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3354 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 63, NO.

8, AUGUST 2016

A Short-Channel-Effect-Degraded Noise Margin


Model for Junctionless Double-Gate MOSFET
Working on Subthreshold CMOS Logic Gates
Te-Kuang Chiang, Senior Member, IEEE

Abstract— Based on the device and equivalent transistor model,


we present a short-channel-effect (SCE)-degraded noise mar-
gin (NM) model for junctionless double-gate MOSFET working
on subthreshold CMOS logic gate. The device parameters such as
the thick silicon thickness, thick gate oxide thickness, high doping
density, and short channel length can severely degrade the NM
due to serious SCE. By contrast, both the small subthreshold
slope η and the balanced transistor strength S can suppress the
NM degradation more efficiently. The required minimum supply
voltage Vdd,min for the subthreshold CMOS logic gate is derived
by the criterion of the NM larger than thermal noise to ensure
the correct logic gate operation. Being similar to drain-induced
barrier lowering, allowable NM corresponding to the minimum
channel length can also be uniquely controlled and determined
by the scaling factor according to the scaling theory.
Index Terms— Junctionless double-gate MOSFET (JLDGFET),
noise margin (NM), scaling factor, scaling theory, subthreshold
CMOS logic gate, subthreshold slope, transistor strength.

I. I NTRODUCTION

R ECENTLY, the demand for ultralow power design has


increased tremendously for all modern very large scale
integration (VLSI) applications due to the increasing prob-
lems of leakage currents, thermal management, and reliability.
To achieve the ultralow power consumptions in digital cir- Fig. 1. Schematic of the CMOS inverter comprising (a) P-JLDGFET and
cuits, the subthreshold current has been used in portable N-JLDGFET and (b) its circuit symbol. The input and output terminals of the
inverter are denoted by Vin and Vout . The supply voltage is Vdd . The node
computing devices and in the memory cell [1]–[4]. It is voltages are defined as follows: Vin = VGp = VGn = VGn − VSn = VGSn ,
demonstrated that subthreshold operation can achieve signif- Vout = VDSn = Vdd − VSDp, VDSn = VDn − VSn , and VSDp = VSp − VDp .
icant power savings in circuit applications requiring a low
to medium frequency of operation [5]. In these applications, major challenges [6], [7]. To alleviate the above-mentioned
energy consumption is kept to a minimum by exploiting problems, incorporating multigate device architecture in
the ultralow voltage operation with transistors working in silicon-on-insulator technology has minimized SCE and
the subthreshold region. On the other hand, the miniatur- extended the scaling of ultralow-power MOSFETs into the
ization of the devices driven by increasing the high pack- nanoscale regime [8]. It is reported that the JL MOSFET
ing density for ultra large scale integration has pushed the has a remarkably simpler fabrication process and improved
feature sizes toward the nanometer regime. To extend the characteristics [9], [10]. In comparison with the conventional
scalability of CMOS technology in the nanometer regime, junction-based transistor, the JL transistor not only allevi-
short channel effect (SCE) such as large drain-induced bar- ates the challenges associated with the formation of steep
rier lowering (DIBL) and poor subthreshold slope are the S/D junction in the nanoscale regime, but also makes it more
suitable for further device scaling. Up to now, the investigation
Manuscript received February 14, 2016; revised May 4, 2016; accepted
June 14, 2016. Date of publication June 28, 2016; date of current version on JL transistors applied for the circuits primarily focused
July 21, 2016. This work was supported by the Ministry of Science and on analog/ac behavior analysis [11], [12]. There are few
Technology under Grant MOST 104-2221-E-390-014. The review of this brief papers focusing on the dc behavior analysis. As logic gate in
was arranged by Editor M. Ieong.
The author is with the Advanced Devices Simulation Laboratory, VLSI is scaled down, SCE will degrade the circuit behavior
Electrical Engineering Department, National University of Kaohsiung, significantly, such that SCE should be seriously accounted
Kaohsiung 811, Taiwan (e-mail: tkchiang@nuk.edu.tw). for in designing the VLSI circuit. In this brief, based on
Color versions of one or more of the figures in this paper are available
online at http://ieeexplore.ieee.org. our previously developed subthreshold current model [13]
Digital Object Identifier 10.1109/TED.2016.2581826 and equivalent circuit model, we develop the NM model
0018-9383 © 2016 IEEE. Personal use is permitted, but republication/redistribution requires IEEE permission.
See http://www.ieee.org/publications_standards/publications/rights/index.html for more information.
CHIANG: SCE-DEGRADED NM MODEL FOR JLDGFET 3355

for the JLDG transistor working on the subthreshold CMOS


logic gate. It is shown that SCE induced by the thick silicon
film tsi , the thick gate oxide tox , and short-channel length
L g can bring about severe NM degradation. Being similar to
DIBL, allowable NM corresponding to the minimum channel
length can also be uniquely controlled and determined by the
scaling factor according to the scaling theory.
II. N OISE M ARGIN M ODEL D ERIVATION
Fig. 1(a) and (b) shows a typical schematic of the CMOS
inverter comprising N-FET and P-FET and its equivalent
logic gate symbol. To develop the NM model for the sub-
threshold CMOS logic gate, we need to use the subthreshold
current model of the JLDG devices. According to our previ-
ously developed subthreshold current model, the subthreshold
current for both the N-FET and P-FET can be expressed as
 −VDSn  VGSn −VTHCn
Fig. 2. (a) Equivalent output circuit of the inverter for high input.
Id,n = Ion 1 − e VT e θCn ηCn VT (b) Equivalent output circuit of the inverter gate for low input. REQ, p , REQ,n ,
 −VSDp  VSGp +VTHCp IEQ, p , and IEQ,n denote the equivalent resistor and the current source for
Id, p = Iop 1 − e VT e θCp ηCp VT (1) P-JLDGFET and N-JLDGFET, respectively. (c) KVL: VSDp + VDSn = Vdd .

with
⎧ √  


⎪ π Nd qμn VT VT θn

⎪ Ion = erf tsi W

⎪ 2L g θn VT



⎪ Cox

⎪θ n = (VGSn (1 − ηSn ) + Vfbn ηSn − VTHSn )

Csi tsi2 ηSn
√  
(2)

⎪ π Na qμ p VT VT θp

⎪ Iop =

⎪ erf tsi W

⎪ 2L g θp VT



⎪ Cox
⎩θ p = (VGSp (1 − ηSp ) − Vfbp ηSp + VTHSp)
Csi tsi2 ηSp
where VTHCn is the central-conduction-mode threshold
voltage for N-FET, VTHCp is the central-conduction-mode
threshold voltage for P-FET, ηSp is the surface-conduction-
mode subthreshold swing for P-FET, ηSn is the surface-
conduction-mode subthreshold swing for N-FET, ηCp is Fig. 3. Transfer curve of the CMOS inverter. The coordinates for the unit-
the central-conduction-mode subthreshold swing for P-FET, gain points are denoted by (VIL,max ,VOH,min ) and (VIH,min ,VOL,max ).
ηCn is the central-conduction-mode subthreshold swing for
N-FET [14], [15], and Vfbp and Vfbn are the flat-band voltage As Vin = Vdd is adopted for the inverter circuit shown in
for P-FET and N-FET, respectively. θCp and θCn are the ideal Fig. 1, Vout can be obtained according to Fig. 2(a). This yields
factors (1  θCp ,θCn < 2) to calibrate the subthreshold swing. S P VddηV−2Vin
Vout = IEQ, p × REQ,n = VT e T (4)
In Fig. 2, the equivalent circuit model for P-FET/N-FET Sn
including the current source and resistor of IEQ, p , IEQ,n , with
REQ, p , and REQ, p can be obtained by the Taylor’e series
1 1 1 1
expansion of (1) [16] = + (5)
⎧ VSGp +VTHCp
η 2 ηCp ηCn

⎪ ηCp VT

⎪ I EQ, p = I op e where S p and Sn , transistor strength for P-type junctionless



⎪ VDSn VT VGSnη −VVTHCn double-gate MOSFET (P-JLDGFET) and N-type JLDGFET

⎨ REQ,n = = e Cn T
Isub,n Ion (N-JLDGFET), are defined as
(3)

⎪I
VGSn −VTHSn VTHCp −VTHCn

⎪ = I e ηCn VT
S p = Iop e ηCp VT , Sn = Ion e ηCn VT . (6)


EQ,n on

⎪ VSDp
V
VT SGp
+VTHSp

⎩ REQ, p = = e ηCp VT . Transistor strength in (6) is one of the key parameters to
Isub, p Iop indicate how strong a current the transistor can deliver to the
The noise margin (NM) can be defined by the unity-gain logic circuit. The ratio of S p to Sn and vice versa can be
points (VIL,max , VOH,min) and (VIH,min , VOL,max ) shown in used to determine the NM for the subthreshold logic gate,
Fig. 3. The coordinates of these points can be found by using which will be shown in (12) and (13). The unity-gain point of
the equivalent transistor model shown in Fig. 2(a) and (b). (VIH,min ,VOL,max) can be found by taking the derivative of (4)
3356 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 63, NO. 8, AUGUST 2016

with respect to Vin and setting this derivative to be −1. This


leads to

Vdd ηVT Sp 2
Vin = VIH,min = + ln + ln . (7)
2 2 Sn η
Equation (7) can be substituted into (4) to evaluate VOL,max
as
ηVT
Vout = VOL,max = . (8)
2
As Vin = 0 is adopted for the inverter circuit shown in Fig. 1,
Vout can be obtained according to Fig. 2(b) and (c). This
leads to
Sn VT  2Vin −Vdd 
Vout = Vdd − IEQ,n × REQp = Vdd − × e ηVT .
Sp
(9)
Being similar to (VIH,min ,VOL,max ), the unity-gain point of Fig. 4. NM versus the channel length L g for different gate oxide thicknesses.
(VIL,max ,VOH,min ) can be found by taking the derivative of (9)
with respect to Vin and setting this derivative to be −1. This
leads to

Vdd ηVT Sp 2
Vin = VIL,max = − ln + ln . (10)
2 2 Sn η
Equation (10) can be substituted into (9) to evaluate VOH,min
as
ηVT
Vout = VOH,min = Vdd − . (11)
2
According to Fig. 3, to evaluate the high NM of NM H , we
need to subtract (7) from (11). This yields
NM H = VOH,min − VIH,min

Vdd ηVT ηVT Sp 2
= − − ln + ln . (12)
2 2 2 Sn η
Similarly, the low NM of NM L can be obtained by subtract-
ing (8) from (10). This leads to
Fig. 5. NM versus the channel length L g for different silicon thicknesses.
NM L = VIL,max − VOL,max

Vdd ηVT ηVT Sn 2
= − − ln + ln . (13)
2 2 2 Sp η III. R ESULTS AND D ISCUSSION
NM of the logic gate can be obtained by selecting the small The 3-D device/circuit simulator device simulation for
value between NM H and NM L . This leads to smart integrated systems DESSIS [17] is used to validate
NM = Small{NM H , NM L }. (14) the proposed model. Both N-JLDGFET and P-JLDGFET
will have the same device parameters in the following sim-
Equation (14) provides a minimum value on the condition of
ulations unless otherwise stated. Fig. 4 shows NM versus
balanced transistor strength (i.e., S p = Sn ). Besides, to ensure
the channel length L g for different gate oxide thicknesses.
the logic circuit to operate correctly, NM should be ≥ thermal
In comparison with the thick tox of 3 nm, the thin tox of 1 nm
noise(∼ K T /q ∼ 26 mv at 27 °C), which leads to
can suppress the NM degradation more efficiently. From the
2 KT viewpoint of the device physics, the thin gate oxide will induce
Vdd ≥ Vdd,min = ηVT + ηVT ln  + ln + (15)
η q the small subthreshold slope of η that can efficiently suppress
with NM degradation. In spite of alleviating NM degradation, the

S p Sn ultrathin gate oxide (note that in the realistic nanometer device,
 = Large , (16) the equivalent oxide thickness for the gate-stack/high dielectric
Sn S P
insulator will be used instead of the gate oxide thickness) will
where  takes the large value between S p /Sn and Sn /S p . For
initiate tunneling effects that will bring about additional static
the best case of a balanced transistor strength (i.e., S p = Sn ,
power consumption through the gate leakage current. How to
ln  = 0), to have the minimum supply voltage Vdd,min (15)
alleviate NM degradation without the penalty of additional
will be reduced to
static power consumption should be accounted for in designing
2 KT
Vdd ≥ Vdd,min (NM) = ηVT 1 + ln + . (17) the low-power subthreshold CMOS circuit. Fig. 5 plots NM
η q versus the channel length L g for different silicon thicknesses.
CHIANG: SCE-DEGRADED NM MODEL FOR JLDGFET 3357

Fig. 6. NM versus the channel length L g for different channel doping Fig. 8. Minimum channel length versus silicon thickness for different
concentrations. gate oxide thicknesses. (NM is kept at  50 mV according to scaling
factor = 2.2.)

factor of α (= L g /2λ) for the double-gate FET can be found


in [19], it should be pointed out that for junctionless transistor,
the scaling length will be derived from bulk-conduction-
mode instead of surface-conduction-mode due to the inherent
bulk-conduction mechanism of the junctionless transistor.
As shown in Fig. 7, when the scaling factor is decreased
below 3, NM degradation will become prominent among
different combinations of device parameters. To suppress the
NM degradation, the scaling factor should go beyond 5,
which implies that the different combination of device para-
meters such as tox , tsi , and L g should meet the criterion for
α = L g /2λ > 5 to reduce NM degradation efficiently. The
figure of merit of the scaling theory is to find the allowable
Fig. 7. NM versus the scaling factor Lg/2λ for different combinations of minimum channel length to fit the design criteria for the
the device parameters. subthreshold CMOS logic gate. Fig. 8 plots the minimum
channel length versus silicon thickness for a different gate
oxide thickness with the criterion of NM  50 mV, which
As indicated in Fig. 5, thin silicon is desired to suppress corresponds to the scaling factor of 2.2. With tsi = 15 nm,
NM degradation. The main reason is that as the channel the allowable minimum channel length will be increased from
length is further decreased, the thin silicon is suitable for 25 to 40 nm as the gate oxide thickness is increased from
preventing a lateral electric field from penetrating the channel 1 to 3 nm. This implies that to acquire a minimum channel
region, which hence efficiently suppresses SCE and causes the length with the allowable minimum NM (i.e., NM  50 mV),
small NM degradation. Although the junctionless transistor is the thin gate oxide can be determined uniquely by the scaling
heavily doped to improve the electrical performance for its theory. As for the inverter gate, it should be noted that the
inherent gated-resistor characteristic, the high doping density leakage current will be prominent when both P-FET and
will degrade the NM behavior for the subthreshold logic gate. N-FET are switched ON simultaneously in the transition of
Fig. 6 plots NM versus the channel length for different channel the output logic state. The leakage current and the relevant
doping concentrations. It is revealed that with increasing power dissipation can be determined in Appendix B.
channel doping density, the NM degradation will be enhanced
as the channel length is further decreased. It seems that the IV. C ONCLUSION
deviation between model data and simulation results increases On the basis of the subthreshold current and equiva-
for the short device with the thick silicon, thick gate oxide, and lent transistor model, an SCE-degraded NM model for the
high doping density. More details regarding the analysis for JLDGFET working on subthreshold CMOS logic gate has
the error between model data and simulation results can be been developed. The model clearly demonstrates how the
found in Appendix A. Being similar to DIBL, NM affected device parameters such as the thick silicon, thick gate oxide,
by the SCE will abide by the scaling theory [18]. Fig. 7 high doping density, and short-channel length can degrade
plots NM versus the scaling factor α (= L g /2λ) for different the NM severely. By contrast, both the small subthreshold
combinations of device parameters. Although both the scaling slope and the balanced transistor strength can suppress the NM
length of λ (=[(4tsiεsi + Cox tsi2 )/(8Cox )]1/2 ) and the scaling degradation efficiently. Being similar to DIBL, allowable NM
3358 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 63, NO. 8, AUGUST 2016

corresponding to the minimum channel length can be uniquely with


determined and controlled by the scaling factor according to −Vin Iop ηV
Vdd Vdd −Vdd
Iop ηV
the scaling theory. The model can be efficiently used to analyze x =e VT , A= e T, B= e T e VT . (4A)
Ion Ion
the behavior of NM as the JLDGFET device is working for
subthreshold CMOS logic gates. With modification, the model Using the graphic method to solve (3A), x can be achieved.
can also be extended to NAND/ NOR gate. By substituting x into (2A), the input/output voltage can
be determined. With the channel doping density of 1.0 ×
A PPENDIX 1018 cm−3 , tsi = 10 nm, tox = 1 nm, L g = 40 nm,
and Vdd = 0.2 V, the input/output voltage, leakage cur-
A. Analysis of the Error Between Model Data and
rent, and relevant power dissipation can be obtained as
Numerical Simulation Results in Figs. 4–6
Vin = 0.085 V, Id = 6.4 × 10−12 A, and P = 1.28 × 10−12 W,
According to the theory of root-mean-square (rms), the error respectively, which agrees well with the numerical simulation
between model data and simulation results can be defined as results of Vin = 0.087 V, Id = 8.4 × 10−12 A, and

N P = 1.68 × 10−12 W.
i=1 (
NMi ) ×
L
2
σNM =
L2 − L1

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CHIANG: SCE-DEGRADED NM MODEL FOR JLDGFET 3359

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