High Q-factor Electro-Acoustic Cavity Resonator
for Sensing Applications
Mujahid Shah Muhammad Amin
Faculty of Electrical Engineering, College of Engineering,
Universiti Teknologi Malaysia Taibah University, Salam Road,
81310 UTM Skudai, Johor, Malaysia Madinah 41411, Saudi Arabia
shah.mujahid@graduate.utm.my masharif@taibahu.edu.sa
Mokhtar Harun
Faculty of Electrical Engineering,
Universiti Teknologi Malaysia
81310 UTM Skudai, Johor, Malaysia
mokhtar@fke.utm.my
Abstract—Sound waves are sensitive to environmental pertur-
bation effects and therefore offer great potential for non-invasive
sensing of background temperature, pressure or bio-chemical ma-
terials. This paper presents a robust design of electromechanical
cavity that can supports high Q resonance for the incident sound
waves. The electromechanical cavity consists of subwavelength
sized tube residing on a piezoelectric substrate. The cavity utilizes
piezoelectric base to absorb and convert incident sound waves to
resonant electric currents. At the same time the residue resonant
acoustic energy is also back reflected in the form of scattered
acoustic fields. The resonator is specially designed to enhance
the sound matter interactions towards the base of the cavity and
therefore increase the sound energy harvesting many folds. The
proposed design of electromechanical resonator cavity system
offers potential for low cost and ultrasensitive environmental
sensing applications.
Index Terms—Resonance, Acoustics, Sensing, MEMs, Cavity
I. I NTRODUCTION
The useful characteristics of resonances can be exploited
in mechanical waves, electrical waves and acoustic waves
etc. The resonance phenomenon is typically interpreted with
many classical physics theories and utilized by scientist and
engineers to build various devices [1]–[3]. In this context,
metamaterials provide a unique platform where resonances
are coupled to achieve several interesting applications rang-
ing from lasing, switching, imaging, sensing, etc [4]–[8].
Metamaterials are composed of manmade structured materials
that provide unique characteristics for wave matter interaction
that is not offered by conventional materials [9]–[11]. The
metamaterials often rely on carefully tuned resonances at
subwavelength scale to provide such unique characteristics.
In the last few years, there is growing interest in the
scientific community to use periodically structured materials
that can efficiently interact with light or sound waves in
unique way [12]–[14]. This paved way for research in photonic
and phononic crystals that exhibit bandgap for subwavelength
waves [12]. The bandgap characteristics of such periodic struc-
tures are also validated experimentally [13]. The dispersion
Omar Siddiqui
College of Engineering,
Taibah University, Salam Road,
Madinah 41411, Saudi Arabia
osiddiqui@taibahu.edu.sa
engineering through bandgaps in such periodic structures are
capable to filter waves, provide support to build invisibility
cloaks, steer beams of wave etc [10], [11], [15], [16]. One
of the such useful applications of periodic structures is to be
able to focus the light or sound waves beyond diffraction limit
[17]. All these applications rely on the dispersion engineer-
ing through carefully designed periodic structures. Dispersion
engineering allows spectral utilization and provides basis for
applications where efficient control over wave propagation is
required [18], [19]. But dispersion engineering for classical
waves such as sound and light is no longer limited to periodic
structures only. The resonances in metamaterials are now a
days utilized to achieve dispersion in wave propagation [20]–
[23].
The compact metamaterials can enhance wave matter inter-
action and contribute to increase the efficiency of harvested
renewable energy i.e., convert acoustic energy to electric
current. In this context, the suppression of sound radiation
to minimize echo and thus reducing noise levels are some of
the well-known applications of acoustic absorbers [24], [25].
There are many kinds of sound absorbers that are built to
provide insulation of sound waves with negligible residue.
Furthermore, resonant acoustic absorption if integrated with
energy harvesting subsystem can be used to build sensitive
acoustic sensors. Unlike the upper limit on the speed of light
due to theory of relativity; the speed of sound waves in any
dense substance generally exceeds sound speed in air. It would
be interesting to utilize resonant sound propagation in highly
dispersive medium [26], [27]. The acoustic resonators are
designed to generate dispersive sound propagation effects [22],
[28]. The increase in sound-matter interaction due to dispersive
sound offers promising applications in non-invasive sensing of
background temperature, pressure or bio-chemical gases.
This paper provides a novel sensing method that utilizes
resonant sound matter interaction through high Q-factor acous-
tic cavity. The electromechanical cavity constitutes a sub-
wavelength sized cylindrical tube placed on a piezoelectric

p 1.5
ht
z Tube Resonator
Exterior Wall
x d
y t
hp
e- e-
e- e- e- e- e- e-
-
e e- e- e-
Piezoelectric material (PZT – 5H)
Fig. 1. Schematic illustration of electro acoustic cavity resonator. Geometry
is not drawn in scale.
substrate. The piezoelectric base couples to the incident sound
wave to generate resonant electric currents. It is shown that
the resonant dispersion increases the energy harvesting through
piezoelectric effect by many folds. The resonant sound waves
originating from acoustic resonator are also back scattered to
interfere with incident sound waves.
In the following sections, first the illustration of the sensing
setup including the cylindrical resonator tube situated on a
piezoelectric base is provided. Next, the spectral response of
the electro acoustic resonator system is discussed. Finally,
the suggested application of the spectral response of electro
acoustic cavity is provided to build a low cost sensing system.
II. D ESIGN OF E LECTRO -ACOUSTIC R ESONATOR
Figure 1 provides a schematic illustration of a hollow core
cylindrical shaped tube residing on piezoelectric substrate. The
walls of the tube are considered as hard with rigid boundary
conditions are enforced on its surface. The height of tube
is chosen to provide resonance corresponding to λ = 4d of
the desired wavelength. The geometrical parameters described
in Fig. 2(a)-(b) are cylinder height ht = 2.5 cm, diameter
d = 15 mm, wall thickness of t = 1 mm respectively. The
thickness of piezoelectric substrate is assumed to be hp = 2
mm of width 20 mm. A rigid exterior wall of inner diameter
20 mm is surrounding the tube resonator. The density of air
and the speed of sound in air are ρ = 1.29 kg/m3 , cs = 343
ms−1 respectively. The piezoelectric substrate is made of
PZT-5H material. Roller boundary condition is used to fix
the bottom boundary of the piezoelectric material to prevent
vertical vibration along z-axis.
The finite element program COMSOL Multiphysics is used
to carry out the numerical characterization of acoustic fields
interaction with piezoelectric material. Acoustic fields are
[Pa]
2
|p|
1
0.5
(a) (c)
[Pa]
0
4
2
Ðp
0
-2
-4
(b)
3218 3219 3220 3221 3222 (d)
Frequency (Hz)
Fig. 2. (a) Magnitude p and (b) phase ∠p in pascal [Pa] of acoustic pressure
fields above the tube resonator. Cross section of pressure field profile of
the tube resonator at (c) 3222 Hz and (d) resonant frequency 3219.5 Hz
respectively.
assumed to be normally incident upon acoustic resonator.
The simulation model uses three different modules involving
acoustic, solid mechanics and electrostatics. The acoustic
module solves the wave equation for sound propagation in the
tube surrounding region. The solid mechanics and piezoelec-
tric modules are utilized to simulate the piezoelectric effect
inside the substrate. An inbuilt multiphysics coupling module
is used to couple between the three independent modules.
The structural symmetry of the cylindrical tube resonator
allows the 3D acoustic cavity to be modelled as 2D axially
symmetric space. Perfectly matched layer is used to terminate
the simulation space to mimic the effect of continuous space
behind the sound source.
III. R ESULTS
A. Resonant Acoustic Pressure Fields
The total acoustic pressure fields monitored above the tube
resonator is provided in Figs. 2(a)-(b). A dip in the pressure
field is observed at resonance frequency of 3219.5 Hz. A high
Q-factor resonance can be observed in the acoustic pressure
fields above tube resonator. The Q-factor of the resonant
reflection originating from the tube reaches 16000. However,
the simulation assumes lossless cavity and piezoelectric effect,
therefore the practical Q-factor may be lesser. It must be noted
that the resonant frequency in either case depends on the height
of tube i.e., f0 = cs /4h. Figure 2(c)-(d) provides the acoustic
pressure fields inside the tube resonator at 3222 Hz and 3219.5
Hz respectively. It is clear that highly concentrated acoustic
pressure fields at resonance frequency build up inside the
cavity resonator. A near acoustic pressure field of amplitude
± 100 [Pa] is achieved at resonance frequency of 3219.5
Hz. The high concentration of acoustic pressure fields can be
utilized for energy harvesting of ambient sound signals around
resonance frequency and sensing of background materials.
 2 C. Sensing through High Q-factor Resonator Cavity
The sensing principle is based upon the variation in sound
Electric Field [V/m]

speed due to temperature or density variation in the back-

1 ground air. Sound speed is very sensitive to minor variation
in environmental effects such as temperature, humidity or air
pressure [29]. The high Q-factor cavity can accurately sense
0
the speed of sound that in turn can be calibrated to such
environmental effects. To demonstrate the sensing mechanism
we vary the speed of sound in air region around the tube
-1
resonator, see Fig. 1. Figure 4(a) provides the variation in
(a) the spectral properties of induced current due to piezoelectric
-2 effect. As the speed of sound is increased from 330 [m/s]
3218 3219 3220 3221 3222 to 340 [m/s] a clear red-shift in the resonance spectrum is
Frequency [Hz] observed. This sharp change in the resonance peak is attributed
0.1 to highly concentrated sound pressure fields around the tube
resonator, as seen in Fig. 2(d). Figure 4(b) provides the
Current Density [mA/m ]

relationship between resonance peak and the sound speed

2

0.08
0.06
Stress [Pa]
-max 0 +max
0.04
(b)
0.02
0 electro acoustic cavity resonator. The proposed resonator can
3218 3219 3220 3221
Frequency [Hz]
Fig. 3. (a) Electric field inside the piezoelectric substrate at various frequen-
cies. (b) The current density (mA/m2 ) at a point inside the substrate generated
due to piezoelectric effect. Inset shows the shape deformation of piezoelectric
substrate due to applied stress at resonance frequency. Deformations in the
plate is not plotted to the scale. The distribution of stress upon the plate is
shown in colorscale. Colorbar is included to reference the stress distribution
between red and blue colors.
B. Resonant Piezoelectric Effect
The acoustic pressure fields incident upon the piezoelectric
material vibrates the piezoelectric substrate. Figure 3 shows
the deformation in the shape of piezoelectric plate due to
applied stress on its surface. The applied pressure upon the
piezoelectric substrate transforms the time harmonic mechani-
cal force to electric currents. Figure 3(a) provides the induced
electric field due to piezoelectric effect. The electric field
reaches ± 1.5 V near the resonance frequency and changes
phase exactly at resonance frequency point. Similarly, the
induced current due to piezoelectric effect is shown in Fig.
3(b). The current density produced due to applied stress
reaches a peak value of 93 µA/m2 . It is emphasized that the
induced electric current due to concentrated pressure fields
inside the tube is enhanced many folds.
in air. The sensitivity of the sensor can be determined by
finding gradient change in resonant frequency f0 as a function
of sound speed variation c, i.e., df0 /dc = −9.4. This sharp
sensor sensitivity can be utilized to build efficient sensors for
environmental perturbation effects including temperature and
pressure. High sensitivity of the sensor is also well suited for
gas sensing at relatively low cost.
IV. C ONCLUSION
This paper presents a robust design of a high Q- factor
3222
work as ultrasensitive sensor to detect minute changes in
the environmental characteristics. The dispersion in the cavity
resonator is capable to increase the energy harvesting through
piezoelectric effect by many folds. The high Q-factor of the
resonator suggest that the design can be utilized for building
electro acoustic sensing system. The proposed electro acoustic
resonator system offers promising applications in non-invasive
sensing of background temperature, pressure or bio-chemical
materials and gases. The theoretical predicted response of
the electro-acoustic sensor can be validated by low cost
experimental setup.
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