Agni College of Technology

Thalambur, Chennai 600 130

Office of Examcell

Question Bank for Unit - 5

Sub Name : Micro Electro Mechanical Systems Department : Mechatronics
Sub Code : EE6007 Year & Sec : IV
PART – A
1. Write the major classes of polymers.

2. Compare and contrast thermo plastic polymer and thermal setting polymer.

3. Give the structure of polyimide.

4. Summarize the properties of elastomers.

5. Describe SU-8.

6. Summarize the process characteristics of PDMS.

7. Describe about LCP.

8. Explain the terms PDMS and PMMA.

9. Discover the need of parylene.

10. Classify the dimmer variations of parylene.

11. Point out the properties of polycarbonate.

12. Compare the properties of plastics and fibres.

13. Give the principle behind multimodal polymer based tactile sensor.

14. Define viscoelastic creep.

15. Express the maximum tensile strength for polymers.

16. List the families of polymers.

17. Give the properties of Teflon.

18. List the actuators for optical MEMS.

19. Define optical mirrors.

20. Generalize the properties of polymide materials.

PART – B
1. i. Summarize the fabrication process of silicon accelerometer with parylene [7]
beams.
ii. Explain in detail about schematic diagram of LCP polymer flow sensors. [6]
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2. i. Explain in detail about PDMS with case study. [7]
ii. Define fluorocarbon, Paralyene and PMMA in detail. [6]

3. i. Compare and contrast SU-8 and parylene. [7]

ii. Examine about pneumatic controlled PDMS valve. [6]

4. Give short notes on:

i. Polymide [7]
ii. LCP [6]

5. i. State the Principle and explain the operation of a typical micromirror. [7]
ii. Explain how micromirror technology is applied in scanning electron [6]
micrograph.

6. Explain about optical applications of MEMS devices [13]

7. Analyze the fabrication steps in Parylene surface micro machined pressure [13]
sensor.

Subject Incharge HOD

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