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US 20110210436A1

(19) United States


(12) Patent Application Publication (10) Pub. No.: US 2011/0210436A1
Chow et al. (43) Pub. Date: Sep. 1, 2011
(54) INTEGRATED CIRCUIT PACKAGING (52) U.S. Cl. ................. 257/686; 438/109; 257/E21.506;
SYSTEM WITH ENCAPSULATION AND 257/E25.013; 257/E23.141
METHOD OF MANUFACTURE THEREOF
(76) Inventors: Seng Guan Chow, Singapore (SG); (57) ABSTRACT
Hin Hwa Goh, Singapore (SG);
Rui Huang, Singapore (SG); Heap
Hoe Kuan, Singapore (SG) A method of manufacture of an integrated circuit packaging
system includes: providing a base Substrate; attaching a base
(21) Appl. No.: 12/714,431 integrated circuit on the base Substrate; attaching a base bar
rier on the base substrate adjacent a base perimeter thereof;
(22) Filed: Feb. 26, 2010 mounting a stack Substrate over the base Substrate, the stack
Publication Classification
Substrate having a stack Substrate aperture with the stack
Substrate having an inter-substrate connector thereon; and
(51) Int. C. dispensing a connector underfill through the stack Substrate
HOIL 25/065 (2006.01) aperture encapsulating the inter-substrate connector, over
HOIL 2/60 (2006.01) flow of the connector underfill prevented by the base barrier.

100
N

130
156
104
106
154. 114 160 108
Patent Application Publication Sep. 1, 2011 Sheet 1 of 9 US 2011/0210436A1

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Patent Application Publication Sep. 1, 2011 Sheet 2 of 9 US 2011/0210436A1

362 360 336

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FIG. 4
Patent Application Publication Sep. 1, 2011 Sheet 3 of 9 US 2011/0210436A1

500
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Patent Application Publication Sep. 1, 2011 Sheet 4 of 9 US 2011/0210436A1

690

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Patent Application Publication Sep. 1, 2011 Sheet 5 of 9 US 2011/0210436A1

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Patent Application Publication Sep. 1, 2011 Sheet 6 of 9 US 2011/0210436A1

O O O O O O O O O O
O O O O O O O O O O 1070
O O O O O O O O O O 1088
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Patent Application Publication Sep. 1, 2011 Sheet 7 of 9 US 2011/0210436A1

FIG. 13

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FIG.14
Patent Application Publication Sep. 1, 2011 Sheet 8 of 9 US 2011/0210436A1

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N

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1490
FIG. 15
Patent Application Publication Sep. 1, 2011 Sheet 9 of 9 US 2011/0210436A1

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N
US 2011/021043.6 A1 Sep. 1, 2011

INTEGRATED CIRCUIT PACKAGING providing a base substrate; attaching a base integrated circuit
SYSTEM WITH ENCAPSULATION AND on the base Substrate; attaching a base barrier on the base
METHOD OF MANUFACTURE THEREOF Substrate adjacent a base perimeter thereof mounting a stack
Substrate over the base Substrate, the stack Substrate having a
TECHNICAL FIELD stack Substrate aperture with the stack Substrate having an
0001. The present invention relates generally to an inte inter-substrate connector thereon; and dispensing a connector
grated circuit packaging system, and more particularly to a underfill through the stack Substrate aperture encapsulating
system for an integrated circuit packaging system with encap the inter-substrate connector, overflow of the connector
Sulation. underfill prevented by the base barrier.
0008. The present invention provides an integrated circuit
BACKGROUND ART packaging system, including: a base Substrate; a base inte
0002 Increased miniaturization of components, greater grated circuit on the base substrate; a base barrier on the base
packaging density of integrated circuits (“ICs'), higher per Substrate adjacent a base perimeter thereof: a stack Substrate
formance, and lower cost are ongoing goals of the computer over the base Substrate, the stack Substrate having a stack
industry. Semiconductor package structures continue to Substrate aperture with the stack Substrate having an inter
advance toward miniaturization, to increase the density of the Substrate connector thereon; and a connector underfill
components that are packaged therein while decreasing the through the Stack Substrate aperture encapsulating the inter
sizes of the products that are made therefrom. This is in substrate connector, overflow of the connector underfill pre
response to continually increasing demands on information vented by the base barrier.
and communication products for ever-reduced sizes, thick 0009 Certain embodiments of the invention have other
nesses, and costs, along with ever-increasing performance. steps or elements in addition to or in place of those mentioned
0003. These increasing requirements for miniaturization above. The steps or elements will become apparent to those
are particularly noteworthy, for example, in portable infor skilled in the art from a reading of the following detailed
mation and communication devices such as cellular phones, description when taken with reference to the accompanying
hands-free cellular phone headsets, personal data assistants drawings.
("PDA's'), camcorders, notebook computers, and so forth. BRIEF DESCRIPTION OF THE DRAWINGS
All of these devices continue to be made smaller and thinner
to improve their portability. Accordingly, large-scale IC 0010 FIG. 1 is a cross-sectional view of an integrated
(LSI) packages that are incorporated into these devices are circuit packaging system along a section line 1-1 of FIG. 2 in
required to be made Smaller and thinner. The package con a first embodiment of the present invention.
figurations that house and protect LSI require them to be 0011 FIG. 2 is a top view of the integrated circuit pack
made Smaller and thinner as well. aging System.
0004 Consumer electronics requirements demand more 0012 FIG. 3 is a cross-sectional view of an integrated
integrated circuits in an integrated circuit package while para circuit packaging system along a section line 3-3 of FIG. 4 in
doxically providing less physical space in the system for the a second embodiment of the present invention.
increased integrated circuits content. Continuous cost reduc 0013 FIG. 4 is a top view of the integrated circuit pack
tion is another requirement. Some technologies primarily aging System.
focus on integrating more functions into each integrated cir 0014 FIG. 5 is a cross-sectional view similar to FIG. 1 of
cuit. Other technologies focus on Stacking these integrated an integrated circuit packaging system in a third embodiment
circuits into a single package. While these approaches pro of the present invention.
vide more functions within an integrated circuit, they do not 0015 FIG. 6 is a cross-sectional view of an integrated
fully address the requirements for performance, integration, circuit packaging system along a section line 6-6 of FIG. 7 in
and cost reduction.
0005 Thus, a need still remains for an integrated circuit a fourth embodiment of the present invention.
packaging system providing improved chip interconnection, 0016 FIG. 7 is a top view of the integrated circuit pack
space savings, and low cost manufacturing. In view of the aging System.
ever-increasing need to improve performance, integration, 0017 FIG. 8 is a cross-sectional view of an integrated
and cost reduction, it is increasingly critical that answers be circuit packaging system along a section line 8-8 of FIG. 9 in
found to these problems. In view of the ever-increasing com a fifth embodiment of the present invention.
mercial competitive pressures, along with growing consumer 0018 FIG. 9 is a top view of the integrated circuit pack
expectations and the diminishing opportunities for meaning aging System.
ful product differentiation in the marketplace, it is critical that 0019 FIG. 10 is a cross-sectional view of an integrated
answers be found for these problems. Additionally, the need circuit packaging system along a section line 10-10 of FIG. 11
to reduce costs, improve efficiencies and performance, and in a sixth embodiment of the present invention.
meet competitive pressures adds an even greater urgency to 0020 FIG. 11 is a top view of the integrated circuit pack
the critical necessity for finding answers to these problems. aging System.
0006 Solutions to these problems have been long sought 0021 FIG. 12 is a cross-sectional view of an integrated
but prior developments have not taught or Suggested any circuit packaging system alonga section line 12-12 of FIG.13
Solutions and, thus, Solutions to these problems have long in a seventh embodiment of the present invention.
eluded those skilled in the art. 0022 FIG. 13 is a top view of the integrated circuit pack
aging System.
DISCLOSURE OF THE INVENTION
0023 FIG. 14 is a cross-sectional view of an integrated
0007. The present invention provides a method of manu circuit packaging system alonga section line 14-14 of FIG.15
facture of an integrated circuit packaging system including: in an eighth embodiment of the present invention.
US 2011/021043.6 A1 Sep. 1, 2011

0024 FIG. 15 is a top view of the integrated circuit pack The current PoP structures are not amenable or not readily
aging System. complied to introduce the reinforcement layers (e.g. underfill
0.025 FIG.16 is a flow chart of a method of manufacture of materials) in the package-to-package standoff gap, particu
an integrated circuit packaging system in a further embodi larly for PoP stacking structures that have same sizes.
ment of the present invention. 0035. The current PoP structures can be mounted on
printed circuit boards (PCBs) with underfill tongues formed
BEST MODE FOR CARRYING OUT THE around the PCBs peripheries. Long underfill overspreads (or
INVENTION tongues) can be formed around the peripheries of the current
0026. The following embodiments are described in suffi PoP structures if conventional dispensing techniques are
cient detail to enable those skilled in the art to make and use employed to provide underfill materials between inter-pack
the invention. It is to be understood that other embodiments age standoff gaps and the current PoP structures’ board-level
would be evident based on the present disclosure, and that mounting standoff gaps.
system, process, or mechanical changes may be made without 0036. The current PoP structures have a number of disad
departing from the scope of the present invention. Vantages or problems. The problems can include a high
0027. In the following description, numerous specific amount of wasted underfill materials, a long dispensing time
details are given to provide a thorough understanding of the for double-layer standoff gaps, or a large PCB keep-out Zone
invention. However, it will be apparent that the invention may required to accommodate the long underfill overspreads.
be practiced without these specific details. In order to avoid 0037 Additional problems that need to be addressed can
obscuring the present invention, some well-known circuits, include inadequate thermal performance of top packages in
system configurations, and process steps are not disclosed in the current PoP structures, since peripheral balls can insuffi
detail. ciently or ineffectively dissipate heat through substrates of
0028. The drawings showing embodiments of the system bottom packages in the current PoP structures. Embodiments
are semi-diagrammatic and not to Scale and, particularly, of the present invention provide answers or solutions to these
Some of the dimensions are for the clarity of presentation and problems by providing various form factors, which can
are shown exaggerated in the drawing FIGS. Similarly, include ascending, descending, or straight profile in structure.
although the views in the drawings for ease of description 0038 Referring now to FIG. 1, therein is shown a cross
generally show similar orientations, this depiction in the sectional view of an integrated circuit packaging system 100
FIGS. is arbitrary for the most part. Generally, the invention along a section line 1-1 of FIG. 2 in a first embodiment of the
can be operated in any orientation. present invention. The integrated circuit packaging system
0029 Where multiple embodiments are disclosed and 100 can represent a configuration of a packaging system,
described having some features in common, for clarity and which can include a pre-stacked package-on-package (PoP)
ease of illustration, description, and comprehension thereof, with an underfillencapsulant interposed between packages or
similar and like features one to another will ordinarily be in an inter-package standoff gap.
described with similar reference numerals. The embodiments 0039. The integrated circuit packaging system 100 can
have been numbered first embodiment, second embodiment, include a base integrated circuit package 102. The base inte
etc. as a matter of descriptive convenience and are not grated circuit package 102 can include a base Substrate 104.
intended to have any other significance or provide limitations Such as a laminated plastic or ceramic Substrate, an organic or
for the present invention. inorganic substrate, a carrier, a printed circuitboard (PCB), or
0030. For expository purposes, the term “horizontal as a printed wiring substrate. The base substrate 104 can include
used herein is defined as a plane parallel to the plane or bond sites, conductive layers, wiring layers, or traces, to
Surface of the integrated circuit, regardless of its orientation. provide electrical connectivity.
The term “vertical refers to a direction perpendicular to the 0040. The base substrate 104 can include a base substrate
horizontal as just defined. Terms, such as “above”, “below'. bottom surface 106 and a base substrate top surface 108 on a
“bottom', “top”, “side' (as in “sidewall”), “higher, “lower, side of the base substrate 104 opposite the base substrate
“upper”, “over, and “under, are defined with respect to the bottom surface 106. The base integrated circuit package 102
horizontal plane, as shown in the figures. can include a base barrier 110 defined as a dam or a structure
0031. The term “on” means that there is direct contact formed to contain or prevent the underfill encapsulation from
between elements. The term “directly on' means that there is overflowing over sides of the base substrate 104. The base
direct contact between one element and another element barrier 110 can be formed with an epoxy resin, a photoresist,
without an intervening element. or a solder mask.
0032. The term “processing as used herein includes 0041. The base integrated circuit package 102 can provide
deposition of material or photoresist, patterning, exposure, the base substrate 104 to mount a base integrated circuit 112,
development, etching, cleaning, and/or removal of the mate Such as an integrated circuit die, a wirebond integrated circuit,
rial or photoresist as required in forming a described struc or a chip, thereon. The base integrated circuit 112 can be
ture. mounted over, on, or attached to the base Substrate top surface
0033. There are increasing expectation and requirements 108 with an attach layer, Such as a die attach, an adhesive, a
for semiconductor devices having better mechanical perfor film, or an epoxy. The base integrated circuit package 102 can
mance, especially for hand held and portable device applica include a base internal interconnect 114. Such as a bond wire,
tions. In current package-on-package (PoP) structures, Solder a ribbon bond wire, or a conductive wire, attached or con
interconnects of a top package can be directly exposed to nected to the base substrate top surface 108 and the base
environment without any reinforcement layers. integrated circuit 112.
0034. The solder interconnects can have joints that are not 0042. The base integrated circuit package 102 can include
sufficiently robust to cope with reliability test requirements a base encapsulation 126. Such as a cover including an epoxy
Such as temperature cycling tests or mechanical impact tests. molding compound, an encapsulant, or a molding material.
US 2011/021043.6 A1 Sep. 1, 2011

The base encapsulation 126 can include a taper side that is The inter-substrate region 156 can include spacing between
Slanted to facilitate a release of a mold system in a molding the base substrate top surface 108 and the stack substrate
process of the base encapsulation 126. bottom surface 132.
0043. The base encapsulation 126 can be formed over the 0.052 The inter-substrate region 156 can include spacing
base substrate 104, partially covering the base substrate top for the base encapsulation 126, the thermal interface layer
surface 108. The base encapsulation 126 can be formed over 154, or a combination thereof. The inter-substrate region 156
the base integrated circuit 112 and the base internal intercon can include the inter-package standoff gap.
nect 114. 0053. The integrated circuit packaging system 100 can
0044) The integrated circuit packaging system 100 can include an inter-substrate connector 158, such as a solder ball,
include a stack integrated circuit package 128 mounted over a stud bump, a solder column, a metal conductor, or a metallic
the base integrated circuit package 102. The stack integrated alloy conductor. The inter-substrate connector 158 can be
formed in the inter-substrate region 156. The inter-substrate
circuit package 128 can include a stack Substrate 130, Such as connector 158 can be formed between the base barrier 110
a laminated plastic or ceramic Substrate, an organic or inor and the base integrated circuit 112.
ganic Substrate, a carrier, a printed circuit board (PCB), or a 0054 The inter-substrate connector 158 can be attached
printed wiring substrate. The stack substrate 130 can include to, attached on, or connected to the base Substrate top surface
bond sites, conductive layers, wiring layers, or traces, to 108 and the stack substrate bottom surface 132. The stack
provide electrical connectivity. substrate 130 can be attached to, attached on, connected to, or
0045. The stack substrate 130 can include a stack substrate connected on the inter-substrate connector 158.
bottom surface 132 and a stack substrate top surface 134 on a 0055 With the inter-substrate connector 158 attached to
side of the stack substrate 130 opposite the stack substrate the stack substrate bottom surface 132, electrical tests can be
bottom surface 132. The stack substrate 130 can include a performed for the stack integrated circuit package 128. The
stack substrate aperture 136 defined as a through slot or an stack integrated circuit package 128 can be attached to the
opening. The stack substrate aperture 136 can be formed base substrate 104 with the inter-substrate connector 158.
through the stack substrate 130, between the stack substrate 0056. The inter-substrate connector 158 can be formed in
bottom surface 132 and the stack substrate top surface 134. an area array around or along a base perimeter of the base
0046. The stack integrated circuit package 128 can include substrate 104 or a stack perimeter of the stack substrate 130.
a stack device 142. Such as an integrated circuit die, a wire The inter-substrate connector 158 can be formed around or
bond integrated circuit, or a chip, mounted over the stack adjacent the base encapsulation 126. The inter-substrate con
substrate 130. The stack device 142 can be attached to the nector 158 can be formed adjacent the base barrier 110.
stack substrate 130 with another attach layer, such as a die 0057 The integrated circuit packaging system 100 can
attach, an adhesive, a film, or an epoxy. The stack integrated include an external interconnect 160, such as a solder ball, a
circuit package 128 can include a stack device internal inter stud bump, a solder column, a metal conductor, or a metallic
connect 144, such as a bond wire, a ribbon bond wire, or a alloy conductor, attached to the base substrate bottom surface
conductive wire, attached or connected to the stack Substrate 106. The external interconnect 160 can be formed on the base
130 and the stack device 142.
substrate bottom surface 106, providing electrical connectiv
0047. The stack integrated circuit package 128 can include ity to external systems. The external interconnect 160 can be
a stack encapsulation 152. Such as a cover including an epoxy formed in a full area array.
molding compound, an encapsulant, or a molding material. 0058. The integrated circuit packaging system 100 can
The stack encapsulation 152 can include a taper side that is include a connector underfill 162. Such as a resin, an encap
Slanted to facilitate a release of a mold system in a molding Sulant, an epoxy, an underfill, a liquid encapsulant, or the
process of the stack encapsulation 152. underfill encapsulant. The connector underfill 162 can func
0048. The stack encapsulation 152 can beformed over the tion as a reinforcement layer in the inter-substrate region 156,
stack substrate 130, partially covering the stack substrate top providing protection for the inter-substrate connector 158.
surface 134. The stack encapsulation 152 can be formed over The connector underfill 162 can be formed with board-level
the stack device 142 and the stack device internal intercon underfill processes, which can be readily performed by Sur
nect 144. face mount technology (SMT) manufacturers for pre-stacked
0049. The integrated circuit packaging system 100 can PoP systems.
include a thermal interface layer 154, such as a thermal inter 0059. The integrated circuit packaging system 100 can
face material (TIM), a mastic material, a cement, an adhesive, include a descending structure profile such that the stack
or a material that can be pasted or filled in gaps between substrate 130, having the stack substrate aperture 136 to
thermal transfer surfaces. For example, the thermal interface facilitate the dispensing process, is over the base substrate
layer 154 can include a phase-change material or a thermal 104 that is attached to the external interconnect 160. As such,
pad. Also for example, the thermal interface layer 154 can the connector underfill 162 can be dispensed with top side
include thermal grease or thermal paste. dispensing methods from atop Surface of a packaging system.
0050. The thermal interface layer 154 can optionally be For example, the top side dispensing methods can be per
pre-applied to increase thermal transfer efficiency. The ther formed with the connector underfill 162 dispensed through
mal interface layer 154 can be deposited between or attached the stack substrate aperture 136 from the stack substrate top
to a top surface of the base encapsulation 126 and the stack surface 134.
substrate bottom surface 132. 0060. The inter-substrate region 156 can be optionally
0051. The integrated circuit packaging system 100 can pre-deposited with the connectorunderfill 162. As such, SMT
include an inter-substrate region 156 defined as spacing manufacturers can perform the underfill process only to the
between the base substrate 104 and the stack substrate 130. external interconnect 160 upon mounting the integrated cir
US 2011/021043.6 A1 Sep. 1, 2011

cuit packaging system 100 on the board. Therefore, the com greatly enhances the underfill process thereby eliminating
plicated underfill process for multi-level standoff gaps can be complicated underfill processes for multi-level standoff gaps.
avoided. 0071 Referring now to FIG. 2, therein is shown a top view
0061. The connector underfill 162 can be filled or dis of the integrated circuit packaging system 100. The integrated
pensed with a dispenser or any encapsulation method during circuit packaging system 100 can include the stack encapsu
manufacturing processes, which can include dispensing guns, lation 152 formed over a portion of the stack substrate top
cartridges, Syringes, needle tips, or spreaders, as examples. Surface 134. The integrated circuit packaging system 100 can
The connector underfill 162 can be filled through the stack include a portion of the connector underfill 162 dispensed
substrate aperture 136. The connector underfill 162 can over the stack Substrate top surface 134, adjacent or around
encapsulate the inter-substrate connector 158 and joints or the stack encapsulation 152.
junctions where the inter-substrate connector 158 is attached 0072 Referring now to FIG. 3, therein is shown a cross
or connected to the base substrate 104 and the stack substrate sectional view of an integrated circuit packaging system 300
130 in the inter-substrate region 156. along a section line 3-3 of FIG. 4 in a second embodiment of
0062 For illustrative purposes, the cross-sectional view is the present invention. The integrated circuit packaging sys
shown with a portion of the connector underfill 162 formed tem300 can represent a configuration of a packaging system,
over the stack substrate top surface 134, although it is under which can include a pre-stacked package-on-package (PoP)
stood that the connector underfill 162 can be formed through with an underfillencapsulant interposed between packages or
the stack substrate aperture 136 up to the stack substrate top in an inter-package standoff gap.
surface 134 after the dispensing process. In other words, the 0073. The integrated circuit packaging system 300 can be
connector underfill 162 can be formed such that an exposed similar to the integrated circuit packaging system 100 of FIG.
surface of the connector underfill 162 can be substantially 1, except for the formation of the stack substrate aperture 136
coplanar with the stack substrate top surface 134 after the of FIG. 1 and the base barrier 110 of FIG. 1 and that the
dispensing process. integrated circuit packaging system 100 is inverted.
0063. The integrated circuit packaging system 100, having 0074 The integrated circuit packaging system 300 can
the stack substrate aperture 136 to facilitate encapsulation or include a base integrated circuit package 302. The base inte
dispensing of the connector underfill 162, can enhance the grated circuit package 302 can include a base substrate 304,
mechanical integrity including temperature cycling test reli Such as a laminated plastic or ceramic Substrate, an organic or
ability, mechanical shock/impact resistance performance, or inorganic substrate, a carrier, a printed circuitboard (PCB), or
better warpage control. The connector underfill 162 can also a printed wiring substrate. The base substrate 304 can include
improve thermal performance of the integrated circuit pack bond sites, conductive layers, wiring layers, or traces, to
aging system 100. provide electrical connectivity.
0064. The base barrier 110 can be mounted over, on, or 0075. The base substrate 304 can include a base substrate
attached to the base substrate top surface 108 to prevent bottom surface 306 and a base substrate top surface 308 on a
overspill. The base barrier 110 can be formed adjacent or side of the base substrate 304 opposite the base substrate
along the base perimeter to prevent the connector underfill bottom surface 306. The base integrated circuit package 302
162 from overflowing over edges of the base substrate 104. can include a base barrier 310 defined as a dam or a structure
0065. As an example, the base barrier 110 can include a formed to contain or prevent the underfill encapsulation from
closed loop structure that is contiguously formed around the overflowing over sides of the base substrate 304. The base
base perimeter. As another example, the base barrier 110 can barrier 310 can be formed with an epoxy resin, a photoresist,
include a segmental structure that is partially formed around or a solder mask.
the base perimeter. 0076. The base integrated circuit package 302 can provide
0066. The stack substrate aperture 136 can be strategically the base substrate 304 to mount a base integrated circuit 312,
or selectively formed near or at a peripheral area of the stack Such as an integrated circuit die, a wirebond integrated circuit,
substrate 130. For example, the stack substrate aperture 136 or a chip, thereon. The base integrated circuit 312 can be
can be selectively formed at or near corners of the stack mounted over or attached to the base substrate bottom surface
substrate 130 to encapsulate the inter-substrate connector 158 306 with an attach layer, Such as a die attach, an adhesive, a
that are critical. film, or an epoxy. The base integrated circuit package 302 can
0067. It has been discovered that the connector underfill include a base internal interconnect 314. Such as a bond wire,
162, the stack substrate aperture 136, the inter-substrate con a ribbon bond wire, or a conductive wire, attached or con
nector 158, and the base barrier 110 significantly improves nected to the base substrate bottom surface 306 and the base
mechanical integrity of the integrated circuit packaging sys integrated circuit 312.
tem 100, providing better warpage control and improved 0077. The base integrated circuit package 302 can include
solder joint reliability based on thermal cycling tests and a base encapsulation 326. Such as a cover including an epoxy
mechanical drop impact tests. molding compound, an encapsulant, or a molding material.
0068. It has also been discovered that encapsulating the The base encapsulation 326 can be formed over the base
inter-substrate connector 158 with the connector underfill substrate 304, the base integrated circuit 312, and the base
162 is significantly better in rheological control consistently internal interconnect 314.
providing Void-free coverage performance. 0078. The integrated circuit packaging system 300 can
0069. It has further been discovered that the connector include a stack integrated circuit package 328 mounted over
underfill 162 or the thermal interface layer 154 significantly the base integrated circuit package 302. The stack integrated
enhances thermal dissipation of the integrated circuit pack circuit package 328 can include a stack substrate 330, such as
aging system 100. a laminated plastic or ceramic Substrate, an organic or inor
0070 Further it has been discovered that pre-depositing ganic Substrate, a carrier, a printed circuit board (PCB), or a
the connector underfill 162 in the inter-substrate region 156 printed wiring substrate. The stack substrate 330 can include
US 2011/021043.6 A1 Sep. 1, 2011

bond sites, conductive layers, wiring layers, or traces, to substrate 304 or a stack perimeter of the stack substrate 330.
provide electrical connectivity. The inter-substrate connector 358 can be formed around or
0079. The stack substrate 330 can include a stack substrate adjacent the stack encapsulation 352. The inter-substrate con
bottom surface 332 and a stack substrate top surface 334 on a nector 358 can be formed adjacent the base barrier 310.
side of the stack substrate 330 opposite the stack substrate I0089. The integrated circuit packaging system 300 can
bottom surface 332. The stack substrate 330 can include a include an external interconnect 360, such as a solder ball, a
stack substrate aperture 336 defined as a through slot or an stud bump, a solder column, a metal conductor, or a metallic
opening. The stack substrate aperture 336 can be formed alloy conductor, attached to the stack Substrate top Surface
through the stack substrate 330, between the stack substrate 334. The external interconnect360 can beformed on the stack
bottom surface 332 and the stack substrate top surface 334. substrate top surface 334 to provide electrical connectivity to
0080. The stack integrated circuit package 328 can include external systems. The external interconnect 360 can be
a stack device 342, Such as an integrated circuit die, a wire formed in a full area array.
bond integrated circuit, or a chip, mounted over the stack 0090 The integrated circuit packaging system 300 can
substrate 330. The stack device 342 can be attached to the include a connector underfill 362. Such as a resin, an encap
stack substrate bottom surface 332 with another attach layer, Sulant, an epoxy, an underfill, a liquid encapsulant, or the
Such as a die attach, an adhesive, a film, oran epoxy. The stack underfill encapsulant. The connector underfill 362 can func
integrated circuit package 328 can include a stack device tion as a reinforcement layer in the inter-substrate region 356,
internal interconnect 344, such as a bond wire, a ribbon bond providing protection for the inter-substrate connector 358.
wire, or a conductive wire, attached or connected to the stack The connector underfill 362 can be formed with board-level
substrate bottom surface 332 and the stack device 342. underfill processes, which can be readily performed by Sur
0081. The stack integrated circuit package 328 can include face mount technology (SMT) manufacturers for pre-stacked
a stack encapsulation 352. Such as a cover including an epoxy PoP systems.
molding compound, an encapsulant, or a molding material. 0091. The integrated circuit packaging system 300 can
The stack encapsulation 352 can include a taper side that is include an ascending structure profile such that the stack
Slanted to facilitate a release of a mold system in a molding substrate 330, having the stack substrate aperture 336 to
process of the stack encapsulation 352. facilitate the dispensing process, is attached to the external
0082. The stack encapsulation 352 can beformed over the interconnect360 and over the base substrate 304. As such, the
stack substrate 330, partially covering the stack substrate connector underfill 362 can be dispensed with bottom side
bottom surface 332. The stack encapsulation 352 can be dispensing methods from a bottom surface of a packaging
formed over the stack device 342 and the stack device internal system. For example, the bottom side dispensing methods can
interconnect 344. be performed with the connector underfill 362 dispensed
0083. The integrated circuit packaging system 300 can through the stack substrate aperture 336 from the stack sub
include a thermal interface layer 354, such as a thermal inter strate top surface 334, where the external interconnect 360 is
face material (TIM), a mastic material, a cement, an adhesive, attached thereto.
or a material that can be pasted or filled in gaps between 0092. The inter-substrate region 356 can be optionally
thermal transfer surfaces. For example, the thermal interface pre-deposited with the connectorunderfill 362. As such, SMT
layer 354 can include a phase-change material or a thermal manufacturers can perform the underfill process only to the
pad. Also for example, the thermal interface layer 354 can external interconnect 360 upon mounting the integrated cir
include thermal grease or thermal paste. cuit packaging system 300 on the board. Therefore, the com
0084. The thermal interface layer 354 can optionally be plicated underfill process for multi-level standoff gaps can be
pre-applied to increase thermal transfer efficiency. The ther avoided.
mal interface layer 354 can be deposited between or attached 0093. The connector underfill 362 can be filled or dis
to the base substrate top surface 308 and the stack encapsu pensed with a dispenser or any encapsulation method during
lation 352. manufacturing processes, which can include dispensing guns,
0085. The integrated circuit packaging system 300 can cartridges, Syringes, needle tips, or spreaders, as examples.
include an inter-substrate region 356 defined as spacing The connector underfill 362 can be filled through the stack
between the base substrate 304 and the stack substrate 330. substrate aperture 336. The connector underfill 362 can
The inter-substrate region 356 can include spacing between encapsulate the inter-substrate connector 358 and joints or
the base substrate top surface 308 and the stack substrate junctions where the inter-substrate connector 358 is attached
bottom surface 332. or connected to the base substrate 304 and the stack substrate
I0086. The inter-substrate region 356 can include spacing 330 in the inter-substrate region 356.
for the stack encapsulation 352, the thermal interface layer 0094 For illustrative purposes, the cross-sectional view is
354, or a combination thereof. The inter-substrate region 356 shown with an exposed surface of the connector underfill 362
can include the inter-package standoff gap. substantially coplanar with the stack substrate top surface 334
0087. The integrated circuit packaging system 300 can after the dispensing process, although it is understood that a
include an inter-substrate connector 358, such as a solderball, portion of the connector underfill 362 can be formed over the
a stud bump, a solder column, a metal conductor, or a metallic stack substrate top surface 334.
alloy conductor. The inter-substrate connector 358 can be 0095. The base barrier 310 can be mounted over or
formed in the inter-substrate region 356. The inter-substrate attached to the base substrate top surface 308 to prevent
connector 358 can be attached or connected to the base sub overspill. The base barrier 310 can be formed adjacent or
strate top surface 308 and the stack substrate bottom surface along the base perimeter, preventing the connector underfill
332. 362 from flowing over edges of the base substrate 304.
0088. The inter-substrate connector 358 can be formed in 0096. As an example, the base barrier 310 can include a
an area array around or along a base perimeter of the base closed loop structure that is contiguously formed around the
US 2011/021043.6 A1 Sep. 1, 2011

base perimeter. As an example, the base barrier 310 can the base integrated circuit package 502. The stack integrated
include a segmental structure that is partially formed around circuit package 528 can include a stack substrate 530, having
the base perimeter. a stack substrate bottom surface 532, a stack substrate top
0097. The stack substrate aperture 336 can be strategically surface 534, and a stack substrate aperture 536, formed in a
or selectively formed near or at a peripheral area of the stack manner similar to the stack substrate 130 of FIG. 1.
substrate 330. For example, the stack substrate aperture 336 0106 The stack integrated circuit package 528 can include
can be selectively formed at or near corners of the stack a stack barrier 540 defined as a dam or a structure formed to
substrate 330 to encapsulate the inter-substrate connector 358 contain or prevent the underfill encapsulation from overflow
that are critical. To facilitate the underfill encapsulation pro ing oversides of the stack substrate 530. The stack barrier 540
cess, the external interconnect360 can be attached to the stack can be formed with an epoxy resin, a photoresist, or a solder
substrate 330 after dispensing the connector underfill 362. mask.
0098. It has been discovered that the integrated circuit 0107 The stack integrated circuit package 528 can include
packaging system 300 with the stack substrate 330, having a stack device 542, a stack device internal interconnect 544,
the external interconnect 360 attached thereto and the stack and a stack encapsulation 552, formed in a manner similar to
substrate aperture 336, greatly enhances the underfill encap the stack device 142 of FIG. 1, the stack device internal
Sulation process using the bottom side dispensing methods. interconnect 144 of FIG.1, and the stack encapsulation 152 of
0099 Referring now to FIG.4, therein is shown a top view FIG. 1, respectively.
of the integrated circuit packaging system 300. The top view 0108. The integrated circuit packaging system 500 can
is shown with the stack substrate 330 of FIG. 3 having the include an inter-substrate region 556 defined as an inter
stack substrate aperture 336 formed on the stack substrate top package standoff gap or spacing between the base Substrate
Surface 334. 504 and the stack substrate 530. The inter-substrate region
0100. The integrated circuit packaging system 300 can 556 can include spacing between the base substrate top sur
include the connector underfill 362 dispensed in the stack face 508 and the stack substrate bottom surface 532. The
substrate aperture 336 around the stack perimeter. The inte inter-substrate region 556 can include spacing for the base
grated circuit packaging system 300 can include the external integrated circuit 512, the base internal interconnect 514, or
interconnect 360 formed on the stack substrate top surface any spacing between the base integrated circuit 512 and the
334. The external interconnect 360 can be formed in a full stack substrate bottom surface 532.
area array. 0109 The integrated circuit packaging system 500 can
01.01 Referring now to FIG. 5, therein is shown a cross include an inter-substrate connector 558, such as a solder ball,
sectional view similar to FIG. 1 of an integrated circuit pack a stud bump, a solder column, a metal conductor, or a metallic
aging system 500 in a third embodiment of the present inven alloy conductor. The inter-substrate connector 558 can be
tion. The integrated circuit packaging system 500 can be attached or connected to the base substrate top surface 508
similar to the integrated circuit packaging system 100 of FIG. and the stack substrate bottom surface 532.
1, except for the formation of the base integrated circuit 0110. The inter-substrate connector 558 can be formed in
package 102 of FIG. 1 and the Stack integrated circuit package an area array around or along a base perimeter of the base
128 of FIG. 1 and an addition of another package. substrate 504 or a stack perimeter of the stack substrate 530.
0102 The integrated circuit packaging system 500 can The inter-substrate connector 558 can beformed adjacent the
represent a configuration of a packaging system, which can base barrier 510 in the inter-substrate region 556.
include a multi-layer pre-stacked package-on-package (PoP) 0111. The stack integrated circuit package 528 can be
structure with various package types and an underfill encap mounted over the base integrated circuit package 502 with the
Sulant interposed between packages or in inter-package inter-substrate connector 558. The inter-substrate connector
standoff gaps. 558 can be attached or connected to the base integrated circuit
0103) The integrated circuit packaging system 500 can package 502 and the stack integrated circuit package 528.
include a base integrated circuit package 502. The base inte 0112 The integrated circuit packaging system 500 can
grated circuit package 502 can include a base substrate 504, include a top integrated circuit package 564 mounted over the
having a base substrate bottom surface 506 and a base sub stack integrated circuit package 528. The top integrated cir
strate top surface 508, and a base barrier 510. The base sub cuit package 564 can include a top substrate 566, such as a
strate 504 and the basebarrier 510 can be formed in a manner laminated plastic or ceramic Substrate, an organic or inor
similar to the base substrate 104 of FIG. 1 and the base barrier ganic Substrate, a carrier, a printed circuit board (PCB), or a
110 of FIG. 1, respectively. printed wiring substrate. The top substrate 566 can include
0104. The base integrated circuit package 502 can provide bond sites, conductive layers, wiring layers, or traces, to
the base substrate 504 to mount a base integrated circuit 512, provide electrical connectivity.
Such as a flip chip, a die, or a bumped chip, thereon. The base 0113. The top substrate 566 can include a top substrate
integrated circuit 512 can be attached or connected to the base bottom surface 568 and a top substrate top surface 570 on a
substrate top surface 508 with a base internal interconnect side of the top substrate 566 opposite the top substrate bottom
514. Such as a solder ball, a stud bump, a solder column, a surface 568. The top substrate 566 can include a top substrate
metal conductor, or a metallic alloy conductor. The base aperture 572 defined as a through slot or an opening. The top
integrated circuit package 502 can include a base underfill substrate aperture 572 can be formed through the top sub
524. Such as an epoxy resin or any underfill resin material, strate 566, between the top substrate bottom surface 568 and
dispensed in the space between the base Substrate top Surface the top substrate top surface 570.
508 and the base integrated circuit 512 to protect the base 0114. The top integrated circuit package 564 can include a
internal interconnect 514. top integrated circuit 574. Such as an integrated circuit die, a
0105. The integrated circuit packaging system 500 can wirebond integrated circuit, or a chip, mounted over the top
include a stack integrated circuit package 528 mounted over substrate 566. The top integrated circuit 574 can be attached
US 2011/021043.6 A1 Sep. 1, 2011

to the top substrate 566 with an attach layer, such as a die manufacturing processes, which can include dispensing guns,
attach, an adhesive, a film, or an epoxy. The top integrated cartridges, Syringes, needle tips, or spreaders, as examples.
circuit package 564 can include a top internal interconnect The connector underfill 590 can be filled through the stack
576, such as a bond wire, a ribbon bond wire, or a conductive substrate aperture 536 and the top substrate aperture 572. The
wire, attached or connected to the top substrate 566 and the connector underfill 590 can encapsulate the inter-substrate
top integrated circuit 574. connector 558, the second inter-substrate connector 586, or
0115 The top integrated circuit package 564 can include a joints or junctions where the inter-substrate connector 558 is
top encapsulation 582. Such as a cover including an epoxy attached or connected to the base substrate 504 and the stack
molding compound, an encapsulant, or a molding material. substrate 530 or where the second inter-substrate connector
The top encapsulation 582 can include a taper side that is 586 is attached or connected to the stack substrate 530 and the
Slanted to facilitate a release of a mold system in a molding top substrate 566.
process of the top encapsulation 582. 0.124. The stack barrier 540 can be formed over or on the
0116. The top encapsulation 582 can be formed over the stack Substrate top Surface 534, adjacent or along the stack
top substrate 566, partially covering the top substrate top perimeter to prevent overspill. The stack barrier 540 can
surface 570. The top encapsulation 582 can be formed over prevent the connector underfill 590 from flowing over edges
the top integrated circuit 574 and the top internal interconnect of the Stack Substrate 530.
576. 0.125. As an example, the stack barrier 540 can include a
0117 The integrated circuit packaging system 500 can closed loop structure that is contiguously formed around the
include a second inter-substrate region 584 defined as spacing stack perimeter. As another example, the stack barrier 540 can
between the stack substrate 530 and the top substrate 566. The include a segmental structure that is partially formed around
second inter-substrate region 584 can include spacing the stack perimeter.
between the stack substrate top surface 534 and the top sub 0.126 The top substrate aperture 572 can be strategically
strate bottom surface 568. or selectively formed at a peripheral area of the top substrate
0118. The second inter-substrate region 584 can include 566. For example, the top substrate aperture 572 can be selec
an inter-package standoff gap. The second inter-substrate tively formed at or near corners of the top substrate 566 to
region 584 can include spacing for the stack encapsulation encapsulate the second inter-substrate connector 586 that are
552 and any spacing between the stack encapsulation 552 and critical. The connector underfill 590 can be filled through the
the top substrate bottom surface 568. stack substrate aperture 536 and the top substrate aperture
0119 The integrated circuit packaging system 500 can 572 with top side dispensing methods.
include a second inter-substrate connector 586, such as a I0127. Referring now to FIG. 6, therein is shown a cross
solder ball, a stud bump, a solder column, a metal conductor, sectional view of an integrated circuit packaging system 600
or a metallic alloy conductor. The second inter-substrate con along a section line 6-6 of FIG. 7 in a fourth embodiment of
nector 586 can be formed in the second inter-substrate region the present invention. The integrated circuit packaging sys
584. The second inter-substrate connector 586 can be tem 600 can represent a configuration of a packaging system,
attached or connected to the stack substrate top surface 534 which can include a pre-stacked package-on-package (PoP)
and the top substrate bottom surface 568. structure with an underfill encapsulant formed under an inter
0120. The second inter-substrate connector 586 can be poser by top side dispensing methods.
formed in an area array around or along the stack perimeter or I0128. The integrated circuit packaging system 600 can
a top perimeter of the top substrate 566. The second inter include a base integrated circuit package 602. The base inte
substrate connector 586 can be formed around or adjacent the grated circuit package 602 can include a base Substrate 604,
stack encapsulation 552. The second inter-substrate connec having a base substrate bottom surface 606 and a base sub
tor 586 can be formed adjacent the stack barrier 540. strate top surface 608, and a base barrier 610. The base sub
0121 The integrated circuit packaging system 500 can strate 604 and the basebarrier 610 can be formed in a manner
include an external interconnect 588, such as a solder ball, a similar to the base substrate 104 of FIG.1 and the basebarrier
stud bump, a solder column, a metal conductor, or a metallic 110 of FIG. 1, respectively.
alloy conductor, attached to the base substrate bottom surface I0129. The base integrated circuit package 602 can provide
506. The external interconnect 588 can be formed on the base the base substrate 604 to mount a base integrated circuit 612.
substrate bottom surface 506, providing electrical connectiv Such as a flip chip, a die, or a bumped chip, thereon. The base
ity to external systems. The external interconnect 588 can be integrated circuit 612 can be attached or connected to the base
formed in a full area array. substrate top surface 608 with a base internal interconnect
0122) The integrated circuit packaging system 500 can 614. Such as a solder ball, a stud bump, a solder column, a
include a connector underfill 590, such as a resin, an encap metal conductor, or a metallic alloy conductor. The base
Sulant, an epoxy, an underfill, a liquid encapsulant, or the integrated circuit package 602 can include a base underfill
underfill encapsulant. The connector underfill 590 can func 624. Such as an epoxy resin or any underfill resin material,
tion as a reinforcement layer in the inter-substrate region 556 dispensed in the space between the base Substrate top surface
and the second inter-substrate region 584, providing protec 608 and the base integrated circuit 612 to protect the base
tion for the inter-substrate connector 558 and the second internal interconnect 614.
inter-substrate connector 586, respectively. The connector 0.130. The integrated circuit packaging system 600 can
underfill 590 can be formed with board-level underfill pro include a stack Substrate 630. Such as an interposer, a Sub
cesses, which can be readily performed by Surface mount strate, an internal Stacking module, an interface module, or a
technology (SMT) manufacturers for pre-stacked PoP sys PCB. The stack substrate 630 can be mounted over the base
temS. integrated circuit package 602.
(0123. The connector underfill 590 can be filled or dis 0131 The stack substrate 630 can include a stack substrate
pensed with a dispenser or any encapsulation method during bottom surface 632 and a stack substrate top surface 634 on a
US 2011/021043.6 A1 Sep. 1, 2011

side of the stack substrate 630 opposite the stack substrate 0.141. The top integrated circuit package 664 can include a
bottom surface 632. The stack substrate 630 can be designed top integrated circuit 674. Such as an integrated circuit die, a
in a singulated or strip form for encapsulant dispensing. The wirebond integrated circuit, or a chip, mounted over the top
stack substrate 630 can include bond sites, conductive layers, substrate 666. The top integrated circuit 674 can be attached
wiring layers, or traces, to provide electrical connectivity to the top substrate 666 with an attach layer, such as a die
between electrical devices or packaging systems that are con attach, an adhesive, a film, or an epoxy. The top integrated
nected to the stack substrate bottom surface 632 and the stack circuit package 664 can include a top internal interconnect
substrate top surface 634. 676, such as a bond wire, a ribbon bond wire, or a conductive
0132. The stack substrate 630 can include a stack substrate wire, attached or connected to the top substrate 666 and the
aperture 636 defined as a through slot or an opening. The top integrated circuit 674.
stack substrate aperture 636 can be formed through the stack 0142. The top integrated circuit package 664 can include a
substrate 630, between the stack substrate bottom surface 632 top second integrated circuit 678, Such as an integrated circuit
and the stack substrate top surface 634. die, a wirebond integrated circuit, or a chip, mounted over the
0133. The integrated circuit packaging system 600 can top integrated circuit 674. The top second integrated circuit
optionally include a stack device 642. Such as a passive 678 can be attached to the top integrated circuit 674 with an
device, an active device, or a discrete component, mounted attach layer, such as a die attach, an adhesive, a film, or an
over the stack substrate 630. The stack device 642 can be epoxy. The top integrated circuit package 664 can include a
mounted around or along a stack perimeter of the stack Sub top second internal interconnect 680, such as a bond wire, a
Strate 630. ribbonbond wire, or a conductive wire, attached or connected
0134) For illustrative purposes, the cross-sectional view is to the top substrate 666 and the top second integrated circuit
shown with the stack device 642 mounted on or attached to 678.
the stack substrate top surface 634, although the stack device 0143. The top integrated circuit package 664 can include a
642 can be mounted on or attached to the stack substrate top encapsulation 682. Such as a cover including an epoxy
bottom surface 632, the stack substrate top surface 634, or a molding compound, an encapsulant, or a molding material.
combination thereof. The top encapsulation 682 can be formed over the top sub
0135 The integrated circuit packaging system 600 can strate 666, the top integrated circuit 674, the top internal
include an inter-substrate region 656 defined as an inter interconnect 676, the top second integrated circuit 678, or the
package standoff gap or spacing between the base Substrate top second internal interconnect 680.
604 and the stack substrate 630. The inter-substrate region 0144. The integrated circuit packaging system 600 can
656 can include spacing between the base substrate top sur include a second inter-substrate connector 686. Such as a
face 608 and the stack substrate bottom surface 632. The solder ball, a stud bump, a solder column, a metal conductor,
inter-substrate region 656 can include spacing for the base or a metallic alloy conductor. The second inter-substrate con
nector 686 can be attached or connected to the stack substrate
integrated circuit 612, the base internal interconnect 614, and top surface 634 and the top substrate bottom surface 668. The
any spacing between the base integrated circuit 612 and the second inter-substrate connector 686 can be attached to a
stack substrate bottom surface 632.
0136. The integrated circuit packaging system 600 can center region of the stack substrate top surface 634.
include an inter-substrate connector 658, such as a solderball, 0145 The integrated circuit packaging system 600 can
a stud bump, a solder column, a metal conductor, or a metallic include an external interconnect 688, such as a solder ball, a
alloy conductor. The inter-substrate connector 658 can be stud bump, a solder column, a metal conductor, or a metallic
attached or connected to the base substrate top surface 608 alloy conductor, attached to the base substrate bottom surface
606. The external interconnect 688 can be formed on the base
and the stack substrate bottom surface 632.
substrate bottom surface 606, providing electrical connectiv
0137 The inter-substrate connector 658 can be formed in ity to external systems. The external interconnect 688 can be
an area array around or along a base perimeter of the base formed in a full area array.
substrate 604 or the stack perimeter. The inter-substrate con 0146 The integrated circuit packaging system 600 can
nector 658 can be formed adjacent the base barrier 610. include a connector underfill 690. Such as a resin, an encap
0138. The stack substrate 630 can be mounted over the Sulant, an epoxy, an underfill, a liquid encapsulant, or the
base integrated circuit package 602 with the inter-substrate underfill encapsulant. The connector underfill 690 can func
connector 658. The inter-substrate connector 658 can be tion as a reinforcement layer in the inter-substrate region 656,
attached or connected to the base integrated circuit package providing protection for the inter-substrate connector 658.
602 and the stack substrate 630 in the inter-substrate region 0147 The connector underfill 690 can be filled or dis
656. pensed with a dispenser or any encapsulation method during
0.139. The integrated circuit packaging system 600 can manufacturing processes, which can include dispensing guns,
include a top integrated circuit package 664 mounted over the cartridges, Syringes, needle tips, or spreaders, as examples.
stack substrate 630. The top integrated circuit package 664 The connector underfill 690 can be dispensed or filled
can include a top Substrate 666, Such as a laminated plastic or through the stack substrate aperture 636. The connector
ceramic Substrate, an organic or inorganic Substrate, a carrier, underfill 690 can encapsulate the inter-substrate connector
a printed circuit board (PCB), or a printed wiring substrate. 658 or joints where the inter-substrate connector 658 is
0140. The top substrate 666 can include bond sites, con attached or connected to the base substrate 604 and the stack
ductive layers, wiring layers, or traces, to provide electrical Substrate 630.
connectivity. The top substrate 666 can includea top substrate 0.148. With the stack substrate 630, the integrated circuit
bottom surface 668 and a top substrate top surface 670 on a packaging system 600 can include the top integrated circuit
side of the top substrate 666 opposite the top substrate bottom package 664 having a smaller footprint mounted over the base
surface 668. integrated circuit package 602 having a larger footprint. The
US 2011/021043.6 A1 Sep. 1, 2011

top integrated circuit package 664 can have a configuration 0159. The stack substrate 830 can include bond sites, con
with a width smaller than that of the stack substrate 630. ductive layers, wiring layers, or traces, to provide electrical
0149. This configuration can allow the entirety of the top connectivity between electrical devices or packaging systems
integrated circuit package 664 mounted over a portion of the that are connected to the stack substrate bottom surface 832
stack substrate 630 that is adjacent or next to another portion and the stack substrate top surface 834.
of the stack substrate 630 that includes the stack substrate (0160 The stack substrate 830 can include a stack substrate
aperture 636. Such configuration can allow the dispenser or aperture 836 defined as a through slot or an opening. The
any encapsulation method to dispense the connector underfill stack substrate aperture 836 can be formed through the stack
690 beside or next to a vertical surface of the top integrated substrate 830, between the stack substrate bottom surface 832
circuit package 664. and the stack substrate top surface 834.
0150 Referring now to FIG. 7, therein is shown a top view 0.161 The stack substrate 830 can include a stack substrate
of the integrated circuit packaging system 600. The integrated protrusion 837. The stack substrate protrusion 837 can out
circuit packaging system 600 can include the stack Substrate wardly laterally extend from the center of the stack substrate
630 of FIG. 6 having the stack substrate top surface 634 and 830. The stack substrate protrusion 837 can overhang or
the stack substrate aperture 636 formed thereon. The stack project over the base integrated circuit package 802. In other
substrate aperture 636 can be formed around or along the words, edges of the stack substrate 830 can laterally extend
stack perimeter. beyond edges of the base integrated circuit package 802 or the
0151. The stack substrate aperture 636 can be formed base substrate 804.
adjacent the stack device 642 or the top integrated circuit 0162 The integrated circuit packaging system 800 can
package 664. The stack substrate aperture 636 can be formed optionally include a stack device 842. Such as a passive
between the stack device 642 and the top integrated circuit device, an active device, or a discrete component, mounted
package 664. The connector underfill 690 can be dispensed under the stack substrate 830. The stack device 842 can be
through the stack substrate aperture 636. mounted over or attached to the stack substrate bottom sur
0152 The stack device 642 can beformed around or along face 832. The stack device 842 can be mounted around or
the stack perimeter. The top integrated circuit package 664 along a stack perimeter of the stack substrate 830.
can be mounted over the stack substrate 630. 0163 The integrated circuit packaging system 800 can
0153. Referring now to FIG. 8, therein is shown a cross optionally include a stack second device 846, Such as a pas
sectional view of an integrated circuit packaging system 800 sive device, an active device, or a discrete component,
along a section line 8-8 of FIG. 9 in a fifth embodiment of the mounted over the stack substrate 830. The stack second
present invention. The integrated circuit packaging system device 846 can be mounted over or attached to the stack
800 can represent a configuration of a packaging system, substrate top surface 834. The stack device 842 can be
which can include a pre-stacked package-on-package (PoP) mounted over a center region of the stack substrate 830.
structure with an underfill encapsulant formed by top side 0164. The integrated circuit packaging system 800 can
dispensing methods on a protruded interposer. include an inter-substrate region 856 and an inter-substrate
0154 The integrated circuit packaging system 800 can be connector 858. The inter-substrate region 856 and the inter
similar to the integrated circuit packaging system 600 of FIG. substrate connector 858 can be formed in a manner similar to
6, except for the formation of the stack substrate 630 of FIG. the inter-substrate region 656 of FIG. 6 and the inter-substrate
6, the stack device 642 of FIG. 6, and the top integrated circuit connector 658 of FIG. 6, respectively.
package 664 of FIG. 6, and an addition of another stack 0.165. The integrated circuit packaging system 800 can
device. The integrated circuit packaging system 800 can include a top integrated circuit package 864. The top inte
include a base integrated circuit package 802. grated circuit package 864 can include a top Substrate 866,
0155 The base integrated circuit package 802 can include having a top substrate bottom surface 868 and a top substrate
a base substrate 804, having a base substrate bottom surface top surface 870, a top integrated circuit 874, a top internal
806 and a base substrate top surface 808, and a base barrier interconnect 876, a top second integrated circuit 878, a top
810. The base Substrate 804 and the base barrier 810 can be second internal interconnect 880, and a top encapsulation
formed in a manner similar to the base substrate 604 of FIG. 882.
6 and the base barrier 610 of FIG. 6, respectively. 0166 The top substrate 866, the top integrated circuit 874,
0156 The base integrated circuit package 802 can include the top internal interconnect 876, the top second integrated
a base integrated circuit 812, a base internal interconnect 814, circuit 878, the top second internal interconnect 880, and the
and a base underfill 824. The base integrated circuit 812, the top encapsulation 882 can be formed in a manner similar to
base internal interconnect 814, and the base underfill 824 can the top substrate 666 of FIG. 6, the top integrated circuit 674
be formed in a manner similar to the base integrated circuit of FIG. 6, the top internal interconnect 676 of FIG. 6, the top
612 of FIG. 6, the base internal interconnect 614 of FIG. 6, second integrated circuit 678 of FIG. 6, the top second inter
and the base underfill 624 of FIG. 6, respectively. nal interconnect 680 of FIG. 6, and the top encapsulation 682
0157. The integrated circuit packaging system 800 can of FIG. 6, respectively.
include a stack substrate 830, such as an interposer, a sub 0167. The integrated circuit packaging system 800 can
strate, an internal Stacking module, an interface module, or a include a second inter-substrate region 884 defined as spacing
PCB. The stack substrate 830 can be mounted over the base between the stack substrate 830 and the top substrate 866. The
integrated circuit package 802. second inter-substrate region 884 can include spacing
0158. The stack substrate 830 can include a stack substrate between the stack substrate top surface 834 and the top sub
bottom surface 832 and a stack substrate top surface 834 on a strate bottom surface 868. The second inter-substrate region
side of the stack substrate 830 opposite the stack substrate 884 can include an inter-package standoff gap.
bottom surface 832. The stack substrate 830 can be designed 0.168. The integrated circuit packaging system 800 can
in a singulated or strip form for encapsulant dispensing. include a second inter-substrate connector 886, such as a
US 2011/021043.6 A1 Sep. 1, 2011

solder ball, a stud bump, a solder column, a metal conductor, grated circuit packaging system 1000 can include a base
or a metallic alloy conductor. The second inter-substrate con integrated circuit package 1002.
nector 886 can be attached or connected to the top substrate 0177. The base integrated circuit package 1002 can
bottom surface 868 and the stack substrate top surface 834. include a base substrate 1004, such as a laminated plastic or
The second inter-substrate connector 886 can be formed in an ceramic Substrate, an organic or inorganic Substrate, a carrier,
area array around or near the stack perimeter. a printed circuit board (PCB), or a printed wiring substrate.
0169. The integrated circuit packaging system 800 can The base substrate 1004 can include bond sites, conductive
include an external interconnect 888. The external intercon layers, wiring layers, or traces, to provide electrical connec
nect 888 can be formed in a manner similar to the external tivity.
interconnect 688 of FIG. 6. 0.178 The base substrate 1004 can include a base substrate
0170 The integrated circuit packaging system 800 can bottom surface 1006 and a base substrate top surface 1008 on
include a connector underfill 890, such as a resin, an encap a side of the base substrate 1004 opposite the base substrate
Sulant, an epoxy, an underfill, a liquid encapsulant, or the bottom surface 1006. The base integrated circuit package
underfill encapsulant. The connector underfill 890 can func 1002 can include a base barrier 1010 defined as a dam or a
tion as a reinforcement layer in the inter-substrate region 856 structure formed to contain or prevent the underfill encapsu
and the second inter-substrate region 884, providing protec lation from overflowing over sides of the base substrate 1004.
tion for the inter-substrate connector 858 and the second (0179 The base barrier 1010 can be formed with an epoxy
inter-substrate connector 886, respectively. resin, a photoresist, or a solder mask. The base barrier 1010
(0171 The connector underfill 890 can be dispensed over can be mounted over or attached to the base substrate top
or on a portion of the stack substrate protrusion 837, encap surface 1008. The base barrier 1010 can be formed along or
sulating the second inter-substrate connector 886 in the sec around a base perimeter of the base substrate 1004.
ond inter-substrate region 884. The connector underfill 890 0180. The base integrated circuit package 1002 can
can be dispensed over or on a portion of the Stack Substrate top include a base integrated circuit 1012, Such as an integrated
surface 834 and filled through the stack substrate aperture circuit die, a wirebond integrated circuit, or a chip, mounted
836, encapsulating the inter-substrate connector 858 in the over the base substrate 1004. The base integrated circuit 1012
inter-substrate region 856. The connector underfill 890 can be can be attached to the base substrate bottom surface 1006 with
filled to encapsulate joints or junctions where the inter-Sub an attach layer, Such as a die attach, an adhesive, a film, or an
strate connector 858 is attached or connected to the base epoxy. The base integrated circuit package 1002 can include
substrate 804 and the stack substrate 830 or where the second a base internal interconnect 1014, such as a bond wire, a
inter-substrate connector 886 is attached or connected to the ribbonbond wire, or a conductive wire, attached or connected
stack substrate 830 and the top substrate 866. to the base substrate bottom surface 1006 and the base inte
0172 For illustrative purposes, the cross-sectional view is grated circuit 1012.
shown with numbers of the inter-substrate connector 858 and 0181. The base integrated circuit package 1002 can
the second inter-substrate connector 886 encapsulated with include a base second integrated circuit 1016, Such as an
the connector underfill 890 as two and two, respectively, on integrated circuit die, a wirebond integrated circuit, or a chip,
each side of the stack substrate 830, although any numbers of mounted over the base integrated circuit 1012. The base sec
the inter-substrate connector 858 and the second inter-sub ond integrated circuit 1016 can be attached to the base inte
strate connector 886 can be encapsulated with the connector grated circuit 1012 with an attach layer. Such as a die attach,
underfill 890. an adhesive, a film, or an epoxy. The base integrated circuit
0173 The stack device 842 can be attached to the stack package 1002 can include a base second internal interconnect
substrate protrusion 837 or over the stack substrate bottom 1018, such as a bond wire, a ribbonbond wire, or a conductive
surface 832. The stack second device 846 can be attached to wire, attached or connected to the base substrate bottom
the stack substrate top surface 834 or between a plurality of surface 1006 and the base second integrated circuit 1016.
the second inter-substrate connector 886. 0182. The base integrated circuit package 1002 can
0.174 Referring now to FIG.9, therein is shown a top view include a base encapsulation 1026. Such as a cover including
of the integrated circuit packaging system 800. The integrated an epoxy molding compound, an encapsulant, or a molding
circuit packaging system 800 can include the top integrated material. The base encapsulation 1026 can beformed over the
circuit package 864 mounted over the stack Substrate top base substrate 1004, the base integrated circuit 1012, the base
surface 834. The integrated circuit packaging system 800 can internal interconnect 1014, the base second integrated circuit
include a portion of the connector underfill 890 dispensed 1016, and the base second internal interconnect 1018.
over the stack substrate top surface 834. 0183 The integrated circuit packaging system 1000 can
0175 Referring now to FIG. 10, therein is shown a cross include a stack substrate 1030, such as an interposer, a sub
sectional view of an integrated circuit packaging system 1000 strate, an internal Stacking module, an interface module, or a
along a section line 10-10 of FIG.11 in a sixth embodiment of PCB. The stack substrate 1030 can be mounted over the base
the present invention. The integrated circuit packaging sys integrated circuit package 1002.
tem 1000 can represent a configuration of a packaging sys 0.184 The stack substrate 1030 can include a stack sub
tem, which can include a pre-stacked package-on-package strate bottom surface 1032 and a stack substrate top surface
(PoP) structure with an underfill encapsulant formed by bot 1034 on a side of the stack substrate 1030 opposite the stack
tom side dispensing methods on a protruded interposer. substrate bottom surface 1032. The stack substrate 1030 can
0176 The integrated circuit packaging system 1000 can be designed in a singulated or Strip form for encapsulant
represent a configuration of a packaging system that is similar dispensing.
to the integrated circuit packaging system 800 of FIG. 8 and 0185. The stack substrate 1030 can include bond sites,
is inverted to allow the underfill encapsulant to be dispensed conductive layers, wiring layers, or traces, to provide electri
from the bottom side of the protruded interposer. The inte cal connectivity between electrical devices or packaging sys
US 2011/021043.6 A1 Sep. 1, 2011

tems that are connected to the stack Substrate bottom Surface space between the top substrate bottom surface 1068 and the
1032 and the stack substrate top surface 1034. top integrated circuit 1074 to protect the top internal inter
0186 The stack substrate 1030 can include a stack sub connect 1076.
strate aperture 1036 defined as a through slot or an opening. 0.195 The integrated circuit packaging system 1000 can
The stack substrate aperture 1036 can be formed through the include a second inter-substrate region 1084 defined as spac
stack substrate 1030, between the stack substrate bottom ing between the stack substrate 1030 and the top substrate
surface 1032 and the stack substrate top surface 1034. 1066. The second inter-substrate region 1084 can include
spacing between the stack substrate top surface 1034 and the
0187. The stack substrate 1030 can include a stack sub top substrate bottom surface 1068.
strate protrusion 1037. The stack substrate protrusion 1037 0196. The integrated circuit packaging system 1000 can
can outwardly laterally extend from the center of the stack include a second inter-substrate connector 1086, such as a
substrate 1030. The stack substrate protrusion 1037 can over solder ball, a stud bump, a solder column, a metal conductor,
hang or project over the base integrated circuit package 1002. or a metallic alloy conductor. The second inter-substrate con
In other words, edges of the stack substrate 1030 can laterally nector 1086 can be attached or connected to the stack Sub
extend beyond edges of the base integrated circuit package strate top surface 1034 and the top substrate bottom surface
1002 or the base Substrate 1004. 1068. The second inter-substrate connector 1086 can be
0188 The integrated circuit packaging system 1000 can formed in an area array around or near the Stack perimeter.
include a stack device 1042, such as a passive device, an 0197) The integrated circuit packaging system 1000 can
active device, or a discrete component, mounted under the include an external interconnect 1088, such as a solder ball, a
stack substrate 1030. The stack device 1042 can be mounted stud bump, a solder column, a metal conductor, or a metallic
over or attached to the stack substrate bottom surface 1032. alloy conductor, attached to the top Substrate top surface
The stack device 1042 can be mounted over, under, or near a 1070. The external interconnect 1088 can be formed to pro
center region of the stack substrate 1030. vide electrical connectivity to external systems.
0189 The integrated circuit packaging system 1000 can 0198 The integrated circuit packaging system 1000 can
include an inter-substrate region 1056 defined as spacing include a connector underfill 1090, such as a resin, an encap
between the base substrate 1004 and the stack substrate 1030. Sulant, an epoxy, an underfill, a liquid encapsulant, or the
The inter-substrate region 1056 can include spacing between underfill encapsulant. The connector underfill 1090 can func
the base substrate top surface 1008 and the stack substrate tion as a reinforcement layer in the inter-substrate region
bottom surface 1032. 1056 and the second inter-substrate region 1084, providing
0190. The integrated circuit packaging system 1000 can protection for the inter-substrate connector 1058 and the sec
include an inter-substrate connector 1058, such as a solder
ond inter-substrate connector 1086, respectively.
ball, a stud bump, a solder column, a metal conductor, or a (0199 The connector underfill 1090 can be dispensed over
or on a portion of the stack substrate protrusion 1037, encap
metallic alloy conductor. The inter-substrate connector 1058 sulating the second inter-substrate connector 1086 in the sec
can be formed in the inter-substrate region 1056. The inter ond inter-substrate region 1084. The connector underfill 1090
substrate connector 1058 can be attached or connected to the
base substrate top surface 1008 and the stack substrate bottom can be dispensed over or on a portion of the Stack Substrate top
Surface 1032. surface 1034 and filled through the stack substrate aperture
1036, encapsulating the inter-substrate connector 1058 in the
(0191 The inter-substrate connector 1058 can beformed in inter-substrate region 1056. The connector underfill 1090 can
an area array around or along the base perimeter or a stack be filled to encapsulate joints or junctions where the inter
perimeter of the stack substrate 1030. The inter-substrate substrate connector 1058 is attached or connected to the base
connector 1058 can beformed adjacent the base barrier 1010. substrate 1004 and the stack substrate 1030 or where the
0.192 The integrated circuit packaging system 1000 can second inter-substrate connector 1086 is attached or con
include a top integrated circuit package 1064. The top inte nected to the stack substrate 1030 and the top substrate 1066.
grated circuit package 1064 can include a top substrate 1066, 0200 For illustrative purposes, the cross-sectional view is
Such as a laminated plastic or ceramic Substrate, an organic or shown with numbers of the inter-substrate connector 1058
inorganic substrate, a carrier, a printed circuitboard (PCB), or and the second inter-substrate connector 1086 encapsulated
a printed wiring Substrate. with the connector underfill 1090 as two and two, respec
0193 The top substrate 1066 can include bond sites, con tively, on each side of the stack substrate 1030, although any
ductive layers, wiring layers, or traces, to provide electrical numbers of the inter-substrate connector 1058 and the second
connectivity. The top substrate 1066 can include a top sub inter-substrate connector 1086 can be encapsulated with the
strate bottom surface 1068 and a top substrate top surface connector underfill 1090.
1070 on a side of the top substrate 1066 opposite the top 0201 The stack device 1042 can be attached to the stack
substrate bottom surface 1068. substrate bottom surface 1032. The stack device 1042 can be
0194 The top integrated circuit package 1064 can include attached to the stack substrate 1030 between a plurality of the
a top integrated circuit 1074. Such as a flip chip, a die, or a inter-substrate connector 1058.
bumped chip, mounted under the top substrate 1066 or over 0202 Referring now to FIG. 11, therein is shown a top
the top substrate bottom surface 1068. The top integrated view of the integrated circuit packaging system 1000. The
circuit 1074 can be attached or connected to the top substrate integrated circuit packaging system 1000 can include the top
bottom surface 1068 with a top internal interconnect 1076, integrated circuit package 1064 mounted over the stack Sub
Such as a solder ball, a stud bump, a solder column, a metal strate top surface 1034.
conductor, or a metallic alloy conductor. The top integrated 0203 The integrated circuit packaging system 1000 can
circuit package 1064 can include a top underfill 1081, such as include the external interconnect 1088 attached to the top
an epoxy resin or any underfill resin material, dispensed in the substrate top surface 1070. The integrated circuit packaging
US 2011/021043.6 A1 Sep. 1, 2011

system 1000 can include a portion of the connector underfill interconnect 1276, a top second integrated circuit 1278, a top
1090 dispensed over the stack substrate top surface 1034. second internal interconnect 1280, and a top encapsulation
0204 Referring now to FIG. 12, therein is shown a cross 1282.
sectional view of an integrated circuit packaging system 1200 0213. The top substrate 1266, the top integrated circuit
along a section line 12-12 of FIG. 13 in a seventh embodiment 1274, the top internal interconnect 1276, the top second inte
of the present invention. The integrated circuit packaging grated circuit 1278, the top second internal interconnect
system 1200 can represent a configuration of a packaging 1280, and the top encapsulation 1282 can be formed in a
system, which can include a pre-stacked package-on-package manner similar to the top substrate 866 of FIG. 8, the top
(PoP) structure with an underfill encapsulant formed by top integrated circuit 874 of FIG. 8, the top internal interconnect
side dispensing methods on a protruded interposer, after trim 876 of FIG.8, the top second integrated circuit 878 of FIG. 8,
ming off the excessive edges of the protruded interposer. the top second internal interconnect 880 of FIG. 8, and the top
0205 The integrated circuit packaging system 1200 can encapsulation 882 of FIG. 8, respectively.
be similar to the integrated circuit packaging system 800 of 0214. The integrated circuit packaging system 1200 can
FIG. 8, except for the formation of the stack substrate 830 of include a second inter-substrate region 1284, a second inter
FIG. 8. The integrated circuit packaging system 1200 can substrate connector 1286, an external interconnect 1288, and
include a base integrated circuit package 1202. a connector underfill 1290. The second inter-substrate region
0206. The base integrated circuit package 1202 can 1284, the second inter-substrate connector 1286, the external
include a base substrate 1204, having a base substrate bottom interconnect 1288, and the connector underfill 1290 can be
surface 1206 and a base substrate top surface 1208, a base formed in a manner similar to the second inter-substrate
barrier 1210, a base integrated circuit 1212, a base internal region 884 of FIG. 8, the second inter-substrate connector 886
interconnect 1214, and a base underfill 1224. The base sub of FIG. 8, the external interconnect 888 of FIG. 8, and the
strate 1204, the base barrier 1210, the base integrated circuit connector underfill 890 of FIG. 8, respectively.
1212, the base internal interconnect 1214, and the base under 0215. After the encapsulation process of the connector
fill 1224 can be formed in a manner similar to the base underfill 1290 is completed, a portion of the stack substrate
substrate 804 of FIG. 8, the base barrier 810 of FIG. 8, the 1230 or a portion of the connector underfill 1290 can be
base integrated circuit 812 of FIG. 8, the base internal inter trimmed off or removed to maintain the overall footprint of
connect 814 of FIG. 8, and the base underfill 824 of FIG. 8, the structure of the integrated circuit packaging system 1200.
respectively. AS Such, widths of the base integrated circuit package 1202,
0207. The integrated circuit packaging system 1200 can the stack substrate 1230, and the top integrated circuit pack
include a stack Substrate 1230. Such as an interposer, a Sub age 1264 can be substantially the same. The integrated circuit
strate, an internal Stacking module, an interface module, or a packaging system 1200 can have a straight profile in struc
PCB. The stack substrate 1230 can be mounted over the base ture.
integrated circuit package 1202. 0216. After the portion of the stack substrate 1230 is
0208. The stack substrate 1230 can include a stack sub trimmed off or removed, the stack substrate 1230 can include
strate bottom surface 1232 and a stack substrate top surface an external Surface having characteristics of the portion of the
1234 on a side of the stack substrate 1230 opposite the stack stack substrate 1230 removed. The characteristics of the por
substrate bottom surface 1232. The stack substrate 1230 can tion of the stack substrate 1230 removed can include grinding
be designed in a singulated or Strip form for encapsulant marks, Sanding marks, sawing marks, other removal tool
dispensing. marks, or a physically processed surface. For example, the
0209. The stack substrate 1230 can include bond sites, portion of the stack substrate 1230 to be removed can include
conductive layers, wiring layers, or traces, to provide electri an excessive edge or a protruded portion of the Stack Substrate
cal connectivity between electrical devices or packaging sys 1230.
tems that are connected to the stack Substrate bottom Surface 0217. After the portion of the connector underfill 1290 is
1232 and the stack substrate top surface 1234. trimmed off or removed, the connector underfill 1290 can
0210. The stack substrate 1230 can include a stack sub include an external Surface having characteristics of the con
strate aperture 1236 defined as a through slot or an opening. nector underfill 1290 removed. The characteristics of the
The stack substrate aperture 1236 can be formed through the connector underfill 1290 removed can include grinding
stack substrate 1230, between the stack substrate bottom marks, Sanding marks, sawing marks, other removal tool
surface 1232 and the stack substrate top surface 1234. The marks, or a physically processed surface. With the portion of
integrated circuit packaging system 1200 can optionally the stack substrate 1230 and the portion of the connector
include a stack device 1242 that can be formed in a manner underfill 1290 removed, an outer edge of the stack substrate
similar to the stack second device 846 of FIG. 8. 1230 can be substantially intersected by an extent of the
0211. The integrated circuit packaging system 1200 can connector underfill 1290.
include an inter-substrate region 1256 and an inter-substrate 0218. Referring now to FIG. 13, therein is shown a top
connector 1258. The inter-substrate region 1256 and the inter view of the integrated circuit packaging system 1200. The top
substrate connector 1258 can beformed in a manner similar to view is shown with the integrated circuit packaging system
the inter-substrate region 856 of FIG. 8 and the inter-substrate 1200 having the top integrated circuit package 1264.
connector 858 of FIG. 8, respectively. 0219 Referring now to FIG. 14, therein is shown a cross
0212. The integrated circuit packaging system 1200 can sectional view of an integrated circuit packaging system 1400
include a top integrated circuit package 1264. The top inte along a section line 14-14 of FIG. 15 in an eighth embodiment
grated circuit package 1264 can include a top Substrate 1266, of the present invention. The integrated circuit packaging
having a top substrate bottom surface 1268 and a top substrate system 1400 can represent a configuration of a packaging
top surface 1270, a top integrated circuit 1274, a top internal system, which can include a pre-stacked package-on-package
US 2011/021043.6 A1 Sep. 1, 2011

(PoP) structure with an underfill encapsulant formed by bot thickness of the base integrated circuit 1412, the base second
tom side dispensing methods on a protruded interposer with a integrated circuit 1416, or the base third integrated circuit
central opening. 1420.
0220. The integrated circuit packaging system 1400 can 0227. The stack substrate aperture 1436 can be formed
be similar to the integrated circuit packaging system 800 of adjacent or around the stack substrate open region 1438. The
FIG. 8, except for the formation of the base integrated circuit top or an upper portion of the base integrated circuit package
package 802 of FIG. 8 and the stack substrate 830 of FIG.8. 1402 can be positioned in the stack Substrate open region
The integrated circuit packaging system 1400 can include a 1438.
base integrated circuit package 1402. 0228. The integrated circuit packaging system 1400 can
0221) The base integrated circuit package 1402 can include an inter-substrate region 1456 and an inter-substrate
include a base substrate 1404, having a base substrate bottom connector 1458. The inter-substrate region 1456 and the inter
substrate connector 1458 can beformed in a manner similar to
surface 1406 and a base substrate top surface 1408, a base the inter-substrate region 856 of FIG. 8 and the inter-substrate
barrier 1410, a base integrated circuit 1412, and a base inter connector 858 of FIG. 8, respectively.
nal interconnect 1414. The base substrate 1404, the base 0229. The integrated circuit packaging system 1400 can
barrier 1410, the base integrated circuit 1412, and the base include a top integrated circuit package 1464. The top inte
internal interconnect 1414 can be formed in a manner similar
to the base substrate 804 of FIG. 8, the base barrier 810 of grated circuit package 1464 can include a top Substrate 1466,
FIG. 8, the base integrated circuit 812 of FIG. 8, and the base having a top substrate bottom surface 1468 and a top substrate
internal interconnect 814 of FIG. 8, respectively. top surface 1470, a top integrated circuit 1474, a top internal
interconnect 1476, a top second integrated circuit 1478, a top
0222. The base integrated circuit package 1402 can second internal interconnect 1480, and a top encapsulation
include a base second integrated circuit 1416. Such as an 1482.
integrated circuit die, a wirebond integrated circuit, or a chip, 0230. The top substrate 1466, the top integrated circuit
mounted over the base integrated circuit 1412. The base sec 1474, the top internal interconnect 1476, the top second inte
ond integrated circuit 1416 can be attached to the base inte grated circuit 1478, the top second internal interconnect
grated circuit 1412 with an attach layer. Such as a die attach, 1480, and the top encapsulation 1482 can be formed in a
an adhesive, a film, or an epoxy. The base integrated circuit manner similar to the top substrate 866 of FIG. 8, the top
package 1402 can include a base second internal interconnect integrated circuit 874 of FIG. 8, the top internal interconnect
1418, such as a bond wire, a ribbonbond wire, or a conductive 876 of FIG.8, the top second integrated circuit 878 of FIG. 8,
wire, attached or connected to the base substrate top surface the top second internal interconnect 880 of FIG. 8, and the top
1408 and the base second integrated circuit 1416. encapsulation 882 of FIG. 8, respectively.
0223) The base integrated circuit package 1402 can 0231. The integrated circuit packaging system 1400 can
include a base third integrated circuit 1420. Such as an inte include a second inter-substrate region 1484, a second inter
grated circuit die, a wirebond integrated circuit, or a chip, substrate connector 1486, an external interconnect 1488, and
mounted over the base second integrated circuit 1416. The a connector underfill 1490. The second inter-substrate region
base third integrated circuit 1420 can be attached to the base 1484, the second inter-substrate connector 1486, the external
second integrated circuit 1416 with an attach layer, such as a interconnect 1488, and the connector underfill 1490 can be
die attach, an adhesive, a film, or an epoxy. The base inte formed in a manner similar to the second inter-substrate
grated circuit package 1402 can include a base third internal region 884 of FIG. 8, the second inter-substrate connector 886
interconnect 1422, such as a bond wire, a ribbonbond wire, or of FIG. 8, the external interconnect 888 of FIG. 8, and the
a conductive wire, attached or connected to the base substrate connector underfill 890 of FIG. 8, respectively.
top surface 1408 and the base third integrated circuit 1420. 0232 Referring now to FIG. 15, therein is shown a top
0224. The base integrated circuit package 1402 can view of the integrated circuit packaging system 1400. The
include a base encapsulation 1426, Such as a cover including integrated circuit packaging system 1400 can include the top
an epoxy molding compound, an encapsulant, or a molding integrated circuit package 1464 mounted over the stack Sub
material. The base encapsulation 1426 can beformed over the strate top surface 1434. The integrated circuit packaging sys
base substrate 1404, the base integrated circuit 1412, the base tem 1400 can include a portion of the connector underfill
internal interconnect 1414, the base second integrated circuit 1490 dispensed over the stack substrate top surface 1434.
1416, the base second internal interconnect 1418, the base 0233 Referring now to FIG. 16, therein is shown a flow
third integrated circuit 1420, and the base third internal inter chart of a method 1600 of manufacture of an integrated circuit
connect 1422. packaging system in a further embodiment of the present
0225. The integrated circuit packaging system 1400 can invention. The method 1600 includes: providing a base sub
include a stack substrate 1430, having a stack substrate bot strate in a block 1602; attaching a base integrated circuit on
tom surface 1432, a stack substrate top surface 1434, a stack the base substrate in a block 1604; attaching a base barrier on
substrate aperture 1436, and a stack substrate protrusion the base substrate adjacent a base perimeter thereof in a block
1437. The stack substrate 1430 can be formed in a manner 1606; mounting a stack substrate over the base substrate, the
similar to the stack substrate 830 of FIG. 8, except that the stack Substrate having a stack Substrate aperture with the
stack Substrate 1430 can include a stack Substrate open region stack Substrate having an inter-substrate connector thereon in
1438 defined as a cavity, a window, a hole, or the central a block 1608; and dispensing a connector underfill through
opening. the stack Substrate aperture encapsulating the inter-substrate
0226. The stack substrate open region 1438 can beformed connector, overflow of the connector underfill prevented by
in the center of the stack substrate 1430. The stack substrate the base barrier in a block 1610.
open region 1438 can beformed in order to create spacing for 0234. The resulting method, process, apparatus, device,
mold cap thickness of the base encapsulation 1426 or flip chip product, and/or system is straightforward, cost-effective,
US 2011/021043.6 A1 Sep. 1, 2011

uncomplicated, highly versatile, accurate, sensitive, and dispensing a connector underfill through the stack Sub
effective, and can be implemented by adapting known com strate aperture encapsulating the inter-substrate connec
ponents for ready, efficient, and economical manufacturing, tor, overflow of the connector underfill prevented by the
application, and utilization. base barrier.
0235 Another important aspect of the present invention is 7. The method as claimed in claim 6 wherein:
that it valuably supports and services the historical trend of mounting the Stack Substrate includes mounting the stack
reducing costs, simplifying systems, and increasing perfor Substrate having a stack Substrate protrusion; and
aCC. dispensing the connector underfill includes dispensing the
0236. These and other valuable aspects of the present connector underfill over a portion of the stack substrate
invention consequently further the State of the technology to protrusion.
at least the next level. 8. The method as claimed in claim 6 further comprising
0237 While the invention has been described in conjunc removing a portion of the Stack Substrate and a portion of the
tion with a specific best mode, it is to be understood that many connector underfill, an outer edge of the stack Substrate Sub
stantially intersected by an extent of the connector underfill.
alternatives, modifications, and variations will be apparent to 9. The method as claimed in claim 6 wherein mounting the
those skilled in the art in light of the aforegoing description. stack Substrate includes mounting the stack Substrate having
Accordingly, it is intended to embrace all such alternatives, a stack Substrate open region adjacent the stack Substrate
modifications, and variations that fall within the scope of the aperture.
included claims. All matters hithertofore set forth herein or 10. The method as claimed in claim 6 wherein attaching the
shown in the accompanying drawings are to be interpreted in base integrated circuit on the base Substrate includes attach
an illustrative and non-limiting sense. ing a flip chip on the base Substrate.
What is claimed is: 11. An integrated circuit packaging system comprising:
1. A method of manufacture of an integrated circuit pack a base Substrate;
aging System comprising: a base integrated circuit on the base Substrate;
providing a base Substrate; a base barrier on the base Substrate adjacent a base perim
attaching a base integrated circuit on the base Substrate; eter thereof,
attaching a base barrier on the base Substrate adjacent a a stack substrate over the base substrate, the stack substrate
base perimeter thereof; having a stack Substrate aperture with the stack Substrate
mounting a stack Substrate over the base Substrate, the having an inter-substrate connector thereon, and
stack substrate having a stack substrate aperture with the a connector underfill through the stack Substrate aperture
stack Substrate having an inter-substrate connector encapsulating the inter-substrate connector, overflow of
thereon, and the connector underfill prevented by the base barrier.
dispensing a connector underfill through the stack Sub 12. The system as claimed in claim 11 wherein the stack
strate aperture encapsulating the inter-substrate connec Substrate includes the stack Substrate having a stack barrier
tor, overflow of the connector underfill prevented by the adjacent a stack perimeter thereof.
base barrier. 13. The system as claimed in claim 11 wherein the connec
2. The method as claimed in claim 1 wherein mounting the tor underfill is adjacent the base barrier.
stack Substrate includes mounting the stack Substrate having 14. The system as claimed in claim 11 wherein the connec
tor underfill is between the base substrate and the stack Sub
a stack barrier adjacent a stack perimeter thereof. Strate.
3. The method as claimed in claim 1 wherein dispensing 15. The system as claimed in claim 11 further comprising
the connector underfill includes dispensing the connector a top integrated circuit package over the stack Substrate, the
underfill adjacent the base barrier. entirety of the top integrated circuit package adjacent the
4. The method as claimed in claim 1 wherein dispensing stack Substrate aperture.
the connector underfill includes dispensing the connector 16. The system as claimed in claim 11 wherein the inter
underfill between the base substrate and the stack substrate. substrate connector is between the base barrier and the base
5. The method as claimed in claim 1 further comprising integrated circuit.
mounting a top integrated circuit package over the Stack Sub 17. The system as claimed in claim 16 wherein the stack
strate, the entirety of the top integrated circuit package adja Substrate includes a stack Substrate protrusion, the connector
cent the stack Substrate aperture. underfill over a portion of the stack substrate protrusion.
6. A method of manufacture of an integrated circuit pack 18. The system as claimed in claim 16 wherein the connec
aging System comprising: tor underfill includes an outer edge of the stack substrate
providing a base Substrate; substantially intersected by an extent of the connector under
attaching a base integrated circuit on the base Substrate; fill.
attaching a base barrier on the base Substrate adjacent a 19. The system as claimed in claim 16 wherein the stack
base perimeter thereof; Substrate includes a stack Substrate open region adjacent the
mounting a stack Substrate over the base Substrate, the stack Substrate aperture.
stack Substrate having a stack Substrate aperture with the 20. The system as claimed in claim 16 wherein the base
stack Substrate having an inter-substrate connector integrated circuit includes a flip chip on the base Substrate.
thereon and the inter-substrate connector between the
c c c c c
base barrier and the base integrated circuit; and

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