Documenti di Didattica
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Optical MEMS
Fundamentals of Micromachining
Dr. Bruce Gale
With special thanks to Dr. Michael McShane
Sensor Tips
D Photoresist-Based Microdispensing
Rc = (n − 1) f =
4L
D=diameter (5-750µm)
L=resist thickness (up to 50µm)
• Microjet directs
droplets to substrate
• Liquid solidifies on
contact
• Surface tension causes
formation of spherical
surface
• 25-100µm diameter
Photosensitive Glass Laser Heating
2-500µm diameters
Highly spherical
Other shapes also possible
Reflective Optics Multilayer Dielectrics
• Reflection Coatings
– Si
Sequential deposition of materials
– Metals Sputtering
– Multilayer Dielectrics Molecular beam epitaxy
Self-assembly
• Mirrors
– Single
– Arrays
• Actuation moves
Intensity
d Intensity membrane
• Movement alters
λ0
λ optical pathlength
•Change in optical pathlength: • Results in change in
•Refractive index (n)
•Cavity length (d) transmitted “color”
•Changes resonance wavelength 2π nd
(wavelength at which constructive Phase shift φ =
interference occurs) λ
• Optical couplers in
regions of waveguide
contact
• Coupling depends on
relative phase of waves
arriving at coupler
•Arrays used to cover broader • Changes in “arms”
spectral regions produce changes in
•Required due to periodicity of output fringes
interference
Detectors Applications
• Switches
• Spectrometers
• Photodiodes
• Scanners
• µ-bolometers
• Displays
• Fundamentals of Microfabrication