Documenti di Didattica
Documenti di Professioni
Documenti di Cultura
Think small !
Think small !
R.P.H. Chang
Director
National Center for Learning and Teaching in
Nanoscale Science and Engineering
Northwestern University
with contributions from Professors Chen and
Hersam
Five questions to ponder!!
Microwave
Dust mite
200 µm 0.1 mm
10-4 m
100 µm
Fly ash
Microworld
Human hair ~ 10-20 µm
~ 10-50 µm wide
The 0.01 mm
10-5 m
10 µm P
O
O O
Infrared
Red blood cells
O O O O
~35 nm
10-7 m 0.1 µm
Combine nanoscale building
100 nm blocks to make novel
Ultraviolet
photosynthetic reaction
center with integral
semiconductor storage
10-8 m 0.01 µm
~10 nm diameter 10 nm Nanotube electrode Nanotube transistor
ATP synthase
10-10 m 10-9 m 10-8 m 10-7 m 10-6 m 10-5 m 10-4 m 10-3 m 10-2 m 10-1 m 1m
Transmission Scanning Magnifying
Light Microscope naked eye
Electron Microscope Electron Microscope Glass
Scanning Probe
Microscope
Optical Microscopy
Resolution depends on the instrument, particularly the tip size, but can
be atomic (10-11 m)
http://en.wikipedia.org/wiki/Scanning_probe_microscopy
Can small objects be useful?
bottom of an object
Nanolubricants
floor
Nanosphere Nanotube
… Nano-
particles
Spores Flour
Honeycomb
Smoke
Marshmallows/Whipped Cream Stained Glass Nanosized
solid
Nanosized
particles
gas bubbles
suspended
in a solid Nanosized solid
in a gas
particles in a solid
Solutions 1 nm Colloids 100 nm Suspensions
Si3N4 LAYER
Si SUBSTRATE
RETICLE
(OR MASK)
1 µm
SIMILAR CYCLE IS REPEATED 2 LENS
TO LAY DOWN METAL LINKS
6 BETWEEN TRANSISTORS Ferromagnetic/superconducting
PATTERNS ARE PROJECTED
devices (e-beam lithography)
NEW PHOTORESIST IS SPUN REPEATEDLY ONTO WAFER
METAL ON WAFER AND STEPS 2 TO 4
CONNECTOR ARE REPEATED
4 EXPOSED
DOPED PHOTORESIST
REGION IS REMOVED
AREAS UNPROTECTED
BY PHOTORESIST ARE Molecular electronics
ETCHED BY GASES
(e-beam lithography)
Top-Down: Nanoimprint Lithography
Mold
1. Imprint
• Press Mold Resist
Substrate
• Remove Mold
2. Pattern Transfer
• RIE
Top-Down: Nanosphere Lithography
Bottom-Up: Carbon Nanotube Synthesis
100 nm
Bottom-Up: Molecular Self-Assembly
• Spontaneous organization of molecules into stable, structurally
well-defined aggregates (nanometer length scale).
• Molecules can be transported to surfaces through liquids to
form self-assembled monolayers (SAMs).
For example, an ice cube and a glacier both melt at the same
temperature (32ºF).
Nanoscale Melting Temperature
Nanocrystal size decreases
For example,
Eagle One
Nanowax
self-cleaning window
Sunglasses
Nanocoating on eyeglass lenses:
antireflective polymer coating
(3-10 nm) self assembles
Critical Dimensions:
Particle Diameter, Separation Distance, Aspect Ratio,
Fiber Diameter, Layer Thickness, Grain Diameter, …
Golf Club Shafts
Nanoparticles within fiber reinforced composites
AccuFLEX shafts: “longer, straighter, more consistent”
nanoparticles
fibers
Golf Club Shafts and Heads
Nanoparticles reinforces carbon
(graphite) composite material
Polymer
molecular chains bind
clay platelets together
Exfoliated Material
• Composite Materials
– 1% of MWNTs increased the modulus of
polystyrene by 42%.1
• Nanoscale Electronic Devices
– NTs can act as nanoscale wires for
devices, such as field effect transistors.2
1. Quan, D., et al., Appl. Phys. Lett., 2000, 76, 2868. 2. Collins, P.G., et al., Science, 2001, 292, 706.
Applications
• Field Emission
Devices
– Sharp tip of NTs
produces high field
emission.
– Flat panel displays
have been created
using NTs as the
field emitter.1
1. Wang, Q., et al., Appl. Phys. Lett., 1998, 72, 2912. Choi, W.B., et. al., Appl. Phys. Lett. 75 20 (1999) p. 3129.
Applications
• Nanoscale Probes:
– The mechanical robustness and high
aspect ratio allow NTs to be used as high
resolution tips for atomic probe
microscopes.1 Carbon nanotube
1. Hafner,
Hafner, J.H., et al., Nature, 1999,
1999, 398, 761.
Field Emission
φ = work function
Field Emission
• Emitter design
Fowler-Nordheim equation
– To maximize current
density (j) ⎛ Eloc ⎞
2 ⎡ − BΦ 2 ⎤
3
Operating parameters
Emission current
76 µA/mm2
density
Applied voltage 300 V
Glass
ZnO
V anode phosphor
Glass spacer
0.2 mm Mo gate
Nanotube emitter
V gate FOTURAN
substrate
Spin-on glass
Back contact to emitters