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14 IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, VOL. 20, NO.

1, FEBRUARY 2010

New Delay-Time Measurements on a 64-kb


Josephson–CMOS Hybrid Memory
With a 600-ps Access Time
Kan Fujiwara, Qingguo Liu, Member, IEEE, Theodore Van Duzer, Life Fellow, IEEE,
Xiaofan Meng, and Nobuyuki Yoshikawa, Member, IEEE

Abstract—A 64-kb subnanosecond Josephson–CMOS hybrid problem in superconducting digital technology, particularly
random-access memory (RAM) has been developed with ultra- for high-end computing applications. Some superconducting
fast hybrid interface circuits. The hybrid memory is designed memory systems were demonstrated using purely Josephson
and fabricated using a commercial 0.18-μm CMOS process and
NEC-SRL’s 2.5-kA/cm2 Nb process for Josephson circuits. The junction (JJ) technology, which, however, were both
millivolt-level Josephson signals are amplified to volt-level CMOS insufficiently dense and too small in capacity for high-end
digital signals by a hybrid interface amplifier, which is the most applications [2], [3].
challenging part of the memory system. The performance of this Josephson–CMOS hybrid RAMs have the potential to re-
amplifier is optimized by minimizing its parasitic capacitance move the memory bottleneck faced by JJ digital technology.
loading. The 4-K operation of short-channel CMOS devices and
circuits is reviewed, and a complete 4-K CMOS BSIM3 model, The basic idea is to use high-density CMOS memory and inter-
which has been verified by experiments, is discussed. The memory face it to high-speed ultralow-power superconductive devices.
bit-line output currents are detected by ultralow-power high-speed Fig. 1 shows the system block diagram. The memory core and
Josephson devices. Here, we report the first high-frequency access- decoders have been fabricated in a commercial CMOS technol-
time measurements on the full critical path showing 600 ps for a ogy; the current sensors are fabricated using standard Nb tech-
single bit. We discuss future designs made to reduce the crosstalk
and improve margins, as well as plans to reduce power dissipation nology, and the interface circuits involve both technologies. The
and latency. memory cell is modified from the traditional three-transistor
dynamic RAM (DRAM) cell, which works as a static memory
Index Terms—Access time, high-speed measurement, hybrid
memory, interface circuit. cell at 4 K due to nearly zero subthreshold leakage current.
This approach was proposed in 1993 [4], and some preliminary
I. I NTRODUCTION simulations and measurements that confirm its feasibility have
been reported [5], [6]. In this paper, high-frequency component

J OSEPHSON-JUNCTION-BASED rapid single-flux-


quantum (RSFQ) logic is the only technology with
demonstrated capability of an order of magnitude increase in
delay times and access-time measurements of the full critical
path of the hybrid memory are presented for the first time.

speed over CMOS logic while having orders-of-magnitude-


lower power dissipation [1]. Random access memory is needed II. S HORT-C HANNEL MOSFETs AT
to complement the RSFQ logic. However, the lack of large- C RYOGENIC T EMPERATURE
capacity and sufficiently fast memory has been a long-standing
We have reported [7] that, for several submicrometer
commercial CMOS processes (Rohm 0.35-μm CMOS, Na-
Manuscript received May 15, 2009; revised September 21, 2009. First tional Semiconductor Corporation (NSC) 0.25-μm CMOS, and
published November 24, 2009; current version published January 29, 2010.
This paper was recommended by Associate Editor O. Mukhanov. The work Hitachi 0.18-μm CMOS), both individual devices and circuits
of Q. Liu, T. Van Duzer, and X. Meng was supported by the Office of Naval work better at 4 K than at room temperature. Details of
Research under Grant N00014-03-1-0065. The work of N. Yoshikawa was 4-K CMOS operation can be found in [7]–[9]. Here, we sum-
supported by the VLSI Design and Education Center (VDEC), The University
of Tokyo, Tokyo, Japan, in collaboration with Cadence Design Systems, Inc., marize the advantages of 4-K operation of commercial short-
and Synopsys, Inc. channel CMOS devices. Six key changes of properties upon
K. Fujiwara is with SanDisk Limited, Yokkaichi 512-8550, Japan (e-mail:
Kan.Fujiwara@sandisk.com).
lowering the temperature from 300 to 4 K are given here.
Q. Liu was with the Department of Electrical Engineering and Computer Sci-
ences and the Engineering Research Support Organization (ERSO), University 1) Saturation velocity increases by up to about 30%.
of California, Berkeley, CA 94720 USA. He is now with National Semiconduc- 2) Threshold voltage Vt increases from about 0.35 V to
tor Corporation, Santa Clara, CA 95051 USA (e-mail: qingguo.liu@nsc.com). about 0.55 V.
T. Van Duzer and X. Meng are with the Department of Electrical Engineering
and Computer Sciences, University of California, Berkeley, CA 94720 USA 3) Subthreshold leakage becomes effectively zero, with the
(e-mail: vanduzer@eecs.berkeley.edu; meng@eecs.berkeley.edu). subthreshold swing changing from 70–100 mV/dec to
N. Yoshikawa is with the Department of Electrical and Computer Engi- about 10 mV/dec.
neering, Yokohama National University, Yokohama 240-8501, Japan (e-mail:
yoshi@yoshilab.dnj.ynu.ac.jp). 4) Source and drain capacitances decrease by a factor of
Digital Object Identifier 10.1109/TASC.2009.2034471 about 8. (Gate capacitance does not change.)

1051-8223/$26.00 © 2009 IEEE


FUJIWARA et al.: DELAY-TIME MEASUREMENT ON JOSEPHSON–CMOS HYBRID MEMORY WITH ACCESS TIME 15

Fig. 1. Hybrid memory system of 64 kb for measuring delays including overall access time for a single cell.

our hybrid memory, current flows from the cell to a very low
impedance and ultralow-power high-speed Josephson current
sensor at the end of the bit line, which translates a current into
a millivolt pulse that goes to the processor.
The decoder for the 64-kb memory is an eight-input AND
gate circuit. In order to have minimum power consumption and
more robustness, the “static” CMOS logic family is chosen
[10]. The “logical effort” approach [10] has been used to
minimize the delay in the critical path. In addition, for mini-
mum delay, the decoder is designed such that the low-to-high
transition is faster than the high-to-low transition. Simulations
show a 400-ps total delay for the driver, decoder, memory cell,
and current sensor.

Fig. 2. 3-T memory cell. Upon accessing the cell, current will flow down the
III. I NPUT I NTERFACE A MPLIFIER
BL Read line if charge representing a “1” is stored at node X.
The most challenging part of this hybrid approach is the
input interface between the two logic families. In order to
5) Ring oscillator measurements indicate a logic speed in-
convert millivolt-level superconductor digital signals to volt-
crease of about 50%.
level CMOS digital signals with minimum delay and power
6) Static power is essentially eliminated, so the total power
dissipation, the hybrid interface amplifier shown in Fig. 3 was
dissipation is appreciably reduced.
implemented [11].
In order to simulate the 0.18-μm CMOS circuits used in this Part 1 of the interface amplifier is the so-called Suzuki stack
4-K experiment, we modified the room-temperature BSIM-3 [12], which has widely been studied for converting millivolt
model file according to our experimental data and verified it pulses to multi-millivolt signals [13]. Based on simulations, the
by measuring simple circuits, including ring oscillators. Several delay time is about 20 ps for a Suzuki stack with a 40-mV
important parameters (threshold voltage, average mobility, and output.
subthreshold swing) were extracted from the 4-K I–V curves. The operation of Part 2 of this hybrid amplifier is as follows:
By adjusting other parameters, the model was trimmed, so that When the clock is high, M1 is biased so that the current
the simulated I–V curves closely fit the measured ones. Then, in M1 , M2 , and the N -junction array is a little less than
the 4-K capacitances are measured and added to the model. the critical current in the N junctions, which is typically
In this paper, the so-called 3-T DRAM cell (Fig. 2) is chosen 0.8Ic . When the 40-mV input arrives at the gate of M1 , this
as the memory cell for its high density and because a nonde- n-channel MOS transistor acts like a voltage-controlled current
structive readout is desired. Upon readout in standard room- source, increasing the current by ΔiM 1 = vin gm , where gm
temperature operation, the voltage on the bit line is sensed to is the transconductance of M1 at the given bias point. Note
determine whether a “0” or a “1” is stored [10]. However, in that ΔiM1 must be much greater than the process variation of
16 IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, VOL. 20, NO. 1, FEBRUARY 2010

Fig. 3. Input interface amplifier. Part 1 is the so-called Suzuki stack with
16 junctions in each leg. It converts the 200-μA input pulse into a 40-mV pulse
that drives Part 2 of the amplifier. The junctions in both the Suzuki stack and
the 400-junction load array have critical currents of 400 μA.

critical currents in order to achieve robust switching and should Fig. 4. 5 mm × 5 mm Josephson chip. (The circuits in the center are for other
provide enough overdrive to switch the output stack at a high experiments.)
speed. When the current in the junctions exceeds the critical
current, all of the junctions switch, and the output voltage is
lowered by NVg by discharging capacitor C0 , which represents
all the parasitic capacitances at that node. In the present design,
N is 400 and gives a 1.1-V voltage drop. The M3 p-channel
MOS transistor is provided to speed up the resetting. When
the clock is low, M2 is off, and M3 is on, the output voltage
is charged up to VDD via M3 , and all N junctions return to
the zero-voltage state. When the clock is high again, all the
junctions are biased at 0.8Ic and are waiting for the next input.
The delay time of the Part 2 amplifier depends on the
discharging process of the output node that occurs when the
400-junction array goes into the voltage state, so the output-
to-ground capacitance is very critical. Several approaches
have been reported to decrease that parasitic capacitance [9],
[14]. Simulations using the currently employed 2.5-kA/cm2
Josephson technology and 0.25-μm CMOS process indicate a
delay of 170 ps with VDD = 1.5 V.
The stage following the interface amplifier is a CMOS in-
verter. The delay of the interface circuit also strongly depends
on the voltage level needed to trigger that inverter and can be re-
duced by lowering the VDD of the interface circuit. To minimize
capacitive loading, a minimum-size inverter is used. Due to the
sharp threshold characteristics and the larger threshold voltage, Fig. 5. 2.4 mm × 2.4 mm 64-kb CMOS memory chip. The gray cross strips
the initial inverter gate voltage can be as low as VDD − Vt are a requirement for the processing. The square surrounding the cross strips is
the boundary of the memory. The target memory cell is beneath those strips.
without compromising the output level. (The PMOS is still off
with an extremely small leakage current.) Given a 1.5-V VDD IV. H IGH -F REQUENCY M EASUREMENTS
of the CMOS digital circuits and 0.55-V threshold voltage, the
A. Test Setup
VDD of the interface amplifier can be as low as 1.0 V. We need
only 0.5-V voltage drop rather than 1.0-V voltage drop from The chips for the hybrid memory were fabricated using a
the interface amplifier to drive the following inverter. We have standard 0.18-μm CMOS process and NEC-SRL’s 2.5-kA/cm2
seen from simulation that the delay of the interface amplifier Nb Josephson process. The physical sizes are 5 mm × 5 mm for
can be reduced to less than 100 ps. The simulation results for the JJ chip shown in Fig. 4 and 2.4 mm × 2.4 mm for the CMOS
the complete critical path show that the total memory access chip shown in Fig. 5. In our previously reported measurements
time can be about 500 ps. [6], wire bonding was used to connect the Josephson and
FUJIWARA et al.: DELAY-TIME MEASUREMENT ON JOSEPHSON–CMOS HYBRID MEMORY WITH ACCESS TIME 17

Fig. 6. Circuit used for making delay measurements on various parts of the memory system. The arrays of four JJs are used to provide sharp rise time signals for
the oscilloscope. For example, the Suzuki stack and Part 2 comprise the input interface amplifier; when a clock signal (CLK1 ) is applied, current flows into the
OUT1 array and switches it. It also switches both parts of the interface amplifier and current flows into the OUT2 array, causing it to switch. With the oscilloscope
connected to OUT1 and OUT2 , the signals appear as in the sketch, and the delay can be measured. Other delays in the circuit can be measured in the same way,
including the overall delay, or access time.

CMOS chips. For this paper, we were able to employ solder-


bump bonding, so the parasitic inductances between chips
were greatly reduced. The measurements were made using two
different wideband probes. One is a BCP-2 cryoprobe manu-
factured by American Cryoprobe, Inc. The ground block was
modified by introducing a hole to accommodate the CMOS chip
mounted on the Josephson chip. The other one is an SRL probe.
Both probes have a bandwidth that is higher than 10 GHz,
which makes high-frequency measurements possible.

B. Delay Measurement Circuit


We have reported [5] a delay measurement circuit that is spe-
cially designed for measuring small delays that are difficult to
traditionally measure. In this paper, several delay-measurement
circuits were included, so that it is possible to measure delays
for various parts of the memory and the total access time. The
diagram of this setup is shown in Fig. 6. In this configuration, Fig. 7. Dependence of the delay in Part 2 of the interface amplifier as a
the five p-type MOSFETs M4 – M8 each deliver about 200 μA function of the supply voltage “AMP VDD adjusted” on the Part 2 circuit, with
of current when they are completely turned on. In addition, the VDD of the remaining CMOS circuits in the memory kept at 1.5 V.
all the 4JJ arrays have the same critical current of 150 μA.
C. Measurements
The full critical path measurement is as follows: CLK1 and
DCLK1 trigger M4 and M5 , OUT1 is then switched to 10 mV We previously reported the delay of the memory core and
and a 200-μA current flows into the Suzuki stack; after some Part 2 of the interface amplifier with wire bonding between
small delay, the Part-2 amplifier and, subsequently, the decoder CMOS and Josephson chips [6]. In that work, the clock sig-
switch. Then, the target memory cell is selected and delivers a nals were generated by signal generator Rhode & Schwarz
current of about 200 mA to switch OUT4 . The time difference Signal SMP22, and the output signals were monitored using a
between OUT1 and OUT4 is the total access time. At the same Tektronix 11801 oscilloscope. In those wire-bonded samples,
time, the delay of the interface amplifier can also be measured we were able to measure the relationship between the two
by taking the difference between OUT1 and OUT2 . If we want VDD ’s and the delay time of the Part 2 amplifier of the interface
to measure the memory cell delay, we can trigger M7 and circuit, as shown in Fig. 7.
M8 by CLK2 and DCLK2 and measure the signals at OUT3 Now, using solder-bump-bonded chip sets, the whole inter-
and OUT4 . face amplifier (Part 1 and Part 2) delay has been measured.
The cables from OUTx to the oscilloscope must exactly be As discussed in Section III, the delay of the interface circuit
the same in type and length. We used cables with part number can be adjusted by changing the supply voltage of the interface
TCF35BAA1000FC made by TSSJ (a Japanese company). We amplifier. Fig. 8 shows the waveforms of OUT1 and OUT2 at
estimate the potential inaccuracies in propagation delays to be a 1-GHz clock frequency; the time difference between the two
about 20 ps. outputs of about 100 ps represents the delay of the interface
18 IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, VOL. 20, NO. 1, FEBRUARY 2010

is millivolt-level crosstalk in both situations, which makes it


difficult to read the delay. Therefore, we subtracted the data
in Fig. 9(b) from Fig. 9(a) to get the result in Fig. 9(c). The
usual way of measuring delay at the mid-levels of the output
and input signals is inappropriate here, because the slopes of
the switching at OUT1 and OUT4 are different due to the
different loading capacitances at two pads, which are mainly
caused by the bit-line capacitance. Therefore, the right way to
read the delay is to read from two starting points, which gives
a delay of about 600 ps. The different output levels are because
of the different currents supplied by M1 and the measured
memory cell. The measurement delay is a little higher than
the simulation result; the possible reason is unaccounted-for
parasitics. The waveform of OUT4 is noisier than that of OUT1
and has a sharp peak, even before OUT1 rises. The reason
is believed to be the crosstalk into OUT4 from the volt-level
CMOS signals CLK1 .
Fig. 8. Measured delay of about 100 ps in the input amplifier with the
amplifier VDD set at 1.05 V and the VDD of the remaining CMOS system
at 1.5 V.
V. D ISCUSSION
The crosstalk problem, as shown in Fig. 9, is one of the most
important issues that must be corrected. Only measurements
that involve memory bit lines have the crosstalk problem. The
2-mm-long bit line can serve as an antenna to pick up undesired
signals from the volt-level CMOS digital clock. More careful
design and layout are necessary. Since the clock lines have,
in relation to the bit lines, comparable currents but voltage
that is two to three orders of magnitude higher, we expect that
the coupling between them is electrical rather than magnetic.
This problem is being addressed in the next design by physical
separation of the clock and bit lines, and by electric shielding of
the bit lines. We will also consider possible inductive coupling
into the bit lines.
The functionality and high-speed operation of the memory
have been confirmed. However, the margins and robustness
of the interface amplifier need improvement. Both the Suzuki
stack and Part-2 amplifier need improvement. For the Suzuki
stack, the margins at high frequencies are lower than the
margins at low frequencies, mainly because the punchthrough
effect is worse at higher frequencies [15]. Resistors added
as shunts on the junctions can significantly suppress the
punchthrough [9]. Simulations have shown that, with appropri-
ate shunting resistance, Suzuki stacks have larger margins with
lower bit error rate, without compromising the output level. We
are also considering modified versions of the Suzuki stack.
The performance of Part 2 of the input interface amplifier is
Fig. 9. Access-time measurement using OUT1 and OUT4 . There is consider- critically dependent on the bias on M1 since the input signal
able crosstalk into OUT4 from the 1.5-V system clock. By subtracting (b) the
OUT4 signal in the absence of a reading command from (a) that with the read from the Suzuki stack is only 40 mV. We are implementing a
command, we obtained the graph in (c). From this, we determine the access precision CMOS calibration circuit to set the bias at 20 mV
time to be about 600 ps. The different slopes of the rising curves in (c) result using an eight-junction Josephson array held in the voltage state
from the different loading on OUT1 and OUT4 .
as a reference.
With the continued development of both semiconductor and
circuit with VDD = 1.05 V for the interface and VDD = 1.5 V superconductor technologies, more advanced processes are ex-
for the CMOS part. pected to be used in the hybrid memory in the future. A
Fig. 9 shows the result of the total access time measure- 20-kA/cm2 Nb process has been demonstrated in the laboratory
ment. Fig. 9(a) shows the waveforms when the Suzuki VDD is [16], and 90-nm CMOS processes are now industrial standard.
applied so a memory cell is being read, and Fig. 9(b) shows Based on the scaling rules of CMOS and assuming that the
the waveforms when the Suzuki VDD is turned off. There low-temperature improvement of CMOS does not change much
FUJIWARA et al.: DELAY-TIME MEASUREMENT ON JOSEPHSON–CMOS HYBRID MEMORY WITH ACCESS TIME 19

with scaling, one can calculate that the hybrid memory ac- [9] Q. Liu, “Josephson-CMOS hybrid memories,” Ph.D. dissertation, Univ.
cess time for 90-nm CMOS will be 240 ps, whereas power California, Berkeley, Apr. 2007.
[10] J. M. Rabaey, A. Chandrakasan, and B. Nikolic, Digital Integrated
dissipation decreases only a little, because the interface static Circuits: A Design Perspective, 2nd ed. Englewood Cliffs, NJ: Prentice-
power dominates [17]. Furthermore, if a special low-voltage Hall, 2002.
4-K CMOS process becomes available, the power dissipation [11] U. S. Ghoshal, “Josephson-CMOS memories,” Ph.D. dissertation, Univ.
California, Berkeley, Jan. 1995.
can greatly be reduced. [12] H. Suzuki, A. Inoue, T. Imamura, and S. Hasuo, “A Josephson driver
to interface Josephson junctions to semiconductor transistors,” in IEDM
Tech. Dig., 1988, pp. 290–293.
VI. C ONCLUSION [13] M. Suzuki, M. Maezawa, H. Takato, H. Nakagawa, F. Hirayama,
S. Kiryu, M. Aoyagi, T. Sekigawa, and A. Shoji, “An interface circuit for a
The complete critical path of a 64-kb hybrid memory has Josephson–CMOS hybrid digital system,” IEEE Trans. Appl. Supercond.,
vol. 9, no. 2, pp. 3314–3317, Jun. 1999.
been measured for the first time; a 600-ps access time, as well [14] T. Van Duzer, Q. Liu, X. Meng, S. Whitely, and N. Yoshikawa, “High-
as the delay of components of the memory system, was shown. speed interface amplifiers for SFQ-to-CMOS signal conversion,” in ISEC
The measured delays are somewhat larger than simulated ones, Ext. Abstr., Sydney, Australia, Jul. 2003. Paper PMo35.
[15] R. E. Jewett and T. Van Duzer, “Low-probability punchthrough in
and the possible reasons and potential improvements were Josephson junctions,” IEEE Trans. Magn., vol. MAG-17, no. 1, pp. 599–
discussed. Future elimination of crosstalk and the correction 602, Jan. 1981.
of the small-margin problem were also discussed. With a [16] L. A. Abelson and G. L. Kerber, “Superconductor integrated circuit
fabrication technology,” Proc. IEEE, vol. 92, no. 10, pp. 1769–1771,
20-kA/cm2 process and a 90-nm CMOS process, the total Oct. 2004.
access time for a 64-kb hybrid memory will be about 240 ps, [17] Q. Liu, T. Van Duzer, K. Fujiwara, and N. Yoshikawa, “Hybrid
and power dissipation will be somewhat lower than that for the Josephson–CMOS memory in advanced technologies and larger sizes,”
J. Phys., Conf. Ser., vol. 43, pp. 1171–1174, 2006.
present design. The power dissipation can further be improved
if a special CMOS technology targeted at 4-K operation could
be used.

ACKNOWLEDGMENT Kan Fujiwara received the B.E., M.E., and Ph.D. degrees in electrical and
computer engineering from Yokohama National University, Yokohama, Japan,
The authors would like to thank the reviewers for their in 2000, 2002, and 2005, respectively.
careful reading and their insightful comments. Q. Liu would From 2005 to 2007, he was a Postdoctoral Researcher in the Department
like to thank J. Wieser and J. Zhang of NSC for their help of Electrical Engineering and Computer Sciences, University of California,
Berkeley, where he worked on the Josephson–CMOS hybrid random access
on the CMOS layout. K. Fujiwara would like to thank SRL re- memory project. From 2007 to 2008, he was a JSPS Research Fellow with
searchers Dr. M. Hidaka, Dr. Y. Hashimoto, Dr. Y. Kameda, and ISTEC-SRL. He is currently with SanDisk Limited, Yokkaichi, Japan, as a
Dr. T. Miyazaki, and all the people who worked in the Process Process Integration Engineer. His research interests include superconductive
devices and their applications, particularly memory circuits in digital systems.
Group at SRL for the Nb JJ foundry service and the generous
help in making the bump-bonded samples.

R EFERENCES
[1] K. K. Likharev and V. K. Semenov, “RSFQ logic/memory family: A new Qingguo Liu (S’03–M’07) received the B.S. and M.S. degrees from Nanjing
Josephson-junction technology for sub-terahertz-clock-frequency digi- University, Nanjing, China, in 1999 and 2002, respectively, and the Ph.D.
tal systems,” IEEE Trans. Appl. Supercond., vol. 1, no. 1, pp. 3–28, degree from the University of California, Berkeley, in 2007.
Mar. 1991. He is currently with NS Labs, National Semiconductor Corporation,
[2] S. Tahara, I. Ishida, Y. Ajisawa, and Y. Wada, “Experimental vortex tran- Santa Clara, CA. His research interests include superconductive electronics and
sitional nondestructive read-out Josephson memory cell,” J. Appl. Phys., CMOS circuits in power management for energy storage and conversion.
vol. 65, no. 2, pp. 851–856, Jan. 1989.
[3] S. Nagasawa, S. Tahara, H. Numata, and S. Tsuchida, “A miniaturized
vortex transitional memory cell for a Josephson high-speed RAM,” in
IEDM Tech. Dig., Dec. 1992, pp. 793–796.
[4] U. Ghoshal, H. Kroger, and T. Van Dnzer, “Superconductor-
semiconductor memories,” IEEE Trans. Appl. Supercond., vol. 3,
no. 1, pp. 2315–2318, Mar. 1993. Theodore Van Duzer (S’52–A’54–M’60–SM’75–F’77–LF’93) received the
[5] Q. Liu, T. Van Duzer, X. Meng, S. R. Whiteley, K. Fujiwara, T. Tomida, B.S. degree in electrical engineering from Rutgers University, New Brunswick,
K. Tokuda, and N. Yoshikawa, “Simulation and measurements on a NJ, in 1954, the M.S. degree in engineering from the University of California,
64-kbit hybrid Josephson–CMOS memory,” IEEE Trans. Appl. Los Angeles, in 1957, and the Ph.D. degree in electrical engineering from the
Supercond., vol. 15, no. 2, pp. 415–418, Jun. 2005. University of California, Berkeley, in 1960.
[6] Q. Liu, K. Fujiwara, X. Meng, S. R. Whiteley, T. Van Duzer, Since 1961, he has been with the Department of Electrical Engineering and
N. Yoshikawa, Y. Thakahashi, T. Hikida, and N. Kawai, “Latency and Computer Sciences, University of California, Berkeley, where he is currently an
power measurements on a 64-kb hybrid Josephson–CMOS memory,” Emeritus Professor. Since 1968, he has led a research group in superconductive
IEEE Trans. Appl. Supercond., vol. 17, no. 2, pp. 526–529, Jun. 2007. electronics, including both devices and circuits. He is a coauthor (with S. Ramo
[7] N. Yoshikawa, T. Tomida, K. Tokuda, Q. Liu, X. Meng, S. R. Whiteley, and J. R. Whinnery) of Fields and Waves in Communication Electronics and
and T. Van Duzer, “Characterization of 4 K CMOS devices and circuits a coauthor (with C. W. Turner) of Introduction to Superconductive Devices.
for hybrid Josephson–CMOS systems,” IEEE Trans. Appl. Supercond., His current research interests include hybrid superconductor/semiconductor
vol. 15, no. 2, pp. 267–271, Jun. 2005. 4-K random access memory.
[8] N. Kawai, Y. Takahashi, K. Gotoh, N. Yoshikawa, and T. Van Duzer, Prof. Van Duzer initiated and served as the founding Editor-in-Chief of the
“Characterization of 90 nm Cryo-CMOS devices and circuits for hy- IEEE T RANSACTIONS ON A PPLIED S UPERCONDUCTIVITY and as a Guest
brid Josephson–CMOS memories,” in ISEC Ext. Abstr., Washington, DC, Editor for several IEEE journal special issues. He is a member of the U.S.
Jun. 2007. Paper PB01. National Academy of Engineering.
20 IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, VOL. 20, NO. 1, FEBRUARY 2010

Xiaofan Meng received the B.S. and Ph.D. degrees (equivalent) from Peking Nobuyuki Yoshikawa (M’06) received the B.E., M.E., and Ph.D. degrees
University, Shenzhen, China, in 1962 and 1976, respectively, both in physics. in electrical and computer engineering from Yokohama National University,
He is currently a Senior Development Engineer in the Department of Elec- Yokohama, Japan, in 1984, 1986, and 1989, respectively.
trical Engineering and Computer Sciences, University of California, Berkeley Since 1989, he has been with the Department of Electrical and Computer
(UC Berkeley). Beginning in 1984, he was an Assistant and Associate Professor Engineering, Yokohama National University, where he is currently a Professor.
and then the Director of the Superconducting Electronics Group, Department His research interests include superconductive devices and their applications in
of Physics, Peking University. During 1987–1991, he was a Visiting Asso- digital and analog circuits, and single-electron-tunneling devices and quantum
ciate Professor in the Department of Electrical Engineering and Department computing devices.
of Physics, University of Virginia, Charlottesville. In 1991, he became a Prof. Yoshikawa is a member of the Institute of Electronics, Information and
Senior Visiting Scientist in the Department of Electrical Engineering and Communication Engineers of Japan, Japan Society of Applied Physics, Institute
Computer Sciences, UC Berkeley. He is also a Consultant to many high- of Electrical Engineers of Japan, and Institute of Electrical and Electronics
technology companies. He has extensive research experience in superconductor Engineers.
and semiconductor electronics, MEMS and other devices, and IC fabrication,
including thin-film deposition, photolithography, wet and dry etching, mate-
rial characterization, low-temperature technology, high and ultrahigh vacuum
technology, nanotechnology, and clean room fabrication. He is a coauthor
(with Y. X. Pan) of the book Brief History of Science and Technology in Ancient
China (Beijing, China: People’s Publishing House of China) and a co-translator
(with G.J. Cui) of the Chinese edition of Physics and Application of Josephson
Effect (Beijing, China: Metrology Publishing House of China) (A. Barone and
G. Paterno). He has more than 80 publications on superconductive electronics
and other fields. His current research interest is superconductor device and
circuit fabrication, including Josephson junctions, ICs, and superconductor
bolometer arrays.
Dr. Meng was the recipient of awards from Peking University, Peking
Commission of Science and Technology, and Chinese National Commission
of Science and Technology for superconductor device and low temperature
research; the Wel Zeilinger Staff Excellence Award; and Distinguished Service
Awards from the Department of Electrical Engineering and Computer Sciences,
UC Berkeley.

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