Sensors and Actuators A 159 (2010) 168–173

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Sensors and Actuators A: Physical

journal homepage: www.elsevier.com/locate/sna

A novel NO2 gas sensor using dual track SAW device

Changbao Wen a,b,∗ , Changchun Zhu c , Yongfeng Ju a , Hongke Xu a , Yanzhang Qiu a
a
Institute of Micro-nanoelectronics, School of Electronics and Control Engineering, Chang’an University, Xi’an, 710064, China
b
Shaanxi Engineering and Technique Research Center for Road and Traffic Detection, Xi’an, 710064, China
c
Institute of Vacuum Microelectronics, School of Electronics and Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China

a r t i c l e i n f o a b s t r a c t

Article history: A nitrogen dioxide (NO2 ) gas sensor using dual track surface acoustic wave (SAW) device was developed
Received 6 August 2009 and fabricated in this paper. The dual track architecture and the MSCs were skillfully applied to the
Received in revised form 23 February 2010 sensor. The external perturbations were eliminated by the dual track architecture, and the bulk acoustic
Accepted 14 March 2010
wave (BAW) was suppressed by Multistrip coupler (MSC). The input IDT apodized by Morlet wavelet
Available online 18 March 2010
function can improve the side lobe rejection compared with uniform IDT. Utilizing Tungsten powders,
hydrogen peroxide, absolute methanol and polyvinylpyrrolidone as raw materials, the micro-porous
Keywords:
network Tungsten trioxide (WO3 ) film sensitive to NO2 gas was fabricated in measurement acoustic
Surface acoustic wave (SAW) device
Nitrogen dioxide (NO2 )
track of dual track SAW device. Experiments results confirm that the NO2 gas sensor using dual track SAW
Gas sensor device has good response characteristics to different concentrations NO2 gas from 0.5 ppm to 10 ppm.
Dual track Furthermore, the NO2 gas sensor using dual track SAW device has good reproducibility and stability.
Tungsten trioxide (WO3 ) © 2010 Elsevier B.V. All rights reserved.

1. Introduction
Nitrogen dioxide (NO2 ) is a major component of vehicle exhaust,
as well as the main emissions of the thermal power and chemical
production process [1,2]. It is a main source of acid rain and photo-
chemical smog, and is very harmful to the plant, building facilities
and production equipments [3,4]. Furthermore, NO2 is a toxic gas
itself, and causes some serious diseases of human being, such as
heart failure, arrhythmia and other cardiovascular causes of death
[5]. Hence, the monitor and measurement of NO2 gas have great
significance to decrease the damage level and keep humane heath.
So far there have been lots of efforts in developing a variety of
NO2 gas sensors such as semiconductor sensor [6], capacitive type
sensor [7], and surface acoustic wave (SAW) sensor [8]. In these
sensors, SAW sensor is passive, small volume, and low price, which
is quite attractive in portable instruments and wide requirement
of applications.
In SAW device, the SAW energy is confined into a zone close
to the piezoelectric crystals surface and is of a few wavelengths
thick [9,10]. The acoustic energy confinement makes the SAW sen-
sor very sensitive to any changes around environment. Different
mechanisms of interaction between the measured and the acoustic
propagation have been reported, such as the mass loading effects,
∗ Corresponding author at: Institute of Micro-nanoelectronics, School of Electron-
ics and Control Engineering, Chang’an University, Xi’an, 710064, China.
Tel.: +86 29 82339349; fax: +86 29 82339349.
E-mail address: wchbdn@163.com (C. Wen).
and the changes of the elastic loading and the electrical conductiv-
ity loading [11–15]. Most usually, the SAW velocity is affected by
the additional mass loading of gas molecules in acoustic track. The
perturbation analysis of additional mass loading has been given by
Auld [15].
Currently, there are two main research directions in gas sensors
using SAW device. One direction is concerned with the improve-
ment of architecture and performance of sensor, such as low
insertion sensor, strong anti-interference and high stability sen-
sor. Although the SAW energy confined near surface region is an
important merit to SAW device serving as gas sensor, it also makes
SAW sensor sensitive to temperature and other external factors.
Furthermore, the bulk acoustic wave (BAW) and side lobe have
a great impact on the performances of gas sensor, and then it
can result in some measurement errors. In order to solve these
problems, some measures and schemes have been adopted in
SAW gas sensors, such as dual delay line pattern using the dif-
ference principle [16], Multistrip coupler (MSC) suppressing BAW
[17], but these shortcomings cannot be solved simultaneously, and
only partial performances are improved. In addition, the sensi-
tive film on the propagation track is responsible for the response
performances of SAW device, thus the other direction devotes
to studying and synthesizing new sensitive material or sensi-
tive film. For the NO2 gas sensitive film, several materials have
been tried, such as SnO2 , ZnO, and WO3 (Tungsten trioxide) film
[18–20]. In order to improve the sensitivity of WO3 film, these
methods require other doped substances and high temperature
[18,20]. However, the operating temperature of SAW devices is
usually less than 100 ◦ C, thus these films required temperatures

0924-4247/$ – see front matter © 2010 Elsevier B.V. All rights reserved.
doi:10.1016/j.sna.2010.03.012
 C. Wen et al. / Sensors and Actuators A 159 (2010) 168–173
above 100 ◦ C are not suitable as the sensitive film of SAW gas sen-
sor.
Here, we develop a NO2 gas sensor using dual track SAW
device. The sensor consists of a dual track SAW device and the
micro-porous network WO3 film sensitive to NO2 . Because the
polyvinylpyrrolidone is applied to the preparation of WO3 film, a
number of micro-porous networks were formed in WO3 film. This
micro-porous network WO3 film can physically absorb NO2 gas at
room temperature by means of the mass loading effects. The dual
track architecture eliminates the external perturbations, and the
MSC suppresses the BAW, and the input IDT apodized by Morlet
wavelet function can improve the side lobe rejection. Hence, the
sensor has achieved good response characteristics and stability.
The fabrications and principles, and tests of NO2 gas sensor using
dual track SAW device are presented in this paper. The paper is
organized as follows. Section 2 is devoted to realizing the NO2 gas
sensor using dual track SAW device. The working principles of sen-
sor are presented in Section 3. In Section 4, the test system and
the response characteristics, and the reproducibility and stability
of the NO2 gas sensor using dual track SAW device are analyzed
respectively. Conclusions are drawn in Section 5.
2. Fabrication of sensor
2.1. Design of SAW device
There are a number of piezoelectric materials available to SAW
sensors. The choice depends on the operation frequency and the
type of the device. Here, in order to decrease the insertion loss and
the size of sensor, 128◦ Y-X LiNbO3 crystals with high electrome-
chanical coupling constant are selected as substrate materials of
SAW sensor [13]. The velocity of the SAW propagating on the 128◦
Y-X LiNbO3 substrate is 3980 m/s, and the electromechanical cou-
pling constant K2 is 5.5%.
In our previous works [21,22], we found that the smaller side
lobe can be obtained if the IDT of SAW device is apodized by
the envelope of Morlet wavelet function. In this dual track SAW
device, the input IDT is apodized by the envelope of Morlet wavelet
function without using uniform IDT. Furthermore, the dummy elec-
trodes are used to eliminate the phase front distortion of waves
propagating through apodized input IDT, and the split electrodes
are used to minimize acoustic reflections within the transducers.
Aluminum IDTs, with uniform spacing and metallization ratio of
50%, are directly deposited by conventional contact ultraviolet pho-
tolithography on the top of the 128◦ Y-X LiNbO3 substrate.
Fig. 1(a) shows the schematic diagram of dual track SAW device.
The center frequency of device is 101.764 MHz. The IDT0 is an input
IDT apodized by the envelope of Morlet wavelet function. The elec-
trodes width and electrodes gap of input IDT are 4.888 ␮m. The
numbers of electrodes pairs are 128. The maximum acoustic aper-
ture is 1.53 mm. The MSC1 and MSC2 are two MSCs with identical
design parameters. Their electrodes width and electrodes gap of
input IDT are 7.16 ␮m, and the numbers of electrodes pairs are
103. Fig. 1(b) shows the local magnified picture of IDT0 and MSC1
examined by PIXERA (Model: PVC-100). IDT1 and IDT2 are two uni-
form output IDTs with identical design parameters. The electrodes
width and electrodes gap of input IDT are 4.888 ␮m. The numbers
of electrodes pairs are 3 and their maximum acoustic aperture is
1.521 mm. Area1 is the region between MSC1 and output IDT1 , and
Area2 is the region between MSC2 and output IDT2 . The distance
between MSC1 and output IDT1 , and the distance between MSC2
and output IDT2 are 5 mm. The height of output IDT1 and output
IDT2 is 3.5 mm. Hence, we can design the sensitive areas of Area1
and Area2 as 4.5 mm × 3.2 mm. The sound absorption material can
suppress the unwanted energy reflected from the substrate edges.
169
Fig. 1. Schematic diagram (a), and the local magnified picture (b) of dual track SAW
device.
2.2. Preparation of WO3 film
Most usually, the WO3 (Tungsten trioxide) film can be deposited
by sputtering technique, chemical vapour deposition and sol–gel
preparation [23–25]. However, these methods are quite expensive
and require complicated measurement equipment, which are diffi-
cult to meet the requirement of low price and wide applications. In
addition, in order to improve sensitivity, it is necessary to elevate
measurement temperature and add other doped metal, such as Au,
Pt, Pd and Nb.
Here, we select Tungsten powders, hydrogen peroxide, absolute
methanol and polyvinylpyrrolidone as raw materials. The micro-
porous network WO3 film is fabricated in Area1 of dual track
SAW device via the spray method. At the room temperature, 1.2 g
pure Tungsten powders were dissolved in 15 mL 30 wt% hydro-
gen peroxide under stirring. The white solution can be obtained by
ultrasonication for 4 h. The 15 mL absolute methanol was dropwise
added to the white solution under stirring. The white flocculent
precipitate was filtrated after 12 h at room temperature, and the
transparent solution was obtained. The 0.15 g polyvinylpyrrolidone
was added to the transparent solution. Then the relatively viscous
solution was formed, which was very stable and able to be place for
days without precipitation. Subsequently, the solution was concen-
trated to 15 mL at 393 K, and then was adder to the sprayer.
The film thickness can be controlled by controlling the volume
of spray chamber of sprayer. In the experiments, we found that the
relatively thick film can be achieved by the sprayer with a large
volume of spray chamber, and the relatively thin film can be pro-
duced with a small volume of spray chamber. When the volume of
spray chamber of sprayer was 0.6 mL, the thickness of WO3 film is
approximately 90 ␮m. The thickness should be a more optimized
for this sensor. Moreover, we found that the response amplitude of
sensor will decrease gradually, and the insertion loss will increase
varied with the thickness increasing. If the film thickness is less
than 90 ␮m, we have to reduce the volume of solution in the spray
chamber. However, the area of sensitive film will reduce due to
the solution surface tension, so the sensitivity of the sensor is also
decrease.
170 C. Wen et al. / Sensors and Actuators A 159 (2010) 168–173
Fig. 2. Substrate surface before and after coating with WO3 film. (a) Free surface of 128◦ Y-X LiNbO3 crystals; (b) substrate surface coated with WO3 film.
A thickness of 2.5 mm plastic sheet was selected as mask plate.
A square hole with the same size as the Area1 was made in the
mask plate center. Under the protection of mask, the solution was
sprayed onto the region Area1 . In this experiment, the distance
between mask plate and the device surface keeps about 5 mm, and
the distance between the nozzle and mask plate is about 3 cm. As
the liquid surface tension, this method is not entirely accurate in
controlling the size of the sensitive area, but can avoid the leakage
effects underneath the mask layer in the photoresist and others
method, and the device surface contamination and device damage.
The sensor was put into the thermostat at 333 K for 1 h, and
then the power of the thermostat was cut off. The tempera-
ture of sensor gradually returned to room temperature after 10 h.
The micro-porous network WO3 film was obtained on the Area1
of dual track SAW device. Because the structure-directing agent
polyvinylpyrrolidone is applied to the preparation of WO3 film, a
number of micro-porous networks are formed in WO3 film. Fur-
thermore, when the weight ratio between polyvinylpyrrolidone
and pure Tungsten powders is from 10% to 16%, we find the porous
size of WO3 film is about 1 to 50 ␮m and the sensor has good
absorption and desorption characteristics. When the porous size
of WO3 film is less than 1 ␮m, the sensor has a long recovery time.
When the porous size of WO3 film is larger than 50 ␮m, the sen-
sor has a poor adsorption to NO2 gas. Especially, the sensor has
no obvious absorption features when the number of porous size in
100 ␮m is more than 50%. In this research, the weight ratio between
polyvinylpyrrolidone and pure Tungsten powders is 12.5%. Fig. 2
shows the substrate surface before and after coating with WO3 film
examined by PIXERA (Model: PVC-100).
3. Working principles of sensor
When the electronic signal is applied to the sensor in Fig. 1,
owing to the inverse piezoelectric effects of substrate, the input
IDT (IDT0 ) in SAW sensor excites not only SAW propagating along
crystals surface, but also BAW. The BAW has higher frequency than
SAW, and can produce some ripples and spurious components in
response curve [26]. The SAW and BAW excited by input IDT will
be bidirectional transmission, and the MSC can fully transfer SAW
without affecting BAW to continue to propagate in the primitive
acoustic track [13,27]. In this case, the SAW and the BAW launched
by input IDT can be separated into different tracks. Therefore, one
can spread some sound absorption materials at the terminal of BAW
transmitting, and ultimately eliminate the BAW that interferes in
the performance of SAW gas sensor.
Two full transfer MSCs (MSC1 and MSC2 ) are symmetri-
cally deposited on the two acoustic propagation tracks of input
IDT0 , respectively. The SAW and the BAW launched by the
input IDT (IDT0 ) can be separated by MSCs (MSC1 and MSC2 ),
and the SAW can be transferred into down acoustic tracks.
The output IDTs (IDT1 and IDT2 ) with same design parameters
are symmetrically deposited on two output acoustic tracks of
MSCs (MSC1 and MSC2 ), respectively. The SAW separated by
full transfer MSCs (MSC1 and MSC2 ) can be received by the
output IDTs (IDT1 and IDT2 ) via regions Area1 and Area2 , respec-
tively. Hence, two acoustic tracks IDT0 → MSC1 → Area1 → IDT1
and IDT0 → MSC2 → Area2 → IDT2 are symmetrically formed on the
both sides of input IDT (IDT0 ).
Because the design parameters of one component are identical
and symmetric in this sensor, the sensitive film can be fabricated
on regions Area1 or Area2 . Once one region is chosen as measure-
ment region to absorb gas, the other region without sensitive film
can be seen as reference region. Hence, the SAW propagation track
with measurement region can be called measurement track, and
the other track with reference region can be called reference track.
In this work, the region Area 1 is coated with WO3
film sensitive to NO2 gas, and then the acoustic track
IDT0 → MSC1 → Area1 → IDT1 is the measurement track. The
other region Area2 remains the free surface of piezoelectric sub-
strate, and then the acoustic track IDT0 → MSC2 → Area2 → IDT2 is
the reference track.
The concentration of NO2 gas was measured by this dual track
SAW gas sensor, the principles are as follows.
Before the sensor was exposed to the concentration C1 at
time t0 , the output frequency MC1 t0 of the measurement track
IDT0 → MSC1 → Area1 → IDT1 and the output frequency RC1 t0 of the
reference track IDT0 → MSC2 → Area2 → IDT2 can be measured and
obtained by network analyzer. Hence, the difference frequency
DC1 t0 between the measurement track and the reference track
should be
 
DC1 t0 = MC1 t0 − RC1 t0  (1)
When the concentration of NO2 gas is C1 at time t1 , the differ-
ence frequency signal DC1 t1 between the measurement track and
the reference track is
 
DC1 t1 = MC1 t1 − RC1 t1 
(2)
Similarly, when the concentration of NO2 gas is C1 at arbitrary
time tn , the difference frequency signal DC1 tn between the measure-
ment track and the reference track should be
 
DC1 tn = MC1 tn − RC1 tn 
(3)
One can measure the difference values
DC1 t0 , DC1 t1 , DC1 t2 , DC1 t3 , DC1 t4 , . . . , DC1 tn for the NO2 concen-
 C. Wen et al. / Sensors and Actuators A 159 (2010) 168–173
Fig. 3. Frequency spectrum characteristic of the dual track SAW device.
tration C1 at time t0 , t1 , t2 , t3 , t4 , . . ., tn . Hence, the curve C1 tn − tn
that is the difference frequency signal varied with time is obtained.
Using the similar approach, ones can obtain n − 1 curves, which
are DC2 tn − tn , DC3 tn − tn , DC4 tn − tn , . . . , DCn tn − tn at concentra-
tion C2 , C3 , C4 , . . ., Cn , respectively.
Assuming that the WO3 film is sufficiently stable, the addi-
tional loading mass of sensitive film affected by the environmental
interference can be omitted. For the NO2 gas sensor using dual
track SAW device at time tn , if the external perturbation is ˛n
for the measurement track IDT0 → MSC1 → Area1 → IDT1 , and the
external perturbation should also be ˛n for the reference track
IDT0 → MSC2 → Area2 → IDT2 due to the symmetrical architecture
of this sensor. The final measurement value DCn tn is the difference
frequency between the measurement track and the reference track,
thus the external perturbation can be removed.
For example, when the NO2 gas concentration is C1 at time tn , the
measurement error from temperature is ˛nT for the measurement
track and the reference track, respectively. Under this condition,
the output DC1 tn of the NO2 gas sensor using dual track SAW device
should be the difference value signal between the measurement
track and the reference track, i.e.,
   
DC1 tn = (MC1 tn + ˛nT ) − (RC1 tn + ˛nT ) = MC1 tn − RC1 tn 
(4)
From Eq. (4), one can find that the measurement error ˛nT
is removed. Hence, the NO2 gas sensor using dual track SAW
device can compensate the temperature or other perturbations
from external environment to the measurement signal.
The frequency spectrum characteristic of this dual track SAW
device is measured by Advantest R3765CG network analyzer, as
shown in Fig. 3. We can find that the dual track SAW device can
suppress the BAW, and avoid higher side lobe and spurious compo-
nents in the right side of the frequency response curve. In addition,
the input IDT is apodized with the envelope of Morlet wavelet func-
tion, thus side lobe suppression is better than that of uniform IDT
[13,28].
4. Sensor testing
4.1. Experimental setup
In order to evaluate the response of NO2 gas sensor using dual
track SAW device, we design the experimental setup, as shown in
Fig. 4. The experimental setup consists of a NO2 gas sensor using
dual track SAW device in tight gas chamber, an air and NO2 gas
supply part, NO2 gas exhaust and purification part, an Advantest
R3765CG network analyzer, and power supply part and signals
171
Fig. 4. Schematic diagram of experimental setup for testing the NO2 gas sensor
using dual track SAW device.
processing part. The volume of gas chamber is 4833 cm3 . The gas
supply part in the experimental setup can obtain 0.1 ml injected
gas, and the concentration of NO2 gas is 1680 ppm. Thus, the NO2
gas concentrations from 34.7 ppb to 1680 ppm can be detected by
the experimental setup shown in Fig. 4.
At the beginning of test, the air is injected into the chamber for
2 min. When the NO2 gas is infused into the chamber, the differ-
ence frequency of the sensor reaches to a stable value. Due to the
mass loading effects, the WO3 film can absorb NO2 gas, and produce
downward shift in the frequency of the measurement track. Thus,
the difference frequency between the measurement track and the
reference track can be obtained.
With this experimental setup shown in Fig. 4, all difference
frequencies can be recorded and processed for different gas con-
centrations at different time periods. The changes in difference
frequencies can be attributed to the mass uptake of NO2 gas on
the WO3 film.
In the experiment, all of the gas concentration was achieved by
mixing the NO2 gas sample and laboratory air. Thus, each end of
the experiment, we will pass air into the chamber, and purge the
NO2 gas from the chamber.
4.2. Response characteristics
When the NO2 gas at certain concentrations is injected into the
chamber, the NO2 gas adsorbed in WO3 film will gradually reach to
a steady state, and the output response of the sensor will reach to
a stable value. Here, the working principle of the sensor is mainly
based on the mass loading effects. Hence, the output responses of
sensor are different due to the mass loading effects determined by
the different NO2 gas concentrations.
In order to observe the response characteristics of NO2 gas sen-
sor using dual track SAW device, the NO2 gas concentrations at
0.5 ppm, 1 ppm, 2 ppm, 3 ppm, 5 ppm, 8 ppm and 10 ppm are mea-
sured, the response characteristics of sensor for NO2 gas at different
concentrations is shown in Fig. 5. We can observe that the differ-
ence frequency is a function of time at different concentrations, and
the difference frequency outputted by the NO2 gas sensor using
dual track SAW device increases with increasing NO2 gas concen-
tration.
Furthermore, we found that the porous size of WO3 film has
a great influence on the response time and the recovery time of
the NO2 gas sensor using dual track SAW device. When the porous
172 C. Wen et al. / Sensors and Actuators A 159 (2010) 168–173
Fig. 5. Response characteristics of sensor for NO2 gas at different concentrations.
size of WO3 film is about 1–50 ␮m, the sensor has good response
time and the recovery time. When the porous size of WO3 film
is less than 1 ␮m, the sensor has a long recovery time as the gas
desorption time become longer. When the porous size of WO3
film is larger than 50 ␮m, the sensor has a poor response as the
WO3 film has a weak adsorption to NO2 gas. The sensor has no
obvious response when the porous size of WO3 film is larger than
100 ␮m.
4.3. Reproducibility
The reproducibility is a very important index for sensor. In
case of environmental monitoring, the threshold limit value (TLV)
for NO2 gas is 3–25 ppm, according to the safety standards given
by the American Conference of Governmental Industrial Hygien-
ist (ACGIH). Here, we examine the reproducibility by this sensor
response to the concentration of NO2 gas at 3 ppm in chamber. All
tests are performed at same experimental conditions, and the test
procedure is repeated five times using the same sensor. The test
results are shown in Fig. 6.
Fig. 6 shows the NO2 gas sensor using dual track SAW device has
good reproducibility in five times test. In addition, one can observe
that the sensor reaches a stable state at approximately 240 s, and
these test curves are coincident approximately at 260 s.
Fig. 6. Reproducibility of sensor for concentration at 3 ppm.
Fig. 7. Error curve of sensor in 60 days.
4.4. Stability
In order to examine the stability of the sensor, the NO2 gas sensor
using dual track SAW device is placed into the gas chamber with
NO2 gas concentration at 3 ppm. The experiment is performed for
60 days, and the gas concentration is measured every 24 h.
Fig. 7 shows the error curve of the frequency shift outputted
by the NO2 gas sensor using dual track SAW device. In 60 days,
the maximum measurement error is about 180 Hz, and the rela-
tive change of frequency is 0.82%. Moreover, the response speed of
sensor has not changed, thus the sensor has good stability in long
term.
In addition, the sensitive film is one of the important compo-
nents of the sensor, so its stability can affect the stability of the
sensor. In order to examine the stability of WO3 film, we heat up
the gas chamber with NO2 gas concentration at 3 ppm, and the
ambient temperature of gas chamber rises from 25 ◦ C to 80 ◦ C in
3 min. We measure that the change of frequency shift in measure-
ment track (IDT0 → MSC1 → Area1 → IDT1 ) is 0.185 kHz due to the
change of temperature, and the change of frequency shift in refer-
ence track (IDT0 → MSC2 → Area2 → IDT2 ) is 0.179 kHz due to the
change of temperature. The concentration error produced by the
mass loading of sensitive film approximates 0.83 × 10−3 ppm due
to the change of temperature. Hence, the frequency shift produced
by WO3 film does not change a lot in comparison with the frequency
shift produced by SAW device due to environmental interference.
It should be noted that the performance deviation produced by
sensitive film must be measured and consider provided that the
sensitive film is not stable to the temperature change, and other
environmental interference is relatively large.
5. Conclusions
In this paper, we have presented a NO2 gas sensor using dual
track SAW device. The WO3 film sensitive to NO2 gas was syn-
thesized and fabricated in measurement acoustic track of dual
track SAW device. The sensor has some advantages over SAW
sensor, i.e., the elimination of the external perturbations, the
suppression of the BAW and the improvement of the side lobe
rejection. The experiment results demonstrate that the sensor has
good response characteristics, reproducibility and stability. Fur-
thermore, the dual SAW gas sensor can be used to detect any
gases, supposing that the corresponding sensitive film can be
found.
 C. Wen et al. / Sensors and Actuators A 159 (2010) 168–173
Acknowledgements
This project is supported by the National Natural Science Foun-
dation of China (Grant Nos.60806043 and 60876038), the China
Postdoctoral Science Foundation (Grant No. 20090461278), the
Special Fund for Basic Scientific Research of Central Colleges,
Chang’an University (Grant No. CHD2009JC025), and the Key Labo-
ratory Foundation of Shaanxi Engineering and Technique Research
Center for Road and Traffic Detection.
References
[1] G. Zamboni, M. Capobianco, E. Daminelli, Estimation of road vehicle exhaust
emissions from 1992 to 2010 and comparison with air quality measurements
in Genoa, Italy, Atmos. Environ. 43 (2009) 1086–1092.
[2] E. Hawe, C. Fitzpatrick, P. Chambers, G. Dooly, E. Lewis, Hazardous gas detection
using an integrating sphere as a multipass gas absorption cell, Sens. Actuators
A 141 (2008) 414–421.
[3] A. Richter, J.P. Burrows, H. Nuc, C. Granier, U. Niemeier, Increase in tropospheric
nitrogen dioxide over China observed from space, Nature 437 (2005) 129–132.
[4] O.C. Jeong, S. Konishi, Three-dimensionally combined carbonized polymer sen-
sor and heater, Sens. Actuators A 143 (2008) 97–105.
[5] G. Hoek, B. Brunekreef, P. Fischer, J. vanWijnen, The association between air
pollution and heart failure, arrhythmia, embolism, thrombosis, and other car-
diovascular causes of death in a time series study, Epidemiology 12 (2001)
355–357.
[6] K. Wierzbowska, L. Bideux, B. Adamowicz, A. Pauly, A novel III–V semiconduc-
tor material for NO2 detection and monitoring, Sens. Actuators A 142 (2008)
237–241.
[7] C. Zamani, K. Shimanoe, N. Yamazoe, A new capacitive-type NO2 gas sen-
sor combining an MIS with a solid electrolyte, Sens. Actuators B 109 (2005)
216–220.
[8] A. Venema, E. Nieuwkoop, M.J. Vellekoop, W.J. Ghijsen, A.W. Barendsz,
M.S. Nieuwenhuizen, NO2 gas-concentration measurement with a SAW-
chemosensor, IEEE Trans. Ultrason. Ferroelect. Freq. Contr. UFFC 34 (1987)
149–156.
[9] C. Caliendo, P. Verardi, E. Verona, A.D. Amico, C.D. Natale, G. Saggio, M. Serafini,
R. Paolesse, S.E. Huq, Advances in SAW-based gas sensors, Smart Mater. Struct.
6 (1997) 689–699.
[10] A. Sadek, C.O. Baker, D.A. Powell, W. Wlodarski, R.B. Kaner, K. Kourosh, Polyani-
line nanofiber based surface acoustic waves gas sensors—effect of nanofiber
diameter on H2 response, IEEE Sensors J. 7 (2007) 213–218.
[11] A. Mauder, SAW gas sensors: comparison between delay line and two port
resonator, Sens. Actuators B 26 (1995) 187–190.
[12] V.I. Anisimkin, I.M. Kotelyanskii, V.I. Fedosov, C. Caliendo, P. Verardi, E. Verona,
Analysis of the different contributions to the response of SAW gas sensors, in:
Proceedings of the IEEE Ultrasonics Symposium, vol. 1, 1995, pp. 515–518.
[13] A.A. Oliner, Acoustic Surface Waves, Springer-Verlag, New York, 1978.
[14] A.J. Ricco, S.J. Martin, Thin metal film characterization and chemical sensors:
monitoring electronic conductivity, mass loading and mechanical properties
with surface acoustic wave devices, Thin Solid Films 206 (1991) 94–101.
[15] B.A. Auld, Acoustic Fields and Waves in Solid, Wiley, New York, 1973.
[16] E. Benes, M. Groschl, F. Seifert, A. Pohl, Comparison between BAW and SAW
sensor principles, IEEE Trans. Ultrason. Ferroelect. Freq. Contr. 45 (1998)
1314–1330.
[17] H. Becker, C. Rupp, M.V. Schickfus, S. Hunklinger, Multistrip couplers for surface
acoustic wave sensor application, IEEE Trans. Ultrason. Ferroelect. Freq. Contr.
43 (1996) 527–530.
173
[18] H. Xia, Y. Wang, F. Kong, S. Wang, B. Zhu, X. Guo, J. Zhang, Y. Wang, S. Wu,
Au-doped WO3 -based sensor for NO2 detection at low operating temperature,
Sens. Actuators B 134 (2008) 133–139.
[19] J. Kaur, S.C. Roy, M.C. Bhatnagar, Highly sensitive SnO2 thin film NO2
gas sensor operating at low temperature, Sens. Actuators B 123 (2007)
1090–1095.
[20] M. Penza, G. Cassano, F. Tortorella, Gas recognition by activated WO3 thin-film
sensors array, Sens. Actuators B 81 (2001) 115–121.
[21] C. Wen, C. Zhu, Y. Ju, Y. Qiu, H. Xu, W. Lu, X. Hu, Y. Wu, J. Liu, Dual track architec-
ture and time synchronous scheme for wavelet reconstruction processor using
SAW device based on MSC, Sens. Actuators A 147 (2008) 222–228.
[22] C. Wen, C. Zhu, Time synchronous dyadic wavelet processor array using surface
acoustic wave devices, Smart Mater. Struct. 15 (2006) 939–945.
[23] T. Takahashi, J. Tanabe, N. Yamada, H. Nakabayashi, Influence of working gas
pressure on structure and properties of WO3 films reactively deposited by rf
magnetron sputtering, J. Vacuum Sci. Technol. A 21 (2003) 1414–1418.
[24] M. Gillet, R. Delamare, E. Gillet, Growth, structure and electrical properties of
tungsten oxide nanorods, Eur. Phys. J. D 34 (2005) 291–294.
[25] R.E. Tanner, A. Szekeres, D. Gogova, K. Gesheva, Study of the surface roughness
of CVD-tungsten oxide thin films, Appl. Surf. Sci. 218 (2003) 162–168.
[26] J.V. Knuuttila, J.J. Vartiainen, J. Koskela, V.P. Plessky, C.S. Hartmann, M.M.
Salomaa, Bulk-acoustic waves radiated from low-loss surface-acoustic-wave
resonators, Appl. Phys. Lett. 84 (2004) 1579–1581.
[27] F.G. Marshall, C.O. Newton, E.G.S. Paige, Theory and design of the surface acous-
tic wave multistrip coupler, IEEE Trans. Microw. Theory Tech. A 21 (1973)
206–215.
[28] D.P. Morgan, Surface-Wave Devices for Signal Processing, Elsevier Science Pub-
lisher, Netherlands, 1985.
Biographies
Changbao Wen was born in Shanxi, China in 1976. He received his PhD degree in
physics electronics from Xi’an Jiaotong University, in 2007. From 1996 to 2001, he
was an electronic engineer in Zhong TiaoShan Corp. He has been a faculty member
of School of Electronics and Control Engineering, Chang’an University. His current
research interests focus on SAW device, sensor and signal processing.
Changchun Zhu was born in 1936. He is now PhD tutor and professor of Xi’an
Jiaotong University, and the director of Institute of Vacuum Microelectronics and
MEMS. He has been engaged in research works on vacuum microelectronics and
semiconductor devices, SAW and C-nanometer tube technology, etc. in recent years,
more than 300 papers have been issued in scientific publications and conferences
of homeland and abroad, and ten patents have been possessed. He has won eight
awards above provincial/ministerial level and many other awards.
Yongfeng Ju was born in Shaanxi, China in 1962. He received his BS degree from
Chongqing University, China, in 1989, MS degree from Xi’an Jiaotong University, in
1994, and PhD degree from Chang’an University, in 2006. He is now a professor in
School of Electronics and Control Engineering of Chang’an University. His current
research interests focus on traffic intelligent control engineering, electronic devices
and signal processing.
Hongke Xu was born in Shaanxi, China in 1963. He received his PhD degree from
Chang’an University, China, in 2006. He is now a professor in School of Electronics
and Control Engineering of Chang’an University. His current research interests focus
on signal processing and traffic intelligent control engineering.
Yanzhang Qiu was born in Shaanxi, China in 1962. He received his BS degree from
Chang’an University, China, in 1989. He is now an associate professor in School of
Electronics and Control Engineering of Chang’an University. His current research
interests focus on signal processing, electrical and electronics devices.