Chapter 05 Vacuum Optics

Vacuum Optics
Standard Viewports
Viewports for Optical Applications
Special Viewports and

Additional Components
Optical Fiber Feedthroughs -

Singlemode
Optical Fiber Feedthroughs -

Multimode
Accessories for Optical Fiber

Feedthroughs
Contents
Introduction Page -3 to -9
Standard Viewports
Standard viewports with demountable O-ring seal Page -10 to -11
Viewports with permanent joint Page -12 to -14

Viewports for UV-VIS-NIR, CF Page -17
Viewports for UV-VIS-NIR, with anti-reflection coating Page -18 to -21
Viewports for optical applications, KF Page -22 to -23
Viewports for UV-VIS-NIR, CF Page -24 to -26
Viewports for VIS-IR, CF Page -27 to -28
Viewports for IR, CF Page -29 to -30
Viewports for UV-VIS-NIR, CF Page -31
High Precision Optic Series Page -32 to -35
Special Viewports and Additional Components

Viewports with conducting, transparent ITO coating Page -36 to -38
Viewports with luminescent layer Page -39
Borosilicate glass in quick access doors (QAD) Page -40
Lead-glass safety-caps with radiation shielding Page -41
Viewport shutters Page -42
Viewports with flanged socket Page -42
Optical Fiber Feedthroughs - Singlemode Page -43 to -46
Optical Fiber Feedthroughs - Multimode Page -47 to -49
Optical Fiber Feedthroughs - FSMA 905 Page -50 to -51
Accessories for Optical Fiber Feedthroughs Page -52 to -55
5-2 www.vacom-vacuum.com
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Standard Viewports
Standard Viewports with Demountable O-ring Seal
Borosilicate and fused silica (SiO2), KF/ISO demountable
KF Viewport ISO-K Viewport (flange mounting)
Technical data
Description viewport with demountable O-ring seal (FKM)
Connection type KF, ISO-K or ISO-F flange
He leak rate < 1.0E-9 mbar l/s
Window material borosilicate (Borofloat®33)
or fused silica (Silux®)
Flange material - KF, ISO-K: stainless steel 304
7 - ISO-F: aluminum, anodized
Frame material FKM, O-ring
Transmission range ca. 400...2500 nm (Borofloat®33),
ca. 300...2000 nm (Silux®)
Bakeout temperature Max. 150 °C (with aluminum frame 120 °C)
Viewports
The listed products and replacement parts are also available as clean room products (CRP). Please contact us for
further information.
Order code Flange A D L L2

Borosilicate Quartz
Flange connection: KF, T(max) = 150 °C
VPKF40B-E-Z VPKF40Q-E-Z DN40KF 57 40 10 3.8
VPKF50B-E-Z VPKF50Q-E-Z DN50KF 77 50 10 3.8
Flange connection: ISO-K (flange mounting with claw clamps), T(max) = 150 °C
VPISOK63B-E-Z VPISOK63Q-E-Z DN63ISO-K 98 70 14 3.8
VPISOK100B-E-Z VPISOK100Q-E-Z DN100ISO-K 133 102 13 5
Flange connection: ISO-F (wall mounting with screws) , T(max) = 120 °C
VPISOF63B-E VPISOF63Q-E DN63ISO-F 130 70 12 3.8
VPISOF100B-E VPISOF100Q-E DN100ISO-F 165 102 12 5
Flange connection: ISO-K (wall mounting with wall clamps), T(max) = 150 °C
VPISOK63B-E VPISOK63Q-E DN63ISO-K 95 70 12 3.8
VPISOK100B-E VPISOK100Q-E DN100ISO-K 130 102 12 5
Option: KF and ISO-K flange made of stainless steel 316L.
Standard Viewports
Standard Viewports with Demountable O-ring Seal
ISO-K Viewport (wall mounting) ISO-F Viewport (wall mounting)
Replacement windows
Order code Accessories for

Borosilicate glass
VPWB-44X4-CONE VPKF40B-E
VPWB-54X4-CONE VPKF50B-E
VPWB-75X4-CONE VPKISOK63B-E
Fused silica
VPWQ-44X4-CONE VPKF40Q-E
VPWQ-54X4-CONE VPKF50Q-E
VPWQ-75X4-CONE VPKISOK63Q-E
Replacement O-rings
Order code Accessories for

KF40VR-VP flange DN40KF
VR53X5-VI400-65 flange DN50KF
VR-74X5-VI563-70 flange DN63ISO
ISO100VR-VP flange DN100ISO
ISO160VR-VP flange DN160ISO
www.vacom-vacuum.com 5-11
Standard Viewports
Viewports with Permanent Joint
Borosilicate glass, KF/ISO
KF Viewport ISO Viewport
Technical data
Description viewports with permanent flange-window-joint
Connection type KF, ISO-K flange
Window material borosilicate (Corning 7056)
Flange material stainless steel 304
Frame material Kovar®
Transmission range ca. 400...2500 nm
Bakeout temperature Max. 150 °C
Max. heating and cooling rate 3 K/min
Borosilicate glass, KF/ISO

Flange connection: KF
VPKF16B-L DN16KF 30 16 13 1.6
VPKF25B-L DN25KF 40 16 13 1.6
VPKF40B-L DN40KF 55 32 13 3
VPKF50B-L DN50KF 75 32 13 3
Flange connection: ISO-K
VPISOK63B-L DN63ISO-K 95 49 14 3.5
VPISOK100B-L DN100ISO-K 130 65 16 3.5
VPISOK160B-L DN160ISO-K 180 90 18 6
VPISOK200B-L DN200ISO-K 240 135 18 8
VPISOK250B-L DN250ISO-K 290 135 18 8
Standard Viewports
Borosilicate glass, CF/QCF
CF Viewport QCF Viewport
Technical data
Connection type CF flange
Flange material stainless steel 304L or 316LN
Binding material Kovar®
Bakeout temperature (QCF) Max. 350 °C
Borosilicate glass, CF
Some of listed products and replacement parts are also available as clean room products (CRP). Please contact us
for further information.

Stainless steel 304L, Kovar® sleeve, T(max) = 350 °C
VPCF16B-L DN16CF 34 16 12.7 1.5
VPCF40B-L DN40CF 70 38 12.7 3
VPCF63B-L DN63CF 114 63 17.4 3.5
VPCF100B-L DN100CF 152 90 19.9 6
VPCF160B-L DN160CF 203 136 22.3 8
Magn. permeability μ(r) < 1.005, stainless steel 316LN, tantalum sleeve, T(max) = 120 °C
VPCF16B-K-NM DN16CF 34 16 12.7 1.5
VPCF40B-K-NM DN40CF 70 32 12.7 3
VPCF63B-K-NM DN63CF 114 63 17.4 3.5
VPCF100B-K-NM DN100CF 152 90 19.9 6
VPCF160B-K-NM DN160CF 203 136 22.3 8
Borosilicate glass, QCF

VPQCF40B-L DN40QCF 55 25 12 2.5
VPQCF63B-L DN63QCF 87 49 17 2.5
VPQCF100B-L DN100QCF 134 65 14 3.5
Ɣ For further information please see chapter Standard Components - QCF Components.
Standard Viewports
Fused silica (SiO2), CF
CF Viewport
Technical data
Window material fused silica (SiO2)
Flange material stainless steel 304, 304L or 316LN
Order code Flange A D L L2 Heating rate [K/min]

Magn. permeability μ(r) < 1.3, stainless steel 304, stainless steel sleeve, T(max) = 200 °C
VPCF16UVQ-L DN16CF 34 16 8.9 2.5 25
VPCF40UVQ-L DN40CF 70 35 12.7 3.3 25
VPCF63UVQ-L DN63CF 114 68 17.3 6.4 25
VPCF100UVQ-L DN100CF 152 98 19.8 6.4 25
VPCF160UVQ-L DN160CF 203 137 22.4 9.4 25
VPCF200UVQ-L DN200CF 254 198 24.6 9.4 25
Magn. permeability μ(r) < 1.005, stainless steel 316LN, titanium sleeve, T(max) = 200 °C
VPCF16UVQ-L-NM DN16CF 34 16 8.9 2.5 25
VPCF40UVQ-L-NM DN40CF 70 35 12.7 3.3 25
VPCF63UVQ-L-NM DN63CF 114 68 17.3 6.4 25
VPCF100UVQ-L-NM DN100CF 152 98 19.8 6.4 25
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Viewports for UV-VIS-NIR, CF
CF Viewport
Technical data
Description CF viewport with fused silica
Window material fused silica (Corning HPFS 7980)
Flange material stainless steel 304 or 316LN
Transmission range ca. 190...2000 nm (EUVQ),
ca. 250...2000 nm (DUVQ)
Max. bakeout temperature 200 °C
Surface quality 20/10 (scratch/dig)
Flatness < Ȝ/4 (at 632 nm)
Parallelism < 10''
Coating see viewports for UV-VIS-NIR,
with anti-reflection coating

DUV Fused silica (bis 250 nm) EUV Fused silica (bis 190 nm)
VPCF16DUVQ-L VPCF16EUVQ-L DN16CF 34 16 8.9 2.2
VPCF100DUVQ-L - DN100CF 152 98 19.8 6.4
VPCF160DUVQ-L - DN160CF 203 137 22.4 9.4
VPCF16DUVQ-L-NM VPCF16EUVQ-L-NM DN16CF 34 16 8.9 2.2
VPCF100DUVQ-L-NM - DN100CF 152 98 19.8 6.4
Ɣ For fused silica on KF Flange see Viewports for Optical Applications, KF.
Viewports for UV-VIS-NIR, with Anti-reflection Coating
BBAR coated fused silica (SiO2)
CF Viewport
Technical data
Description fused silica with broad band anti-reflection coating
with CF flange

Coating BBAR1 (ca. 225...450 nm), BBAR2 (ca. 425...760 nm),
BBAR3 (ca. 550...1100 nm)
Note Please do not hesitate to contact us for special coatings for
individual wavelengths / wavelength ranges.
BBAR1 (225 nm ... 450 nm) on fused silica (DUV)

VPCF16DUVQ-L-BBAR1 DN16CF 34 16 7.4 2.5
VPCF16DUVQ-L-BBAR1-NM DN16CF 34 16 7.4 2.5


Ɣ Fused silica with BBAR coating on KF flange available on request.
VAR on fused silica (SiO2)
CF Viewport
Technical data
Description fused silica with narrow band anti-reflection coating
with CF flange
Transmission range ca. 190...2000 nm (EUVQ), ca. 250...2000 nm (DUVQ)
Coating VAR1 (193 nm), VAR2 (248 nm),
VAR3 (780 nm), VAR4 (1064 nm)
Note Please do not hesitate to contact us for special coatings for
individual wavelengths / wavelength ranges.
VAR1 (193 nm) on fused silica (EUV)

VPCF40EUVQ-L-VAR1 DN40CF 70 35 12.7 3.3
VPCF63EUVQ-L-VAR1 DN63CF 114 68 17.3 6.4
VPCF40EUVQ-L-VAR1-NM DN40CF 70 35 12.7 3.3
VPCF63EUVQ-L-VAR1-NM DN63CF 114 68 17.3 6.4

VPCF40DUVQ-L-VAR2 DN40CF 70 35 12.7 3.3
VPCF40DUVQ-L-VAR2-NM DN40CF 70 35 12.7 3.3


Ɣ Fused silica with VAR coating in other sizes and on KF flange available on request.
Viewports for Optical Applications, KF
Viewports for optical applications
KF Viewport
Technical data
Description various optical materials with KF flange
Connection type KF flange

Viewports for Optical Applications, KF
Order code Flange A D L L2 S/D Flatness (632 nm)

VPKF40DUVQ-L DN40KF 55 36 14 2.5 20/10 Ȝ/4
VPKF50DUVQ-L DN50KF 75 36 16 2.5 20/10 Ȝ/4
Sapphire (AI203), KF

VPKF40UVS-L DN40KF 55 24 13 2 50/20 Ȝ
VPKF50UVS-L DN50KF 75 24 13 2 50/20 Ȝ
Quartz crystal, Z-Cut (SiO2), KF

VPKF40QZCUT-L DN40KF 55 23 14 2.5 20/10 Ȝ/4
VPKF50QZCUT-L DN50KF 75 23 16 2.5 20/10 Ȝ/4

Magnesium fluoride (MgF2), KF

VPKF40MGF2-L DN40KF 55 23 14 2.5 20/10 Ȝ/4
VPKF50MGF2-L DN50KF 75 23 16 2.5 20/10 Ȝ/4
Calcium fluoride (CaF2), KF

VPKF40CAF2-L DN40KF 55 23 14 2.5 20/10 Ȝ/4
VPKF50CAF2-L DN50KF 75 23 16 2.5 20/10 Ȝ/4
Zinc selenide (ZnSe), KF

VPKF40ZNSE-L DN40KF 55 23 14 2.5 40/20 Ȝ/4
VPKF50ZNSE-L DN50KF 75 23 16 2.5 40/20 Ȝ/4
Ɣ Fused silica (SiO2), quartz crystal and zinc selenide available with anti-reflection coating.
Calcium fluoride (CaF2), CF
CF Viewport
Technical data
Description CF viewport with calcium fluoride
Window material calcium fluoride, crystalline
Transmission range ca. 120 nm ... 7 μm
Calcium fluoride (CaF2), CF
Order code Flange A D L L2 Heating rate S/D Flatness (632 nm)

[K/min]
VPCF40CAF2-L DN40CF 70 23 12.7 2.5 10 20/10 Ȝ/4
VPCF63CAF2-L DN63CF 114 48 17.3 3.8 10 20/10 Ȝ/4
VPCF100CAF2-L DN100CF 152 48 19.8 3.8 10 20/10 Ȝ/4
VPCF16CAF2-K DN16CF 34 16 12.7 1.5 3 60/40 Ȝ/4
VPCF40CAF2-K DN40CF 70 32 12.7 3 3 60/40 Ȝ/4
VPCF63CAF2-K DN63CF 114 63 17.4 5 3 60/40 Ȝ/4
VPCF100CAF2-K DN100CF 152 89 19.9 6 3 60/40 Ȝ/4
VPCF160CAF2-K DN160CF 203 136 22.3 9.5 3 60/40 Ȝ/4
VPCF16CAF2-K-NM DN16CF 34 16 12.7 1.5 3 60/40 Ȝ/4
VPCF40CAF2-K-NM DN40CF 70 32 12.7 3 3 60/40 Ȝ/4
VPCF160CAF2-K-NM DN160CF 203 136 22.3 9.5 3 60/40 Ȝ/4
Ɣ KF Viewport with calcium fluoride see Viewports for Optical Applications, KF.
Magnesium fluoride (MgF2), CF
CF Viewport
Technical data
Description CF viewport with magnesium fluoride
Window material magnesium fluoride, crystalline
Magnesium fluoride (MgF2), CF

[K/min]
VPCF40MGF2-L DN40CF 70 23 12.7 2.5 10 20/10 Ȝ/4
VPCF63MGF2-L DN63CF 114 48 17.3 3.8 10 20/10 Ȝ/4
VPCF100MGF2-L DN100CF 152 48 19.8 3.8 10 20/10 Ȝ/4
VPCF16MGF2-K DN16CF 34 16 12.7 1.5 3 60/40 Ȝ/4
VPCF40MGF2-K DN40CF 70 32 12.7 3 3 60/40 Ȝ/4
VPCF63MGF2-K DN63CF 114 63 17.4 5 3 60/40 Ȝ/4
VPCF100MGF2-K DN100CF 152 89 19.9 6 3 60/40 Ȝ/4
VPCF160MGF2-K DN160CF 203 136 22.3 9.5 3 60/40 Ȝ/4
VPCF16MGF2-K-NM DN16CF 34 16 12.7 1.5 3 60/40 Ȝ/4
VPCF40MGF2-K-NM DN40CF 70 32 12.7 3 3 60/40 Ȝ/4
VPCF160MGF2-K-NM DN160CF 203 136 22.3 9.5 3 60/40 Ȝ/4
Ɣ KF Viewport with magnesium fluoride see Viewports for Optical Applications, KF.
Quartz crystal, Z-Cut (SiO2), CF
CF Viewport
Technical data
Description CF viewport with quartz crystal
Window material quartz crystal, Z-Cut
Coating anti-reflection coating available
Quartz crystal (SiO2), CF
Order code Flange A D L L2 Heating rate Flatness (632 nm)

[K/min]
VPCF40QZCUT-L DN40CF 70 23 12.7 2.5 25 Ȝ
VPCF16QZCUT-K DN16CF 34 16 12.7 1.5 3 Ȝ/2
VPCF40QZCUT-K DN40CF 70 32 12.7 3 3 Ȝ/2
VPCF16QZCUT-K-NM DN16CF 34 16 12.7 1.5 3 Ȝ/2
VPCF40QZCUT-K-NM DN40CF 70 32 12.7 3 3 Ȝ/2
Ɣ KF Viewport with quartz crystal see Viewports for Optical Applications, KF.
Viewports for VIS-IR, CF
Zinc selenide (ZnSe), CF
CF Viewport
Technical data
Description CF viewport with zinc selenide
Window material zinc selenide, crystalline
Transmission range ca. 0.6 ... 15 μm
Coating available (optimized for 10.6 μm)
Zinc selenide (ZnSe), CF

[K/min]
VPCF40ZNSE-L DN40CF 70 23 12.7 2.5 10 40/20 Ȝ/4
VPCF63ZNSE-L DN63CF 114 48 17.3 3.8 10 40/20 Ȝ/4
VPCF100ZNSE-L DN100CF 152 48 19.8 3.8 10 40/20 Ȝ/4
VPCF16ZNSE-K DN16CF 34 16 12.7 1.5 3 60/40 Ȝ
VPCF40ZNSE-K DN40CF 70 32 12.7 3 3 60/40 Ȝ
VPCF63ZNSE-K DN63CF 114 63 17.4 5 3 60/40 Ȝ
VPCF100ZNSE-K DN100CF 152 89 19.9 6 3 60/40 Ȝ
VPCF160ZNSE-K DN160CF 203 136 22.3 9.5 3 60/40 Ȝ
VPCF16ZNSE-K-NM DN16CF 34 16 12.7 1.5 3 60/40 Ȝ
VPCF40ZNSE-K-NM DN40CF 70 32 12.7 3 3 60/40 Ȝ
VPCF160ZNSE-K-NM DN160CF 203 136 22.3 9.5 3 60/40 Ȝ
Ɣ KF Viewport with zinc selenide see Viewports for Optical Applications, KF.
Viewports for VIS-IR, CF
Zinc sulfide (ZnS), CF
CF Viewport
Technical data
Description CF viewport with zinc sulfide
Window material zinc sulfide, crystalline
Transmission range ca. 0.4...13 μm
Coating available
Zinc sulfide (ZnS), CF

[K/min]
VPCF16ZNS-K DN16CF 34 16 12.7 1.5 3 60/40 Ȝ
VPCF40ZNS-K DN40CF 70 32 12.7 3 3 60/40 Ȝ
VPCF63ZNS-K DN63CF 114 63 17.4 5 3 60/40 Ȝ
VPCF100ZNS-K DN100CF 152 89 19.9 6 3 60/40 Ȝ
VPCF160ZNS-K DN160CF 203 136 22.3 9.5 3 60/40 Ȝ
VPCF16ZNS-K-NM DN16CF 34 16 12.7 1.5 3 60/40 Ȝ
VPCF40ZNS-K-NM DN40CF 70 32 12.7 3 3 60/40 Ȝ
VPCF160ZNS-K-NM DN160CF 203 136 22.3 9.5 3 60/40 Ȝ
Ɣ KF Viewport with zinc sulfide available on request.
Viewports for IR, CF
Silicon (Si), CF
CF Viewport
Technical data
Description CF viewport with silicon
Window material silicon, crystalline
Flange material stainless steel 304 or 304L
Transmission range ca. 1.2 ... 6 μm and far IR (FIR)
Silicon (Si), CF

[K/min]
VPCF40SI-L DN40CF 70 23 12.7 2.5 10 40/20 Ȝ
VPCF63SI-L DN63CF 114 48 17.3 3.8 10 40/20 Ȝ
VPCF100SI-L DN100CF 152 48 19.8 3.8 10 40/20 Ȝ
VPCF16SI-K DN16CF 34 16 12.7 1.5 3 20/10 Ȝ
VPCF40SI-K DN40CF 70 32 12.7 3 3 20/10 Ȝ
VPCF63SI-K DN63CF 114 63 17.4 5 3 20/10 Ȝ
VPCF100SI-K DN100CF 152 89 19.9 6 3 20/10 Ȝ
Viewports for IR, CF
Germanium (Ge), CF
CF Viewport
Technical data
Description CF viewport with germanium
Window material germanium, crystalline
Transmission range ca. 2...15 μm
Germanium (Ge), CF

[K/min]
VPCF40GE-L DN40CF 70 23 12.7 2.5 10 40/20 Ȝ
VPCF63GE-L DN63CF 114 48 17.3 3.8 10 40/20 Ȝ
VPCF100GE-L DN100CF 152 48 19.8 3.8 10 40/20 Ȝ
VPCF16GE-K DN16CF 34 16 12.7 1.5 3 20/10 Ȝ
VPCF40GE-K DN40CF 70 32 12.7 3 3 20/10 Ȝ
VPCF63GE-K DN63CF 114 63 17.4 5 3 20/10 Ȝ
VPCF100GE-K DN100CF 152 89 19.9 6 3 20/10 Ȝ
VPCF16GE-K-NM DN16CF 34 16 12.7 1.5 3 20/10 Ȝ
VPCF40GE-K-NM DN40CF 70 32 12.7 3 3 20/10 Ȝ
VPCF63GE-K-NM DN63CF 114 63 17.4 5 3 20/10 Ȝ
Sapphire (AI2O3), CF
CF Viewport
Technical data
Description CF viewport with sapphire
Window material sapphire, crystalline
Surface quality 50/20 (scratch/dig), 20/10 on request
Flatness < 2 Ȝ (at 632 nm)
Sapphire (AI2O3), CF

VPCF16UVS-L DN16CF 34 15 7.4 1.5
VPCF40UVS-L DN40CF 70 24 12.7 2
VPCF63UVS-L DN63CF 114 37 17.3 2
VPCF100UVS-L DN100CF 152 75 19.8 3
Ɣ Sapphire on KF flange see Viewports for Optical Applications, KF.
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The high-quality optics allow an outstanding transmission
quality of optical signals into your vacuum chamber.
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Viewports with Conducting, Transparent ITO Coating
Borosilicate glass with ITO-coating
Technical data
Description borosilicate with ITO coating
Flange material stainless steel 304L
Coating indium tin oxide (ITO)
Borosilicate glass with ITO-coating

VPCF40B-L-ITO DN40CF 70 38 12.7 3
VPCF63B-L-ITO DN63CF 114 63 17.4 3.5
VPCF100B-L-ITO DN100CF 152 90 19.9 6
Ɣ KF fittings on request.
Viewports with Conducting, Transparent ITO Coating
Sapphire with ITO-coating
Technical data
Description sapphire with ITO coating
Window material sapphire, crystalline
Flange material stainless steel 304L or 316LN

Coating indium tin oxide (ITO)
Sapphire with ITO-coating

VPCF40S-L-ITO DN40CF 70 38 12.7 3
VPCF63S-L-ITO DN63CF 114 63 17.4 3.5
VPCF100S-L-ITO DN100CF 152 90 19.9 6
VPCF40S-L-ITO-NM DN40CF 70 38 12.7 3
VPCF63S-L-ITO-NM DN63CF 114 63 17.4 3.5
VPCF100S-L-ITO-NM DN100CF 152 90 19.9 6
Ɣ KF fittings on request.
Viewports with Luminescent Layer
Borosilicate glass with luminescent layer P43
Technical data
Description borosilicate glass with luminescent layer P43 and
intermediate ITO coating
Flange material stainless steel 304L

Coating luminescent layer P43 (Gd2O25:Tb)
Borosilicate glass with luminescent layer P43

VPCF40B-L-ITOP43 DN40CF 70 38 12.7 3
VPCF63B-L-ITOP43 DN63CF 114 63 17.4 3.5
VPCF100B-L-ITOP43 DN100CF 152 90 19.9 6
Ɣ Other luminescent layers on request.
Borosilicate Glass in Quick Access Doors (QAD)
Borosilicate glass in quick access doors (QAD)
DN63CF - DN200CF DN250CF, DN300CF
Technical data
Description viewport with CF quick access door
Window material borosilicate (Borofloat®33)
Flange material stainless steel 304 (aluminum door frame, anodized)
Frame material FKM, O-ring
Borosilicate glass in quick access doors (QAD)
Order code Flange D D2 D3 D4 L

QAD63VP-AL-304 DN63CF 80 103 63 57 30
QAD100VP-AL-304 DN100CF 124 149 100 95 33
QAD160VP-AL-304 DN160CF 165 194 150 145 35
QAD200VP-AL-304 DN200CF 297 274 200 195 43
QAD250VP-AL-304 DN250CF 360 305 350 150 53
QAD300VP-AL-304 DN300CF 410 368 305 150 53
Ɣ For further information on CF Quick access doors please see chapter Standard Components.
Lead-glass Safety-caps with Radiation Shielding
Lead-glass safety-caps with radiation shielding
Technical data
Description lead-glass in stainless steel caps suitable for all CF viewports.
assembly with 3 set screws.
Window material lead-glass (lead equivalent ca. 1.6 mm at 100 kV ... 200 kV)
Frame material stainless steel 304 or 316L

Lead-glass safety-caps with radiation shielding, stainless steel 304
Order code Flange A D D2 L L2

LGH-100-304 DN100CF 160 89 153 25 6
LGH-160-304 DN160CF 212 138 204 25 6
Lead-glass safety-caps with radiation shielding, stainless steel 316L

LGH-16-316 DN16CF 44 15 36 18 6
LGH-40-316 DN40CF 80 36 71 23 6
LGH-63-316 DN63CF 123 66 115 26 6
LGH-100-316 DN100CF 160 89 153 25 6
LGH-160-316 DN160CF 212 138 204 25 6
Viewport Shutters
The rotary feedthrough type MagiDrive MD16 serve as drive for all viewport shutters. The basic version of the rotary
feedthrough is pivote and hold the shutter in any position. Please find further drive options in chapter 10 Mechanical
Feedthroughs.
Viewport shutters
Technical data:
Description viewport shutters protect the vacuum side of a viewport from
material deposition (e.g. in coating applications)
Drive rotary feedthrough MagiDrive MD16

VPSCF40 DN40CF 70 37 31.8 116 10
VPSCF63 DN63CF 114 63.5 57 135 19.5
VPSCF100 DN100CF 152 101.6 87 158 35.5
VPSCF160 DN160CF 203 152.4 133.2 173 52.5
Viewports with Flanged Socket
Different glass-metal-constructions make it possible to limit the position of the optical components not only to the flange
connection e. g. on the chamber wall. Tubulations (of metal or glass), flexible hoses or other connection elements allow to
bring the coupling position of the viewport very close to the sample inside the chamber (e. g. to ease the focusing of beams
on the sample surface) or to connect two chambers with a transparent tube.
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Optical Fiber Feedthroughs - Singlemode
Fiber SM633, FC/APC connector
Technical data:
Optical fiber singlemode fiber SM633
Wavelength 633 nm
Numerical aperture 0.12
Cut-off wavelength 580 nm
Coupling FC/APC (8° ferrule angle)
Typical insertion loss 1 dB
Typical return loss 60 dB
Ferrule 2.5 mm ceramics (ZrO2)
Fiber construction
Order code Flange Number of feedthroughs 2
1
0
9
8
7
6
5
4
3
W-SM633-FCAPC - 1
CF16-SM633-FCAPC-1 DN16CF 1
Technical data:
Wavelength 780 nm
Fiber construction
1
0
9
8
7
6
5
4
3
W-SM780-FCAPC - 1
Technical data:
Wavelength 850 nm
Fiber construction
1
0
9
8
7
6
5
4
3
W-SM850-FCAPC - 1

Fiber SM1310, FC/PC connector
Technical data:
Wavelength 1310 nm / 1550 nm
Coupling FC/PC
Typical insertion loss 0.5 dB at 1310 nm
Fiber construction
1
0
9
8
7
6
5
4
3
W-SM1310-FCPC - 1
CF16-SM1310-FCPC-1 DN16CF 1
Technical data:
Wavelength 1310 nm / 1550 nm
Typical insertion loss 0.5 dB
Fiber construction
2
1
0
9
8
7
6
5
4
W-SM1310-FCAPC - 1
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ZZZYDFRPYDFXXPFRP 5
Optical Fiber Feedthroughs - Multimode
Fiber MM50, FC/APC connector
Technical data:
Optical fiber multimode fiber MM50
Wavelength ca. 850...1300 nm
Coupling FC/APC

1
0
9
8
7
6
5
4
3
Fiber construction W-MM50-FCAPC - 1
CF16-MM50-FCAPC-1 DN16CF 1
Fiber MM50, FC/PC connector
Technical data:
Optical fiber multimode fiber MM50
Coupling FC/PC

1
0
9
8
7
6
5
4
3
Fiber construction W-MM50-FCPC - 1
CF16-MM50-FCPC-1 DN16CF 1
Fiber MM400UV, FC/PC connector
Technical data:
Optical fiber multimode fiber MM400UV
Coupling FC/PC
Ferrule 2.5 mm metal (ARCAP AP4)

1
0
9
8
7
6
5
4
3
Fiber construction W-MM400UV-FCPC - 1
CF16-MM400UV-FCPC-1 DN16CF 1
Fiber MM400IR, FC/PC connector
Technical data:
Optical fiber multimode fiber MM400IR
(optional 500...2600 nm)
Coupling FC/PC
Ferrule 2.5 mm metal (ARCAP AP4)
Fiber construction Order code Flange Number of feedthroughs 2

1
0
9
8
7
6
5
4
3
W-MM400IR-FCPC - 1
CF16-MM400IR-FCPC-1 DN16CF 1
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Accessories for Optical Fiber Feedthroughs
Introduction
You can easily realize a complete solution with the provided accessories for optical fiber feedthroughs consisting of
atmosphere side fiber cable, feedthrough and vacuum compatible cable. Especially the fiber cables represent only a small
choice of our product range. Only a few combinations of cable length and plug configuration are listed as an example for fiber
SM1310.
The provided cables are available for all standard fibers at any length and with many possible plug types. We are pleased to
provide a solution espacially adapted to your requirements.
In addition, we gladly offer you special accessories e. g. for the cleaning of connector ferrules.
FC Coupling
Singlemode and multimode FC coupling
FC coupling for FC connector

Flange with holes for two M2 screws
Coupling of FC/PC to FC/PC or FC/APC to FC/APC
For singlemode or multimode connectors
Ceramic sleeve (ZrO2)
Technical data:
Operating temperature -40...85 °C
Order code Description e

2
1
0
9
8
7
6
5
4
3
KUP-A-FC for air side
KUP-V-FC UHV compatible
Optical Fiber Cables
Atmospheric cables
Optical fiber cable for use in atmosphere

With protective jacket (hollow hose)
Technical data:
Optical fiber SM1310
Material connector zinc
Interlock threading / key
Order code Length Connector

[m] Configuration b
KAB-A-SM1310-500-FCAPC-SE 0.5 FC/APC single-sided
KAB-A-SM1310-500-FCAPC-DE 0.5 FC/APC double-sided


KAB-A-SM1310-500-FCPC-SE 0.5 FC/PC single-sided

KAB-A-SM1310-500-FCPC-DE 0.5 FC/PC double-sided

KAB-A-SM1310-500-FCAPC-FCPC 0.5 FC/APC, FC/PC

Optical Fiber Cables
Ultra high vacuum cables
Optical fiber cable for ultra high vacuum applications
Technical data:
Optical fiber SM1310
Material connector stainless steel 303
Interlock threading / key
Ausheiztemperatur Max. 180 °C
Order code Length Connector

[m] Configuration b
KON-V-SM1310-500-FCAPC-SE 0.5 FC/APC single-sided
KON-V-SM1310-500-FCAPC-DE 0.5 FC/APC double-sided

KON-V-SM1310-500-FCPC-SE 0.5 FC/PC single-sided

KON-V-SM1310-500-FCPC-DE 0.5 FC/PC double-sided

KON-V-SM1310-500-FCAPC-FCPC 0.5 FC/APC, FC/PC

Connectors for Optical Fiber Cables

Technical data:
Suitable for cable diameter 0.9...3.5 mm
Strain relief 150 N
Product life > 1000 connection cycles
Operating temperature -40...85 °C
Atmospheric connectors
Connector for use in atmosphere

Housing material: zinc
Order code Accessories for Connector 3

2
1
0
9
8
7
6
5
4
CONN-SM-FCAPC-A SM633, SM780, SM850, SM1310 FC/APC

CONN-SM-FCPC-A SM633, SM780, SM850, SM1310 FC/PC
CONN-MM50-FCAPC-A MM50 FC/APC

CONN-MM50-FCPC-A MM50 FC/PC
CONN-MM400-FCPC-A MM400UV, MM400IR, MMGE400IR FC/PC
Ultra high vacuum connectors
Connectors for ultra high vacuum applications

Cleaned in ultrasonic bath
Packed for vacuum application
Housing material: stainless steel 303
Order code Accessories for Connector 3

2
1
0
9
8
7
6
5
4
CONN-SM-FCAPC-V SM633, SM780, SM850, SM1310 FC/APC
CONN-SM-FCPC-V SM633, SM780, SM850, SM1310 FC/PC
CONN-MM50-FCAPC-V MM50 FC/APC

CONN-MM50-FCPC-V MM50 FC/PC
CONN-MM400-FCPC-V MM400UV, MM400IR, MMGE400IR FC/PC

Chapter 05 Vacuum Optics

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Chapter 05 Vacuum Optics

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Vacuum Optics

Viewports for Optical Applications

Special Viewports and

Optical Fiber Feedthroughs -

Optical Fiber Feedthroughs -

Accessories for Optical Fiber

Introduction Page -3 to -9

Viewports for Optical Applications

High Precision Optic Series Page -32 to -35

 Special Viewports and Additional Components

Optical Fiber Feedthroughs - Singlemode Page -43 to -46

Optical Fiber Feedthroughs - Multimode Page -47 to -49

Optical Fiber Feedthroughs - FSMA 905 Page -50 to -51

Accessories for Optical Fiber Feedthroughs Page -52 to -55

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Standard Viewports with Demountable O-ring Seal

Borosilicate and fused silica (SiO2), KF/ISO demountable

KF Viewport ISO-K Viewport (flange mounting)

Order code Flange A D L L2

Standard Viewports with Demountable O-ring Seal

ISO-K Viewport (wall mounting) ISO-F Viewport (wall mounting)

Order code Accessories for

Order code Accessories for

Viewports with Permanent Joint

Borosilicate glass, KF/ISO

KF Viewport ISO Viewport

Borosilicate glass, KF/ISO

Order code Flange A D L L2

Viewports with Permanent Joint

Borosilicate glass, CF/QCF

CF Viewport QCF Viewport

Order code Flange A D L L2

Borosilicate glass, QCF

Order code Flange A D L L2

Viewports with Permanent Joint

Fused silica (SiO2), CF

Fused silica (SiO2), CF

Order code Flange A D L L2 Heating rate [K/min]

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Viewports for UV-VIS-NIR, CF

Fused silica (SiO2), CF

Fused silica (SiO2), CF

Order code Flange A D L L2

Viewports for UV-VIS-NIR, with Anti-reflection Coating

BBAR coated fused silica (SiO2)

Viewports for UV-VIS-NIR, with Anti-reflection Coating

BBAR1 (225 nm ... 450 nm) on fused silica (DUV)

Order code Flange A D L L2

BBAR2 (425 nm ... 760 nm) on fused silica (DUV)

Order code Flange A D L L2

BBAR1 (550 nm ... 1100 nm) on fused silica (DUV)

Order code Flange A D L L2

Viewports for UV-VIS-NIR, with Anti-reflection Coating

VAR on fused silica (SiO2)

Viewports for UV-VIS-NIR, with Anti-reflection Coating

VAR1 (193 nm) on fused silica (EUV)

Order code Flange A D L L2

Introduction Page -3 to -9

High Precision Optic Series Page -32 to -35

Special Viewports and Additional Components

Optical Fiber Feedthroughs - Singlemode Page -43 to -46

Optical Fiber Feedthroughs - Multimode Page -47 to -49

Optical Fiber Feedthroughs - FSMA 905 Page -50 to -51

Accessories for Optical Fiber Feedthroughs Page -52 to -55

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