El t

Electron Microscopy 
Mi
SEM and TEM
SEM and TEM
Content

1. Introduction: Motivation for electron microscopy
2 Interaction with matter
2. Interaction with matter
3. SEM: Scanning Electron Microscopy 
3.1 Functional Principle
3.2 Examples
3.3 EDX (Energy‐Dispersive X‐ray spectroscopy)
4 TEM: Transmission Electron Microscopy
4. TEM: Transmission Electron Microscopy
4.1 Functional Principle
4.2 Examples
4.3 Comparing SEM and TEM          
d
4.4 HAADF (High Angle Annular Dark‐Field Imaging)
 1 Motivation for EM
1. Motivation for EM

Resolution of light microscope is limited:
λ
sin Θ = 1.22 ⋅
D
• wavelenght of visible light
wavelenght of visible light
• less diffraction for smaller wavelenghts

¾ possible magnification: ~ 2 000

[ ]
[1]
 1 Motivation for EM
1. Motivation for EM

Different approach: use electrons instead of light
• Access
Access to much smaller wavelengths
to much smaller wavelengths
λ=
h
p
(3.7 pm for 100 keV)
• electrostatic/electromagnetic  lenses   
l t t ti / l t ti l
instead of glass lenses

¾ possible magnification: ~ 2 000 000

[2]
2 Interaction with matter
2. Interaction with matter
Backscattered electrons
Secondary electrons
y
Auger electrons
Transmitted electrons
Transmitted electrons
X‐Rays
specimen phonons
 2 Interaction with matter
2. Interaction with matter
Topography and composition  Backscattered electrons
Topography
p g p y Secondary electrons
y

Structure and composition

Structure and composition Transmitted electrons
Transmitted electrons
Composition X‐Rays
 2 Interaction with matter
2. Interaction with matter
2 different approaches:

Backscattered and 
B k d d T
Transmitted electrons
i d l
secondary electrons

SEM TEM
3 SEM
3. SEM

Scanningg
Electron
Microscopy
 3 1 Functional Principle
3.1 Functional Principle

Electron source

Condenser lens

Scan coil

Objective lens
2‐25 kV e‐
Specimen 
+ Detectors
 3 1 Functional Principle
3.1 Functional Principle

Electron gun e‐

Condenser lens
coils coils
Scan coil

Objective lens N
N
Specimen 
+ Detectors S
 3 1 Functional Principle
3.1 Functional Principle

Electron gun e‐

Condenser lens

Scan coil

Objective lens Waveform 
generator
Specimen 
+ Detectors Detector signal
 3 1 Functional Principle
3.1 Functional Principle

Electron gun
e‐
Condenser lens

Scan coil coils coils

Objective lens
f

Specimen 
+ Detectors
 3 1 Functional Principle
3.1 Functional Principle

Electron gun e‐
El t
Electron‐ and
d
Condenser lens Lightdetectors

Scan coil

Objective lens

Specimen 
+ Detectors
 3 2 Examples
3.2 Examples
Photonic crystal in silicon substrate Nanowires in silicon substrate 

WSI, D. Dorfner WSI, D. Pedone
 3 3 Energy Dispersive Systems (EDX)
3.3 Energy Dispersive Systems (EDX)
e‐

e‐

Bremsstrahlung Electron filling holes
→ X‐ray Continuum → Characteristic X‐rays
Information about 
chemical composition
p
 3 3 Energy Dispersive Systems (EDX)
3.3 Energy Dispersive Systems (EDX)
Solid state X‐ray
Solid state X ray Detector
Detector
N2

Si(Li)

coldfinger
X‐ray

‐X‐ray creates hole/electron pairs (3.8 eV necessary per pair)
‐Number
Number of pairs and current are a measure for X
of pairs and current are a measure for X‐ray
ray energy
energy
3 3 Energy Dispersive Systems (EDX)
3.3 Energy Dispersive Systems (EDX)

Alloy of aluminum and 
tungsten

[3]
 reminder
2 different approaches:

Backscattered and 
B k d d T
Transmitted electrons
i d l
secondary electrons

SEM TEM
4 TEM
4. TEM

Transmission
Electron
Microscopy
 4 1 Functional principles
4.1 Functional principles

Electron gun

Condenser lenses

Object

Objective lens 
+ intermediate lens  50‐ 400 kV e‐
+ projective lense
l
 4 1 Functional principles
4.1 Functional principles

Electron gun
e‐
Condenser lenses

Object

Objective lens 
+ intermediate lens 
+ projective lense
l
 4 1 Functional principles
4.1 Functional principles

Electron gun e‐

Condenser lenses
~100nm specimen
p
Object

Objective lens 
+ intermediate lens 
+ projective lense
l scattered direct beam
 4 1 Functional principles
4.1 Functional principles

Electron gun

Condenser lenses

Object

Objective lens 
+ intermediate lens 
+ projective lense
l
 4 2 Example
4.2 Example
Crossectional analysis of a 
conductor nanogap device

WSI, S. Strobel WSI, D. Pedone
4 3 Comparison of SEM and TEM
4.3 Comparison of SEM and TEM
SEM: scans with a  TEM: illumantes whole 
focused point sample
 4.4 High Angle Annular Dark‐Field  
4 4 High Angle Annular Dark Field
Imaging (HAADF)
g g( )
‐ used in STEM (scanning transmission electron microscopy)
‐ rayleigh scattering at high angles
rayleigh scattering at high angles
‐Angle depends on the atomic number Z: 
‐electron intesity: I ∝ Z 2

¾ by messuring the electron intensity, while scanning over 
the sample, information about the chemical compositio 
can be aquired
can be aquired
Thanks for your attention.
 reference

‐ TUM chemie department: 
http://www.ch.tum.de/em/emlabor/methoden/rem.htm
http://www ch tum de/em/emlabor/methoden/tem htm
http://www.ch.tum.de/em/emlabor/methoden/tem.htm
‐wikipedia:
http://en.wikipedia.org/wiki/Electron_microscopy
http://en wikipedia org/wiki/Transmission electron microscope
http://en.wikipedia.org/wiki/Transmission_electron_microscope
http://en.wikipedia.org/wiki/Scanning_Electron_Microscope
http://en.wikipedia.org/wiki/Energy‐dispersive_X‐ray_spectroscopy
http://en wikipedia org/wiki/HAADF
http://en.wikipedia.org/wiki/HAADF
http://en.wikipedia.org/wiki/EELS
‐ Transmission Electron Microscopy, D. B. Williams and C. B. Carter
‐ Scanning electron microscopy and X‐ray Microanalysis, G. Lowes
g py y y ,
‐ electron microscopy in solid state physics, H. Bethge and J. Heydenreich
 reference

[1] http://en.wikipedia.org/wiki/Optical_microscope
[2] http://de.wikipedia.org/wiki/Elektronenmikroskop
[3] http://www ch tum de/em/emlabor/methoden/rem edx htm
[3] http://www.ch.tum.de/em/emlabor/methoden/rem‐edx.htm