - electronics removed)
Mounting position horizontal (recommended) 10
Materials in vacuum Au on W, stainless steel, glass, Ni, PTFE (polyimide instead of
PTFE available)
Electrical connectors D-Sub 9 pin (DC in, analog/digital I/O, relay 1), D-Sub 15 pin
txtAbstand (DC in, analog/digital I/O, relay 1+2, RS232, RS485)
Connectable passive gauges replacement gauge tube see CVG-102
Order code Vacuum connection H

CVM201GBA DN16KF 30
CVM201GEA DN16CF 34
Accessories

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lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
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lbl06par
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lbl04par
connection
H
PS-12VDC-SUBD9 Wall pow. sup. 100-230 VAC(EU)/12 VDC
PS402-A Battery adapter for 2 x 9 V batteries
THERMOVAC TTR 100 Combination Gauge (Pirani / capacitive)
Active vacuum gauge with a Pirani and a ceramic diaphragm transducer, rough and medium vacuum,
optional setpoints
Improved accuracy at rough vacuum compared to standard Pirani gauges

Gas-type independent measurement from 100 … 1500 mbar
Mixed output signal of Pirani and diaphragm gauge from 1 … 100 mbar
Short response time, shows the real pressure during fast evacuation or venting
Replaceable sensor unit
Potentiometer for zero (HV) adjustment (ATM adjustment not required)
Two push-buttons for setpoint adjustment (optional)
Technical data
Measurement range 0.05 ... 1.5E+5 Pa | 5E-4 … 1500 mbar | 4E-4 … 1125 Torr
Measuring method heat loss (Pirani); diaphragm (Al2O3, capacitive, absolute
txtAbstand pressure) (both temperature compensated)
Accuracy ±15 % of reading (1E-3 ... 50 mbar)
±5 % of reading (50 … 950 mbar)
±2.5 % of reading (950 … 1050 mbar)
Reproducibility ± 2 % of reading (1E-3 … 1100 mbar)
Response time 10 ms
Analog outputs log-linear, 0 ... 10.3 V
Setpoint relays 2 relays, 30 VDC / 1 A (optional)
Max. bakeout temperature 80 °C at the flange (horizontal position)
Heat loss sensor tungsten, always active
Materials in vacuum stainless steel, W, Al2O3, glass, Ni, Cu, NiFe, SnAg, AgPd
txtAbstand
Power supply 15 ... 30 VDC (2.5 W)
Electrical connectors RJ45 (DC in, analog out, optional relays)
Display and control units MVC-3 A, MVC-3 B, MVC-3 C, DISPLAY ONE
10
Order code Description Vacuum H H
l
connection b
LH-230026 TTR 100 DN16KF 26
LH-230027 TTR 100 S2 (2 setpoints) DN16KF 45
LH-230028 TTR 100 1/8” NPT 26
LH-230029 TTR 100 S2 (2 setpoints) 1/8” NPT 45
PENNINGVAC PTR 225 / PTR 237 Penning Gauge
Active cold cathode ionization gauge, medium vacuum to UHV, optional setpoint, optional fieldbus
interfaces
All-metal gauge cell

Good ignition characteristics due to optimized electrode design
Low sputtering tendency (even with argon) due to high voltage reduction after plasma ignition and
due to titanium cathode
Low magnetic stray field
Potentiometer and monitor output for setpoint adjustment (optional)
Technical data
Measurement range 1E-7 ... 1 Pa | 1E-9 … 1E-2 mbar | 7.5E-10 … 7.5E-3 Torr
Measuring method cold cathode ionization (Penning)
txtAbstand
Accuracy ± 30 % of reading (1E-8 ... 1E-4 mbar)
Reproducibility ± 4 % of reading
Temperature coefficient < 0.5 % of reading / K
Analog outputs log-linear, 0 ... 10.6 V, 1.333 V / decade
Error signals ignition status output
Setpoint relays 1 relay, 60 VDC / 0,5 A (optional)
Digital control inputs high voltage on/off
Interfaces ProfiBus DP (optional) or DeviceNet (optional)
Max. bakeout temperature PTR 225: 200 °C (electronics and magnet removed)
PTR 237: 350 °C (electronics and magnet removed)
Materials in vacuum stainless steel, CrNi, Al2O3, NiFe, Ni, Ti
Power supply 14.5 ... 36 VDC, typ. 24 VDC (< 2 W)
txtAbstand Electrical connectors RJ45 (DC in, analog/digital I/O), optional connector (relay),
optional connector (ProfiBus DP or DeviceNet)
10
Order code Description Vacuum connectionH
lbl14par
lbl13par
lbl12par
lbl11par
lbl10par
lbl09par
lbl08par
lbl07par
lbl06par
lbl05par
H
LH-15734 PTR 225 DN25KF
LH-15736 PTR 237 DN40CF
LH-16434 PTR 225 S (1 setpoint) DN25KF
LH-89641 PTR 225 PB (ProfiBus DP) DN25KF
LH-89642 PTR 237 D (DeviceNet) DN40CF
txtAbstand
PENNINGVAC PTR 90 Combination Gauge (inverted Magnetron / Pirani)
Active vacuum gauge with a cold cathode ionization and a Pirani transducer, rough vacuum to UHV
Simple wide range vacuum gauge for continuous measurement between atmosphere and UHV
Permanent pressure monitoring with the Pirani gauge
Automated operation of the ionization gauge
Improved reliability even in argon processes (sputtering)
Potentiometer for Pirani adjustment (HV and ATM)
Technical data
Measurement range 5E-7 ... 1E+3 Pa | 5E-9 … 1000 mbar | 3.8E-10 … 750 Torr
Measuring method cold cathode ionization (inverted magnetron);
heat loss (Pirani)
Accuracy ± 30 % of reading (1E-8 ... 100 mbar)
txtAbstand Reproducibility ± 5 % of reading (1E-8 ... 100 mbar)
Analog outputs log-linear, 0 … 10.5 V, 0.6 V / decade
Error signals < 0.5 V; > 9.5 V (Pirani defect);
ignition status output
Max. bakeout temperature 150 °C (electronics and magnet removed)
Ionization gauge auto on/off on (< 1E-2 mbar), off (> 1E-2 mbar)
Heat loss sensor tungsten, always active
Materials in vacuum stainless steel, ceramics, FKM 75, Mo, Ni, Au, W
Electrical connectors RJ45 (DC in, analog out, status)
txtAbstand Display and control units MVC3-A, MVC3-B, MVC3-C, DISPLAY ONE

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LH-230070 PTR 90 DN25KF
LH-230071 PTR 90 DN40KF
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LH-230072 PTR 90 DN40CF
IGM-401 Bayard-Alpert Gauge Module
Active hot cathode ionization gauge, medium vacuum to UHV, digital display, setpoint, serial interface
Rugged, compact stand-alone vacuum gauge

Extensive functions
High measurement stability and reproducibility
Filament overpressure protection via auto turn off (limit programmable)
All functions and parameters programmable via front keys (menu-driven)
Technical data
Measurement range 1.3E-7 … 6.7 Pa | 1.3E-9 … 6.7E-2 mbar | 1E-9 … 5E-2 Torr
Measuring method hot cathode ionization (Bayard-Alpert)
Sensitivity for N2 factory pre-set, user adjustable 2 ... 99
Units Pa, mbar, Torr (switchable)
txtAbstand Display graphical display (OLED, yellow), mantissa 3-digit,
exponent 2-digit, plus further elements
Analog outputs log-linear, 0 ... 9 V, 1 V / decade
Setpoint relays 1 relay (SPDT), 30 VDC / 1 A
Digital control inputs degas on/off, filament on/off, emission current
Interfaces RS485
Max. bakeout temperature 200 °C (electronics removed)
Ionization gauge auto on/off auto off only (limit programmable)
Filaments (cathodes) yttria coated iridium
Number of filaments 2
Ionization gauge degas electron bombardment
Materials in vacuum stainless steel, W, Ta, Y2O3 on Ir, ceramics
Power supply 20 ... 28 VDC (14 W)
Electrical connectors D-Sub 9 pin (DC in, analog/digital I/O),
D-Sub 9 pin (DC in, RS485, relay)
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IGM401YCD IGM-401 DN25KF 37
txtAbstand
IGM401YFD IGM-401 DN40CF 43
Accessories

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PS501-EU AC adapter, 90 … 240 VAC (EU) / 24 VDC (D-Sub 9-pin)
ATMION® COMPACT Wide Range Gauge (Bayard-Alpert / Pirani)
Active vacuum gauge with a hot cathode ionization and a Pirani transducer, rough vacuum to UHV,
optional external display, setpoint, serial interface, optional ProfiBus DP interface
Combination vacuum gauge, extensive functions, wide measurement range (13 decades)
High accuracy and repeatability, short response time
Fully automated operation as well as external control of the measuring mode possible
Permanent pressure monitoring by the Pirani gauge
Long filament service life due to coating and intelligent emission control
No unexpected down-time due to automatic filament change-over
Non-mixed output signal, either Bayard-Alpert or Pirani sensor signal
Detachable electronics, replaceable gauge head
Service software available
Pirani adjustment via digital input, serial interfaces or control unit
Technical data
txtAbstand Measurement range 1E-8 ... 1E+5 Pa | 1E-10 … 1000 mbar | 7.5E-11 … 750 Torr
Measuring method hot cathode ionization (Bayard-Alpert);
heat loss (Pirani) (temperature compensated)
Accuracy ± 10 % of reading (1E-8 … 1E-2 mbar)
± 25 % of reading (1E-2 … 10 mbar)
Reproducibility ± 5 % of reading (1E-8 … 1E-2 mbar)
Display ATMIGRAF (optional, see display units)
Analog outputs log-linear, 0 ... 10 V (0.625 V / decade)
Error signals via interfaces and status LED
Setpoint relays 1 transistor output, max. 24 VDC / 0.2 A
Digital control inputs Degas, Pirani adjust (ATM, VAC), operating mode
Interfaces RS232, optional Profibus DP
Max. bakeout temperature 180 °C at the flange (electronics removed)
Ionization gauge auto on/off on (< 1E-2 mbar), off (> 1E-1 mbar) (adjustable)
Number of filaments 2
10 Ionization gauge degas electron bombardment
Heat loss sensor platinum, always active
Materials in vacuum stainless steel, W, Pt, glass, Y2O3 on Ir, NiFe (KF version only),
glass ceramic (CF version only), Al2O3
Power supply 21,6 ... 26,4 VDC (10 … 22 W)
Electrical connectors D-Sub 15 pin (DC in, analog and digital I/O, RS232),
optional D-Sub 9 pin (Profibus DP)
Display and control units MVC-3 A, ATMIGRAF
txtAbstand
Order code Description Vacuum H
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connection b
ATC25KLE ATMION® Compact DN25KF
ATC40CLE ATMION® Compact DN40CF
ATC25KPLE ATMION® Compact (ProfiBus DP) DN25KF
ATC40CPLE ATMION® Compact (ProfiBus DP) DN40CF
Accessories

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AT24E AC adapter, 100-240 VAC(EU)/24 VDC (D-Sub 15)
ATPC Y adapter f. RS232, 2 x D-Sub 15, 1 x D-Sub 9
ATLPC3 RS232 interface cable, 3 m, 2 x D-Sub 9
ATGC25K-HP Replacement gauge head, DN25KF
ATGC40C-HP Replacement gauge head, DN40CF
Other cable lengths see section "Cables" at the end of this chapter.
ATMION® STANDARD Wide Range Gauge (Bayard-Alpert / Pirani)
Active vacuum gauge with a hot cathode ionization and a Pirani transducer, rough vacuum to UHV,
optional external display, setpoint, serial interface, optional ProfiBus DP, replaceable filaments
As ATMION® Compact, but higher bakeout temperature and replaceable filaments

Combination gauge, extensive functions, wide measurement range (13 decades)
High accuracy and repeatability, short response time
Fully automated operation as well as external control of the measuring mode possible
Permanent pressure monitoring by the Pirani gauge
Long filament service life due to coating and intelligent emission control
No unexpected down-time due to automatic filament change-over
Non-mixed output signal, either Bayard-Alpert or Pirani sensor signal
Detachable electronics, replaceable gauge head
Service software available
Pirani adjustment via digital input, serial interfaces or control unit
Technical data
Measurement range 1E-8 ... 1E+5 Pa | 1E-10 … 1000 mbar | 7.5E-11 … 750 Torr
Measuring method hot cathode ionization (Bayard-Alpert);
txtAbstand heat loss (Pirani) (temperature compensated)
± 25 % of reading (1E-2 … 10 mbar)
Reproducibility ± 5 % of reading (1E-8 … 1E-2 mbar)
Display ATMIGRAF (optional, see display units)
Analog outputs log-linear, 0 ... 10 V (0,625 V / decade)
Error signals via interfaces and status LED
Setpoint relays 1 transistor output, max. 24 VDC / 0.2 A
Digital control inputs Degas, Pirani adjust (ATM, VAC), operating mode
Interfaces RS232, optional Profibus DP
Max. bakeout temperature 250 °C at the flange (electronics removed)
Ionization gauge auto on/off on (< 1E-2 mbar), off (> 1E-1 mbar) (adjustable)
Filaments (cathodes) yttria coated iridium 10
Number of filaments 2, replaceable
Ionization gauge degas electron bombardment
Heat loss sensor platinum, always active
Materials in vacuum stainless steel, W, Pt, Y2O3 on Ir, glass ceramic, Al2O3, Cu
Power supply 21,6 ... 26,4 VDC (10 … 22 W)
Electrical connectors D-Sub 15 pin (DC in, analog and digital I/O, RS232),
optional D-Sub 9 pin (Profibus DP)
Display and control units MVC-3 A, ATMIGRAF
Order code Description Vacuum connection

ATS40C ATMION® Standard DN40CF
txtAbstand
Accessories

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AT24E AC adapter, 100-240 VAC(EU)/24 VDC (D-Sub 15)
ATPC Y adapter f. RS232, 2 x D-Sub 15, 1 x D-Sub 9
ATGS40C Replacement gauge head, DN40CF
ATGS Replacement gauge head without tube, DN40CF
ATF-001-1 Dual replacement filament (Y2O3 coated Ir) + CU40 gasket
Controllers for Active Vacuum Gauges
THPS 760 PLUS Vacuum Controller
Display and control unit for one active piezo-resistive diaphragm gauge HPM 760S
Display unit for one HPM 760S diaphragm gauge

High stability, accuracy and reliability
Two setpoint relais and analog output
Two potentiometers at the front for setpoint adjustment as well as zero and span adjustment
Technical data
txtAbstand Measurement channels 1
Display range 0.1 … 1000 Torr
Resolution 0.1 Torr
Units Torr
Display LED, 4½ digits, red
Analog outputs linear, 0 ... 10 V
Setpoint relays 2 relays (SPDT), max. 240 V AC/ 2 A
Operating elements 2 potentiometers, 2 push-buttons
Housing plastics, 1/8 DIN, for panel mounting
Power supply 85 ... 240 VAC, 50/60 Hz, 50 mA
Electrical connectors terminal blocks (AC, relays, gauge, analog out)
Connectable gauges HPM 760S (0-10 V version only)
txtAbstand
Scope of delivery unit, power cable 1.5 m (US), gauge cable 2.5 m

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HPS-760 THPS 760 PLUS
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DISPLAY ONE One-Channel Vacuum Controller
Display and control unit for one active gauge (THERMOVAC or PENNINGVAC)
Simple power supply and display unit for one active Pirani or Pirani/capacitance or
cold cathode/Pirani gauge
Automatic gauge identification
Reads the setpoint status of the gauge and supplies a relay output
Technical data
txtAbstand Display range 5E-7 … 1.5E+5 Pa |5E-9 … 1500 mbar | 3.8E-9 … 1125 Torr
Measurement rate 50 / s
Units mbar, Pa, Torr (switchable)
Display LED (green), mantissa max. 4 digits, exponent 2 digits, unit,
setpoint status
Display update rate 4/s
Analog outputs 0 ... 10 V, dependent on gauge
Setpoint relays 1 relay (SPDT), 60 VDC / 1A
txtAbstand
Operating elements DIP-switch for unit and mantissa
Housing aluminium, 1/4 x 19”, 2 U
Power supply 100 … 240 VAC, 50/60 Hz (max. 5 VA)
Electrical connectors IEC plug (AC), RJ45 (gauge), terminal 5 pin (relay, analog out)
Connectable gauges THERMOVAC TTR 90 / 91 / 96 / 211 / 216 / 100;
PENNINGVAC PTR 90
Scope of delivery unit, power cable (EU), mating connector for terminal
txtAbstand Order code Description Vacuum

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LH-230001 DISPLAY ONE
Accessories
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LSL3 Cable for TTR and PTR, 3 m
MVC-3 C Two-channel Vacuum Controller
Display and control unit for two active gauges (CERAVAC, THERMOVAC, CVM-201 and/or PENNINGVAC)
Compact controller for 2 active vacuum gauges (capacitance, heat loss, cold cathode, combined)
Highly accurate signal processing
Overpressure protection for PTR gauges via auto turn off (limit programmable)
Programmable gas type correction factor (for PTR gauges only)
Clearly structured front key menu for access to all functions / parameters
Large alpha-numeric 7-segment display for each channel
Serial interfaces, setpoint relays, digital inputs and analog outputs
txtAbstand Forward-looking, reliable technology
Free LabVIEW driver available
Technical data
(not applicable for ATMION® - refer to MVC-3 A)
Display range 1E-8 … 1.5E+5 Pa |1E-10 … 1500 mbar | 7.5E-11 … 1125 Torr
Measurement range dependent on gauge
Display LED (green), 1 line per channel (mantissa 4 digits,
exponent 2 digits), unit, relay status
txtAbstand Analog outputs 1 per channel, 0 ... 10 V, dependent on gauge
Setpoint relays 2 relays (SPDT) per channel, 30 VDC / 1 A
Digital control inputs PTR on/off
Ionization gauge auto on/off PTR 225/237: optionally via a Pirani gauge
10 Power supply 100 ... 240 VAC, 50/60 Hz (max. 60 W)
Electrical connectors IEC plug (AC), 2 x RJ45 (active gauges), D-Sub 25 pin (relays),
D-Sub 9 pin (RS232 and RS485), D-Sub 15 pin (analog and
txtAbstand digital I/O)
Connectable active gauges CERAVAC CTR 90 / 100 / 91;
THERMOVAC TTR 90 / 91 / 96 / 211 / 216 / 100;
CVM-211 (log-linear version only!);
PENNINGVAC PTR 225 / 237 / 90
Scope of delivery unit, power cable (EU)

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MVC3-C MVC-3 C (2 ch. for CTR / TTR / CVM-211 / PTR)
Accessories

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SSL3 Cable for CVM-211, 3 m
CSL3 Cable for CTR, 3 m
USB-RS232-KONV USB2.0/RS232 converter, USB-cable 0.8 m, driver CD
ATMIGRAF Display and Power Supply for ATMION®
Display and power supply for one active ATMION® wide range gauge
Budget-priced, mobile "plug-and-play" display for one ATMION® wide range gauge
Better flexibility than a gauge-integrated display
Allows for simultaneous integration of the ATMION® into a control system
Wall power supply for ATMIGRAF and ATMION® included
All in- and outputs of the ATMION® accessible at the backside
9-pin D-Sub connector to connect the ATMION® RS232 interface to a PC
txtAbstand
With a setpoint relay (driven by the ATMION® transistor setpoint)
Technical data
Display range 1E-10 … 1000 mbar
Units mbar
Display LED (green), mantissa 2 digits, exponent 2 digits,
mode (Pir/Fil1/Fil2), setpoint status
txtAbstand Display update rate 4/s
Analog outputs as ATMION® (log-linear, 0 … 10 V)
Error signals as ATMION®
Setpoint relays 1 relay (SPST), 60 VDC / 1 A
Digital control inputs as ATMION®
Interfaces as ATMION®
txtAbstand Protection category IP 40
Power supply 24 VDC (max. 24 W)
Electrical connectors D-Sub 15 pin (analog/ digital I/O, DC in); jack plug 5 mm (DC in
for included wall power supply); D-Sub 15 pin (gauge);
D-Sub 9 pin (RS232)
Connectable gauges ATMION® Compact / Standard
Scope of delivery unit, wall power supply 90 ... 240 VAC / 24 VDC (EU plug)
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AGPC-2 ATMIGRAF
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ATL3 Cable for ATMION®, 3 m
MVC-3 A Vacuum Controller for ATMION®
Display and control unit for one active ATMION® wide range gauge and up to two other active gauges
(CERAVAC, THERMOVAC, CVM-201 and/or PENNINGVAC)
Compact controller for 1 ATMION® (active wide range vacuum gauge hot cathode/Pirani)
2 optional channels for other active vacuum gauges (capacitance, heat loss, cold cathode,
combined)
Highly accurate signal processing
Overpressure protection for PTR gauges via auto turn off (limit programmable)
Programmable gas type correction factor (for PTR gauges only)
txtAbstand Large alpha-numeric 7-segment display for each channel
Forward-looking, reliable technology
Technical data
Measurement channels for ATMION®: 1
for other active gauges: 2 (optional)
Display range 1E-8 … 1.5E+5 Pa |1E-10 … 1500 mbar | 7.5E-11 … 1125 Torr
Measurement range dependent on gauge
txtAbstand exponent 2 digits), unit, relay status, Pir/Fil1/Fil2
Analog outputs 1 per channel, 0 ... 10 V, dependent on gauge
Digital control inputs ATMION® on/off, Degas on/off, PTR on/off
10 Ionization gauge auto on/off PTR 225/237: optionally via a Pirani gauge
Power supply 100 ... 240 VAC, 50/60 Hz (max. 60 W)
txtAbstand
Electrical connectors IEC plug (AC), D-Sub 15 pin (ATMION®), optional 2 x RJ45 (other
active gauges), D-Sub 25 pin (relays), D-Sub 9 pin (RS232 and
RS485), D-Sub 15 pin (analog and digital I/O)
Connectable active gauges ATMION® Compact / Standard;
CERAVAC CTR 90 / 100 / 91 (optional);
THERMOVAC TTR 90 / 91 / 96 / 211 / 216 / 100 (optional);
CVM-211 (log-linear version only!) (optional);
PENNINGVAC PTR 225 / 237 / 90 (optional)

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MVC3-A0 1 channel for ATMION®
MVC3-AM 1 ch. f. ATMION®, 2 ch. f. CTR/TTR/CVM-211/PTR
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High and Ultra High Vacuum Gauges and Controllers
MVC-3 B High and Ultra High Vacuum Controller
Controller for one passive Bayard-Alpert gauge (BARION®) and up to two active gauges (CERAVAC,
THERMOVAC, CVM-201 and /or PENNINGVAC)
Compact controller with high-accuracy electrometer for 1 passive gauge BARION®

2 optional channels for active vacuum gauges (capacitance, heat loss, cold cathode, combined)
Intelligent emission current control for long filament life cycle
Programmable correction factor for each of both passive gauge filaments 1 and 2
Degas by electron bombardment (EB)
Overpressure protection for BARION® and PTR gauges via auto turn off (limit programmable)
Programmable gas type correction factor (for BARION® and PTR gauges only)
txtAbstand Clearly structured front key menu for access to all functions / parameters
Large alpha-numeric display for each channel
Forward-looking, reliable technology
Technical data
Measurement channels for passive hot cathode gauge BARION®: 1
for active vacuum gauges: 2 (optional)
Display range 1E-10 … 1.5E+5 Pa |1E-12 … 1500 mbar | 1E-12 … 1125 Torr
Measurement range electrometer (passive gauge channel):
1E-10 … 10 Pa |1E-12 … 0.1 mbar |1E-12 … 0.075 Torr
active gauge channels (optional): dependent on gauge
txtAbstand Accuracy of electrometer ± 1% of reading
exponent 2 digits), unit, relay status, Fil1/Fil2
Analog outputs passive gauge channel:
log-linear, 0 … 10 V, 0.625 V / decade
active gauge channels (optional):
1 per channel, 0 ... 10 V, dependent on gauge
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Digital control inputs BARION® on/off, Degas on/off, PTR on/off
txtAbstand Operating elements 4 front keys
Ionization gauge auto on/off BARION®, PTR 225/237: optionally via a Pirani gauge
Filament operation modes automatic emission control (DC supply), Fil1/Fil2/auto
Electron bombardment degas start via front keys, digital input or PC
Power supply 100 ... 240 VAC, 50/60 Hz (max. 60 W)
Electrical connectors IEC plug (AC), D-Sub mixed pin (BARION®), optional 2 x RJ45
(active gauges), D-Sub 25 pin (relays), D-Sub 9 pin (RS232 and
RS485), D-Sub 15 pin (analog and digital I/O)
Connectable passive gauges BARION®
Connectable active gauges CERAVAC CTR 90 / 100 / 91 (optional);
THERMOVAC TTR 90 / 91 / 96 / 211 / 216 / 100 (optional);
CVM-211 (log-linear version only!) (optional);
PENNINGVAC PTR 225 / 237 / 90 (optional)

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MVC3-B0 1 channel for BARION®
MVC3-BM 1 ch. f. BARION®, 2 ch. f. CTR/TTR/CVM-211/PTR
MVC-3 B High and Ultra High Vacuum Controller
Accessories

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BSL3 Cable for BARION® (up to 250 °C), 3 m
BARION® Bayard-Alpert Gauge
Passive hot cathode ionization gauge for MVC-3 B, medium vacuum to UHV, replaceable filaments
UHV capable passive gauge with a demountable stainless steel cover

Automated, safe operation with the gauge controller MVC3-B
Long life cycle and no unexpected down time due to 2 coated long-life filaments (replaceable)
Very low heat input into the vacuum system (gauge temperature < 40 °C at 25 °C ambient)
No electro-magnetic interference and no filament vibration due to DC supply
Vacuum measurement possible to 250 °C bakeout temperature
Degas function by electron bombardment (EB)
High accuracy and reproducibility (both filaments factory calibrated)
Protective grid at vacuum port against interference from the process
Technical data
Measurement range 2E-9 … 4 Pa |2E-11 … 4E-2 mbar | 1.5E-11 … 3E-2 Torr
10 txtAbstand Measuring method hot cathode ionization (Bayard-Alpert)
Sensitivity for N2 approx. 20 / mbar
X-ray limit < 2E-9 Pa | < 2E-11 mbar | < 1.5E-11 Torr
Reproducibility ± 5 % of reading
Max. bakeout temperature 400 °C (plug and cable removed)
250 °C (with plug and cable)
Materials in vacuum stainless steel, W, Y2O3 on Ir, glass ceramics, Ag plated Cu
txtAbstand Display and control units MVC-3 B
Scope of delivery vacuum gauge, hexagonal wrench for plug locking screws

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BAT40C BARION® DN40CF
Accessories

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ATF-001-1 Dual replacement filament (Y2O3 coated Ir) + CU40 gasket
txtAbstand
GP 307 Controller for Bayard-Alpert Gauges
Modular controller for up to two passive hot cathode gauges (GP 274 series) and up to two fore-vacuum
gauges
Available in two basic versions, which differ in electrometer measurement range (standard or
UHV) and degas operation (I²R or EB)
txtAbstand Two hot cathode gauges connectable, alternate (sequential) activation
Control unit and power supply in two separate chassis
Front keys for direct activation of the hot cathode gauges and degas
Other control elements for parameter settings behind the hinged display front panel
Extendible controller functionality through optional modules
Modules for 2 fore-vacuum channels (alternatively 2 convection Pirani gauges,
2 thermocouple gauges, or 1 convection Pirani plus 1 capacitance gauge)
Modules for a serial interface
Modules for process control relays
Module for additional linear analog outputs
txtAbstand Technical data

Measurement channels for hot cathode gauges: 1
for fore-vacuum gauges: 2 (optional module)
Measurement range standard electrometer:
1.3E-8 … 13 Pa | 1.3E-10 … 0.13 mbar | 1E-10 … 0.1 Torr
UHV electrometer:
6.6E-10 … 13 Pa | 6.6E-12 … 0.13 mbar | 5E-12 … 0.1 Torr
fore-vacuum modules (optional): dependent on gauge
Sensitivity for N2 adjustable
Accuracy of electrometer typically ± 3 % of reading (Standard und UHV)
Units mbar, Pa, Torr (switchable on the module hardware)
exponent 1½ digits), setpoint status
Analog outputs electrometer:
log-linear, 0 ... 10 V, 1 V / decade
Convectron® module (optional): 10
thermocouple module (optional): non linear, 0 ... 10 V
capacitance gauge module (optional): linear, 0 ... 10 V
Setpoint relays optional modules with 2 or 6 relays (SPDT), 240 VAC / 4 A or
30 VDC / 5 A
Digital control inputs IG1/2 on/off, Degas on/off
Digital outputs IG1/2 status
Interfaces optional, either RS232, RS485 or IEEE488
Ionization gauge auto on/off control via optional fore-vacuum channel available
Filament operation modes emission 0.1 / 1 / 10 mA (switchable, DC supply);
no filament switch at the controller, filament selection by plugging
the pins at the gauge
Electron bombardment degas 10 … 40 W (UHV electrometer)
Resistance heated degas 80 W max. (standard electrometer)
Housing control unit and power supply: each Aluminium, 1/2 x 19”, 2 U,
side-by-side or remote mounting
Power supply 90 ... 130 and 180 ... 260 VAC, 50/60 Hz (max. 250 W)
Electrical connectors IEC plug (AC), 2 x IG plug, 2 x collector Coax, jack plug
(electrometer analog out), D-Sub (remote I/O), further connectors
depending on configuration
Connectable passive gauges GP 274 series or compatible;
GP 275 Convectron® or compatible (optional);
DV-6 or compatible (optional)
Connectable active gauges capacitance diaphragm gauges (optional)
Scope of delivery control unit and power supply, power cable, interconnect cable
power supply - control unit
GP 307 Controller for Bayard-Alpert Gauges
GP 307 controller, 3-line display, sequential operation of a second gauge, remote input/output interface
for Series 274 glass tubulated or nude (not UHV) gauges, resistive degas (I2R):
Order Code Description
307502 – x y z – u v left mount, side-by-side with power supply for 19” rack
307501 – x y z – u v half-rack mount, remote power supply
for Series 274 nude UHV gauges with electron bombardment degas (EB), UHV electrometer (reads to 2E-11 Torr):
Interface Option x Description

0 none
A RS232
B RS485
C IEEE488
D linear analog output
Gauge Option y Description

0 none
1 dual Convectron®
2 Convectron® / capacitance diaphragm gauge
3 dual thermocouple
Setpoint Option z Description

10 0 none
A 2 setpoint relays for ion gauge
B 6 setpoint relays, 2 per channel
C 6 setpoint relays, user configurable
Display Option - Measurement units: Power Cord Option:

Option u Description Option v Description
T Torr 1 North America 115 V
M mbar 2 North America 240 V
P Pa 3 Universal Europe 220 V
4 United Kingdom 240 V
Optional rack-mount installation hardware (for field installation)
Order code Adapter for Vacuum

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307008 1 or 2 power supplies side-by-side
307009 Power supply and control unit side-by-side
307010 1 control unit on the left or right side (please specify)
307011 1 control unit in the center
307021 2 control units side-by-side
Gauge cables see section "Cables" at the end of this chapter.
GP 350 UHV Controller for Bayard-Alpert Gauges
Modular controller for one passive UHV hot cathode gauge (GP 274 series) and up to two Convectron®
gauges
Controller with UHV electrometer for 1 hot cathode gauge

Front keys for direct activation of the hot cathode gauge (Fil1/2) and degas
txtAbstand Extendible controller functionality through optional modules
Module for 2 convection Pirani channels
Module for a serial interface (RS232 module)
Module for 2 setpoint relays (process control module)
Module for 2 serial interfaces and 4 setpoint relays (PC/RS232/RS485 module)
Technical data
for convection Pirani gauges: 2 (optional module)
Measurement range UHV electrometer:
1.3E-10 … 1.3 Pa | 1.3E-12 … 0.013 mbar | 1E-12 … 0.01 Torr
Convectron® module (optional):
1E-2 … 1.3E+5 Pa | 1E-4 … 1330 mbar | 1E-4 … 1000 Torr
Sensitivity for N2 adjustable, 3 … 50 / Torr
Accuracy of electrometer typically ± 3 % of reading
Units Pa, mbar, Torr (switchable on the module hardware)
txtAbstand Display LED (green), 1 line per channel (mantissa 2 digits,
Analog outputs electrometer:
Setpoint relays process control module (optional):
2 relays (SPDT), 30 VAC or 30 VDC / 5 A
PC/RS232/RS485 module (optional): 10
4 relays (SPDT), 30 VDC / 2 A
Digital control inputs Fil1/2 on/off, degas on/off
Digital outputs filament status
Interfaces RS232 module (optional)
PC/RS232/RS485 module (optional)
Ionization gauge auto on/off control via Convectron channel available
Filament operation modes emission 0.1 / 1 / 10 mA, (switchtable, AC supply)
Electron bombardment degas approx. 40 W
Power supply 90 ... 130 and 200 ... 260 VAC, 50/60 Hz (max. 120 W)
Electrical connectors IEC plug (AC), IG plug, collector Coax, jack plug (electrometer
analog out), D-Sub 9 pin (remote I/O), further connectors
depending on configuration
Connectable passive gauges GP 274 series or compatible;
GP 275 Convectron® or compytible (optional)
Scope of delivery unit, power cable
GP 350 UHV Controller for Bayard-Alpert Gauges
GP 350 controller for 1 series 274 UHV nude ionization gauge, 1-line display, EB degas, remote
input/output interface

350501 – x – u v half-rack mount
350502 – x – u v left mount for 19-inch rack
350503 – x – u v center mount for 19-inch rack
Option x Description
0 none
A RS232
F RS232 / RS485 (switchable) and 4 setpoint relays
G 2 setpoint relays for ion gauge
Display Options - Measurement units: Power Cord Options:

GP 350 controller, for a Series 274 nude UHV gauge and dual Convectron® Gauge operation, 3-line display, electron
bombardment degas (EB), remote input/output interface:

10 350507 – x – u v half-rack mount
350508 – x – u v left mount for 19-inch rack
350509 – x – u v center mount for 19-inch rack
Option x Description
0 none
F RS232 / RS485 (switchable) and 4 setpoint relays
Display Options - Measurement units: Power Cord Options:

Gauge cables see section "Cables" at the end of the chapter.
GP 274 Glass Tubulated Bayard-Alpert Gauges
Passive hot cathode ionization gauges, medium vacuum to UHV, bifilar anode grid
Glass tubulated gauge, applicable with standard electrometer and UHV electrometer
Degas by resistance heating (I2R) or electron bombardment (EB)
Non-replaceable tungsten or thoria coated iridium filaments
Compatible with many controllers of other manufacturers
Technical data
Measurement range 4E-8 … 13 Pa | 4E-10 … 0.13 mbar | 3E-10 … 0.1 Torr
Sensitivity for N2 approx. 10 / Torr
txtAbstand X-ray limit 4E-8 Pa | 4E-10 mbar | 3E-10 Torr
Accuracy (typical) ± 20 % of reading
Tubulation dia. 19.05 or 25.4 or 15 mm;
in Pyrex or Kovar®, or flanged
Envelope nonex glass 7720, O.D. 57 mm, L. 127 mm
Mounting position any, vertical recommended
Filaments (cathodes) dual, W or single, thoria coated Ir (non-replaceable)
Electron bombardment degas 100 W max.
Resistance heated degas 6.3 … 7.5 VAC at 10 A
Cathode current 4…6A
Cathode voltage 3 … 5 VDC at +30 VDC Bias
Collector potential 0V
Grid potential +180 VDC
Materials in vacuum glass, ss, W, heat resistant metal, ThO2 on Ir (if appl.)
Overall Length 152 mm
Display and control units GP 307, GP 350, and others
Series 274 glass tubulated gauges with single thoria-coated iridium filament
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Order code Vacuum connection Vacuum

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274002 3/4 inch Pyrex glass inlet port
274003 3/4 inch Kovar metal inlet port
274005 1 inch Pyrex glass inlet port
274006 1 inch Kovar metal inlet port
274036 15 mm Pyrex glass inlet port
274020 DN16CF non-rotatable, 3/4 inch port
274008 DN40CF non-rotatable, 1 inch port
274032 DN25KF, 1 inch port
Series 274 glass tubulated gauges with dual tungsten filaments
Order code Vacuum connection Vacuum

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274037 15 mm Pyrex glass inlet port
274012 3/4 inch Pyrex glass inlet port
274013 3/4 inch Kovar metal inlet port
274015 1 inch Pyrex glass inlet port
274016 1 inch Kovar metal inlet port
274018 DN40CF non-rotatable, 1 inch port
GP 274 Nude Bayard-Alpert Gauges
Passive hot cathode ionization gauges, medium vacuum to UHV, replaceable filament, bifilar anode
Nude gauge, applicable with standard electrometer and UHV electrometer

Bifilar anode grid
Degas by resistance heating (I2R) or electron bombardment (EB)
Replaceable thoria coated iridium filament
Compatible with many controllers of other manufacturers
Technical data
Measurement range 5E-8 … 13 Pa | 5E-10 … 0.13 mbar | 4E-10 … 0.1 Torr
txtAbstand Sensitivity for N2 approx. 10 / Torr (dependent on tube diameter)
X-ray limit 5E-8 Pa | 5E-10 mbar | 4E-10 Torr
Filaments (cathodes) single, thoria coated Ir (replaceable)
Electron bombardment degas 100 W max., 70 W nominal
Resistance heated degas 6.3 … 7.5 VAC at 10 A
Cathode current 4…6A
Materials in vacuum stainless steel, ceramics, W, heat resistant metal, ThO2 on Ir
Insertion Length 76 mm
Electrical connectors push-on pins or pin guard with locking strain relief
10 Series 274 Nude gauges with single thoria-coated iridium filament
Order code Vacuum Electrical connection

connection
274028 DN40CF for push-on pins
274043 DN40CF with pin guard/locking strain relief
274053 DN40KF with pin guard/locking strain relief
Accessories
Order code Description

274029 Replacement filament (ThO2 coated Ir, original GP)
274029-1 Replacement filament (ThO2 coated Ir)
GP 274 Nude Bayard-Alpert UHV Gauges
Passive hot cathode ionization gauges, medium vacuum to UHV, replaceable filaments, welded anode
Nude gauge with extended UHV range (for UHV electrometer)

Welded anode grid, degas by electron bombardment (EB) only
2 replaceable tungsten or thoria coated iridium filaments
Compartible with many controllers of other manufactures
Technical data
Measurement range 3E-9 … 1.3 Pa | 3E-11 … 0.013 mbar | 2E-11 … 0.01 Torr
Sensitivity for N2 approx. 25 / Torr (dependent on tube diameter)
txtAbstand X-ray limit 3E-9 Pa | 3E-11 mbar | 2E-11 Torr
Filaments (cathodes) dual, W or dual, thoria coated Ir (replaceable)
Electron bombardment degas 40 W max.
Cathode current 2.5 … 3.5 A at 4 mA Emission
Materials in vacuum ss, ceramic, W, heat resistant metal, ThO2 on Ir (if appl.)
Insertion Length 76 mm
Electrical connectors push-on pins or pin guard with locking strain relief
Series 274 Nude UHV gauges with dual thoria coated iridium filaments

connection
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2748130 DN40KF for push-on pins
Accessories
Order code Description Electrical

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274025 Replacement filaments (ThO2 coated Ir, original GP)
274025-1 Replacement filaments (ThO2 coated Ir)
Series 274 Nude UHV gauges with dual tungsten filaments

connection
274050 DN40KF for push-on pins
Accessories

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274024 Replacement filaments (tungsten, original GP)
274024-1 Replacement filaments (tungsten)
GP 370 STABIL-ION® Controller for Bayard-Alpert Gauges
Modular controller for up to two passive hot cathode gauges (GP 370 series) and up to two fore-vacuum
gauges
Highly accurate and stable measurement system for high vacuum and UHV
Two ionization gauges series 370 connectable, alternate (sequential) activation
UHV electrometer, operates both available gauge versions (extended range gauge or UHV gauge)
txtAbstand Degas by electron bombardment (EB)
Control unit and power supply in two separate chassis
Front keys for direct activation of the hot cathode gauges and degas
Extendible controller functionality through optional modules
Modules for 2 fore-vacuum channels (alternatively 2 convection Pirani gauges or 1 convection
Pirani plus 1 capacitance gauge)
Modules for a serial interface
Modules for process control relays
txtAbstand Technical data

for fore-vacuum gauges: 2 (optional module)
Measurement range UHV electrometer:
1.3E-9 … 13 Pa | 1.3E-11 … 0.13 mbar | 1E-11 … 0.1 Torr
fore-vacuum modules (optional): dependent on gauge
Accuracy complete system (controller + GP 370 gauge):
±4 % of reading (2E-2 … 1E-9 Torr)
Units mbar, Pa, Torr (switchable on the module hardware)
txtAbstand Analog outputs electrometer:
10 capacitance gauge module (optional): linear, 0 ... 10 V
Setpoint relays optional: module with 2 or 6 relays (SPDT), 60 VDC / 5 A
Digital control inputs IG1/2 status, IG1/2 on/off, Degas on/off, filament selection, IG gas
selection, CG gas selection, pressure range selection, etc.
Interfaces optional: either RS232, RS485 or IEEE488
Ionization gauge auto on/off control via fore-vacuum channel available
Filament operation modes emission 0.1 / 4 mA (switchable, DC supply)
Electron bombardment degas 10 … 40 W
Housing control unit and power supply: each Aluminium, 1/2 x 19”, 2 U,
side-by-side or remote mounting
Power supply 90 ... 130 or 180 ... 260 VAC, 50/60 Hz (max. 220 W)
Electrical connectors IEC plug (AC), 2 x IG plug, 2 x collector Coax, jack plug
(electrometer analog out), D-Sub 15 pin (remote I/O), D-Sub (IG
remote inputs), further connectors depending on configuration
Connectable passive gauges GP 370 STABIL-ION® gauges;
GP 275 Convectron® or compatible (optional)
Connectable active gauges capacitance diaphragm gauges (optional)
Scope of delivery control unit and power supply, power cable, interconnect cable
power supply - control unit
GP 370 STABIL-ION® Controller for Bayard-Alpert Gauges
GP 370 controller, for one STABIL-ION® gauge, 3-line display, EB degas, sequential operation of a
second gauge, remote input/output interface

Interface option x Description

0 none
A RS232
B RS485
C IEEE488
Gauge Option y Description

0 none
1 dual Convectron®
2 Convectron® / capacitance diaphragm gauge
Setpoint option z Description

0 none
A 2 setpoint relays for ion gauge
B 6 setpoint relays, 2 per channel
Display Option - Measurement units: Power Cord Option:

T Torr 1 North Amerika 115 V 10
M mbar 2 North Amerika 240 V
Optional installation hardware
Order code Adapter for Electrical

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370008 1 or 2 power supplies side-by-side
370010 1 control unit on the left or right side (please specify)
370011 1 control unit in the center
370021 2 control units side-by-side
Gauge cables see section "Cables" at the end of this chapter.
GP 370 STABIL-ION® Bayard-Alpert Gauges
Passive hot cathode ionization gauges, medium vacuum to UHV
Precise assembly and stainless steel tube for improved reproducibility

Memory module with calibration data included
Technical data
txtAbstand
X-ray limit extended range gauge: 3E-8 Pa | 3E-10 mbar | 2E-10 Torr
UHV gauge: 3E-9 Pa | 3E-11 mbar | 2E-11 Torr
Max. bakeout temperature 150 °C (with plug and cable)
450 °C (without plug and cable)
Number of filaments 2 (non-replaceable)
Materials in vacuum UHV compatible, vacuum baked
Vacuum connection DN40CF
Display and control units GP 370 STABIL-ION® controller

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370120 Extended range gauge (with memory module)
370121 UHV range gauge (with memory module)
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Beam Flux Monitor
VACOM-BFM Beam Flux Monitor System
System for monitoring the beam equivalent pressure (B.E.P.) in MBE applications
Optimized design of the vacuum parts with minimized outgassing surface

Linearly shiftable Bayard-Alpert ionization gauge (replaceable)
Two long-life filaments (replaceable)
Very low heat input into the vacuum system
Easy servicing
Gauge is adapted for installation in tubes > 34 mm I.D.
Compact, functional gauge controller MVC3-B0
High accuracy and reproducibility
txtAbstand Intelligent emission control for long filament service life
Programmable correction factors for both filaments and gas type
System developed in cooperation with MBE users
Technical data
txtAbstand
Display range 1E-10 … 10 Pa | 1E-12 … 0.1 mbar | 1E-12 … 0.075 Torr
Measurement range controller:
1E-10 … 10 Pa | 1E-12 … 0.1 mbar | 1E-12 … 0.075 Torr
gauge:
5E-9 … 4 Pa | 5E-11 … 4E-2 mbar | 3.8E-11 … 3E-2 Torr
Accuracy controller: < 1 % of reading;
gauge: ±10 % of reading (1E-8 … 1E-2 mbar)
Reproducibility gauge: ±5 % of reading (1E-8 … 1E-2 mbar)
exponent 2 digits), unit, relay status, Fil1/Fil2 10
Analog outputs log-linear, 0 … 10 V, 0.625 V / decade
Digital control inputs gauge on/off, Degas on/off
Max. bakeout temperature vacuum system: 230 °C (with cable)
Mounting position gauge: any
txtAbstand Filaments (cathodes) yttria coated iridium
Filament operation modes automatic emission control (DC supply), Fil1/Fil2/auto
Electron bombardment degas start via front keys, digital input, or PC
Materials in vacuum ss, W, Y2O3 on Ir, Ta, glass ceramics, Au, Ag plated Cu
Housing controller: aluminium, 1/4 x 19”, 3 U
Max. diameter gauge: 32 mm
Protection category controller: IP 40
Power supply controller: 100 ... 240 VAC, 50/60 Hz (max. 60 W)
Electrical connectors controller: IEC plug (AC), D-Sub mixed pin (gauge), D-Sub 25 pin
(relays), D-Sub 9 pin (RS232 and RS485), D-Sub 15 pin (analog
and digital I/O)
gauge: special connector
Vacuum connection DN40CF
Scope of delivery VACOM-BFM (complete system) containing gauge, linear shift
mechanism, controller MVC3-B0, power cable (EU); Please order
gauge cable separately.
Beam Flux Monitor
VACOM-BFM Beam Flux Monitor System
VACOM-BFM (complete system), vacuum connection DN40CF (please order gauge cable separately)
Order code Description Home Stroke lbl04par

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VBX35-200H-075 VACOM-BFM 75 200
VBX35-300H-100 VACOM-BFM 100 300
Other dimensions for Home and Stroke on request
Gauge cables

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BX35L05 Cable for VBX35-…, 5 m
Accessories

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BX35G Replacement gauge kit with filaments (Y2O3 coated Ir)
BX35F Replacement filaments (Y2O3 coated Ir)
USB-RS232-KONV USB2.0/RS232 converter, USB cable 0.8 m, driver CD
10
Cables
Interface Cables
Cables for RS232 communication

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USB-RS232-KON USB2.0/RS232 converter, USB-cable 0.8 m, driver CD
Gauge Cables for MVC-3 Series, ATMIGRAF, DISPLAY ONE (for Active Vacuum Gauges)
Cables for connecting one ATMION® gauge with MVC-3 A or ATMIGRAF

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Cables for connecting one TTR or PTR gauge with DISPLAY ONE or MVC-3 series

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Cables for connecting one CVM-211 gauge with MVC-3 series

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Cables for connecting one CTR gauge with MVC-3 series

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Cables
Gauge Cables for MVC-3 B Controllers (for Passive Vacuum Gauges)
Cables for a passive ionization gauge BARION®

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Gauge Cables for GP 307 Controllers
Cables for one glass tubulated ionization gauge series GP 274

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307042 Cable, power supply and controller side-by-side, 3 m
307043 Cable, power supply and controller side-by-side, 7.5 m
307030 Cable, remote mounting of power supply, 3 m
307031 Cable, remote mounting of power supply, 7.5 m
Cables for one nude ionization gauge (also UHV gauge) series GP 274, with push-on pins

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10 307046 Cable, power supply and controller side-by-side, 3 m
307047 Cable, power supply and controller side-by-side, 7.5 m
307035 Cable, remote mounting of power supply, 7.5 m
20307-409 Cable, up to 225 °C, p.s. and ctrl. side-by-side, 10.5 m
Cables for one nude ionization gauge (also UHV gauge) series GP 274, with pin guard, locking strain
relief, for EB-Degas

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307046-CE Cable, up to 150 °C, p.s. and ctrl. side-by-side, 3 m
307047-CE Cable, up to 150 °C, p.s. and ctrl. side-by-side, 7.5 m
307048-CE Cable, up to 150 °C, p.s. and ctrl. side-by-side, 15 m
307034-CE Cable, up to 150 °C, remote mounting of p.s., 3 m
307035-CE Cable, up to 150 °C, remote mounting of p.s., 7.5 m
307036-CE Cable, up to 150 °C, remote mounting of p.s., 15 m
Cables
Gauge Cables for GP 307 Controllers
Cables for one nude ionization gauge series GP 274 (not UHV gauge), with pin guard / locking strain
relief, for I2R-Degas

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307046-CR Cable, up to 150 °C, p.s. and ctrl. side-by-side, 3 m
307047-CR Cable, up to 150 °C, p.s. and ctrl. side-by-side, 7.5 m
307048-CR Cable, up to 150 °C, p.s. and ctrl. side-by-side, 15 m
307034-CR Cable, up to 150 °C, remote mounting of p.s., 3 m
307035-CR Cable, up to 150 °C, remote mounting of p.s., 7.5 m
307036-CR Cable, up to 150 °C, remote mounting of p.s., 15 m
Cables for fore-vacuum gauges

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303040-10 Cable for 2 Convectron® gauges, 3 m
303040-25 Cable for 2 Convectron® gauges, 7.5 m
307027 Cable for 1 Convectron® and 1 capacitance gauge, 3 m
307028 Cable for 1 Convectron® and 1 capacitance gauge, 7.5 m
307054 Cable for 2 thermocouple gauges, 3 m
307055 Cable for 2 thermocouple gauges, 7.5 m
307056 Cable for 2 thermocouple gauges, 15 m
Gauge Cables for GP 350 Controllers 10
Cables for one nude UHV ionization gauge series GP 274 (dual filament, internal collector wire)

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350004 with push-on pins, 3 m
350005 with push-on pins, 7.5 m
350006 with push-on pins, 15 m
350004-C up to 150 °C, w. pin guard/locking strain relief, 3 m
350005-C up to 150 °C, w. pin guard/locking strain relief, 7.5 m
350006-C up to 150 °C, w. pin guard/locking strain relief, 15 m
350053-20 up to 225 °C, with push-on pins, 6 m
Cables for dual Convectron® gauges

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Cables
Gauge Cables for GP 370 STABIL-ION® Controllers
Cables for one STABIL-ION® gauge

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360116-10 Cable, power supply and controller side-by-side, 3 m
360116-25 Cable, power supply and controller side-by-side, 7.5 m
360116-50 Cable, power supply and controller side-by-side, 15 m
360117-10 Cable, remote mounting of power supply, 3 m
360117-25 Cable, remote mounting of power supply, 7.5 m
Cables for fore-vacuum gauges

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307028 Cable for 1 Convectron® and 1 capacitance gauge, 7.5 m
10

10 Vacuum Measurement

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10 Vacuum Measurement

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Vacuum Measurement

Rough and Medium Vacuum

Active Vacuum Gauges

High and Ultra High Vacuum

Beam Flux Monitor

Introduction Page 10-3 to 10-9

Active Vacuum Gauges Page 10-19 to 10-31

Controllers for Active Vacuum Gauges Page 10-32 to 10-36

Beam Flux Monitor Page 10-49 to 10-50

Cables Page 10-51 to 10-54

Criteria for the selection of vacuum gauges

Accuracy, reproducibility, response time

Composition of the process media

Process conditions and environmental conditions

Process control, data logging

Vacuum pressure ranges

Conversion of pressure units

1 Pa = 0.01 mbar = 0.0075 Torr 1 micron = 1 mTorr = 0.133 Pa = 1.33E-3 mbar

Rough and medium vacuum gauges and controllers

Active vacuum gauges

Controllers for active vacuum gauges

High and ultra high vacuum gauges and controllers

Beam Flux Monitor

Features of active vacuum gauges

Possible combinations of active or passive vacuum gauges and controllers

Features of vacuum gauge controllers and meters

Relative pressure (or gauge pressure)

Vacuum gauge, vacuum measurement instrument, vacuum meter

Passive vacuum gauge

Active vacuum gauge

Gas-type independent measurement

Gas-type dependent measurement

Typical measuring ranges of different vacuum gauges

Diaphragm vacuum gauges

Piezo-resistive diaphragm vacuum gauges

Measuring methods (continued)

Capacitance diaphragm vacuum gauges

Heat loss vacuum gauges

Thermocouple vacuum gauges

Pirani vacuum gauges

Convection-enhanced Pirani vacuum gauges

Wheatstone bridge circuit

Measuring methods (continued)

Ionization vacuum gauges

Cold cathode ionization vacuum gauges

Hot cathode ionization vacuum gauges

Combined vacuum gauges

ATMION® wide range vacuum gauge

RFM Bourdon Gauge

Visual monitoring of roughing lines and evacuation processes

Order code Description Vacuum D H

Visual and electronic monitoring of roughing lines and evacuation processes

Order code Description Vacuum D H l

DVR 2 Capacitance Diaphragm Gauge

Battery-operated vacuum gauge, rough vacuum, internal ceramic transducer

Gas-type independent measurement

Order code Description Vacuum

txtAbstand Order code Description lbl14par

DCP 3000 Capacitance Diaphragm Gauge

Gas-type independent and long-term stable measurement

Order code Description lbl14par

HPM 4/6 Thermocouple Vacuum Gauge Meter