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Module no.

Course contents (Total Detail of course


lectures) (number of lectures)
History and
technology trends,
Overview of CMOS
Clean room
process, Clean room
procedures, IC
fabrication flow.
Crystal structure,
Czochralski, Float-
Crystal growth, Wafer Zone growth
manufacturing methods, Wafer
specification, Crystal
characterization
Wet and Dry
oxidation, Growth
Silicon Oxidation kinetics and Models,
Quality,
Characterization.
Light sources, Optical
lithography,
Photoresist types,
Mask making,
Lithography
Advanced
Lithography
techniques and their
comparison.
Dry and wet etch
techniques. Si
Etching etching , Plasma
etching, Reactive Ion
Etching.
Diffusion equations
and profiles,
Diffusion Modeling
concentration
dependent diffusion.
Chemical Vapor
Deposition, Molecular
Beam epitaxy,
Thin film deposition Epitaxial defects, low
and high dielectric
deposition, Poly
deposition.
Ion channeling,
Ion Implantation Implant damage,
Annealing.
Physical and chemical
vapor deposition, Al
Metallization
and Cu metallization,
Silicide formation.
Process Integration, Introduction to
Yield Bipolar, BICMOS,
and MEMS
technology,
Planarization, Multi-
chip modules and
packaging.

Introduction CAD tools and methodology, Notations, symbols,


and terminology, Example of analog signal
processing and analog ICs.

Review of IC technology, device modeling and Modeling of BJT and MOS devices, BJT and MOS
layout fabrication technology, Basic IC layout and passive
components

Basic analog subcircuits MOS switch and resistor, Current sources/sinks and
current mirrors, Design of basic amplifiers, Current
and voltage references
Noise analysis and modeling Time and frequency-domain analysis, Noise models
for IC devices, Noise analysis examples
Basic operational amplifier (opamp) design Non-ideal characteristics of opamps, Design of two-
stage opamps, Stability and frequency compensation

Comparators Characterization of a comparator, Bipolar


comparators, CMOS Comparators

Integrated filters Opamp-RC filters, MOSFET-C filters, Gm-C filters,


Switched-capacitor filters

Introduction to data converters Characterization and definition of data converters,


Nyquist-Rate Digital-to-Analog Converters,
Oversampled Converters

Introduction Historical Review, Issues Integrated Circuit


Design, Quality Metrics

CMOS Devices MOS Capacitor, MOS Diode, NFET and PFET


Large Signal I-V Relations, DC and Transient
Modeling and Simulation, Device Scaling
Integrated Circuit Interconnect o RLC Characteristics of Interconnect
o Modeling (lumped RC, distributed RC,
transmission line), DC and Transient Modeling
and Simulation Scaling
CMOS Inverter Logic Function DC Transfer Functions, Static and Dynamic
Characteristics, DC and Transient Modeling and
Simulation, Logic Design Prototypes (CMOS,
pseudo-NMOS, Diode), Design Optimization
(noise margin, area, power, delay)
CMOS Combinational Logic Design Single Output /Multiple Input (NAND, NOR,
XOR), Multiple Output/Multiple Input (Adder,
o Mux/DeMux), Static and Dynamic Design, DC
Transfer Functions, Static and Dynamic
Characteristics, DC and Transient Modeling and
Simulation, Design Optimization (logic style,
noise margin, area, power, delay), Next
Generation and Scaling
CMOS Sequential Logic Design o CMOS Latches and Flips-Flops,
o Monostable and Astable Circuits, Static and
Dynamic Design, DC Transfer Functions, Static
and Dynamic Characteristics, DC and Transient
Modeling and Simulation, Design Optimization
(logic style, clocking, setup time, hold time,
area, power, delay), Next Generation and
Scaling
o
o
o Introduction o VLSI design flow, challenges.
o Verilog/VHDL:
o introduction and use in synthesis,
modeling combinational and sequential logic,
writing test benches.
o Logic synthesis o Two-level and multilevel gate-
level optimization .
o Binary decision diagrams. Basic
concepts of high-level synthesis, partitioning,
scheduling, allocation and binding. Technology
mapping.
o Physical design automation o VLSI design styles, full-custom,
standard-cell, gate-array and FPGA, Physical
design automation algorithms, floor-planning,
placement, routing, compaction, design rule
check, power and delay
o estimation, clock and power
routing, Special considerations for analog and
mixed-signal designs.
Digital domain

Succesive Digital Time- Time-domain


approximation Deltasigma calibration interleaving processing

SAR Offset Without


compensation Switched current
Oversampling calibration (cao et reference source (yang
(Flynn et al) al, 2009) SAR & sharpeshkar, 2005,
2006).

With background
calibration (alpman
et al., 2009)
Recursive
Additional successive
comparators with approximation
background algorithm in the
calibration (kijima, time domain
ito et al. 2009) Input reference (jimenez-irastorza
generation from et al. 2011)
comparator offset
(sundström &
alvandpour, 2009)

N-bit flash quantizer


replaced by asynchronous
comparator ((Colodro &
Torralba, 2008). )
Analog reduction Biasing

Inverter based ΔΣ
Switched op-amp Op-amp sharing Op-amp less
modulators
Assisted op-amp and
helper techniques
4th order band-pass CBSC (comparator
Op-amp for two based switched
ΣΔ modulator using adjacent stages in
two switched op- capacitors) Hybrid ΣΔ modulator
successive alternative technique(fiorenza et
amps (kuo & liu, phases(hashemi & fabricated in 65nm
2004). al., 2006) CMOS technology
shoaei, 2007; sasidhar,
2009) (van veldhoven et al.,
2008)
Pipelined ADC based
on zero-crossing
detector (shin et al.
2008; brooks & lee,
2009)
(Chae & han, 2009)
the inverter behavior
used as an extremely
ADC array using simple amplifier
charge redistribution
architecture
(draxelmayr, 2004)

Comparator based
flash ADC structure
(van der plas, 2006)
FA FA

FA

FA FA

FA

FA FA

FA

FA FA
T15 T14 T13 b3
T12
T11
T10
c1
T9
d0
T8 b2
T7 Bit3 (MSB)
T6
c0
T5
T4
T3
T2 b1
T1 c1c0 Bit2
T0

b3
b0 b2 b1 b0
Bit1

T15T13T11 T9 T7 T5 T3 T1

Bit0 (LSB)

Bit3 = d0
Bit2 = c0 + c1
Bit1 = b0 + b1 + b2 + b3
Bit0 = T1 + T3 + T5 + T7 + T9 + T11 + T13 + T15

V+
Vin
00000000111111111

(2n-1) to n n -bit
encoder

V-

Resistor string Thermometer


Comparator array Thermometer code to binary encoder
IC
Fundamental theorey , Process indepth analysis
Fabrication

Analog IC Digital IC
VLSI CAD
Custom IC design skills, Digital IC design skills, Programming skills
design Design

Projects
Comprehensive design practice
1.0

0.9

0.8
 Vm

0.7

0.6

0.5

0.4
0.01 0.1 1 10 100

Wp/Wn aspect ratio

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