Microelectronics Journal 90 (2019) 12–18

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Microelectronics Journal
journal homepage: www.elsevier.com/locate/mejo

A silicon Hall sensor SoC for current sensors

Alper Girgin, Melih Bilmez, Hamid Yadegar Amin, Tufan Coşkun Karalar *
Electrical and Communications Engineering Department, Istanbul Technical University, Istanbul, Turkey

A R T I C L E I N F O A B S T R A C T

Keywords: In this paper we present a System on Chip (SoC) that implements a Hall Effect Sensor along with its readout
Hall sensor circuits and calibration support. The sensor is designed for use in Hall effect based current sensors. The SoC was
Read out ICs implemented in 0.18u CMOS technology and integrates Hall sense elements, preamplifiers as well as a delta sigma
Digital sensor calibration
ADC, a DAC and a digital calibration. The SoC achieves 11 V/T gain and 0.76% RMS accuracy over a range of
Hall sensor based current sensors
Sensor SoC

300 mT and 30 kHz signal bandwidth. The SoC integrates a digital correction unit that implements a polynomial
Integrated silicon sensor computation algorithm for calibrating out the current sensor’s magnetic core induced nonlinearities. Offset
temperature drift of the sensor is 6.81μT per degrees over 40  C to 85  C range. A current sensor is built using
the SoC. It can measure currents from 10 A to 10 A and achieve 1.67% RMS measurement accuracy.

1. Introduction
Hall effect based magnetic field sensors are easily built using mixed
signal CMOS processes. Therefore they are commonly used whenever
there is need for a low cost magnetic field sensor with moderate per-
formance. Their applications range from consumer to automotive appli-
cations. These sensors are often packaged with magnetic cores, rotators
etc. to realize different types of sensors that can measure parameters such
as current, rotational speed, angle, position etc. [1].
One very common use of magnetic field sensors is in current mea-
surements where the magnetic field due to the current is used to deter-
mine current. Also called open loop current sensors, these devices use a
gapped ferrite magnetic core around the current flow and amplify the
induced magnetic field and confines the field lines [1,2]. Such a use is
illustrated in Fig. 1. The magnetic flux density (B in [T]) is the quantity
measured by the Hall effect sensor. For this type of current sensors there
are two main types of errors.
The first type of errors come from the offset and gain shift of the Hall
effect sensor element. More often than not this is the main type of error
against which currently used Hall effect based magnetic field sensors are
calibrated. These sensors often implement calibration by adjusting the
readout preamplifier gain and offset [3–6]. Currently on-chip support
exists for correcting the Hall sense element offset and gain errors.
The second type of errors arise during the generation of magnetic flux
within the magnetic core [1]. To understand these errors it should be
noted that, the current to be measured relates linearly to the magnetic
field (H in [A/m]) inside the magnetic core. This magnetic field also gives
rise to a magnetic flux within the magnetic core. The flux is, nominally,
linearly proportional to the magnetic field and thus current [7]. However
as the current and magnetic field increase, due to the magnetization of
the used ferrite magnetic core, the flux within the core displays a
nonlinear transfer curve, as well as saturation and hysteresis. This
magnetization is mainly due to the material and geometric properties of
ferrite cores. Therefore the nonlinear dependence of the flux density (as
well as Hall effect sensor output) to the current is a major source of
measurement error for open loop current sensors. The overall impact of
the nonlinearity on the current sensor transfer function is illustrated also
in Fig. 1.
In literature the nonlinearity-induced error has been dealt in multiple
ways. In the first group, there are sensors that utilize magnetic cores 2-3x
larger than necessary. These cores are used such that the maximum
magnetic flux due to the current is well below the saturation level, which
is impacted by the core geometry. That is the operational flux levels are
30–40% of the maximum (saturation) magnetic flux [8]. Therefore larger
sized (than necessary) magnetic cores are used. As the second group of
sensors there is a secondary winding around the core to generate a
counter magnetic field and keep the equivalent flux within the core near
neutral level. This approach is called a closed loop Hall Effect based
sensor [2]. Closed loop sensors have higher costs and power consump-
tion, as they require secondary windings and buffers to drive the sec-
ondary windings. As the third group of nonlinearity mitigation the
nonlinearities are corrected by post processing the sensor outputs using a
microcontroller [9,10]. Implementing these microcontroller based algo-
rithms require the use of additional computational resources from an

* Corresponding author.
E-mail addresses: girginal@itu.edu.tr (A. Girgin), bilmez@itu.edu.tr (M. Bilmez), amin@itu.edu.tr (H.Y. Amin), tufan.karalar@itu.edu.tr (T.C. Karalar).

https://doi.org/10.1016/j.mejo.2019.04.020
Received 22 December 2018; Received in revised form 12 April 2019; Accepted 24 April 2019
Available online 2 May 2019
0026-2692/© 2019 Elsevier Ltd. All rights reserved.
A. Girgin et al.
Fig. 1. Hall effect based current sensor illustration (b) Vout-Imeas relation
illustration.
external device (such as a microcontroller) as well as its additional power
consumption. The requirement of external devices also increases the size
of the overall current sensor.
By integrating the digital calibration functions on the same die as the
Hall effect sensor a compact and lower power current sensor can be
designed. In this work we present a System on Chip (SoC) that imple-
ments a Hall effect based magnetic field sensor and its associated readout
and calibration circuits. It is used along with a gapped ferrite magnetic
core to build an open loop current sensor.
Novelty of our design comes from the fact that our SoC includes
digital correction capability against the magnetic core induced non-
linearities. Therefore outputs of the current sensor built using our SoC
would need no post processing to correct these nonlinearities. Thereby
offering a chance to reduce system complexity.
In this paper we present a novel magnetic field sensor with integrated
digital polynomial calibration block implemented using floating-point
representations. The main focus was on integration and functionality
Fig. 2. SoC block diagram.
100kHz
200kHz 400kHz
Vin
1MHz
5MHz
Fig. 3. Feed-forward preamplifier architecture (left) schematic for last stage (5 MHz) integrator of preamp (right).
13
Microelectronics Journal 90 (2019) 12–18
rather than power minimization.
2. Architecture
The SoC architecture is shown in Fig. 2. Through the signal path the
Hall sensor converts the magnetic field to a Voltage. This is amplified
using a Programmable Gain Amplifier (PGA). The amplifier comprised of
two cascaded PGA’s. The amplifier output is digitized by using a Delta
Sigma Modulator ADC and its decimation filter (A/D). The digital sensor
output is calibrated using the integrated digital correction module. The
calibrated signal converted back to analog using a Delta Sigma modu-
lated DAC (D/A). The DAC output is driven out by a voltage buffer, which
improves the current driving capability of the Analog output. This analog
output signal ensures the compatibility of the sensor to existing Hall
Sensor interfaces. The sensor device is designed so that it houses most of
the auxiliary blocks for self sufficient operation. Aside from the signal
path components listed above the SoC includes a Band Gap Reference
Voltage as well as bias current generation (BG/REF). Moreover the
oscillator for clock generation (CLK) as well as Power on Reset (POR)
generation capabilities are included on chip. Finally a Serial Parallel
Interface (SPI) is included for configuring the SoC from an external host
computer.
2.1. Hall Sensor
The Integrated Hall sensor is implemented as a planar 4 terminal
device in an N-well. The N-Well is octagonally shaped and measures
120 μm across. Its output voltage is nominally a linear function of the
magnetic flux density (B) and the bias current (Ibias) [1]. The Hall
element is designed to handle maximum flux density of 300 mT with a
1 mA bias current. The sensor is assumed to respond to the vertical
VREF
CCMFB
Vop
CINT
Von
V1p V1n V2n V2p V3p V3n
k1I0 k2I0 k3I0
Vout
A. Girgin et al.
Fig. 4. Floating point calibration block.
component of the applied magnetic fields. The expected maximum signal
is 10 mV.
The sensor has an output offset due to doping variations [1]. Using
EM simulators this offset is estimated around 5Vrms. Using switches and
applying the sensor bias in four different directions spins the sensor bias
currents. Averaging measurements from different bias current can cancel
offsets and allow reducing the sensor measurement offsets [1].
2.2. Preamplifier
The preamplifier (preamp) used after the sensor is comprised of two
cascaded amplifiers each utilizing feed-forward paths [11]. The pream-
plifier has a bandwidth of 100 kHz. With 50 dB amplifier gain needed due
to the 10 mV hall element full-scale signal. A single stage amplifier would
require a 300 MHz unity gain frequency and about 100 dB of loop gain at
DC. For design using slower and lower gain sub stages a feed forward
architecture is selected. The design does not use switched capacitor based
integrators [5] as preamplifiers to keep the amplifier bandwidth re-
quirements relatively low. This potentially can allow power savings.
However we did not optimize our design to reap the benefits of this
potential. The architecture and bandwidth of each feed forward stage is
shown in Fig. 3. Fully differential transistor level design of the last stage
of the preamplifiers is shown in Fig. 3. The preamplifier can be pro-
grammed to have gain values within 0–65 dB with roughly 5 dB steps.
The second amplifier has more relaxed specifications in terms of offset as
well as noise and potentially can consume less power. Preamplifiers draw
a current of 3.7 mA together and target to achieve more than 60 dB of
linearity. The chopping reduces the preamp offset to 50μV while intro-
ducing glitches to the output and summing junctions. RC low pass filters
are used at the input and output of the first stage to filter such glitches.
2.3. ADC
For performing digital calibration, the output of the preamplifier is
digitized using a Continuous time Delta Sigma Modulator (DSM). The
ADC is clocked at 12.5 MHz and at 100 kHz bandwidth the oversampling
ratio is 62.5. The target resolution is 12 bits. A 12 –bit resolution from the
ADC ensures that the ADC does not create a performance bottleneck. A
Continuous time DSM was selected to allow use of slower amplifiers than
a discrete time implementation. A 3rd order loop with 17 levels of
quantization is determined to yield the target performance.
The ADC is implemented using a cascade of integrators with Current
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Microelectronics Journal 90 (2019) 12–18
DAC feedback [12]. The Quantization results are shuffled with Dynamic
Element Matching before feedback to reduce DAC nonlinearities [13].
The Cascaded integrators are built using standard folded cascode am-
plifiers [12]. The Feedback DAC’s are cascoded NMOS current sources
with PMOS loads to prevent common mode shift.
ADC outputs are obtained by filtering the modulator outputs through
a decimation filter consisting of three cascaded sinc filters [12]. The
decimated ADC outputs are available to the calibration block or to an
external host through the serial interface. ADC power consumption is
5.7 mA.
2.4. Calibration block
Currently in most Hall Sensor IC’s calibration is performed as gain
and offset correction [2]. On the contrary, a more sophisticated cali-
bration is performed in our project using a digital calibration block. This
block assumes that the nonlinearity of the current sensor transfer func-
tion (from input current to sensor output including the magnetic core
nonlinearity) can be approximated by a 5th (or lower) order polynomial.
Current Sensor transfer function nonlinearity is due to hysteresis and
saturation during the generation of the magnetic flux within the mag-
netic core. This generation is usually modeled after the hyperbolic
tangent function in earlier models [14]. The fifth order model is chosen
as a polynomial approximation to this hyperbolic tangent function.
During operation the current sensor digital output is corrected by
calculating a polynomial function for the sensor output voltage. Unlike
other available current sensors the gain and offset are calibrated out as
part of this polynomial computation as well. Moreover the necessary
circuit for this calibration is integrated on-chip. The resulting imple-
mentation uses 2100 gates and occupies 82000 μm2 silicon area in our
0.18 μm process.
The calibrated result is obtained by calculating a fifth order poly-
nomial function of the ADC output. The input and output of this cali-
bration are 12-bit fixed-point signals with values between 1 and 1. The
coefficients were stored as custom floating-point numbers with 5-bit
exponents and 7-bit mantissa. The fixed-point representation was not
chosen, as the coefficients would have needed to be 40-bits wide. Due to
the floating-point nature, calibration first encodes the incoming fixed-
point data into the custom floating-point representation. Next the com-
putations for the 5th degree polynomial are executed. Finally the
floating-point result is converted back to fixed point. During this con-
version the necessary clipping and saturation operations are carried out.
A. Girgin et al.
2.3mm
DIGITAL CONTROL
Preamp 1
Hall Sensors
2.3mm
Preamp2
DAC REF ADC
Fig. 5. Sensor SoC micrograph (Left), Hall Sensors lineup (R).
A block diagram of this block is illustrated in Fig. 4. The calibration block
can be bypassed for debugging purposes. It can be used to implement
lower order calibration polynomials when higher order calibration co-
efficients are forced to zero.
The calibration coefficients are computed during manufacturing after
the sensor is mounted into the final form factor. During the
manufacturing tests a current ramp is applied to the sensor as input.
Reading the ADC outputs through the serial interface against the input
current values, a polynomial regression can be executed externally. As
the result of this regression calibration polynomial coefficients are
determined. The speed of this conversion is mainly determined by the
calibration current values. To speed up this calibration as few as 6 current
values can be used. However to improve the accuracy more calibration
values and longer calibrations would be necessary.
When the 5th order polynomial cannot achieve optimum approxi-
mation due to resolution constraints, a lower order polynomial can be
helpful to reduce the error across the signal range. Then such a low order
polynomial would be realized by setting the fifth order (and if necessary
the fourth order) term to zero. The computed coefficients are kept in local
memory and need to be loaded through the serial interface every time the
sensor is powered up. If a flash memory were added to the device at a
later time the boot loading of the calibration coefficients from an external
memory would not be necessary.
The use of the high order polynomial calibration algorithm and its
Fig. 6. C-frame Electromagnet used for magnetic sensor tests (Left), Current Sensor Built from Hall Sensor SoC (Right). The SoC is tested in three configurations.
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Microelectronics Journal 90 (2019) 12–18
integration on the sensor SoC are the main novelties of our design.
2.5. DAC
The DAC is included in the SoC mainly to be able to get an analog
version of the calibrated output. This analog output allows the use of our
sensor by existing systems. These applications use an analog output from
the magnetic field sensors. Our SoC can provide such an analog output
using this DAC. The DAC implements a current steering type DAC pre-
ceded by a Delta sigma modulator and succeeded by a voltage buffer. The
delta sigma modulator architecture is MASH 2-1 [15]. Its outputs are
thermometer encoded and shuffled for dynamic element matching con-
cerns. The DAC outputs are converted to voltage by load resistors and are
amplified by the output amplifier and filter. The current DAC has a total
current of 7 mA full-scale current output, including buffers. The DAC is
clocked at 12.5 MHz and targets a 100 kHz bandwidth. At 62.5 over-
sampling ratio and 6-bit quantization the DAC aims 100 dB SQNR and
12-bit resolution.
It should be noted that the DAC output filter, which has a 100 kHz
corner frequency, along with the ADC decimation filter are effectively
cascaded and reduce the overall signal bandwidth to 65 kHz. This
bandwidth reduction is a longer delay in the output. In reality, increasing
the signal bandwidths to 160 kHz and sacrificing OSR can alleviate this
excess delay on signal path.
3. Implementation
Hall Effect SoC has been manufactured in 0.18u CMOS 5 V compliant
process. It operates off of a 5 V supply, which was chosen for compati-
bility with existing mainstream sensors. Its micrograph is shown in Fig. 5.
It has dimensions of 2.3 mm  2.3 mm. Each block was implemented to
have dedicated regulators to reduce power supply noise coupling be-
tween blocks. The regulator outputs are nominally at 3.8 V.This is the
main supply voltage for the blocks. The main focus was on integration
and functionality rather than power minimization.
There are five different types of Hall elements they are placed along a
vertical line. These five sensors can be used to compare their various
performance metrics against each other. For the results in our measure-
ments the 3rd sensor was found to yield the largest sensor outputs. The
SoC is almost completely self-contained including clocks; voltage and
current references as well as an on chip reset generation. Only the
configuration data needed to be provided. Once the chip is powered up
all configuration bits, calibration coefficient numbers need to be down-
loaded through the serial port.
The SoC was not packaged but rather placed and wire bonded directly
on a printed circuit board (PCB) using chip on board methodology. The
PCB is inserted in the magnetic core cap as shown in Fig. 6 The input
current has 6 turns around the gapped core to increase the magnetic field
induced within the magnetic core. The Hall sensor is visible within the
gap of the magnetic core.
A. Girgin et al. Microelectronics Journal 90 (2019) 12–18

-1

-2

-3

-300 -200 -100 0 100 200 300

Fig. 7. Hall Sensor curve showing the Magnetic field to output voltage (Vout) relation.

be measured is wound around a gapped magnetic core. Also the

Table 1
sensor SoC is inserted into the gap. The field induced by the current to
SoC performance summary.
be measured is amplified and spatially concentrated by the magnetic
Sub Block This work [3] [4] core.
Process 0.18 μm 0.35 μm 0.18u
Area 5.29 mm2 11.55 mm2 0.06 mm2 The magnetic core also ensures the generated field is perpendicular to
Supply Voltage 5V 3.3 V 1.8 V
the sensor. The resulting field is sensed in our SoC placed in the gap and
Magnetic field range 300 mT 40 mT 6 mT
Sensitivity 11 V/T 50 mA/T 20 V/T converted to the output voltage. When the calibration block is bypassed
Voffset drift (input ref) 270uTrms 40uVrms 50uTrms the sensor data at the DAC output is shown in Fig. 8. In this setup the
Offset drift over T 6.81μT/C 0.3uT/C N/A current is swept from 0 up to 10 A then down to 10 A and this sequence
Accuracy (rms error) 0.7% 0.08% 0.2% is repeated twice. The repetitions aim to invoke the hysteresis of the
Bandwidth 30 kHz 500 kHz 10 kHz
Power (sense) 50 mW 40 mW 120uW
magnetic core.
Power (sense þ calib) 116.6 mW The measured magnetic field swing covers about 10% of the overall
sensor range. Also, it should be noted that the rotational offset cancel-
lation is not applied in the particular results in Fig. 8. Therefore 500 mV
4. Measurement results offset at the preamp output (equivalent to 1.7 mV raw sensor output
offset) is present.
The Hall sense element itself draws 2.3 mA current and has 1.4 kOhm To evaluate the RMS output error at the calibrated sensor output. A
resistance. The raw sensor offset has a standard deviation of 5.7mVrms 5th order polynomial fit was computed from the sensor input to output
[16]. After rotational averaging the residual sensor offset decreases to data. This polynomial is plotted in Fig. 8. When this polynomial fit was
150uVrms. The preamplifier offset alone is 45uVrms. The current sensor used to correct the output data the remaining RMS error of the output
temperature is also swept from 40  C to 85  C by placing the SoC in a was found to be 8.5 mV. With this error and a 510 mV full swing, the
temperature chamber. The residual voltage output offset of the sensor is output accuracy is about 1.67%. When the calibration was performed
measured as the temperature is swept. The resulting residual offset using only gain and offset correction the RMS output accuracy is 1.9%.
change is measured to be 6.81μT/C over the temperature range. Hence, the 5th order polynomial fit has accuracy advantages.
There are three sources of error in this current sensor:
 In the first configuration the sensor is placed in an adjustable mag-
netic field in a C_Frame electromagnet. The measurements indicate 1. The current sensor RMS output error of 1.67% is dominated by the
the sensor is linear up to 300 mT while preamp gain is 300. Results nonlinearity induced by the magnetic core hysteresis. The current
of this measurement are shown in Fig. 7. As expected reducing the sensor magnetic core is the main source of nonlinearity. As a remedy
preamp gain allows larger magnetic fields to be measured before the using a larger magnetic core can reduce the flux density and reduce
sensor output saturates. The magnetic field sensor accuracy is calcu- the hysteresis.
lated to be 0.7%. This accuracy was found by calculating the RMS 2. The sensor linearity is limited to 0.7% as per the measurements in
error compared to the linear regression of the measured data in Fig. 7. Fig. 7. The linearity is this measurement is limited by the zero
Performance metrics of the design are summarized in Table 1 crossing of the results. Adding offsets to the input current level can
 In the second configuration, which is shown in right panel of Fig. 6, force inputs away from the zero crossing points.
the sensor is packaged as a current sensor. In this setup the current to

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A. Girgin et al. Microelectronics Journal 90 (2019) 12–18

-0.3
measured data
polynomial fit
-0.35

-0.4

-0.45

-0.5

-0.55

-0.6

-0.65

-0.7

-0.75

-0.8
-10 -8 -6 -4 -2 0 2 4 6 8 10

Fig. 8. Current sensor DC output.

distortion (HD2) at 60 kHz. We should note that 40 dB HD2 is enough to

capture 1% of accuracy. The 40 dB HD2 observed in this output comes
from an issue in the ADC. In particular the common mode control of the
ADC feedback DAC’s has a bug, which shows problems when there’s a
differential DC input. In the sensor system the offset from the Hall
element does create a differential DC input that induces such harmonics.
Correcting the ADC common mode control fixes this harmonic issue and
yields a better than 10-bit linearity performance. The Magnetic field
sensor runs off a 5 V supply and consumes 23.3 mA (and 9.9 mA without
calibration). As mentioned before this rather high power consumption is
due to the lack of power optimization.

5. Conclusion

In this paper a Hall Effect based magnetic field sensor SoC has been
presented. The SoC is used to build a current sensor. The SoC has a novel
feature that implements a nonlinear polynomial calibration with an in-
Fig. 9. Sensor, preamplifier, ADC and DAC readout chain output performance at tegrated digital computation block. This calibration corrects the non-
30 kHz input. linearities generated by the magnetic core used in the current sensor. The
SoC includes a magnetic field sensor readout section that includes a feed-
forward multipath preamp with programmable gain. It also includes a
delta sigma ADC and a delta sigma modulated DAC. The sensor system
3. For the current sensor, magnetization due to the 10 A current input
achieves a
300 mT range with a gain of 11 V/T and offset drift of
level covers about 10% of its full -scale magnetic input range. For such
6.81μT/C. It achieves 0.76% magnetic field measurement accuracy over
magnetic field levels the core does not display “saturation induced
30 kHz bandwidth. Using this SoC a current sensor was realized. This
nonlinearity” that would necessitate the use of a 5th order calibration
current sensor achieved 1.67% measurement accuracy using a 5th order
polynomial. This is visible in Fig. 8. However a high order calibration
polynomial calibration.
polynomial is beneficial as it can reduce the RMS error from 1.9%
when using a linear calibration.
Acknowledgment
In the third configuration, the AC responses of the preamplifier, ADC
This project was funded by the Scientific and Technological Research
and DAC lineup is tested. For this purpose a sinusoidal signal, which is
Council of Turkey TUBITAK research grant 115C053. Assoc. Prof.
generated with an Agilent 81150 A function generator, is injected into
Hüseyin Kurt is acknowledged for his assistance in magnetic sensor
the preamplifier test input. During the test the preamplifier gain is set to
characterization. ITU VLSI Laboratories is acknowledged for the SoC
unity. The sensor signal chain was characterized using a 30 kHz sinu-
characterization.
soidal input. The input signal includes a 1.75 V DC component as well.
The output signal, shown in Fig. 9 has 40 dB of second harmonic

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A. Girgin et al. Microelectronics Journal 90 (2019) 12–18

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