Working Principle and Applications of Capacitive

Pressure Sensor
Vinaasha(2019)
School Of Manufacturing Engineering, UniMAP
bvinaasha@gmail.com
Abstract-The pressure sensor structure, working principles, parameters and
applications has been presented in this paper. The theory of operation are also
included. Besides, one suitable sensor were proposed that suit to any industrial
application. Also, factors that should be taken in consideration when selecting a
sensor prior to the application was discussed.
Keywords-Pressure sensor, classification based on sensing element, structure,
working principle, parameters, application, factors of selecting sensor.
I. INTRODUCTION
Pressure acts as an essential parameter in many real life applications. To prevent the
system from suffering serious pressure damage, pressures should always be monitored
and maintained to a suitable and consistent level. The pressure measurement becomes
a critical issue with this requirement, and this can be done using a pressure sensor [1],
[2]. The pressure is generally defined as the force applied per unit area. Pressure
mathematical expression, P:
P=F/A (1)
Where F is the force, and where A is the force area. This mechanical motion of the
elements, proportional to the pressure applied, can be used to determine the
magnitude of the pressure. In essence, an electronic device used to detect an element
pressure state is a pressure sensor. Thus, the elements within the sensor, like a
diaphragm, create an electric signal that can easily be recognized, detected and
measured other electrical equipment[3]. Either current, resistance, capacitance or
voltage can be this electrical signal. This process is summarized in the block diagram
shown in Fig. 1.

Fig. 1 Basic operating principle of pressure sensor

II. Theory of Operation
When under pressure, the capacitive pressure sensor changes its capacity. Two
leading plates and an elastic diaphragm Fig. 2 were constructed by a capacitive
pressure sensor. The conductive panel attached to the diaphragm is bent with that
diaphragm when a pressure has been applied. The bending of the plate reduces the
distance between the two plates. Using the capacitance equation, c:
(2)
Where is relative permitability, is the dielectric constant, A is the zone of the
plates, and d is the distance of two plates.

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