X-ray Fluorescence Spectrometer

Supermini200
Maintenance Manual

Rigaku Corporation

ME1A-40 20170608
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1. MAINTENANCE
1. MAINTENANCE ............................................................................................. 1

GENERAL ............................................................................................................................. 1

1.1 ANALYSIS CONTROL ..................................................................................................... 2

1.1.1 PHA ADJUSTMENT .................................................................................................. 2
1.1.2 EXECUTION OF CHECK ANALYSIS ........................................................................ 7
1.1.3 EXECUTION OF DRIFT CORRECTION.................................................................... 8
1.1.4 REGISTRATION OF LIBRARY .................................................................................. 9

1.2 STANDARD ACCESSORIES ......................................................................................... 11

1.2.1 STANDARD SAMPLES ........................................................................................... 11
1.2.2 PARTS AND CONSUMABLES FOR MAINTENANCE.............................................. 11
1.2.3 TOOLS ................................................................................................................... 12
1.2.4 CONSUMED AND DETERIORATED PARTS........................................................... 12

1.3 PERIODIC INSPECTION ............................................................................................... 13

1.3.1 PERIODIC INSPECTION SUPPORT SOFTWARE .................................................. 13
1.3.2 PERIODIC INSPECTION ITEMS ............................................................................ 14

1.4 PROCEDURES FOR MAINTENANCE ........................................................................... 16

1.4.1 PLACE OF COMPONENTS AND NAMES............................................................... 16
1.4.2 CHECK AND CLEANING ........................................................................................ 17
1.4.3 REPACEMENT OF CONSUMABLES AND DETERIORATED PARTS...................... 23
1.4.4 POINTS TO CHECK VACUUM PUMP..................................................................... 25
1.4.5 AFTER WORK COMPLETION ............................................................................... 29

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i-2 Supermini200 Maintenance Manual

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GENERAL
Described in this chapter are items necessary to keep and control the quality of the product.

In Supermini200, PC (Proportional Counter) can be chosen out of “F-PC (gas flow type)” and
“S-PC (shielded type)” as an option at the time of purchase.

In the case of equipment with “S-PC”, P-10 gas system is not carried.
The operation, work, etc. about P-10 gas and PC window which have been described with this
instruction manual are unnecessary.

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1.1 ANALYSIS CONTROL

The analysis control means the PHA adjustment, check analysis, drift correction and so on in
the quantitative analysis. Select the Control button on the “Sample ID Setting” screen and set
sample IDs.

Analysis Control Description

PHA Adjustment Preparation for qualitative/quantitative analysis
Check Analysis Preparation for quantitative analysis
Drift Correction
Quantitative application setup and analysis preparation
Sample
Library Sample Spectrometer sensitivity setup

1.1.1 PHA ADJUSTMENT

The PHA adjustment must be executed before daily analyses. In the case of 24-hour continual
analyses, the PHA adjustment should generally be carried out once a day. After the P-10 gas
cylinder or PC window is exchanged, the energy axis must be readjusted. (In this case, adjust
the gain according to “Gain Adjustment of Detector” on page 1-4.) However, the axis is
ordinarily stable and does not shift.

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The PHA adjustment should be carried out 30 minutes or more after aging is completed.
Adjustments are made for both detectors using the PHA adjustment samples. The PHA
adjustment can be started from the Analysis menu and the Spectrometer Startup menu.

 Startup From Analysis Menu

Since the system has two detectors, the PC and SC, set IDs for both of them.

 1. Click Analysis on the menu.

 2. Select [Edit]  [Add New ID]  [2:Sample ID].
 3. Click Control .
 4. Enter a sample name in the “Sample information” frame if necessary.
 5. Set an operator name in the “Sample information” frame if necessary.
 6. Select <PHA adjustment> in the “Analytical condition” frame.
 7. Select <PC> or <SC> for the code name.
 8. Click OK .

 Startup From Spectrometer Startup Menu

The PHA adjustment can also be started from the Spectrometer Startup menu. Its procedure
will be described below. The detectors for the SC and PC systems can be adjusted continually.
In the case of this screen, because aging can be done after the X-rays are turned on, an interval
till a PHA adjustment can be set. Set the interval to zero to execute a PHA adjustment
immediately.

 1. Put the PHA adjustment samples on arbitrary sample positions on the turret.
 2. Click Startup / Shutdown on the menu.
 3. Select [Spectrometer Startup].
 4. Select <Adjust PHA> under “PHA”.
 5. Set the positions where the PHA adjustment samples are placed for the sample position.
 6. Select <PC> for the detector.
 7. Select <SC> for the detector.
 8. Set an interval till an adjustment.
 9. Click Start .

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 Gain Adjustment of Detector

When the detector high voltage is changed, the gain for X-ray pulses is changed. The peaks of
differential curves measured by the PHA scan are usually observed at 200 for the first order line.
When the pulse height is shifted too much and cannot be adjusted automatically, the detector high
voltage must be adjusted.
The high voltage can be adjusted on the “Test Measurement” screen and the procedure of the
adjustment is shown below:

Start

Execute PHA scan

Check peak position

Yes
Peak is near 200?
No
Adjust detector gain

End

See “l. Test Measurement” in “5.2 Maintenance” in the Supermini200 instruction manual for
detailed operation.
To start [Test Measurement], operate as follows:

 1. Click Maintenance on the menu.

 2. Select [Test Measurement].

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 Execute PHA Scan

Check the peak position by the PHA scan measurement. The PHA adjustment sample can be
used to check the differential curve.
Select the following measuring line for each detector for the PHA scan:

Detector Line
SC Sn-KA
PC Si-KA

 1. Click in the middle right part of the screen.

 2. Select [Meas. Cond]  [Spectrum...] and select a measuring line.
 3. Select [Meas. Cond]  [Setting...].
 4. Change the measuring condition and sample position if necessary.
 5. Click Start .

 An example of a result of the PHA scan is shown below:

Read the rough peak position of the differential curve. When the PHA adjustment is correctly
made, the peak position is located around 200.

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 Adjust Detector Gain

The gain of the detector is adjusted by changing the voltage applied to the detector. Operate as
follows for the gain adjustment:

 1. Select [Control]  [Detector Gain Adjustment...].

 2. Select a detector to adjust from <SC> and < PC>.
 3. Select an adjustment method and a relative gain.

 4. Click Start to change the gain.

The relative gain is the ratio of the changed gain to the current gain. For example, when the
peak position under the current gain is 100 and 200 is the peak position after an adjustment, the
relative gain is 2.0. The values at the right side of relative gains in parentheses are base voltages
after an adjustment.
After the detector gain has been changed, carry out a PHA scan again and make sure that the
peak is located around 200.

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1.1.2 EXECUTION OF CHECK ANALYSIS

The check analysis is carried out to make sure whether prepared calibration curves are in
normal operation or not. Ordinarily the same one sample is measured for assessment. By
executing the check analysis for the same sample several times a day, X-R control charts can
be drawn to check the relationship between the average values and ranges of analyzed values.
For the setting procedure for check samples, see <4.2 h. Setting of Analysis Control
Information> in the instruction manual.

 1. Click Analysis on the menu.

 2. Select [Edit]  [Add New ID]  [2:Sample ID].
 3. Click Control .
 4. Select a sample position.
 5. Enter a sample name if necessary.
 6. Set an operator name if necessary.
 7. Select <Check analysis> in the “Analytical condition” frame.
 8. Select a folder that has an application for “Folder” in the “Analytical condition” frame.
 9. Select a limit range name.
 10. Set the number of repetitions for “Repeat times”.
 11. Click OK .

If necessary, an output format that is a combination of a file format and a transfer

method can be designated on the “Result output” list. When an output format that has a
transfer method other than RS232C is selected, enter a file name.

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1.1.3 EXECUTION OF DRIFT CORRECTION

When the number of standard samples and the number of analyzed components are small,
calibration curves can be prepared each time before analyzing unknown samples. However, in
the ordinary X-ray fluorescence analysis, calibration of X-ray intensities alone is carried out
before analyzing unknown samples. This calibration of X-ray intensities is called the drift
correction. By calibrating X-ray intensities using several samples to use the same calibration
curves for a long period, analysis time can be shortened. When the drift correction is
insufficient, calibration curves must be re-created. For the setting procedure for the drift
correction, see <3.2 f. Measurement of Standard Samples> in the instruction manual.

 1. Click Analysis on the menu.

 2. Select [Edit]  [Add New ID]  [2:Sample ID].
 3. Click Control .
 4. Select a sample position.
 5. Enter a sample name if necessary.
 6. Set an operator name if necessary.
 7. Select <Drift correction> in the “Analytical condition” frame.
 8. Select a folder that has an application for “Folder” in the “Analytical condition” frame.
 9. Select a limit range name.
 10. Select an appropriate item for “Update Selection”.
 11. Set the number of repetitions for “Repeat times”.
 12. Click OK .

Update Selection

“Update Selection” is designated for calculation control such as preparation for calculation, data
storage and calculation instructions to obtain various coefficients in parallel with a series of
measurements. By setting “Update Selection” properly, this calculation control can operate
correctly.

Update Selection Description

Flag for the first sample in a series of ID lines.
First sample
Initializes calculation information for each analysis type.
Flag for the last sample in a series of ID lines.
Last sample
Executes calculation using a series of measured results.
Intermediate Flag for an ID line other than the above.

If <Last sample> is not measured, coefficients will not be updated.

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1.1.4 REGISTRATION OF LIBRARY

Procedure to Register Library

The operation flow to register each type of library is shown below. The common library uses
standard substances and the matching library uses standard samples. Except for that, the same
procedure can be used for those types of libraries. For both types of libraries, library drift
correction to calibrate X-ray intensities is registered using other creating procedures.

 1. Click Utility on the menu.

 2. Select [Sensitivity Library].

 Flowchart to Create Sensitivity Library

Start

Common or matching
library? No
Yes
Create measuring condition

Prepare library samples Prepare drift correction samples

Measure library samples Measure drift correction samples

Update sensitivity Update intensities

End End

When setting new library samples, see the instruction manual.

Item Section in Instruction Manual

Create measuring condition 3.5 b. Measuring Condition
Prepare library/drift correction samples 3.5 c. Library Sample
Update sensitivity 3.5 e. Sensitivity Calibration

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Execute Library Sample Measurement

Library samples are measured to register or update a sensitivity library (a collection of

spectrometer sensitivity values) used in the FP quantification method.

 1. Click Analysis on the menu.

 2. Select [Edit]  [Add New ID]  [2:Sample ID].
 3. Click Control .
 4. Select a sample position.
 5. Enter a sample name if necessary.
 6. Set an operator name if necessary.
 7. Select <Library sample> in the “Analytical condition” frame.
 8. Select a library type.
 9. Select a code name.
 10. Click OK .

When a measurement is made for a newly created library, sensitivity calibration must be
carried out. For the sensitivity calibration, see <4.5 e. Sensitivity Calibration> in the
instruction manual.

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1.2 STANDARD ACCESSORIES

These are supplied with the product.

1.2.1 STANDARD SAMPLES

Used for the instrument (precision) control.
 Standard sample Cu (Cat. No.3399H022)
 Standard sample acrylic (Cat. No.3399H023)
 Standard sample Ti (Cat. No.3399H024)
 Standard sample A1070 (Cat. No.3399H025)
 PH adjustment sample (Cat. No.3399H029)
 Glass monitor sample （DCS-G1）

1.2.2 PARTS AND CONSUMABLES FOR MAINTENANCE

 Oils, Greases and Related Products

These are lubricants used for daily maintenance work.
Name Specification Qty Location/Purpose

ISOFLEX TOPAS NB Sealing compound for

Grease 1 O-rings (sealing in
52（5gr）
vacuum)

 Spare Parts

Name Specification Qty Location/Purpose

F-PC Window Cat No.3199B020 1 F-PC

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1.2.3 TOOLS

These are used for daily maintenance work and housed in a toolbox.
When doing maintenance work, use tools suitable for that work and parts to be handled for
safety and to prevent damage to parts etc.

 Supplied Tools and Utensils

Name Specification Qty

Hex Driver D-3 (for M4 screw) 1
Hex Wrench Nominal 2 1
Nominal 2.5 1
Nominal 3 1
Nominal 4 1
Phillips Screwdriver No.1300 No.1 (for M2 - M2.6) 1
No.1300 No.2 (for M3 - M5.5) 1
Slotted Screwdriver No.1000-75 (for 24) 1
Monkey Wrench UM24 1
Tool Case transparent vinyl 1
(Houses the above tools.)

1.2.4 CONSUMED AND DETERIORATED PARTS

These are parts that are consumed or deteriorated in the course of the operation of the
instrument.
Order necessary articles from us.

Name Specification Qty Location/Purpose

F-PC Window Cat No.3199B020 1 F-PC
Vacuum pump
Cat No.3299C001 (1L)
Vacuum Pump Oil 1 (The consumption is
Cat No.3299C002 (4L)
about 1L.)
Vacuum Pump Oil Mist
OMT200A 1 Vacuum pump
Trap

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1.3 PERIODIC INSPECTION

1.3.1 PERIODIC INSPECTION SUPPORT SOFTWARE

Jobs displayed on the “Maintenance Check List” screen are software items to support the
periodic inspection of the spectrometer.
The “Maintenance Check List” software displays items for the daily inspection of the
spectrometer so that the administrator of the spectrometer can check the contents of work on
the screen. For the details of the operation of “Maintenance Check List”, see “5.2
MAINTENANCE” in the instruction manual. Only the outline of the operation is described
below:

 1. Click Maintenance on the menu.

 2. Select [Spectrometer Test]  [Maintenance Check List].
 3. Select a check period.

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1.3.2 PERIODIC INSPECTION ITEMS

Described below are items that the periodic inspection support program displays on the screen
and should be checked periodically or maintained non-periodically.
Periodic inspection items are classified by the check period.

a. Daily Check

Item Contents
PHA (SC, PC)
Check that PHA adjustments are completed normally.
adjustment
The temperature should be 15 to 28C. The daily variation should
Room temperature
be within +/-2C.
Spectrometer check Check the spectrometer status using “Self Diagnostics”.
Drift correction for
Use the Analysis program.
quantitative analysis
Quantitative analysis of
Use the Analysis program.
check sample
Flow rate of He gas (in
Check that the ordinary flow rate is 0.5 L/min. or more.
case of He type)
Cleaning of sample
Clean up the sample holder when soiled.
holder

b. Weekly Check

Item Contents
Residual pressure of
Replace the cylinder when the pressure is 0.5 MPa.
P-10 gas
Residual pressure of
Replace the cylinder when the pressure is 0.5 MPa.
He gas
Drift correction Check the change of drift correction coefficients using “Record
coefficients for Drift Correction Result”.
Results of check Check analyzed results using “Record for Check Analysis
sample analyses Result”.

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c. Monthly Check

Item Contents
Check the oil level, oil leak and whether or not the pump is
Vacuum pump
abnormally hot (the main unit is 65C or higher).
Check the change of the resolution of the detector using
Resolution of detector
“Record for PHA Adjustment Result”.
Checking and cleaning
O-rings in the sample chamber and under the sample stage
of sample chamber
Save user data when an analysis condition has been changed or
Data saving
in a similar case.

d. Six-Monthly Check

Item Contents

Cooling fan Cleaning of the fan filter

Updating drift correction

Measurement of the drift correction samples
of sensitivity library

e. Non-Periodic Maintenance

Item Contents
Replacement of PC
Execute the PC maintenance program.
window
Replacement of P-10 gas When the pressure is 1MPa, the system can be operated for about
cylinder 20 days. (40L cylinder)
Replacement of He gas When the pressure is 1MPa, the system can be operated for about
cylinder 25 hours. (40L cylinder)
Adjustment of detector When a PHA adjustment is impossible, make an adjustment
gain using the test measurement program.
Replacement of X-ray
If the X-ray tube is faulty, replace it.
tube

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1.4 PROCEDURES FOR MAINTENANCE

1.4.1 PLACE OF COMPONENTS AND NAMES

Place of components and its names are shown hereunder.

②Top cover panel

⑤Sample chamber cover panel
①ASC cover panel
⑥X-ray indication light

③Fan filter

④Power switch
⑧Turret ⑦Power indication
light

No. Name Function

① ASC cover panel To protect samples on the turret

② Top cover panel
③ Fan filter
④ Power switch
⑤ Sample chamber cover panel
⑥ X-ray indication light
⑦ Power indication light
⑧ Turret
Removable for inspection/maintenance
To prevent dust coming into the instrument
Power switch for the instrument
Open this cover when the sample chamber is maintained.
Lighted up when X-rays is generated.
Lighted up when power is ON.
12 sample holders can be loaded.

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1.4.2 CHECK AND CLEANING

Periodic check and cleaning of the sample chamber inside and the sample stage are
recommended as those parts may be soiled with sample material according to its sort and
installation environment.

Following parts will be needed to be cleaned up.

Parts to check and cleaned up Procedure
・Sample holder See 1.4.2.a
・Sample stage See 1.4.2.b
・O-ring of sample chamber See 1.4.2.c
・Sample turret See 1.4.2.d
・Fan filter See 1.4.2.e

Software function for maintenance of the sample chamber

Software function for maintenance of the sample chamber can be used for cleaning or
maintenance work of the chamber.
The outline of preparations that the sample chamber maintenance function makes is as
follows:

X-Ray Generator Turned on  Turned off

Analysis Chamber Atmosphere Vacuum, Helium  Air, Helium

Sample Chamber Maintenance

 1. Click Maintenance on the menu.

 2. Select [Spectrometer Test]  [Sample Chamber Maintenance].

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 3. Click OK .

 4. Confirm that a message “Preparation for sample chamber completed…….” is shown.

 5. Click OK .

 6. Terminate the ZSX Guidance.

 7. Switch off the power of the main instrument

 8. Open the sample chamber cover panel, and start a maintenance work.

For the procedure for cleaning and replacement, see that part in the maintenance
manual.

a. Cleaning of sample holder

Dirt on the face and the back of the sample mask should be wiped off with clean cloth or soft
paper soaked with alcohol.
Especially, when sample powder, etc. is stuck on the back of the sample mask, it must
thoroughly be removed.

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b. Cleaning of sample stage

Prior to the cleaning work, execute the “Sample Chamber Maintenance” program.

1. After execution of the “Sample Chamber Maintenance”, hold the sample chamber cover
panel as the figure below and open it.

Sample chamber
cover panel

Top cover panel

The top cover panel can also be removed to make the work easy. Lift it up simply to
remove it as it is stuck with magnets.

Magnet

Care must be taken not to drop anything into the instrument inside when the top cover
panel is removed.

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2. Wipe the sample stage with soft cloth or the like soaked with alcohol.

Sample stage

Under the sample stage

There are important parts such parts like X-ray tube, etc. under the sample stage. Do not
touch them. Also do not drop anything into the sample stage as it will affect to analysis
precision.

3. Loosen the sample stage fixing bolts (2 pieces of A shown below) with a hexagonal
wrench.

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4. Open the sample stage. Bolts are kept on the stage not to fall down.
5. Wipe the O-ring and its contact surface ( parts shown below) with soft cloth or the
like soaked with alcohol.

O-ring

O-ring contact
surface

6. After cleaning, apply the grease (ISOFLEX TOPAS NB 52) of standard accessory to the
O-ring thinly and evenly.

Pay attention not to give any crack to the O-ring.

7. Close the sample stage back, and fix it with the bolts (2 pieces) with a hexagonal wrench
securely.

Fixing bolts must be tighten securely. Looseness of the olts will affect to the analysis
precision.

8. Put back the sample chamber cover panel and the top cover panel as before.

Be careful not to your finger bit when the sample chamber cover panel is put back.

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c. Cleaning of sample chamber O-ring

Prior to the cleaning work, execute the “Sample Chamber Maintenance” program.

Clean up the O-ring of the sample chamber thoroughly. Wipe it with soft cloth or the like
soaked with alcohol. Also wipe the contact surface in the same way.
After cleaning, apply the grease (ISOFLEX TOPAS NB 52) of standard accessory to the
O-ring thinly and evenly.

O-ring

Sample chamber lid

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d. Cleaning of sample turret

There is a holder sensor under the turret. Clean up the turret without dropping powder or
foreign material into the holes bored through the turret board.

Place of holder sensor

Hole
(12 positions)

e. Cleaning of fan filter

For your safe, terminate the ZSX Guidance and switch off the power of the instrument.
Remove the fan filters located on the right side cover panel and rear cover panel.

1.4.3 REPACEMENT OF CONSUMABLES AND DETERIORATED

PARTS

Replace following parts as occasion demands.

Replacement parts
・P-10 gas cylinder
・Vacuum pump oil
・Oil mist trap for vacuum pump

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Replacement of P-10 gas cylinder

 Timing of replacement of P-10 gas cylinder

Replace the cylinder with a new one when the residual pressure came down to 0.5MPa.

 Procedure for replacement of P-10 gas cylinder

1. Turn the X-rays off, and switch off the power of the instrument.

2. Close the source valve completely.

3. Disconnect the quick connector.

4. Remove the pressure regulator with the pressure gauge form the cylinder by means of
loosening the hexagonal cap nut with big wrench.

5. Remove the valve cover cap of the new cylinder and mount securely the pressure
regulator with pressure gauge removed in step 4.
Mouthpiece of the cylinder may be covered with a plastic cap to keep it clean. Remove
the cap if it is the case.

It is very danger if the gas blows up from the mouthpiece. Never direct the
mouthpiece to human body, especially to face.
Also do not bring your face close to the pressure gauge.

6. Connect the quick connector.

7. Open fully the source valve.

Pressure gauge Source valve

Mouthpiece
Quick
connector

Pressure regulator
with pressure gauge

P-10 gas tube

Valve cover cap

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1.4.4 POINTS TO CHECK VACUUM PUMP

1. Switch off the power for the instrument before maintenance of the vacuum pump.
Never turn the power on during maintenance. It causes electric shock or injury.
2. Temperature of the pump is high right after use. Wait until it goes down to avoid a
burn.

【Precaution for inspection】

・Check of oil amount and oil color can be made with the oil level gauge.
・Oil may easily leak on the floor when checking, supplying, cleaning and replacing oil,
and it makes the floor slippery. Work is to be made carefully.

Check items and contents

Contents of check items are shown below. Action is to be referred each forthcoming
description.

Check interval Object Contents Action

Amount is in the range?
Color of oil on the level
Oil gauge is normal?
(Reddish brown or white
turbidity is abnormal.)
Sound Abnormal sound or
Daily
Vibration vibration?
Surface temperature normal?
Surface
(Higher than 65deg.C is
temperature
abnormal.)
Leakage from bearing, plug,
Oil leakage
seam of case, etc.?
3000 hours use or Air intake
Dust is choking?
6 months after oil wire net
replacement Oil Renew even if no problem.
See ”Oil supply”.
See “Oil renewal”.
(When abnormality is
observed or 6 months
passed.)
Stop using the instrument
and contact your local
agent or Japan directly.
Do not intend to do
anything by yourself.
See “Cleaning of wire
net”.
See “Oil renewal”.

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a. Oil supply (Supplement of oil)

1. Set the atmosphere of analysis chamber of the instrument to air, then switch off the power.
(Power of the vacuum pump is also shut off automatically.)
2. Wait for cooling down of the pump.

3. Remove the cap of oil port and supply the pump oil specified. (See the figure below.)

4. Do not forget to put the cap back.

Oil level is to be managed within the range of oil level gauge even when the pump is
under operation.

Oil port
Oil amount in the oil level gauge Intake port

Oil level
gauge

Pump

Drain plug

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Oil port cap Intake port

Exhaust port
(Drawing is with oil
mist trap)

Oil level gauge

Drain plug

Oil filter cap

b. Oil renewal

1. Set the atmosphere of analysis chamber of the instrument to air, then switch off the power.
(Power of the vacuum pump is also shut off automatically.)
2. Wait for cooling down of the pump.

3. Remove the vacuum piping and make the pump independent.

4. Prepare a pail or a container (bigger than 1 litter) to receive the old oil and put it under the
drain plug.
5. Remove the oil port cap, then remove the drain plug (with O-ring). Oil comes out. Drain
the old oil completely.

6. Pour new oil from the oil port after putting the drain plug (with O-ring) back to the pump.

7. Put the oil port cap back.

Spilled oil must be wiped off so that slipping down or mistake to think oil leakage
will not take place.

In case of awfully dirty pump oil

It may be difficult to get vacuum good enough even after renewal of the pump oil if the
old oil is awfully dirty. In this case, drive the pump for several minutes, then drain and
renew the oil once again.
Good vacuum may still not be gotten if dirt in oil is terribly heavy such that oil sludge is
thick at the bottom of the pump. Overhaul of the pump will be required in such a case.
Consult with Rigaku’s local agent or Rigaku Japan for pump overhaul.

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c. Cleaning of wire net

A wire net is seen in the intake port when the vacuum pipe is removed. Take it out and
clean it up using air blow or solvent.

d. Cleaning of oil filter

This oil filter is to remove foreign material or sludge in the pump oil.

≪Timing of check≫

Check the oil filter first when the pump performance (ultimate vacuum degree, etc.)
becomes bad or pump rotation sound becomes high.
Check once every month is recommended even if nothing seemed bad.

≪How to clean≫

Drain the oil referring to the steps of “Oil renewal”.

Remove the two screws of the oil filter cap and draw out the filter joint. A pipe-shaped
filter will be seen at the tip of the filter joint. Clean it up with air blow or solvent.
Put everything back as before. Do not forget to put the O-ring back.
Pour new oil referring to the steps of “Oil renewal”.

e. Replacement of oil mist trap

The oil mist trap is to separate and collect the oil component from the oil mist in the
exhaust air and oil drop and return it to the pump case.
As it is choked with dust, etc. during operation, periodical replacement is recommended.

≪Timing to replace≫
It depends on the environment and operation condition, but it is reasonable to think every
1,500 ~ 2,000 hours of operation is the time to replace the oil mist trap.

≪How to replace oil mist trap≫

・Removal
Turn the trap clockwise to remove.
・Installation
Turn a new trap counter clockwise to install and fasten it.

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 MAINTENANCE

1.4.5 AFTER WORK COMPLETION

Restart the instrument following the steps below.

1. Connect all peripherals.

2. Switch the power of the main instrument ON.

3. Check flow of the P-10 gas is normal.

4. Start up the ZSX Guidance and initialize the system.

5. Turn the X-ray ON.

6. Execute the X-ray tube aging, and wait for its end.

7. Carry out the PHA adjustment 30 minutes later. Now it is ready for analysis.

Supermini200 Maintenance Manual 29

MAINTENANCE

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30 Supermini200 Maintenance Manual