Documenti di Didattica
Documenti di Professioni
Documenti di Cultura
Printed in the UK
1. Introduction cromachining [16, 17], anodic bonding [18, 19], etc) belong
to the category of batch processes as well as their parent
Nowadays, technologies for the microminiaturization microelectronics technologies. Others belong to the cate-
of mechanical structures are being developed within gory of individual processes (e.g., micro stereo lithography
the fields that are commonly referred to as micro [20, 21], laser micromachining [22, 23], micro-EDM [24],
electro mechanical systems (MEMS) in the USA [1, 2], microgrinding [25], and other technologies [26] originated
micro system technology (MST) in Europe [3] and in mechanical engineering).
micromachine technology in Japan [4, 5]. The substantial The need for individual processing is caused by the
part of all these technologies is integrated circuit (IC) restriction of materials, the shape of parts, and structures
based batch technologies from microelectronics [6, 7]. inherent in batch processing [27, 5, 13]. Individual
Microelectronics-based technologies enable the creation processing is a basis for mechanical engineering, where
of microdevices that incorporate simple mechanical there is already a wealth of experience in the design
components [8, 9] fabricated mainly from silicon [10]. and fabrication of sophisticated machines and mechanisms
The development of complex microsystems such as including 3D structures and movable parts.
miniature machine tools, manipulators and robots [11, 12] The use of mechanical engineering technologies to
calls for the development of sophisticated mechanical make micro machinery [28–33] raises a number of issues
structures that have 3D movable and complex-shaped parts that are still unclear. These issues concern the limits
made from diverse materials. This spurred on work on of mechanical machining, ways of achieving them, the
the modification of existing technologies [7] as well as the cost and throughput of equipment, and the range and
development of novel technologies [13] to meet the needs cost of potential applications. Some aspects of these are
of micromechanics. discussed in this paper. In section 2 we consider the
A number of technologies which emerged in microme- typical features of both batch and individual processes.
chanics as a result of this work (LIGA [14, 15], surface mi- The dimensional limits of various mechanical machining
0960-1317/96/040410+16$19.50
c 1996 IOP Publishing Ltd
Micromechanical engineering and microequipment
411
E M Kussul et al
412
Micromechanical engineering and microequipment
413
E M Kussul et al
3.1.2. Removal of material using an electric field. die or mold, by the plasticity of material, and by distortions
Micro-EDM and electrochemical removal and deposition during removal of ready parts. Additional errors appear
fall into this category. after the removal of ready parts as a result of cooling
Micromachining by micro-EDM is well-known [24] deformations.
and has been used to machine shafts and holes with 5 µ Errors owing to cooling deformations should scale
diameter, radial deviation of less than 0.5 µ, and surface down linearly with the size of parts produced. Errors owing
roughness less than 0.1µ [13]. Micronozzles of 2.3 µ to die or molding filling and removal do not change with
diameter were also reported [42]. The limits of EDM can downsizing of parts produced. Microdie fabrication errors
reach atomic dimensions, because its operation principle are determined in a manner similar to the fabrication errors
does not differ from that of STM, single atoms can be of any other micromechanical devices. Metal casting errors
removed [43, 44]. The drawbacks of EDM are relatively include those due to crystallization.
low productivity and restriction of materials. Thus, the total error for machining by restricted
Electrochemical etching and deposition have reached deformation results from several sources and exceeds the
submicron range [45] and allow the fabrication of 3D error of other techniques discussed above. The size error
structures [46]. Though electrochemical processing deals
is still more than 1 µ, and the surface roughness is more
in principle with the removal and the deposition of discrete
than 0.1 µ (see [3], p 44). However this type of machining
atoms, the statistical nature of chemical reactions prevents
provides high throughput and can be used for fabrication
reaching atomic order accuracy.
of workpieces and parts that do not require high accuracy.
414
Micromechanical engineering and microequipment
415
E M Kussul et al
416
Micromechanical engineering and microequipment
materials, energy, labor, and floor area in MbM. into micromechanics by micromechanical engineering.
The low cost of individual micromechanical machining
Thus the miniaturization of equipment opens the way to
and assembly will make feasible a number of potential
a drastic decrease in the unit cost of individual processing.
applications as well as allowing development of novel
At a low unit cost of individual micromachining, the most
applications that are not at present considered economical.
natural way to achieve high throughput is to parallelize the
This concerns both mass and small-lot applications.
process of individual machining by concurrent use of a great
Mass applications should be manufactured by massively
quantity of microequipment of the same kind (figure 4(c)).
parallel MbM. However, unlike batch production where
This type of high-throughput process may be called
mass manufacturing is an essential prerequisite to
‘massively parallel’ to stress the difference from mass economically attractive applications, because of the need to
manufacturing in macromechanics and microelectronics. In justify the initial costs of equipment and production setting-
microelectronics, mass manufacturing is achieved not by up, the mass of microapplication is not as critical for MbM.
individual, but by batch processes. In macromechanics, the With the availability of low-cost universal microequipment
high cost of macroequipment, the large floor area that it (to be produced by mass and automated micromachine tool
occupies, and the high energy consumption prevents mass industry) and reasonable labor expenditure, the making
parallelization of manufacturing. The number of machine of inexpensive single-unit and small-lot applications is
tools that concurrently mass produce identical parts in the possible. This is especially important for research and
factory does not usually exceed several dozen. prototype manufacture, as well as for the fabrication of
Contrastingly, for a 1 dm3 microfactory exploiting unique microdevices that may have a market even at
massively parallel MbM, the number of machine tools with relatively high cost.
overall dimensions of 1.5 mm × 1.5 mm × 1.5 mm (e.g.,
GDF = 4, G = 4 in table 2) placed 3.5 mm apart (at 5 mm
7.1. Classification of micromechanical applications
intervals) will be 8000. Realization of machine tools with
smaller linear dimension, e.g., 0.1 mm (GDF = 4, G = 6), Let us consider three types of micromechanical applications
will make it possible to place 8 000 000 machine tools in distinguished by their function.
a 1 dm3 factory. Thus, massively parallel MbM presumes
thousands and millions of concurrently performed identical 7.1.1. Applications oriented to the macroworld. There
individual operations instead of single or dozens of such are applications ([3, 30, 60] and references therein) in
operations in mass macromechanical production. which micromechanical devices exert influence on the
Exploitation of such a great number of microsized macroworld. In these applications macroeffect is obtained
machine tools is only feasible if they are automatically by the integration into a single structure of a vast number
operated and the microfactory as a whole is highly of microparts, each performing a microfunction. Such
automated. We expect that many useful and proven applications require supermass production and assembly
concepts, ideas and techniques of automation can be of parts at low cost. Examples are filters (see
borrowed from mechanical engineering. They vary from subsection 7.3.1), heat exchangers (see subsection 7.3.2),
the principles of factory automation (FMS and CAM) to panels, tactile displays, supercapacitors and systems for the
the ideas of unified containers and clamping devices and separation and purification of liquids.
techniques of numerical control. However automation With existing micromechanical technologies, some of
of micromanufacturing has peculiarities that will require these applications are too expensive or difficult to realize.
special development. These will be discussed elsewhere Massively parallel MbM will allow the manufacture of
([59], see also section 9). low-cost devices of this type because of its capability to
To summarize, massively parallel MbM should be manufacture low-cost arbitrary shaped parts and make use
based on individual machining of microparts and assembly of any material, low-cost assembly and mass production.
of microdevices realized by parallel operation of a great
number of automated microequipment. This enables high
7.1.2. Applications oriented to the microworld.
productivity and low unit costs, as for batch manufacturing.
The diversity of materials required, the need to make
Unlike batch processes, there are no problems with
parts of complex shape and the need to assemble
fabrication of 3D parts and assembly of sophisticated
sophisticated structures with movable joints prevents
constructions. These features of massively parallel MbM
complete fabrication of these applications exclusively by
allow revision of the wide-spread belief about poor cost-
batch technologies. For example, it is not practical to
effectiveness of micromechanical production and individual
produce microequipment by batch technologies.
processes and allow the search for new areas of prospective
By their complexity, potential and current applications
micromechanical applications.
of this kind vary from mechanical microtools to microrobots
and include ([3, 8, 9, 60–63] and references therein)
7. Applications microsurgery instruments; microsensors; applications
in microelectronics (microconnectors, packaging, etc);
The fabrication method proposed for micromechanical micromotors (see subsections 7.3.3 and 7.3.4) and
devices will allow a broadening of the spectrum of potential microactuators; microinstruments (including STM and
applications, due to an extension the spectrum of materials, AFM); microsystems for drug delivery; microfluid analysis
machining, assembly methods, and designs introduced system; bio micromanipulation (including cell handling);
417
E M Kussul et al
418
Micromechanical engineering and microequipment
419
E M Kussul et al
420
Micromechanical engineering and microequipment
Table 4. The typical features of microelectronics-based and mechanical engineering based micromechanics.
421
E M Kussul et al
422
Micromechanical engineering and microequipment
To realize the idea of massively parallel MbM, microdevices produced, especially for mass production. In
a very high level of automation is required. It is such a way, the range of cost-effective micromechanical
necessary both to realize control of miniature equipment applications is supposed to be extended through a
and to decrease the cost of human labor. One of widening of the scope of feasible microdesigns and
the problems in automation of microequipment is the low-cost manufacturing and assembly of mechanical
miniaturization of controllers. This problem appears microcomponents.
since the pace of microequipment downsizing may be
well ahead the pace of miniaturization of electronic
controllers. Solutions to this problem may be provided Acknowledgments
by the development of non-electronic controllers that
could become the object of micromechanical engineering The authors would like to thank Jiri Soukup for valuable
[64], as well as by feedforward automatic control comments, Fred Runyan and Tanya Olar for their help
over a number of machine tools performing identical and suggestions, Toshio Fukuda and Naomi Akao for
operations using a single controller. On the other hand, providing the most useful Proceedings of the International
the low cost of microequipment will permit automatic Symposiums on Micro Machine and Human Science.
maintenance (the operation that defies automation in
macroproduction) by automatic replacement of defective or
worn microequipment.
References
Existing micromechanical technologies gave rise to the
market of specialized miniature devices, such as sensors, [1] Various authors 1987–1996 Proc. IEEE Micro Electro
that find application even though their cost is rather Mechanical Systems Workshops (IEEE)
high. The approach proposed in this paper makes it [2] Gabriel K J 1994 ARPA MEMS Program. Vision Statement
possible to search for novel types of application due to (ARPA/ETO)
[3] Lebbnik G K (ed) 1994 Microsystem Technology:
the potentially low cost of MbM. We consider applications Exploring Opportunities (Samsom: STT Netherlands
related to the development of microequipment and entire Study Centre for Technology Trends) STT 56
microfactories to be very promising. Work in this area is [4] Konaka M 1991 Research and development of
underway in Japan [12, 67, 68]. Our approach opens the micromachine technology Dig. Japanese Ind. Technol.
way to a reduction in the cost of microfactories and their 266 25–34
[5] Micromachine Center Japan 1994–1995 Introductory
transformation into ‘personal factories’ for the automated course: micromachine technology Micromachine No
production of micromechanical devices easily available at 7-13
the price of, say, a personal computer. This, in turn, may [6] Morgan D V and Board K 1990 An Introduction to
dramatically change the present view on the complexity and Semiconductor Microtechnology 2nd edn (New York:
the cost of microdevice production. Wiley)
[7] Ohlckers P, Hanneborg A and Nese M 1995 Batch
Thus the manufacturing of micromechanical devices processing for micromachined devices J. Micromech.
by miniature mechanical equipment offers a number of Microeng. 5 47–56
advantages over batch manufacturing, and we consider it [8] Bryzek J, Petersen K and McCulley W 1994
to be a useful complement to the microelectronics-based Micromachines on the march IEEE Spectrum 31 20–31
approach to progress in the micromechanical field. [9] de Rooij N F 1995 Current applications of silicon based
microsystems Proc. 6th Int. Symp. Micro Machine and
Human Science (Nagoya, Japan, 1995) pp 7–10
10. Conclusion [10] Petersen K E 1982 Silicon as a mechanical material Proc.
IEEE 70 420–57
The approach to mechanical microdevice creation consid- [11] Wise K et al (eds) 1994 JTEC Panel on
Microelectromechanical Systems in Japan: Final Report
ered in this paper recommends the wide use of machining (Springfield, VA: NTIS)
and assembly technologies from mechanical engineering. [12] Micromachine Center Japan 1995 Activities of the
These technologies make it possible to fabricate mechani- Micromachine Center in fiscal 1995 Micromachine No
cal microdevices of sophisticated design including 3D and 11
movable parts with complex geometry. [13] Dario P, Carrozza M C, Croce N, Montesi M C and Cocco
M 1995 Non-traditional technologies for
To exploit mechanical engineering technologies in the microfabrication J. Micromech. Microeng. 5 64–71
microrange, microequipment for machining and assembly [14] Becker E W, Ehrfeld W, Hagmann P, Maner A and
should be built up. For realization of microequipment, Munchmeyer D 1986 Fabrication of microstructures with
we propose to implement a sequence of equipment high aspect ratios and great structural heights by
generations with smaller and smaller dimensions. This Synchrotron Radiation Lithography, Galvanoforming,
and Plastic Moulding (LIGA Process) Microelectron.
pathway will permit a gradual revelation and solution Eng. 4 35–56
of miniaturization problems, as well as developing a [15] Rogner A, Eicher J, Munchmeier D, Peters R-P and Mohr J
spectrum of microequipment best suited for the production 1992 The LIGA technique—what are the new
of microdevices of various sizes. opportunities J. Micromech. Microeng. 2 133–40
Miniaturization of equipment will solve the problem [16] Howe R T and Muller R S 1983 Polycrystalline silicon
micromechanical beams J. Electrochem. Soc. 130 1420–3
of its precision and reduce power consumption and floor [17] Linder C, Paratte L, Gretillat M-A, Jaecklin V P and de
area occupied. Coupled with equipment automation, it Rooij N F 1992 Surface micromachining J. Micromech.
will drastically reduce the cost of microequipment and Microeng. 2 122–32
423
E M Kussul et al
[18] Hanneborg A, Nese M and Ohlckers P 1991 [40] Akbari J, Saito J, Hanaoka T and Enomoto S 1993
Silicon-to-silicon anodic bonding with a borosilicate Detection of cutting mode during scratching of ceramics
glass layer J. Micromech. Microeng. 1 139–44 using acoustic emission J. Jpn. Soc. Prec. Eng. 27 35–40
[19] Hanneborg A, Nese M, Jakobsen H and Holm R 1992 [41] Krasnikov V F 1976 Miniature Device Technology
Silicon-to-thin film anodic bonding J. Micromech. (Moscow: Mashinostroenie) in Russian
Microeng. 2 117–21 [42] Masuzawa T, Kuo C-L and Fujino M 1994 A combined
[20] Ikuda K and Hirowatari K 1993 Real three dimensional electrical machining process for micronozzle fabrication
micro fabrication using stereo lithography and metal Ann. CIRP 43 189–92
molding Proc. IEEE Int. Workshop Micro Electro [43] Eigler D M and Schweitzer E K 1990 Positioning single
Mechanical Systems (Fort Lauderdale, FL, 1993) atoms with a scanning tunneling microscope Nature 344
pp 42–7 524–6
[21] Yamaguchi K, Nakamoto T and Abraha P 1994 [44] Binnig G and Rohrer H 1986 Scanning tunneling
Consideration on the accuracy of fabricating microscopy IBM J. Res. Dev. 30 355–69
microstructures using UV laser induced polymerization [45] Husser O E, Craston D H and Bard A J 1989 Scanning
Proc. 5th Int. Symp. Micro Machine and Human Science electrochemical microscopy: high- resolution deposition
(Nagoya, Japan, 1994) pp 171–6 and etching of metals J. Electrochem. Soc. 136 3222–9
[22] Phillips H M and Sauerbrey R A 1993 Excimer laser [46] Madden J D, Lafontaine S R and Hunter I W 1995
produced nanostructures in polymers Opt. Eng. 32 Fabrication by electrodeposition: building 3D structures
2424–35 and polymer actuators Proc. 6th Int. Symp. Micro
[23] Kathuria Y P and Tsuboi A 1994 Eximer laser process Machine and Human Science (Nagoya, Japan, 1995)
technology for micro-machining Proc. 5th Int. Symp. pp 77–81
Micro Machine and Human Science (Nagoya, Japan, [47] Binnig G, Quate C F and Gerber C 1986 Atomic force
1994) pp 153–60 microscope Phys. Rev. Lett. 56 930–3
[24] Masuzawa T, Fujino M, Kobayashi K and Suzuki T 1985 [48] National standard of the USSR 1974 Tungsten wire.
Wire electro-discharge grinding for micro-machining Assortment GOST 18903-73 (Moscow: Izdatelstvo
Ann. CIRP 34 431–4 Standartov) in Russian
[25] Kaneko T, Yamagata Y, Idogaki T, Hattori T and Higuchi [49] Zuzin V I and Tretyakov A V (eds) 1991 Rolling
T 1995 3-dimensional specific thickness glass diaphragm Technology. Reference Book (Moscow: Metallurgia) in
lens for dynamic focusing IEICE Trans. Electron. E78-C Russian
123–7 [50] Push V E (ed) 1986 Metal-cutting machine tools (Moscow:
[26] Suzuki H, Ohya N, Kawahara N, Yokoi M, Ohyanagi S, Mashinostroenie) in Russian
Kurahashi T and Hattori T 1995 Shell-body fabrication [51] Birger I A and Mavlyutov R R 1986 Strength of Materials
for micromachines J. Micromech. Microeng. 5 36–40 (Moscow: Nauka) in Russian
[27] Shimoyama I, Miura H, Holzer R, Chotoku K, Inoue T and [52] Chernavsky S A et al (eds) 1976 ReferenceBook on Metal
Iwatani K 1994 Manipulation with micro-tools Proc. 5th Working (Moscow: Mashinostroenie) in Russian
Int. Symp. Micro Machine and Human Science (Nagoya, [53] Kussul E M 1993 Micromechanics and perspectives of
Japan, 1994) p 33 neurocomputing Neuron-like Networks and
[28] Masuzawa T 1991 An approach to micromachining through Neurocomputers (Kiev: Institute of Cybernetics)
machine tool technology Proc. 2nd Int. Symp. Micro pp 76–82 in Russian
Machine and Human Science (Nagoya, Japan, 1991) [54] Reshetov D N and Portman V T 1986 Precision of Metal
pp 47–52 Cutting Machine Tools (Moscow: Mashinostroenie) in
[29] Friedrich C R and Vasile M J 1996 Development of the Russian
micromilling process for high-aspect- ratio [55] Swigert A M et al 1953 Honing, Lapping and Superfinish
microstructures J. Microelectromech. Syst. 5 33–8 Collected Papers (Dearborn, MI: American Society of
[30] Friedrich C R and Kang S D 1994 Micro heat exchangers Tool and Manufacturing Engineers)
fabricated by diamond machining Prec. Eng. 16 56–9 [56] Koren Y 1983 Computer Control of Manufacturing Systems
[31] Yamagata Y and Higuchi T 1995 Four axis ultra precision (New York: McGraw-Hill)
machine tool and fabrication of micro parts by precision [57] Nicoud J-D 1995 Microengineering: when is small too
cutting technique Proc. 8th Int. Precision Engineering small? Nanoengineering: when is large too large? Proc.
Seminar (Compiegne, France, 1995) pp 467–70 6th Int. Symp. Micro Machine and Human Science
[32] Yamagata Y, Mihara S and Higuchi T 1995 Micro parts (Nagoya, Japan, 1995) pp 1–6
fabrication by ultra precision cutting technique Proc. [58] Teshigahara A, Watanabe M, Kawahara N, Ohtsuka Y, and
72nd JSME Spring Annual Meeting pp 242–5 Hattori T 1995 Performance of a 7-mm microfabricated
[33] Aoyama H, Nakano H, Hayakawa N, Sasaki A and car J. Microelectromech. Sys. 4 76–80
Shimokohbe 1993 Miniature robots for ultra precision [59] Kussul E M et al 1996 On automation in microequipment
measurement and machining Proc. 7th Int. Precision based manufacturing unpublished
Engineering Seminar (Kobe, Japan, 1993) pp 275–89 [60] Stemme G 1995 Micro fluid sensors and actuators Proc.
[34] Schomburg W K, Maas D, Bacher W, Bustgens B, 6th Int. Symp. Micro Machine and Human Science
Fahrenberg J, Menz W and Seidel D 1995 Assembly for (Nagoya, Japan, 1995) pp 45–52
micromechanics and LIGA J. Micromech. Microeng. 5 [61] Fukuda T, Guo S, Kosuge K and Arai F 1993 Active
57–63 catheter system with multi degrees of
[35] Zenkin A S and Petko I V 1990 Limits and Tolerances in freedom—mechanism and experimental results of active
Mechanical Engineering 3rd edn (Kiev: Tehnika) in catheter with multi units and multi D.O.F. Proc. 4th Int.
Russian Symp. Micro Machine and Human Science (Nagoya,
[36] Schey J A 1977 Introduction to Manufacturing Processes Japan, 1993) pp 155–62
(New York: McGraw-Hill) pp 340–7 [62] Sato K, Kawamura Y, Tanaka S, Uchida K and Kohida H
[37] Ro P I 1995 Ultra-presision machining in Korea ATIP 1990 Individual and mass operation of biological cells
Report No 69 (Seoul: ATIP) using micromechanical silicon devices Sensors Actuators
[38] Mechanical Engineering 1993 Expanding the use of A21–A23 948–53
diamond-turning machines Mech. Eng. 115 28, 30 [63] Kikuchi Y, Sato K, and Mizuguchi Y 1994 Modified
[39] Wilkes J 1984 Performance of Diamonds as Cutting Tools cell-flow microchannels in a single- crystal silicon
for Precision Machining (Oxford: Clarendon) substrate and flow behavior of blood cells Microvasc.
424
Micromechanical engineering and microequipment
425