S1 - SiC

S1 - SiC - 4/13/2017 1
Indentation # 1
Indentation parameters
+ Standard + NHTX S/N: 01-06339 settings
Acquisition Rate : 10.0 [Hz] Approach distance : 2000 nm
Linear Loading Approach speed : 1500 nm/min
Max load : 50.00 mN Retract speed : 1500 nm/min
Loading rate : 100.00 mN/min Dz sensor in fine range
Unloading rate : 100.00 mN/min Stiffness Threshold : 500 µN/µm
Pause : 15.0 s Date : 4/7/2017
Hour : 1:07:12 PM
Indenters

Type : Berkovich
Serial number : B-P 69
Material : Diamond

Curves

75.0 1500.0

67.5 1350.0

60.0 1200.0

52.5 1050.0

45.0 900.0

37.5 750.0

30.0 600.0

22.5 450.0

15.0 300.0

7.5 150.0

0.0 mN 0.0 nm

0.00 s 10.00 20.00 30.00 40.00 50.00 60.00 70.00 80.00 90.00 100.00
Penetration depth Normal force
 75.0

67.5

60.0

52.5

45.0

37.5

30.0

22.5

15.0

7.5

0.0 mN

0.0 nm 150.0 300.0 450.0 600.0 750.0 900.0 1050.0 1200.0 1350.0 1500.0
Indentation

Analysis # 1
Method
Oliver & Pharr
Main results
HIT= 1282.7 MPa
EIT= 95.335 GPa
E*= 104.76 GPa
Hypothesis
hc out of calibrated range [18 nm, 653 nm]
Poisson's ratio(nu)= 0.30
Additional results
HVIT= 118.79 Vickers
CIT 0.05/30/15= 2.58 %
nIT= 8.21 %
Fmax= 50.00 mN
hmax= 1323.74 nm
S= 0.6993 mN/nm
hc= 1269.51 nm
hr= 1252.24 nm
hp= 1223.19 nm
m= 1.4062
Epsilon= 0.76
R2= 1.000
Ap= 38980723.63 nm²
Welast= 2026.48 pJ
Wplast= 22667.83 pJ
Wtotal= 24694.31 pJ
Er= 95.993 GPa
Indentation Images

trag1.