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Series Variations
Sonic conductance Type of Voltage Electrical entry With light/surge Manual
Series C [dm3/s·bar)] actuation voltage suppressor override
4/2 5/3(A/B R1/R2) (Option)
Single 3 SJ
Double position
2 position single (Standard) With light/surge voltage
Grommet (G) Grommet
terminal suppressor
Non-locking SY
100 VAC, 50/60 Hz push type
VFS1000 1.8 1.8
200 VAC, 50/60 Hz
(E)
• Grommet terminal (EZ) (Flush) SV
Body Ported
1111
P1111-P1228-E.qxd 08.9.2 2:52 PM Page 1112
Series VFS
Manifold Variations
Manifold
Bar Stacking With With With With Non plug-in
base base attachment terminal multi- D-sub (Connection to
plug lead wire block connector connector each valve)
Body Ported
VFS1000 (P.1119)
VFS2000 (P.1127)
VFS3000 (P.1136)
VFS2000 (P.1146)
Non Plug-in Type
Base Mounted
VFS3000 (P.1168)
VFS4000 (P.1188)
VFS5000 (P.1208)
With multi-connector
With D-sub connector
Stacking base
(Series VFS3000)
Pilot common EXH Non Plug-in
1112
P1111-P1228-E.qxd 08.9.2 2:52 PM Page 1113
Metal Seal
5 Port Pilot Operated Solenoid Valve Series VFS
VQ
(P.1153) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148) (P.1148)
VQ4
(P.1173) (P.1175) (P.1170) (P.1170) (P.1170) (P.1170) (P.1170) (P.1170) (P.1170) (P.1170)
VQ5
(P.1193) (P.1195) (P.1190) (P.1190) (P.1190) (P.1190) (P.1190) (P.1190) (P.1190) (P.1190)
VQC
(P.1212) (P.1209) (P.1209) (P.1209) (P.1209) (P.1209) (P.1209) (P.1209) (P.1209)
VQZ
Individual SUP spacer Interface regulator SQ
With exhaust cleaner VFS
VFR
VQ7
Air shutoff valve spacer
Individual EXH spacer
1113
VFS.qxd 10.11.25 9:49 AM Page 1
Series VFS1000
Model
Flow characteristics (1)
Max. (2)
(3)
Type of
Model
Port 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) operating Response Mass
cycle time (kg)
actuation size C C (ms)
[dm3/(s·bar)] b Cv [dm3/(s·bar)] b Cv (cpm)
2 position
Single VFS1120 VFS1130 18 1.7 0.22 0.38 1.8 0.19 0.40 1200 15 or less 0.18
Double VFS1220 VFS1230 18 1.7 0.22 0.39 1.8 0.19 0.40 1200 13 or less 0.26
Closed 18
VFS1320 VFS1330 1.6 0.20 0.37 1.8 0.20 0.41 600 20 or less 0.27
center
3 position
Exhaust 18
center VFS1420 VFS1430 1.7 0.18 0.38 1.9 0.19 0.44 600 20 or less 0.27
Pressure
center
VFS1520 VFS1530 18 1.7 0.24 0.40 1.6 0.18 0.37 600 20 or less 0.27
Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency.
Note 2) According to JIS B 8375-1981. (The value at supply pressure 0.5 MPa.)
Note 3) In the case of grommet type
Note 4) “Note 1)” and “Note 2)” are with controlled clean air.
VFS1320-쏔D-01
Allowable voltage fluctuation –15 to +10% of rated voltage
Coil insulation type Class B or equivalent (130°C) (5)
Apparent power Inrush 5.6 VA (50 Hz), 5.0 VA (60 Hz)
(Power consumption) AC Holding 3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz
VFS1120-쏔G-01-F Power consumption (DC) 1.8 W (2.04 W: With light/surge voltage suppressor)
Grommet, Grommet terminal,
VFS1220-쏔E-01 Electrical entry
Conduit terminal, DIN terminal
Note 1) Use dry air at low temperatures.
Note 2) Use turbine oil Class 1 (ISO VG32), if lubricated.
Note 3) Impact resistance: No malfunction occurred when it is tested with a drop tester in the axial
VFS1120-쏔G-01 direction and at the right angles to the main valve and armature in both
energized and de-energized states every once for each condition.
(Values at the initial period)
Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz.
Test was performed at both energized and de-energized states in the
JIS Symbol axial direction and at the right angles to the main valve and armature.
(Values at the initial period)
2 position 3 position Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.
Single Closed center
Option Specifications
Pilot valve manual override Non-locking push type (Extended), Locking type (Tool required), Locking type (Lever)
110 to 120, 220, 240 VAC (50/60 Hz)
Coil rated voltage
12, 100 VDC
Option With light/surge voltage suppressor Note)
Double Exhaust center
Foot bracket (With screw) Part No.: AXT626-10A, VFS1120 (single) only
Note) Grommet type is available only w/ surge voltage suppressor (which is directly connected with
lead wire).
Manifold
Pressure center Body type Applicable manifold base (Pilot EXH)
VFS1쏔20 Bar manifold (Individual EXH)
VFS1쏔30 Bar manifold (Common EXH base side)
Note) VFS1쏔30: Manifold only. Cannot be used as a single unit.
1114
1-2-16-VFS1000.qxd 10.3.29 5:46 PM Page 1
How to Order
VFS1 1 20 1 G 01
Symbol CE-compliant
Option
2 position single Nil —
F: With foot bracket Q CE-compliant
Thread type
1
Nil Rc
Port size N∗ NPT
2 position double 01 Rc 1 8 T∗ NPTF
F∗ G SJ
2 ∗ Option ∗ Mountable only
Manual override
for VFS1120. SY
3 position closed center Nil: Non-locking push type A∗: Non-locking push type B∗: Locking type C∗: Locking type
(Flush) (Extended) (Lever) SV
3
SYJ
3 position exhaust center SZ
∗ Option
4
Light/Surge voltage suppressor VP4
Nil None
3 position pressure center Z With light/surge voltage suppressor S0700
S∗ With surge voltage suppressor
5 ∗ Grommet type is available only w/ surge voltage suppressor, not w/ indicator light. VQ
Electrical entry VQ4
Body (Pilot exhaust) G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal
20: Individual EXH VQ5
VQC
VQZ
Coil rated voltage SQ
30∗: Common EXH 1 100 VAC (50/60 Hz)
2 200 VAC (50/60 Hz) VFS
3∗ 110 to 120 VAC (50/60 Hz)
4∗ 220 VAC (50/60 Hz)
5 24 VDC VFR
6∗ 12 VDC
7∗ 240 VAC (50/60 Hz) VQ7
9∗ Other
∗ Manifold only ∗ Option
1115
P1111-P1228-E.qxd 08.9.2 2:52 PM Page 1116
Series VFS1000
Construction
2 position single 2 position double
Exhaust center
Pressure center
Component Parts
No. Description Material Note
1 Body Aluminum die-casted Platinum silver
2 Spool/Sleeve Stainless steel —
3 End plate Resin —
4 Piston Resin —
5 Return spring Stainless steel —
6 Pilot valve assembly — —
7 Detent assembly — —
∗ Refer to “How to Order Pilot Valve Assembly” on page 1115.
1116
P1111-P1228-E.qxd 08.9.2 2:52 PM Page 1117
SJ
Solenoid valve
SY
(Lead wire length)
Manual 2 x ø3.5
SV
override mounting hole
≅ 300
Light
Manual override
(Locking type)
1117
P1111-P1228-E.qxd 08.9.2 2:52 PM Page 1118
Series VFS1000
2 Position Double, 3 Position — Grommet, Grommet terminal, Conduit terminal, DIN terminal
Grommet: VFS1220-G, VFS1320-G, VFS1420-G, VFS1520-G
Manual override
Non-locking push type
(Locking type)
Pilot EXH
(No VFS130)
Light
Manual override
(Locking type)
1118
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 3
Series VFS1000
Manifold Specifications
Single Base Type
Specifications
Compact and lightweight Manifold base type Bar manifold, Body ported
Compact due to manifolding on a single Stations Max. 15 stations
base for mounting in small spaces.
•••
1
15 15 stations Rc 1 8 Rc 1 8 Rc 1 8
VFS
Part no. for mounting bolt Base model
and gasket
BG-VFS1030
Model Pilot exhaust Applicable valve model VFR
Pilot individual EXH
VQ7
20 VFS1쏔20-쏔쏔-01
VFS1쏔30-쏔쏔-01
30
∗VFS1쏔20-쏔쏔-01
mountable
Series VFS1000
Manual override
U side D side
Blanking plate
4 x ø5.2 mounting hole
Gasket
Pilot EXH
Stations
3 position (192.5)
Double (152)
3 position (192.5)
Double (188)
Double (188)
Single (103.5)
Single (121.5)
Single (121.5)
(With light/surge voltage suppressor: 91.5) (With light/surge voltage suppressor: 97.5 (99.5))
(With light/surge voltage suppressor: 86.5)
(With light/surge voltage suppressor: 106.5 (108.5))
(With light/surge voltage suppressor: 96.5)
( ): Y, YZ
n: Station
Symbol Stations 2 3 4 5 6 7 8 9 10 Formula
L1 59 83 107 131 155 179 203 227 251 L1 = 24 x n + 11
L2 77 101 125 149 173 197 221 245 269 L2 = 24 x n + 29
1120
P1111-P1228-E.qxd 08.9.2 2:52 PM Page 1121
Manual override
SJ
U side D side
SY
SV
4 x ø5.2 mounting hole Blanking plate
4 x M5 SYJ
Pilot EXH port
3 position (191.5)
Double (152)
3 position (192.5)
Double (187)
Double (188)
Single (103.5)
Single (121)
Single (121.5)
(With light/surge voltage suppressor: 96.5) (With light/surge voltage suppressor: 102.5 (104.5))
(With light/surge voltage suppressor: 91.5)
(With light/surge voltage suppressor: 111.5 (113.5))
(With light/surge voltage suppressor: 101.5)
( ): Y, YZ
n: Station
Symbol Stations 2 3 4 5 6 7 8 9 10 Formula
L1 59 83 107 131 155 179 203 227 251 L1 = 24 x n + 11
L2 77 101 125 149 173 197 221 245 269 L2 = 24 x n + 29
1121
016-VFS.qxd 11.4.22 9:23 AM Page 1
Model
Flow characteristics (1) (2) (3)
Port Max.
Type of
Model size
1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) operating Response Mass
actuation C C cycle time (kg)
Rc b Cv b Cv (cpm) (ms)
[dm3/(s·bar)] [dm3/(s·bar)]
18 3.2 0.24 0.78 3.4 0.28 0.82
2 position
Option Specifications
Double Exhaust center Pilot type External pilot (1)
Pilot valve manual override Non-locking push type (Extended), Locking type (Tool required)
110 to 120, 220, 240 VAC (50/60 Hz)
Coil rated voltage
12, 100 VDC
Option With light/surge voltage suppressor (2)
Foot bracket (With screw) Part no.: VFN200-17A, VFS2120 (single) only
Pressure center
Note 1) Operating pressure: 0 to 1.0 MPa. Pilot pressure: 0.1 to 1.0 MPa.
Note 2) Grommet type is available only w/ surge voltage suppressor (which is directly connected with
lead wire), not w/ indicator light.
Manifold
Body type Applicable manifold base (Pilot EXH)
VFS2쏔20 Bar manifold (Individual EXH)
VFS2쏔30 Bar manifold (Common EXH base side)
Note) VFS2쏔30: Manifold only. Cannot be used as a single unit.
1122
1-2-16-VFS1000.qxd 10.3.29 5:46 PM Page 2
How to Order
VFS2 1 20 1 G 01
Symbol CE-compliant
Option Nil —
1: 2 position single
F: With foot bracket Q CE-compliant
Thread type
Nil Rc
Port size N∗ NPT
2: 2 position double 01 Rc 1 8
T∗ NPTF
02 Rc 1 4
F∗ G SJ
∗ Option
∗ Mountable only
3: 3 position closed center for VFS2120. SY
Manual override
Nil: Non-locking push type A∗: Non-locking push type B∗: Locking type SV
(Flush) (Extended) (Tool required)
4: 3 position exhaust center
SYJ
SZ
5: 3 position pressure center
∗ Option
VP4
Light/Surge voltage suppressor
∗ Reverse pressure: Can
Nil None S0700
be used by external Z With light/surge voltage suppressor
pilot specifications. S∗ With surge voltage suppressor
∗ Grommet type is available only w/ surge voltage suppressor, not w/ indicator light.
VQ
Body (Pilot exhaust)
20: Individual EXH VQ4
Electrical entry
G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal
VQ5
VQC
30: Common EXH∗
VQZ
Coil rated voltage SQ
1 100 VAC (50/60 Hz)
2 200 VAC (50/60 Hz) VFS
∗ Manifold only 3∗ 110 to 120 VAC (50/60 Hz)
Pilot type 4∗ 220 VAC (50/60 Hz)
Nil Internal pilot 5 24 VDC
VFR
R∗ External pilot 6∗ 12 VDC
∗ Option: Individual 7∗ 240 VAC (50/60 Hz) VQ7
external pilot (Ex- 9∗ Other
ternal pilot port:
Body side) ∗ Option
1123
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1124
Series VFS2000
Construction
2 position single 2 position double
Exhaust center
Pressure center
Component Parts
No. Description Material Note
1 Body Aluminum die-casted Platinum silver
2 Spool/Sleeve Stainless steel —
3 End plate Resin —
4 Piston Resin —
5 Return spring Stainless steel —
6 Pilot valve assembly — —
7 Detent assembly — —
∗ Refer to “How to Order Pilot Valve Assembly” on page 1123.
1124
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1125
Manual override SJ
(Non-locking)
( M5:
∗ Only for external pilot model.)
External pilot port 2 x ø4.5
mounting hole Solenoid valve SY
(Lead wire length)
SV
≅300
SYJ
SZ
VP4
2 x ø3.5 mounting hole
S0700
3 x Rc 1/8, 1/4
2 x Rc 1/8 VQ
VQ4
VQ5
VQC
Grommet terminal: VFS2120-E/EZ DIN terminal: VFS2120-D/DZ/Y/YZ
VQZ
With light/surge voltage suppressor (EZ)
( ): Y, YZ
Light
1125
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1126
Series VFS2000
2 Position Double, 3 Position — Grommet, Grommet terminal, Conduit terminal, DIN terminal
Grommet: VFS2220-G, VFS2320-G, VFS2420-G, VFS2520-G
Manual override
(Non-locking) (M5: External pilot port
2 x ø3.5 mounting hole ∗ Only for external pilot model.)
(Lead wire length)
≅300
3 x Rc 1/8, 1/4
2 x Rc 1/8
Light
Light
1126
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 5
Series VFS2000
Manifold Specifications
Single Base Type
Specifications
Keeps environmental air Manifold base type Bar manifold, Body ported
Stations Max. 15 stations
clean from pilot exhaust
Use of the VV5FS2-30 manifold can exhaust
intensively the pilot exhaust gas to the base Port Specifications
side, and can prevent environmental Porting specifications: Rc
aggravation due to noise and oil mist. Passage
Symbol Base Valve Base SJ
1(P) 5(R1), 3(R2) 1(P) 2(B), 4(A) 3(R2), 5(R1)
1 Common Common Side: 3 8 Top: 1 8, 1 4 Side: 3 8 SY
Option SV
Blanking plate VVFS2000-10A-1 With gasket, screw
SYJ
How to Order Manifold Base
SZ
VV5FS2 20 05 1 03 VP4
VV5FS2-20 CE-compliant
Series VFS2000
Manifold Nil — S0700
Q CE-compliant
Thread type VQ
Nil Rc
N∗ NPT VQ4
T∗ NPTF
F∗ G VQ5
∗ Option
•••
BG-VFS2030 1
15 15 stations Rc 3 8 Rc 3 8 Rc 1 8, 1 4 VFS
Base model VFR
Model Pilot exhaust Applicable valve model
Pilot individual EXH VQ7
20 VFS2쏔20-쏔쏔- 01
02
VFS2쏔30-쏔쏔-01
02
30
∗VFS2쏔20-쏔쏔-01
02
mountable
1127
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1128
Series VFS2000
2n x Rc 1/8, 1/4
M3 x 44
6 x Rc 3/8
U side D side
4 x ø5 mounting hole
Blanking plate
≅300
(Lead wire length)
Pilot EXH
Gasket
Stations
Formula for manifold weight M = 0.108n + 0.068 (kg) n: Station
3 position (229)
3 position (193)
Double (219)
Double (219)
Double (182)
Single (143.5)
Single (125)
Single (143)
1128
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1129
2n x Rc 1/8, 1/4
M3 x 44
SJ
U side D side
SY
SV
VQ4
VQ5
Stations VQC
Formula for manifold weight M = 0.12n + 0.21 (kg) n: Station
VQZ
Grommet terminal: E/EZ Conduit terminal: T/TZ DIN terminal: D/DZ/Y/YZ
Applicable heavy-duty code
SQ
Applicable heavy-duty code
O.D. ø6 to ø8
O.D. ø6 to ø8 (Y: ø4.7 to ø7) VFS
Lead wire O.D.
Max. ø3.5
VFR
VQ7
3 position (193)
3 position (229)
3 position (229)
Double (219)
Double (182)
Double (219)
Single (143.5)
Single (125)
Single (143)
1129
016-VFS.qxd 11.4.22 9:23 AM Page 2
Model
Flow characteristics (1)
Standard Specifications
Compact yet provides a Fluid Air/Inert gas
Valve specifications
Option Specifications
Pilot type External pilot (1)
Double Exhaust center Pilot valve manual override Non-locking push type (Extended), Locking type (Tool reguired)
110 to 120, 220, 240 VAC (50/60 Hz)
Coil rated voltage
12, 100 VDC
Option With light/surge voltage suppressor (2)
Foot bracket (With screw) Part no.: VFS3000-52A, VFS3120 (single) only
Pressure center Note 1) Operating pressure: 0 to 1.0 MPa Note 2) Grommet type is available only w/
Pilot pressure: 0.1 to 1.0 MPa surge voltage suppressor (which
is directly connected with lead
wire), not w/ indicator light.
Manifold
Body type Applicable manifold base Pilot EXH
VFS3쏔20 Individual EXH (Valve side)
Stacking manifold
VFS3쏔30 Common EXH (Manifold base side)
1130
1-2-16-VFS1000.qxd 10.3.29 5:46 PM Page 3
How to Order
VFS3 1 20 1 G 02
CE-compliant
Symbol Option Nil —
1: 2 position single F: With foot bracket Q CE-compliant
Thread type
Nil Rc
Port size N∗ NPT
2: position double 02 Rc T∗
14
NPTF
03 Rc F∗
38
G
SJ
∗ Option ∗ Mountable only
for VFS3120.
3: position closed center
Manual override SY
Nil: Non-locking push type A∗: Non-locking push type B∗: Locking type
(Flush) (Extended) (Tool required) SV
4: position exhaust center
SYJ
SZ
5: position pressure center
∗ Option
Light/Surge voltage suppressor
VP4
Nil None
∗ Reverse pressure:
Can be used by Z With light/surge voltage suppressor
S0700
external pilot S∗ With surge voltage suppressor
specifications.
∗ Grommet type is available only w/ surge voltage VQ
Body (Pilot exhaust) suppressor, not w/ indicator light.
20: Individual EXH VQ4
Electrical entry
G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal VQ5
VQC
30∗: Common EXH
VQZ
SQ
Coil rated voltage
1 100 VAC (50/60 Hz)
2 200 VAC (50/60 Hz)
VFS
3∗ 110 to 120 VAC (50/60 Hz)
∗ Manifold only
4∗ 220 VAC (50/60 Hz) VFR
5 24 VDC
Pilot type
Nil Internal pilot
6∗ 12 VDC VQ7
7∗ 240 VAC (50/60 Hz)
R∗ External pilot
9∗ Other
∗ Option. It will be
an individual ex- ∗ Option
ternal pilot.
(External pilot port: Body side. For 30 type, common external pilot (on manifold side).)
Series VFS3000
Conditions
Body ported Series CJ2 Series CM2 Series MB, CA2 Series CS1/CS2
Tube bore x Length T0604 x 1 m T1075 x 1 m T1209 x 1 m
VFS3120-03 Speed controller AS3001F-06 AS4001F-10 AS4001F-12
Silencer AN200-02 AN202-02
1132
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1133
Construction
2 position single 2 position double
SJ
SY
SV
Pressure center
VQ
VQ4
VQ5
VQC
Component Parts
No. Description Material Note VQZ
1 Body Aluminum die-casted Platinum silver
2 Spool/Sleeve Stainless steel —
3 End plate Resin Black
SQ
4 Piston Resin —
5 Return spring Stainless steel — VFS
6 Pilot valve assembly — —
7 Detent assembly — — VFR
∗ Refer to “How to Order Pilot Valve Assembly” on page 1131.
VQ7
1133
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1134
Series VFS3000
Manual override
(Non-locking) 2 x ø6 Solenoid valve
M5: External pilot port mounting hole
2 x ø4.3 mounting hole
(For external pilot model)
(Lead wire length)
≅300
2 x ø4.3
mounting hole
1134
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1135
2 Position Double, 3 Position — Grommet, Grommet terminal, Conduit terminal, DIN terminal
Grommet: VFS3220-G, VFS3320-G, VFS3420-G, VFS3520-G
Manual override SJ
(Non-locking)
M5: External pilot port
2 x ø4.3 mounting hole
(For external pilot model) SY
(Lead wire
length)
SV
≅300
SYJ
SZ
2 x ø4.3 mounting hole VP4
S0700
VQ
VQ4
VQ5
Grommet terminal: VFS3220-E/EZ VFS3320-E/EZ DIN terminal: VFS3220-D/DZ/Y/YZ VQC
VFS3420-E/EZ VFS3520-E/EZ VFS3320-D/DZ/Y/YZ
VFS3420-D/DZ/Y/YZ VQZ
Lead wire O.D.
Max. ø3.5 VFS3520-D/DZ/Y/YZ
194 (3 position: 204)
With light/surge voltage suppressor (EZ) Applicable heavy-duty cord SQ
O.D. ø6 to ø8
Light (Y: ø4.7 to ø7) 231 (3 position: 241) VFS
With light/surge voltage suppressor (DZ)
VFR
Light
VQ7
2 x ø4.3 mounting hole
Light
1135
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 7
Series VFS3000
Manifold Specifications
Stacking Type
Specifications
Keeps environmental air Manifold base type Stacking type
Stations Max. 15 stations
clean from pilot exhaust
Use of the VV5FS3-31 manifold can
exhaust intensively the pilot exhaust Port Specifications
gas to the base side, and can prevent Passage
Porting specifications: Rc
environmental aggravation due to noise Symbol Base Valve Base
and oil mist. 1(P) 3(R2), 5(R1) 1(P) 2(B), 4(A) 3(R2), 5(R1)
1 Common Common Side: 3 8 Top: 1 4 , 3 8 Side: 3 8
Option
Blanking plate VVFS3000-10A-1 With gasket, screw
SUP block plate AXT636-10A —
EXH block plate AXT636-11A —
Note) Individual SUP or EXH is possible with bottom porting of SUP or EXH. For your order, please
indicate it in the manifold specification sheet.
1
Gasket 15 15 stations Rc 3 8 Rc 3 8 Rc 1 4 , Rc 3 8
Base model
Model Pilot exhaust Applicable valve model
Pilot common EXH
VFS3쏔20-쏔쏔- 02
03
31
VFS3쏔30-쏔쏔- 02
03
Type 20 Type 30
SJ
SY
U side D side
SV
SYJ
Rc 1/8
External pilot port SZ
4 x ø7 mounting hole
Blanking plate
4 x Rc 1/8 VP4
Pilot EXH port: PE
≅300 S0700
(Lead wire length)
VQ
Gasket
VQ4
VQ5
Stations
Formula for manifold weight M = 0.184n + 0.16 (kg) n: Station
VQC
VQZ
Grommet terminal: E/EZ Conduit terminal: T/TZ DIN terminal: D/DZ/Y/YZ
Applicable heavy-duty cord Applicable heavy-duty cord SQ
O.D. ø6 to ø8 O.D. ø6 to ø8
(Y: ø4.7 to ø7)
VFS
Lead wire O.D.
Max. ø3.5 VFR
VQ7
3 position (241)
3 position (240)
Double (231)
3 position (204)
Double (230)
Double (194)
Single (135)
Single (153)
Single (153)
4 x Rc 1/8
Pilot 4 x Rc 1/8
EXH port: PE 4 x Rc 1/8
Pilot
EXH port: PE Pilot
EXH port: PE
(With light/surge voltage suppressor: 104.5) (With light/surge voltage suppressor: 119.5 (121.5))
(With light/surge voltage suppressor: 109)
(With light/surge voltage suppressor: 114) (With light/surge voltage suppressor: 128.5 (130.5))
(With light/surge voltage suppressor: 119)
( ): Y, YZ
n: Station
L Stations 2 3 4 5 6 7 8 9 10 Formula
L1 77 108 139 170 201 232 263 294 325 L1 = 31 x n + 15
L2 92 123 154 185 216 247 278 309 340 L2 = 31 x n + 30
1137
016-VFS.qxd 11.4.22 9:23 AM Page 3
Series VFS2000
How to Order
30 VFS2 1 20 1 D 01
Conforming to
Option
CSA standard
F: With foot bracket
Symbol
1: 2 position single
2: 2 position double
∗ Mountable only
for VFS2120.
Manual override
Nil: Non-locking push type A∗: Non-locking push type B∗: Locking type
∗ Reverse pressure: (Flush) (Extended) (Tool required)
Can be used by
external pilot
specifications.
∗ Manifold only
Pilot type
Nil Internal pilot Coil rated voltage
R∗ External pilot 1 100 VAC (50/60 Hz)
∗ Option: Individual external 2 200 VAC (50/60 Hz)
pilot (External pilot port:
Body side)
3∗ 110 to 120 VAC (50/60 Hz)
4∗ 220 VAC (50/60 Hz)
5 24 VDC
6∗ 12 VDC
7∗ 240 VAC (50/60 Hz)
∗ Option
1137-1
016-VFS.qxd 11.4.22 9:23 AM Page 4
Series VFS3000
How to Order
30 VFS3 1 20 1 D 02
Conforming to
CSA standard Option
Symbol Thread type F: With foot bracket
1: 2 position single Nil Rc
N∗ NPT
T∗ NPTF
F∗ G
2: 2 position double ∗ Option
Port size ∗ Mountable only
02 for VFS3120.
Rc 1 4
3: 3 position closed center 03 Rc 3 8
Manual override
Nil: Non-locking push type A∗: Non-locking push type B∗: Locking type
(Flush) (Extended) (Tool required)
4: 3 position exhaust center
∗ Option
Light/Surge voltage suppressor
∗ Reverse pressure:
Can be used by
Nil None
external pilot Z With light/surge voltage suppressor
specifications.
Electrical entry
D: DIN terminal
Body (Pilot exhaust)
20: Individual EXH
Pilot type
Nil Internal pilot
R∗ External pilot
∗ Option: Individual external pilot (External pilot port: Body side. For 30 type, common external pilot (on manifold side).)
1137-2
016-VFS.qxd 11.4.22 9:23 AM Page 5
Model
Model Flow characteristics (1)
Port Max. (2)
(3)
Type of
size
1 4/2(P A/B) 4/2 5/3(A/B R1/R2) operating Response Mass
actuation cycle time (kg)
Plug-in Non plug-in Rc C C (ms)
[dm3/(s·bar)] b Cv [dm3/(s·bar)] b Cv (cpm)
18 2.4 0.16 0.55 2.8 0.20 0.65
2 position
Standard Specifications
Compact yet provides a large flow Fluid Air/Inert gas
capacity Maximum operating pressure 1.0 MPa
Valve specifications
1138
1-2-16-VFS1000.qxd 10.3.29 5:46 PM Page 4
How to Order
Porting specifications Port size
Nil Side ported Nil Without sub-plate
B∗ Bottom ported Plug-in type conduit
01 Rc 1 8
∗ Option terminal
Option (With terminal block)
02 Rc 1 4 Standard type
Nil None
With attachment plug Z With light/surge voltage suppressor Note) Plug-in type grommet
P01 Rc 1 8
lead wire (With attachment
Body type Electrical entry plug lead wire)
Note)
O: Plug-in type F: Plug-in type P02 Rc 1 4 Compact type
sub-plate SJ
Thread type Note) Please note Cv
factor and piping
Nil Rc port location of SY
N∗ NPT compact sub-
plate is different
T∗ NPTF
F∗ G
from standard.
Refer to page
SV
With terminal block
1161 for details.
∗ Option
SYJ
Plug-in VFS2 2 00 5 F 01
SZ
Non plug-in VFS2 2 10 1 E 02 VP4
CE-compliant
Nil —
S0700
Q CE-compliant
VQ
Port size
Pilot valve manual override Nil Without sub-plate
Symbol Nil: Non-locking push type B∗: Locking type Rc
VQ4
Body type Non plug-in type,
2 position single (Flush) (Tool required) 01 18 Standard
1
1: Non plug-in type
sub-plate Rc type VQ5
02 14
Note) Rc Non plug-in type, VQC
2 position double A∗: Non-locking push type C∗: Locking type S01 18 Compact
(Extended) (Lever) type
2
Note)
S02
Rc
14
VQZ
Pilot type Note) Please note Cv factor
3 position closed center Nil Internal pilot and piping port SQ
∗ Option location of compact
3 R∗ External pilot Option sub-plate are different
∗ Option: External pilot is
Nil None from standard. Refer VFS
possible only to the one to page 1161 for
3 position exhaust center with sub-plate. Z With light/surge voltage suppressor details.
Coil rated voltage S∗ With surge voltage suppressor VFR
4 ∗ Grommet type is available only w/ surge
1 100 VAC, 50/60 Hz
2 200 VAC, 50/60 Hz
voltage suppressor, not w/ indicator light. VQ7
3 position pressure center 3∗ 110 to 120 VAC, 50/60 Hz
Electrical entry
5 4∗ 220 VAC, 50/60 Hz
G: Grommet E: Grommet terminal T: Conduit terminal D, Y: DIN terminal
5 24 VDC
6∗ 12 VDC
3 position double check 7∗ 240 VAC, 50/60 Hz
∗ 9∗ Other
6
∗ Option
∗ Combining double check spacer with external pilot will not work.
1139
1-2-16-VFS1000.qxd 09.8.3 5:06 PM Page 3
Series VFS2000
System Components
∗ It is when the cylinder is extending that is meter-out controlled by speed
Speed
System Solenoid valve Silencer Tube bore x Length controller which is directly connected with cylinder, and its needle valve
controller with being fully open.
∗ The average velocity of the cylinder is the value that the stroke is
Series divided by the total stroke time.
AS3000-02 AN110-01
A VFS2000 T0604 x 1 m ∗ Load factor: ((Load weight x 9.8)/Theoretical force) x 100%
(S = 12 mm2) (S = 35 mm2)
Rc 1 8
Series
AS4000-02 AN110-01
B VFS2000 T1075 x 1 m
(S = 21 mm2) (S = 35 mm2)
Rc 1 4
1140
251-VFS.qxd 10.12.27 1:20 PM Page 1
Construction
2 position single 2 position double
SJ
SY
SV
SYJ
SZ
VP4
S0700
VQ
3 position closed center/exhaust center/pressure center
VQ4
Closed center
VQ5
VQC
Exhaust center
VQZ
SQ
Pressure
VFS
VFR
VQ7
1141
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1142
Series VFS2000
Bottom ported
( ): Rc 1 8
( ): Rc 1 8 ( ): Rc 1 8
1142
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1143
SJ
Bottom ported
SY
SV
(Lead wire length)
≅300
SYJ
SZ
VP4
A, B S0700
VFS
VFR
VQ7
Light
1143
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1144
Series VFS2000
Bottom ported
≅300
( ): Rc 1 8
Light
Light
1144
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1145
≅300
SV
SYJ
SZ
VP4
S0700
(External pilot port)
(M5 x 0.8) VQ
Pilot EXH port
M5 x 0.8 ( ): Rc 1 8
VQ4
Grommet terminal: VFS2610-E-01
02 DIN terminal: VFS2610-D 01
Y -02 VQ5
Lead wire O.D. Max. ø3.5
With light/surge voltage
suppressor
VQC
Light With light/surge voltage
suppressor (DZ) VQZ
Light
SQ
Applicable VFS
heavy-duty
code
O.D. ø6 to ø8 VFR
(Y: ø4.7 to ø7)
VQ7
Light
Applicable
heavy-duty
code
O.D. ø6 to ø8
1145
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 9
Series VFS2000
Manifold Specifications
Plug-in Type: With Attachment Plug Lead Wire
The insert plug is attached to the manifold block
and lead wire is plugged into the valve side.
Please connect with corresponding power side.
VV5FS2 01 06 1 01
CE-compliant
Series VFS2000 Symbol Nil —
Passage Porting
Manifold Symbol specifications Q CE-compliant
P EA, EB A, B
Port size
Plug-in type 1 Common Common Side Symbol P, EA, EB A, B Thread type
With attachment plug lead wire 2∗ Bottom 01
Rc
Rc 1 8 Nil Rc
3∗ Common Individual Side 02 14 Rc 41
N∗ NPT
Stations 4∗ Bottom M Mixed T∗ NPTF
02 2 stations 5∗ Individual Common Side ∗ For bottom F∗ G
6∗ Bottom ported, Rc 1/8 is
∗ Option
With attachment plug lead wire
16 16 stations 7∗ Individual Individual Side only available.
8∗ Bottom ∗ Option
Plug-in Type: With D-sub Connector (Wiring specifications: Refer to page 1227.)
• Wide range of interchangeability
(D-sub connector (25P) conforming to MIL standard) VV5FS2 01F U 1 06 1 01
• Quick wiring permits easier installation. Series CE-compliant
Plug-in type
U side VFS2000 With D-sub connector Symbol Nil —
Porting
Passage specifications
Manifold Symbol Port size Q CE-compliant
Connector mounting direction
P EA, EB A, B Symbol P, EA, EB A, B
D D side mounting 1 Common Common Side 01 Rc 1 8
U U side mounting 2∗ Bottom 02
Rc
Rc 1 4
Thread type
Plug assembly Junction cover 3∗ Common Individual Side M
14
Mixed
Nil Rc
Stations
4∗ Bottom N∗ NPT
Refer to page 1227. ∗ For bottom T∗ NPTF
1 One-piece junction 02 2 stations 5∗ Individual Common Side ported, Rc 1/8 is
cover F∗
D side
6∗ Bottom only available. G
D-sub connector 08 8 stations 7∗ Individual Individual Side ∗ Option
∗ Max. 8 stations 8∗ Bottom ∗ Option
Non Plug-in Type: Grommet, Grommet Terminal, Conduit Terminal, DIN Terminal
• Wiring for every valve
VV5FS2 10 05 2 01
CE-compliant
Symbol
Series VFS2000 Porting
Nil —
Passage Q CE-compliant
Manifold Symbol specifications
Port size
P EA, EB A, B
Note) The individual specification of the P port at the composition symbol 3 to 8 or the EA, EB, ports should be taken as individual port using a block plate.
Therefore, if an individual port is using a single SUP spacer of option or a single EXH spacer, the composition symbol mark is “1”.
1146
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1147
1 4/2
C [dm3/(s·bar)] 2.4 2.4 2.4 SV
b 0.14 0.14 0.14
(P A/B)
VVFS2
Cv 0.50 0.50 0.50 SYJ
C [dm3/(s·bar)] 2.5 2.5 2.5
4/2 5/3
b 0.18 0.18 0.18
(A/B R1/R2)
Cv 0.60 0.60 0.60
SZ
∗ Port size Rc 1 4
VP4
S0700
VQ
VQ4
VQ5
VQC
VQZ
SQ
VFS
VFR
VQ7
1147
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1148
Series VFS2000
Rc 1 8 VVFS2000-R-01-1 VVFS2000-R-01-2
stop actuators in original position for form one unit.
Rc 1 4 VVFS2000-R-02-1 VVFS2000-R-02-2 extended periods. • Piping processes are eliminated.
Body type Plug-in type Non plug-in type
Part no. VVFS2000-21A-1 VVFS2000-21A-2
1148
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1149
U side
SJ
SY
SV
Stations
SYJ
Electrical entry
VQ
VQ4
1(P), 3(R2), 5(R1) port VQ5
Formula for manifold weight M = 0.201n + 0.299 (kg) n: Station VQC
Non plug-in type: VV5FS2-10- Station 1- Port size VQZ
SQ
U side VFS
VFR
2(B), 4(A) port
VQ7
Stations
D side
Bottom ported:
VV5FS2-10- Station 2- Port size 2(B), 4(A) port
≅300 mm
(Lead wire length)
Formula for manifold weight M = 0.174n + 0.218 (kg) n: Stations 1(P), 3(R2), 5(R1) port
Stations
L 1 2 3 4 5 6 7 8 9 10
Formula
L1 75 103 131 159 187 215 243 271 299 327 L1 = 28 x n + 47
L2 84 112 140 168 196 224 252 280 308 336 L2 = 28 x n + 56
1149
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1150
Series VFS2000
U side
Stations
Electrical entry
Plug-in type with terminal block (One-piece junction covers): VV5FS2-01T1- Station 1- Port size
U side
Stations
D side
2(B), 4(A) port
Bottom ported:
With light/surge voltage suppressor
VV5FS2-01T1- Station 2- Port size
Pilot EXH port
Electrical entry
U side
VQ
Pilot EXH port
VQ4
VQ5
Formula for manifold weight M = 0.211n + 0.442 (kg) n: Station
∗ Wiring specifications: Refer to page 1227. 1(P), 3(R2), 5(R1) port
VQC
VQZ
Plug-in type with D-sub connector: VV5FS2-01FD1- Station 1- Port size , VV5FS2-01FU1- Station 1- Port size
SQ
VFS
U side
VFR
2(B), 4(A) port
VQ7
Stations
Bottom ported:
Plug assembly: VVZS3000-21A-
VV5FS2-01FD1
FU1- Station 2- Port size (Option: Refer to page 1227.) With light/surge voltage suppressor
1151
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1152
Series VFS2000
SUP port
EXH port
Release valve
spacer SUP port
Block plate
Throttle valve
spacer Double check
spacer
1152
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 10
VQC
How to Order Note) The manifold of plug-in type with attachment plug lead wire is applied to individual type only. Non plug-in type has no junction cover.
CE-compliant VQZ
VV5FS2 10 08 1 01 AP Nil —
Q CE-compliant SQ
Series VFS2000
Manifold Air release valve coil rating
Base type/Electrical entry Nil None (F, G type only)
VFS
01 Plug-in type with attachment plug lead wire 1 100 VAC, 50/60 Hz
01T Plug-in type with terminal block 5 24 VDC VFR
01C Plug-in type with multi-connector Control unit type 9 Other
01F Plug-in type with D-sub connector Symbol
VQ7
10 Non plug-in type Nil A AP M MP F G C E
Control equipment
Connector mounting direction Stations Air filter with auto-drain
Symbol With connector Applicable base Air filter with manual drain
02 2 stations
Nil None 01, 01T, 10 Regulator
···
···
15∗ 15 stations
D D side mounting Air release valve
01C, 01F
U U side mounting ∗ Base type Pressure switch
01, 01T, 10 2 to 15 stations Blanking plate (Air release valve)
01C, 01F 2 to 8 stations
Junction cover Blanking plate (Filter, Regulator)
Nil Stacking type Symbol Blanking plate (Pressure switch)
Porting Number of manifold blocks
1 Integrated type Passage specifications 2 2 2 2 2 2 2 1
Symbol required for mounting (stations)
Note) Stacking type: P EA, EB B, A
Base type 01, 01T 1 Side
Common Common How to Order Manifold Assembly [Example]
Integrated type: 2∗ Bottom Thread type
Base type 01T, 01C, 01F
3∗ Side Add the valve and option part numbers in order starting
Common Individual Nil Rc from the first station on the D side.
4∗ Bottom
N∗ NPT <Example>
5∗ Side
Individual Common T∗ NPTF • Plug-in type with terminal block
6∗ Bottom
F∗ G (Manifold base) VV5FS2-01T1-091-02-MP5 1
7∗ Side (2 position single) ∗ VFS2100-5FZ 5
Individual Individual ∗ Option
∗ Option 8∗ Bottom (2 position double) ∗ VFS2200-5FZ 2
∗ 2 stations are needed to mount control unit.
The individual specification of the P port in the composition
symbol marks 3 to 8 or EA, EB ports should be taken as Port size • Non plug-in type
individual port using a block plate. Therefore, if an individual Symbol P, EA, EB B, A (Manifold base) VV5FS2-10-071-01-M 1
port is taken using a single SUP spacer of option or a single (2 position single) ∗ VFS2110-5D 5
01 Rc 1 8
EXH spacer, the composition symbol mark is “1”. Rc ∗ 2 stations are needed to mount control unit.
02 14 Rc 1 4
The asterisk denotes the symbol for assembly. Prefix it to
M Mixed the part numbers of the solenoid valve.
1153
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1154
Series VFS2000
Stations
Pressure switch
Air release valve Control unit Outlet for check
regulator
Air filter
D side
Control unit
Po port
Pilot EXH port
Electrical entry
Pressure switch
Stations
Pressure switch
Outlet for check
Air release
regulator
Air filter
Pressure valve
switch
electrical
entry
D side Control unit
Po port n: Stations
Stations
L 3 4 5 6 7 8 9 Formula 10
Pilot EXH port L1 131 159 187 215 243 271 299 327 L1 = 28 x n + 47
L2 140 168 196 224 252 280 308 336 L2 = 28 x n + 56
L3 (MP) 278 306 334 362 390 418 446 474 L3 = 28 x n + 194
1(P), 3(R2), 5(R1) port L3 (AP) 319.5 347.5 375.5 403.5 431.5 459.5 487.5 515.5 L3 = 28 x n + 235.5
1154
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 11
SJ
How to Order
SY
How to order manifold
SV
VV5FS2 01WTBU 08 1 02
CE-compliant SYJ
Plug-in dripproof manifold Nil —
(Equivalent to IP65) Q CE-compliant SZ
01WTBU Common terminal box (U side mounting)
01WTBD Common terminal box (D side mounting) Port size VP4
01W Attachment plug lead wire Symbol P, R1, R2 A, B
01 Rc 1 8
02 Rc 1 4 Rc 1 4
S0700
M Mixed
∗ For bottom ported, A/B port VQ
is available only with Rc 1 8 .
Stations Symbol
VQ4
Porting
02 2 stations Passage
Symbol
specifications
VQ5
•••
•••
P, R1, R2 A, B
15 15 stations 1 Side
2∗
Common
Bottom VQC
∗ Option
VQZ
How to order valves
SQ
VFS2 1 00 5 F X54
CE-compliant
VFS
Nil —
Symbol
Q CE-compliant
VFR
1 2 position single
2 2 position double
Dripproof VQ7
3 3 position closed center
4 3 position exhaust center Pilot valve manual override
5 3 position pressure center Nil Non-locking push type (Flush)
6 3 position double check A∗ Non-locking push type (Extended)
B∗ Locking type (Tool required)
Pilot type C∗ Locking type (Lever)
∗ Option
Nil Internal pilot
R∗ External pilot
∗ Option
Option
Nil None
With light/surge
Z voltage suppressor
1155
398-VFS.qxd 11.4.22 9:46 AM Page 1
Series VFS2000
Dripproof Manifold
With common terminal box: VV5FS2-01WTB UD - Station 1- Port size
Indicator light
Push type manual override
Pilot EXH port
101 (Single)
150.5 (Double)
158 (3 position)
1(P), 3(R2), 5(R1) port External pilot port
x 25 Printed
D side U side
Stations
Electrical entry
n: Stations
Stations
L 1 2 3 4 5 6 7Formula 8 9 10
∗ Terminal mounting stations are not included. L1 120 145 170 195 220 245 270 295 320 345 L1 = 25 x n + 95
Indicates Solenoid valve mounting stations. L2 131 156 181 206 231 256 281 306 331 356 L2 = 25 x n + 106
n: Stations
Stations
L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Formula
L1 70 95 120 145 170 195 220 245 270 295 320 345 370 395 420 L1 = 25n + 45
L2 81 106 131 156 181 206 231 256 281 306 331 356 381 406 431 L2 = 25n + 56
1156
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1157
SJ
SY
SV
SYJ
SZ
VP4
S0700
VQ
VQ4
VQ5
VQC
VQZ
SQ
VFS
VFR
VQ7
1157
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1158
Made to Order
Serial Transmission Kit Manifold: EX123/124 Integrated Type (For Output)
Serial Transmission System
How to Order
How to Order Manifold
1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 11 12
Double
Double
Double
Double
Double
Double
Double
Single
Single
Single
Single
Single
Single
Single
Single
Single
Single
Single
SI unit
SI unit
AB AB AB AB AB AB AB AB AB AB A A A AB A AB A A
01 23 45 67 8 9 10 11 12 13 14 15 01 23 4 5 6 78 9 10 11 11 12
∗ Mixed wiring is available as an option. Use the manifold specification sheet to specify this.
VFS2 00 5F
Symbol Pilot valve manual override
1 2 position single Nil Non-locking push type (Flush)
2 2 position double A Non-locking push type (Extended)
3 3 position closed center B Locking type (Tool required)
4 3 position exhaust center C Locking type (Lever)
5 3 position pressure center
6 3 position double check Option
Nil None
Pilot type Z With light/surge voltage suppressor
Nil Internal pilot
Coil rated voltage
R External pilot
Nil None
24 VDC
1158
P1111-P1228-E.qxd 08.9.2 2:53 PM Page 1159
Serial Transmission Kit Manifold: EX123/124 Integrated Type (For Output) Serial Transmission System
VV5FS2-01S Model - Stations Symbol - Port size -X460
6 x Rc 1/4
26.5 1(P), 5(R1), 3(R2) port
SI unit
13 2 x Rc 1/8 Manual override
PE port
SJ
44
SY
22.5
14.5
79
75
63
PE
126.5
101
A A A A A
119.5
SETTINGS
119.5
1
0
SV
R1
EA
MOD/NET
MODEL
68
150.5
PWR
SQ
158
P
(SI No.EX124-SDN1)
.7
40.5
R2
EB
SYJ
R2
B B B B B
TM
8.5
SMC
5.4
SZ
14.5
16.5
30.5 L1
VP4
L2
38 S0700
VQ
D side Stations 1 2 3 4 5 6 7 8 n U side
VQ4
VQ5
VQC
123.5
SMC SMC SMC
SMC SMC
VQZ
88.5
B B B B B B B B
SQ
47
37.5
A A A A A A A A
VFS
2
11.5
9
42 28 37.5
2n x Rc 1/8, 1/4
4(A), 2(B) port EX123: 2 x G 1/2 VFR
∗ Use a dripproof plug assembly EX124: 4 x G 1/2
(AXT100-B04A) for the unused
conduit port (G 1/2).
Electrical entry VQ7
1159
1-02-16-VFS1000.qxd 10.2.15 11:05 AM Page 1
Series VFS2000
!3
w
U side q
e
!6
!2
t Not used for the 1st station
on D side.
!1
u
y
i
r
!4
!0 D side
o
P
EB
PE
EA
C
SM R2
R1
!5
1160
1-02-16-VFS1000.qxd 10.2.15 11:05 AM Page 2
Replacement Parts
No. Description Material Part no.
1 Connection fitting assembly Steel plate AXT625-4-1A
2 Connection fitting B Steel plate AXT625-5
3 Gasket A NBR AXT625-17
4 Gasket B NBR AXT625-16
5 Gasket HNBR VVFS2000-32-1H
6 O-ring NBR 18 x 15 x 1.5
7 O-ring NBR 10.5 x 7.5 x 1.5
8 O-ring NBR 8 x 5 x 1.5 SJ
Adapter plate Resin For 01 AXT625-6
For 01T
Adapter plate assembly —
For 01T1
AXT625-28-13A
(Terminal section with adapter plate and lead wire assembly)
SY
9
For 01C AXT625-28-1
Adapter plate Resin For 01F VVF2000-26-6 SV
For 01S쏔 AXT625-6
For 01 AXT625-7A SYJ
For 01T AXT625-28-3A
10 Junction cover assembly —
For 01T1
AXT625-28-7A- Stations SZ
For 01C
For 01F VVF2000-26-5A- Stations
For 01S쏔 AZ738-10A- Stations
VP4
For 01 AXT333-12
15
Rubber plug NBR
For 01T
01S쏔
(1)
AXT625-22 S0700
Plug — For 01W EXP22S
16 Guard Resin For 01
01T (1) AXT625-28-4 VQ
VQ4
Replacement Parts: Sub Assembly
No. Description Part no. Component parts Applicable manifold base VQ5
Manifold block !1, Metal joint q, w, O-ring y, u, i, Junction cover !0, Plug-in type
AXT625-01A- 12 (-B) Note)
Adapter plate o, Pin housing, Guide, Insert plug lead wire With attachment plug lead wire
Manifold block
Manifold block !1, Metal joint q, w, O-ring y, u, i, Junction cover !0, Plug-in type
VQC
11 assembly AXT625-20A- 12 (-B) Note)
Adapter plate assembly (with terminal) o, Pin housing, Guide With terminal block
(for 1 station)
VQZ
AXT625-10A-12 (-B) Note) Manifold block !1, Metal joint q, w, O-ring y, u, i Non plug-in type
AXT625-01A2- 12 Note)
Manifold block !2, Metal joint q, w, Gasket t, Junction cover !0, Plug-in type SQ
Adapter plate o, Pin housing, Guide, Insert plug lead wire With attachment plug lead wire
Manifold block
Manifold block !2, Metal joint q, w, Gasket t, Junction cover !0,
12 assembly AXT625-20A2- 12 Note)
Adapter plate assembly (with terminal) o, Pin housing, Guide
Plug-in type
With terminal block
VFS
(for 2 stations)
AXT625-10A2- 12 Note) Manifold block !1, Metal joint q, w, Gasket t Non plug-in type VFR
Plug-in type
AXT625-2A End plate (U) !3, Metal joint q, w, Gasket A e, Guard !6
With attachment plug lead wire VQ7
End plate (U side) Plug-in type
13 AXT625-2A-20 End plate (U) !3, Metal joint q, w, Gasket A e, Guard !6
assembly With terminal block
AXT625-2A-10 End plate (U) !3, Metal joint q, w, Gasket A e Non plug-in type
Plug-in type
AXT625-3A End plate (D) !4, Metal joint q, w, Gasket B r, Guard !6, Steel ball
With attachment plug lead wire
End plate (D side) Plug-in type
14 AXT625-3A-20 End plate (D) !4, Metal joint q, w, Gasket B r, Guard !6, Steel ball
assembly With terminal block
AXT625-3A-10 End plate (D) !4, Metal joint q, w, Gasket B r, Steel ball Non plug-in type
Note) 1: A, B port size Rc 1/8, 2: A, B port size Rc 1/4, (-B): A, B port bottom ported
1160-1
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1161
Lead wire
VP4
5 x bottom ported size
Port Size
Port size Port P, A, B EA, EB
S01 Rc 1 8 Rc 1 8
1 (Center) S02 Rc 1 4 Rc 1 8
Precautions Please pay attention to piping port location of sub-plate. Electrical Connection
Compact type, plug-in type grommet sub-
VFS20-- P01/02
S01/02 : Compact type VFS20-- 01
02 : Standard type plate (With attachment plug lead wire)
• The attachment plug lead wire is attached to the
manifold block and lead wire is plugged in with
valve side as shown in the following list. Please
connect with corresponding power side.
Solenoid A side B side
Lead wire color Red Black Brown White
• There is no polarity.
1161
016-VFS.qxd 11.4.22 9:23 AM Page 6
Model
Model Flow characteristics (1)
Double check
1162
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 13
How to Order
Port size
Nil Without sub-plate
Body type Electrical entry 02 Rc 1 4
O: Plug-in type F: Plug-in type 03 Rc 3 8
sub-plate conduit terminal ∗ For bottom ported, Rc 1 4
Porting is only available.
specifications Thread type
Nil Side ported Nil Rc
B∗ Bottom ported N∗ NPT CE-compliant
∗ Option T∗ Nil
F∗
NPTF
G Q
—
CE-compliant
SJ
∗ Option
SY
Plug-in VFS3 1 0 0 1 F 02 SV
SYJ
Non plug-in VFS3 2 1 1 2 D 02
Pilot valve
SZ
Manual override
Option
Nil: Non-locking push type
VP4
Nil None (Flush)
Z With light/surge voltage suppressor S0700
Electrical entry
Symbol E: Grommet terminal D: DIN terminal
VQ
2 position single 3 position pressure center
1 5 A∗: Non-locking push type VQ4
(Extended)
1163
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1164
Series VFS3000
System Components
Speed ∗ It is when the cylinder is extending that is meter-
SGP (Steel pipe)
System Solenoid valve Silencer out controlled by speed controller which is
controller Port size x Length directly connected with cylinder, and its needle
Series valve with being fully open.
AS4000-02 AN200-02 6A x 1 m ∗ The average velocity of the cylinder is the value
A VFS3000
(S = 24 mm2) (S = 35 mm2) that the stroke is divided by the total stroke time.
Rc 1 4
∗ Load factor: ((Load weight x 9.8)/Theoretical
Series force) x 100%
AS420-03 AN300-03
B VFS3000 10A x 1 m
(S = 73 mm2) (S = 60 mm2)
Rc 3 8
1164
265-VFS.qxd 10.5.7 10:40 AM Page 1
Construction
2 position single 2 position double
SJ
SY
SV
SYJ
SZ
VP4
S0700
3 position closed center/exhaust center/pressure center VQ
Closed center VQ4
VQ5
Exhaust center VQC
VQZ
Pressure center SQ
VFS
VFR
VQ7
2 Sub-plate Aluminum die-casted Platinum silver ∗ Mounting bolt and gasket are not included.
3 Spool/Sleeve Stainless steel —
4 Adapter plate Resin Black
5 End plate Resin Black Sub-plate Assembly
6 Piston Resin — (For External Pilot) Part No.
7 Junction cover Resin — Plug-in VFS3000-P-R 02
03
8 Light cover Resin — Non plug-in VFS3000-S-R 02
03
9 Return spring Stainless steel —
10 Gasket NBR — Part no. for mounting bolt and gasket
11 Hexagon socket head screw Steel — BG-VFS3000
12 Detent assembly — —
13 Pilot valve assembly — —
∗ Refer to “How to Order Pilot Valve Assembly” on page 1163.
1165
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1166
Series VFS3000
2 x ø5.6
mounting hole Rc 1/8 external pilot port
(Only for external pilot) 2(B), 4(A) port
(PE port)
2 x ø5.6
mounting hole
With direct manual override
( ): Rc 1 4
2 x ø5.6
mounting hole
Light window
At FZ
86.5 (3 position: 96.5)
Pilot valve
manual
override
Light window
With direct manual override
At FZ
Pilot valve
manual
With direct manual override
override
( ): Rc 1 4 ( ): Rc 1 4
1166
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1167
Non Plug-in — 2 Position single/Double/3 Position closed center/Exhaust center/Pressure center/Double check
2 position single: VFS3110-E, VFS3110-D
Rc 1/8 external pilot port
(Only for external pilot)
2 x ø5.6 2(B), 4(A) port
mounting hole
(PE port) SJ
SY
SV
Cable ø8 to ø10
SYJ
Pilot valve 2 x ø5.6 SZ
manual override Light window mounting hole
At DZ, EZ
VP4
With direct manual override
S0700
VQ
VQ4
Bottom ported
VQ5
( ): Rc 1 4
VQC
2 position double: VFS3210-E, VFS3210-D 3 position double check: VFS3610-E, VFS3610-D VQZ
3 position closed center: VFS3310-E, VFS3310-D
3 position exhaust center: VFS3410-E, VFS3410-D SQ
3 position pressure center: VFS3510-E, VFS3510-D
2 x ø5.6
mounting hole VFS
2 x ø5.6 mounting hole
VFR
VQ7
( ): Rc 1 4 ( ): Rc 1 4
1167
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 14
Series VFS3000
Manifold Specifications
Plug-in Type: With Terminal Block
• Since lead wires of solenoid valve CE-compliant
are connected with the terminals VV5FS3 01T 06 1 02 Nil —
on upper surface of terminal block, Q CE-compliant
corresponding lead wires from Series VFS3000 Port size Thread type
power source can be wired at the Manifold Symbol P, EA, EB A, B Nil Rc
bottom of terminal Plug-in type 02 Rc 1 4 N∗ NPT
block. Rc
with terminal block 03 1 2 Rc 3 8 T∗ NPTF
Stations M Mixed F∗ G
02 2 stations ∗ Option
Symbol
···
···
Passage Porting
16 16 stations Symbol specifications
P EA, EB (A, B)
1 Side
Common Common
Terminal block 2 Bottom∗ ∗ Option
···
Symbol
08∗ 8 stations Passage Porting
Multi-connector Symbol specifications
∗ Max. 8 stations P EA, EB (A, B)
1 Side
Common Common
2 Bottom∗ ∗ Option
Plug-in Type: With D-sub Connector (Wiring specifications: Refer to page 1227.)
···
···
Passage Porting
16 16 stations Symbol specifications
P EA, EB (A, B)
1 Side
Common Common
2 Bottom∗ ∗ Option
1168
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1169
1169
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1170
Series VFS3000
Blanking plate
It is used by attaching on the manifold block
for being prepared for removing a valve for
maintenance reasons or planning to mount a
spare valve, etc.
Body type Plug-in type Non plug-in type
Part no. VVFS3000-10A
1170
377-VFS.qxd 11.3.10 3:29 PM Page 1
U side
Pilot valve
manual override
Light window
Stations
Bottom ported:
D side
VV5FS3-01T- Station 2- Port size
Electrical entry
U side
Pilot valve
manual override
Light window
Stations
Bottom ported:
VV5FS3-10- Station 1- Port size D side
Applicable cabtire cable O.D.
ø8 to ø10
1171
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1172
Series VFS3000
U side
Light
window
Stations
Plug-in type with D-sub connector: VV5FS3-01FD- Station 1- Port size , VV5FS3-01FU- Station 1- Port size
U side
Pilot valve
manual override
Light window
Stations
Bottom ported:
VV5FS3-01FD
FU - Station 2- Port size
D side
n: Stations
Stations
L 2 3 4 5 6 7 8
Formula
L1 129 162 195 228 261 294 327 L1 = 33 x n + 63
L2 141 174 207 240 273 306 339 L2 = 33 x n + 75
1172
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 15
How to Order SV
SYJ
Plug-in type
VV5FS3 10 06 1 03 CD
Exhaust cleaner AMC610-10
SZ
Series VFS3000 CE-compliant
(Option)
Manifold Nil — VP4
Q CE-compliant
Base type/Electrical
U side
entry Exhaust cleaner
S0700
01T
Plug-in type mounting direction
with terminal block
Exhaust cleaner VQ
Plug-in type Symbol mounting direction
01C
with multi-connector CD D side D side mounting VQ4
Plug-in type CU U side U side mounting
01F
with D-sub connector
10 Non plug-in type Thread type VQ5
D side
Nil Rc
Non plug-in type Connector mounting direction N∗ NPT VQC
Symbol With connector Applicable base T∗ NPTF
F∗
Exhaust cleaner AMC610-10
(Option) Nil None 01T, 10 G VQZ
D D side mounting ∗ Option
01C, 01F
U U side mounting Port size SQ
Stations Symbol P A, B
02 2 stations 02
Rc
Rc 1 4 VFS
03 1 2 Rc 3 8
···
···
Series VFS3000
U side
Light
Pilot valve
manual override Pilot valve D side
manual override
Stations
Exhaust cleaner
(Option)
≅
D side U side
D side mounting
U side
Light
Stations
Exhaust cleaner
(Option)
≅
D side U side
D side mounting
n: Stations
Stations
L 2 3 4 5 6 7 8 9 10
Formula
L1 129 162 195 228 261 294 327 360 393 L1 = 33 x n + 63
L2 141 174 207 240 273 306 339 372 405 L2 = 33 x n + 75
1174
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 16
···
The asterisk denotes the symbol for assembly. Prefix it to the part
numbers of the solenoid valve.
1175
276-VFS.qxd 11.3.11 9:47 AM Page 1
Series VFS3000
Light
Pressure
regulator
Air filter
≅ (Po port)
Electrical entry
Non plug-in type: VV5FS3-10- Station 1- Port size -AP Voltage for release valve
Example for manifold
Individual EXH spacer
Pressure
Stations switch
(195: -MP)
Control unit
Rc 1/2 (Po port)
Stations
L 3 4 5 6 7 8 9 10 Formula
L1 162 195 228 261 294 327 360 393 L1 = 33 x n + 63
L2 174 207 240 273 306 339 372 405 L2 = 33 x n + 75
L3 (MP) 360 393 426 459 492 525 558 591 L3 = 33 x n + 261
L3 (AP) 379.5 412.5 445.5 478.5 511.5 544.5 577.5 610.5 L3 = 33 x n + 280.5
1176
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1177
SJ
SY
SV
SYJ
SZ
VP4
S0700
VQ
VQ4
VQ5
VQC
VQZ
SQ
VFS
VFR
VQ7
1177
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1178
Made to Order
Serial Transmission Kit Manifold: EX123/124 Integrated Type (For Output)
Serial Transmission System
How to Order
How to Order Manifold
1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 10
Double
Double
Double
Double
Double
Double
Double
Single
Single
Single
Single
Single
Single
Single
Single
Single
Single
SI unit
SI unit
AB AB AB AB AB AB AB AB AB AB A A A AB A AB A
01 23 45 67 8 9 10 11 12 13 14 15 01 23 4 5 6 78 9 10 11 11
∗ Mixed wiring is available as an option. Use the manifold specification sheet to specify this.
VFS3 00 5F
Symbol Pilot valve manual override
1 2 position single Nil Non-locking push type (Flush)
2 2 position double A Non-locking push type (Extended)
3 3 position closed center B Locking type (Tool required)
4 3 position exhaust center C Locking type (Lever)
5 3 position pressure center
6 3 position double check Option
Nil None
Pilot type Z With light/surge voltage suppressor
Nil Internal pilot
Coil rated voltage
R External pilot
Nil None
24 VDC
1178
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1179
Serial Transmission Kit Manifold: EX123/124 Integrated Type (For Output) Serial Transmission System
VV5FS3-01S Model - Stations Symbol - Port size Thread -X279
96.5
SY
86.5
SMC
79.5
PE
SERIAL UNIT
9
A A A A A
FG
DG
R4
129
STATION NO.
DB
44
.5
SV
185
DA
24.5 24.5
181
175
EA
B RATE
24G
165
MODEL
RD
LRUN
+24V
SD
PW
SV
LERR.
P
0V
24V
SYJ
2
(SI No.EX124U-SMJ1)
EB
44
54.5
B B B B B
SZ
X
27
46 VP4
2 x Rc 1/8
54 (External pilot port)
S0700
6 x Rc 1/2
1(P), 5(R1), 3(R2) port Pilot valve manual override VQ
D side U side
Stations 1 2 3 4 5 6 7 n VQ4
VQ5
VQC
SMC SMC
VQZ
139
123
SQ
104
B B B B B B B
79.5
14.5
63.5
49.5
VFS
A A A A A A A
19 VFR
2
54 33
1179
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1180
Series VFS3000
Individual
SUP
spacer
Double check
spacer
Interface
regulator
Throttle
valve
spacer Interface
regulator
1180
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1181
SJ
SY
SV
SYJ
SZ
VP4
S0700
VQ
VQ4
VQ5
VQC
VQZ
SQ
End plate (U side) VFS
VFR
VQ7
Replacement Parts
No. Description Material Part no.
1 Connection fitting A Steel plate VVFS3000-5-1A
2 Connection fitting B Steel plate VVFS3000-5-2 • For increasing the manifold bases, please order the manifold block
3 assembly number of the principal part assembly !0.
Gasket NBR VVFS3000-7-1
For plug-in type: The manifold base with terminal stand (integrated
4 Gasket NBR VVFS3000-8
with a junction cover) is required with the o junction cover
5 O-ring NBR 19.8 x 16.6 x 1.6 (End plate) assembly.
6 O-ring NBR 20 x 16 x 2 (Manifold block)
7 O-ring NBR 6.2 x 3 x 1.6
8 Terminal assembly — VVFS3000-6A
For 01T VVFS3000-4A- Stations
9 Junction cover assembly
For 01S AZ738-22A- Stations
13 Rubber plug NBR AXT336-9
Replacement Parts: Sub Assembly Note) Manifold Base/Construction: Plug-in with terminal block.
No. Description Assembly part no. Component parts Applicable manifold base
02 Manifold block !0, Terminal i, Metal joint q, w,
Manifold block VVFS3000-1A-1- 03 Plug-in type
10 Gasket e, r, O-ring y, u, Receptacle assembly
assembly
VVFS3000-1A-2- 02
03 Manifold block !0, Metal joint q, w, Gasket e, r, O-ring y, u Non plug-in type
End plate (U side) VVFS3000-2A-1 End plate (U) !1, Metal joint q, w, O-ring t, y Plug-in type
11
assembly VVFS3000-2A-2 End plate (U) !1, Metal joint q, w, O-ring t, y Non plug-in type
End plate (D side) VVFS3000-3A-1 End plate (D) !2, Metal joint q, w, Gasket e Plug-in type
12
assembly VVFS3000-3A-2 End plate (D) !2, Metal joint q, w, Gasket e Non plug-in type
1181
016-VFS.qxd 11.4.22 9:23 AM Page 7
Exhaust 0.16
VFS4400 VFS4410 600 50 or less 0.82
center 12 12 0.15 2.9 10 0.15 2.4
38 11 0.22 2.7 11 0.22 2.7
Pressure 50 or less 0.82
VFS4500 VFS4510 12 600
center 12 0.22 2.9 11 0.22 2.8
Double 38 6.3 — — 6.5 — —
VFS4600 VFS4610 200 55 or less 1.71
check 12 6.8 — — 6.8 — —
Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency. Note 2) Based on JIS B 8375-1981 (The value at supply press. 0.5 MPa).
Note 3) The figures in the above list are for without sub-plate. In the case of with plug-in sub-plate and with non plug-in sub-plate, add 0.50 kg and 0.43 kg
respectively. Note 4) “Note 1)” and “Note 2)” are with controlled clean air.
Standard Specifications
Compact yet provides a large flow capacity Fluid Air/Inert gas
1/2: C: 12 dm3/(s·bar) Maximum operating pressure 1.0 MPa
Valve specifications
Double check
1182
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 17
How to Order
Port size
Porting Nil Without sub-plate
Body type Electrical entry specifications
03 Rc 3 8
O: Plug-in type F: Plug-in type Nil Side ported 04∗ Rc 1 2
sub-plate conduit terminal B∗ Bottom ported
∗ EA, EB: Rc 3 8
Thread type
∗ In the case of external Nil Rc
pilot (Option), bottom N∗ NPT CE-compliant
piping is not available.
T∗ NPTF Nil —
F∗ G Q CE-compliant
SJ
∗ Option
SY
Plug-in VFS4 2 0 0 5 F 03 SV
SYJ
Non plug-in VFS4 2 1 0
1 1 E 03
Pilot valve SZ
Option Manual override
Nil None Nil: Non-locking push type VP4
(Flush)
Z With light/surge voltage suppressor
P∗ Non-rotating DIN terminal S0700
∗ In the case of w/ “Z”, enter “ZP”.
∗ Type “P” is available for DIN type only. VQ
Symbol Electrical entry
2 position single 3 position pressure center A∗: Non-locking push type VQ4
E: Grommet terminal D: DIN terminal (Extended)
1 5
VQ5
2 position double 3 position double check VQC
2 6
3 SQ
Coil rated voltage
3 position exhaust center
1 100 VAC, 50/60 Hz VFS
2 200 VAC, 50/60 Hz
4 3∗ 110 to 120 VAC, 50/60 Hz
4∗ 220 VAC, 50/60 Hz C∗: Locking type VFR
(Lever)
5 24 VDC
∗ Reverse pressure: Can be used by
external pilot specifications. 6∗ 12 VDC VQ7
7∗ 240 VAC, 50/60 Hz
Body type 9∗ Other
1: Non plug-in type ∗ Option
sub-plate
Pilot type ∗ Option
Nil Internal pilot
R∗ External pilot
∗ Option
How to Order Pilot Valve Assembly
SF4 1 F 30
Body option
0 Standard Coil rated voltage Manual override
1∗ Direct manual override 1 100 VAC, 50/60 Hz
Nil
Non-locking push type
∗ Option 2 200 VAC, 50/60 Hz (Flush)
3∗ 110 to 120 VAC, 50/60 Hz Non-locking push type
A∗
4∗ 220 VAC, 50/60 Hz (Extended)
5 24 VDC Locking type
B∗
6∗ 12 VDC (Tool required)
7∗ 240 VAC, 50/60 Hz C∗
Locking type
9∗ Other (Lever)
∗ Option ∗ Option
∗∗ Refer to page 1224
for voltage conversion.
1183
1-2-16-VFS1000.qxd 09.8.3 5:06 PM Page 4
Series VFS4000
System Components
Speed SGP (Steel pipe) ∗ It is when the cylinder is extending that is meter-out
System Solenoid valve Silencer controlled by speed controller which is directly connected
controller Port size x Length
with cylinder, and its needle valve with being fully open.
A
Series VFS4000 AS420-03 AN300-03 10A x 1 ∗ The average velocity of the cylinder is what the stroke is
Rc 3 8 (S = 73 mm2) (S = 60 mm2) divided by the total stroke time.
Series VFS4000 AS420-04 AN400-04 ∗ Load factor: ((Load weight x 9.8)/Theoretical force) x 100%
B Rc 1 2 15A x 1
(S = 97 mm2) (S = 90 mm2)
1184
1-02-16-VFS1000.qxd 10.1.26 2:02 PM Page 1
Construction
2 position single 2 position double
SJ
SY
SV
SYJ
SZ
VP4
S0700
3 position closed center/exhaust center/pressure center
VQ
Closed center
VQ4
VQ5
Exhaust center
VQC
1185
P1111-P1228-E.qxd 08.9.2 2:54 PM Page 1186
Series VFS4000
(PE port)
Pilot valve
manual override With light/surge voltage suppressor
(With direct manual override)
107 (FZ)
mounting hole
Bottom ported
(R1, R2: Rc 3 8)
Pilot valve
With light/surge voltage suppressor Light window
manual override
With direct manual override
(With direct manual override)
Pilot valve
manual override
177 (FZ)
107 (FZ)
1186
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1187
Non Plug-in — 2 Position single/Double/3 Position closed center/Exhaust center/Pressure center/Double check
2 position single: VFS4110-E, VFS4110-D
2(B), 4(A) port
2 x ø6.5 mounting hole
(PE port)
SJ
SY
SV
DIN terminal
Applicable cabtire cable O.D.
ø8 to ø10 SYJ
Pilot valve
manual override SZ
(With direct manual override)
VP4
S0700
2 x ø6.5
mounting hole
VQ
(R1, R2: Rc 3 8)
VQ4
(R1, R2: Rc 3 8) Bottom ported
VQ5
2 position double: VFS4210-E, VFS4210-D 3 position double check: VFS4610-E, VFS4610-D VQC
3 position closed center: VFS4310-E, VFS4310-D
3 position exhaust center: VFS4410-E, VFS4410-D 2 x ø6.5 mounting hole
VQZ
3 position pressure center: VFS4510-E, VFS4510-D
SQ
2 x ø6.5 mounting hole
187 (3 position: 196.5) VFS
VFR
VQ7
DIN terminal
Applicable cabtire
cable O.D. ø8 to ø10
(R1, R2: Rc 3 8)
(R1, R2: Rc 3 8)
1187
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 18
Series VFS4000
Manifold Specifications
Plug-in Type: With Terminal Block
• Since lead wires of solenoid valve
are connected with the terminals VV5FS4 01T 06 1 03
on upper surface of terminal block, CE-compliant
corresponding lead wires from Series VFS4000 Stations Nil —
power source can be wired at the Manifold 02 2 stations Q CE-compliant
bottom of terminal Plug-in type Port size
···
···
block. with terminal block Symbol P, R1, R2 A, B Thread type
10 10 stations
03 Rc 3 8 Nil Rc
Symbol 04
Rc
1 2 Rc 1 2 N∗ NPT
Passage Porting M Mixed T∗ NPTF
Symbol specifications
∗ For bottom F∗ G
P R1, R2 (A, B)
1 Side ported, Rc 3 8 is ∗ Option
Common Common only available.
2 Bottom∗ ∗ Option
Terminal block
U side
Plug-in type 08∗ 8 stations Port size
with multi-connector ∗ Max. 8 stations Thread type
Symbol P, R1, R2 A, B
Connector mounting 03 Rc 3 8
Nil Rc
D side
direction Rc N∗ NPT
Symbol 04 Rc 1 2
T∗
1 2
D D side mounting NPTF
M Mixed
Plug assembly U U side mounting Symbol Passage Porting
specifications F∗ G
(Option)
P R1, R2 (A, B)
∗ For bottom
Refer to page 1227. ported, Rc 3 8 is ∗ Option
1 Side only available.
Multi-connector Common Common
2 Bottom∗ ∗ Option
Plug-in Type With: D-sub Connector (Wiring specifications: Refer to page 1227.)
···
1188
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1189
1189
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1190
Series VFS4000
Blanking plate
It is used by attaching on the manifold block
for being prepared for removing a valve for
maintenance reasons or planning to mount a
EXH block plate SUP block plate spare valve, etc.
Body type Plug-in type Non plug-in type
Part no. VVFS4000-10A
1190
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1191
U side
SJ
SY
SV
Light
SYJ
Stations
SZ
D side
Bottom ported: VP4
VV5FS4-01T- Station 2- Port size
S0700
(External pilot port)
VQ
(Pilot EXH port: PE)
Light
Stations
D side
1191
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1192
Series VFS4000
Light
Stations
D side
Bottom ported:
VV5FS4-01CD
CU - Station 2- Port size Plug assembly VVFS2000-30A-
(Option: Refer to page 1227.)
Plug-in type with D-sub connector: VV5FS4-01FD- Station 1- Port size , VV5FS4-01FU- Station 1- Port size
Light
Stations
D side
Bottom ported:
VV5FS4-01 FD
FU - Station 2- Port size
Plug assembly VVZS3000-21A-
(Option: Refer to page 1227.)
1192
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 19
10 10 stations Symbol
Passage Porting VQ7
Base type 01T, 10: 2 to 10 stations Symbol specifications
Base type 01C, 01F: 2 to 8 stations P R1, R2 (A, B)
1 Side
Common Common
2 Bottom∗
∗ Option
Series VFS4000
U side
D side
R1, 1 1 2
Stations D side
Manual
override
Exhaust cleaner
≅
(Option)
≅
U side
D side mounting
( ): AMC810
Pilot valve
U side manual override D side
Manual
Stations override
D side
≅
Exhaust cleaner
(Option)
U side
≅
D side mounting
U side mounting
(External pilot port)
(Pilot EXH port: PE)
( ): AMC810 n: Stations
Stations
L 2 3 4 5 6 7 8 9 10
Formula
L1 156 199 242 285 328 371 414 457 500 L1 = 43 x n + 70
L2 168 211 254 297 340 383 426 469 512 L2 = 43 x n + 82
1194
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 20
Set pressure range: OFF 0.1 to 0.6 MPa Filter regulator MP2-3
Differential 0.08 MPa or less
Blanking
(3) Pressure switch MP3-2 VP4
Non plug-in type plate
Contact 1a Release valve VVFS4000-24A-10
Indicator light LED (RED)
Filter
element 11104-5B S0700
Max. switch capacity 2 VA AC, 2 W DC Note 1) Voltage: 24 VDC to 100 VAC
Caution Max. operating current
24 VAC/DC or less: 50 mA
48 VAC/DC: 40 mA
Inner voltage drop: 4 V
Note 2) Combination of a valve VFS41쏔쏔
VQ
100 VAC/DC: 20 mA (single) and a release valve spacer
When using an air filter with auto-drain or
Air release valve (Single only)
manual drain, mount the filter vertically.
Operating pressure range 0.1 to 1.0 MPa
can be used as an air release valve.
Note 3) The non plug-in type cannot be
VQ4
mounted afterwards.
VQ5
How to Order VQC
···
Passage Porting
10∗ 10 stations Symbol specifications Number of manifold blocks 2 2 2 2 2 2 2 1
P R1, R2 (A, B) required for mounting (stations)
∗ Base type 01T, 10:
2 to 10 stations 1 Side
Common Common
2 Bottom∗
Base type 01C, 01F: How to Order Manifold Assembly [Example]
2 to 8 stations ∗ Option
Add the valve and option part numbers in order starting from the first
Port size station on the D side.
Symbol P, R1, R2 A, B <Example>
03 Rc 3 8 Thread type • Plug-in type with terminal block: In order to mount control unit,
Rc it requires 2 stations.
04 1 2 Rc 1 2 Nil Rc
M Mixed N∗ NPT (Manifold base) VV5FS4-01T-081-03-AP5 1
(2 position single) ∗ VFS4100-5FZ 4
∗ For bottom T∗ NPTF
(2 position double) ∗ VFS4200-5FZ 2
ported, Rc 3 8 is F∗ G
only available. • Non plug-in type: In order to mount control unit, it requires 2 stations.
∗ Option (Manifold base) VV5FS4-10-061-03-A 1
(2 position single) ∗ VFS4110-5D 4
The asterisk denotes the symbol for assembly. Prefix it to the part
numbers of the solenoid valve.
1195
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1196
Series VFS4000
U side
Individual SUP spacer
Stations
Outlet for check
222 (180.5: -MP)
D side
regulator
Air filter
Control unit
≅
(Po port)
Electrical entry
Non plug-in type: VV5FS4-10- Station 1- Port size -AP Voltage for release valve
Example for manifold
Individual EXH spacer
Pilot valve
manual override
Double check spacer
U side
Pressure switch
Air release valve
Control unit
(Po port)
n: Stations
Stations
L 3 4 5 6 7 8 9 10 Formula
≅
1196
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1197
SJ
SY
SV
SYJ
SZ
VP4
S0700
VQ
VQ4
VQ5
VQC
VQZ
SQ
VFS
VFR
VQ7
1197
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1198
Made to Order
Serial Transmission Kit Manifold: EX123/124 Integrated Type (For Output)
Serial Transmission System
How to Order
How to Order Manifold
1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 10
Double
Double
Double
Double
Double
Double
Double
Single
Single
Single
Single
Single
Single
Single
Single
Single
Single
SI unit
SI unit
AB AB AB AB AB AB AB AB AB AB A A A AB A AB A
01 23 45 67 8 9 10 11 12 13 14 15 01 23 4 5 6 78 9 10 11 11
∗ Mixed wiring is available as an option. Use the manifold specification sheet to specify this.
How to Order Valves
VFS4 00 5F
Symbol Pilot valve manual override
1 2 position single Nil Non-locking push type (Flush)
2 2 position double A Non-locking push type (Extended)
3 3 position closed center B Locking type (Tool required)
4 3 position exhaust center C Locking type (Lever)
5 3 position pressure center
6 3 position double check Option
Nil None
Pilot type Z With light/surge voltage suppressor
Nil Internal pilot
R External pilot
Coil rated voltage
Nil None
24 VDC
1198
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1199
2 x Rc 1/8
2 x G 1 1/4 (Pilot EXH port: PE) SI unit
(Electrical entry)
L2
38 6 L1
18 43 91.5 SJ
SY
SMC SMC SMC
SMC SMC
SV
105
95.5
86
A A A A A
SYJ
SMC
166
EA
SERIAL UNIT
PE
155.5
5.5
FG
47
205.5
DG
202.5
196.5
28
24
STATION NO.
DB
SZ
187
DA
X
P
B RATE
24G
MODEL
RD
LRUN
+24V
24
SD
PW
SV
LERR.
0V
45
24V
55
(SI No.EX124U-SMJ1)
VP4
9
EB
B B B B B
VQZ
150.5
141.00
115.5
A A A A A A A
SQ
91.5
74.00
VFS
58
18
14
B B B B B B B
3 3 VFR
3
2n x Rc 3/8, 1/2 30
62.5 43 4(A), 2(B) port
EX123: 2 x G 1/2 VQ7
EX124: 4 x G 1/2
∗ Use a dripproof plug assembly (AXT100-
B04A) for the unused conduit port (G Electrical entry
1/2).
1199
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1200
Individual
SUP
spacer
169
Double check
spacer
Individual Interface
EXH regulator
spacer
Interface
regulator
Throttle Interface
valve regulator
spacer
1200
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1201
SJ
SY
SV
SYJ
SZ
VP4
S0700
VQ
Manifold block VQ4
VQ5
VQC
VQZ
End plate (U side) SQ
VFS
VFR
Replacement Parts
No. Description Material Part no. VQ7
1 Connection fitting A Steel plate VVF4000-5-1A
2 Connection fitting B Steel plate VVF4000-5-2 • For increasing the manifold bases, please order the manifold
3 Gasket NBR VVF4000-7 (End plate) block assembly number of the principal part assembly !0.
4 Gasket NBR VVF4000-7-1 (Manifold block) For plug-in type: The manifold base with terminal stand
5 Gasket NBR VVF4000-8 (integrated with a junction cover) is required with the o junction
6 O-ring NBR AS568-011 cover assembly.
7 O-ring NBR P-3
8 Terminal assembly — VVF4000-6A
For 01T VVF4000-4A- Stations
9 Junction cover assembly
For 01SU AZ738-30A- Stations
13 Rubber plug NBR AXT336-9
Replacement Parts: Sub Assembly Note) Manifold Base/Construction: Plug-in type with terminal block.
No. Description Assembly part no. Component parts Applicable manifold base
Manifold block !0, Terminal i, Metal joint q, w,
Manifold block VVF4000-1A-1- 03
04 Plug-in type
10 Gasket r, Receptacle assembly
assembly
VVF4000-1A-2-03
04 Manifold block !0, Metal joint q, w, Gasket r Non plug-in type
End plate (U side) VVF4000-2A-1 End plate (U) !1, Metal joint q, w Plug-in type
11
assembly VVF4000-2A-2 End plate (U) !1, Metal joint q, w Non plug-in type
End plate (D) !2, Metal joint q, w, Gasket e, t,
VVF4000-3A-1 Plug-in type
End plate (D side) O-ring y, u
12
assembly End plate (D) !2, Metal joint q, w, Gasket e, t,
VVF4000-3A-2 Non plug-in type
O-ring t, y
1201
016-VFS.qxd 11.4.22 9:23 AM Page 8
center
34 17 0.20 4.2 17 0.13 4.1
38 14 0.30 3.7 14 0.31 3.8
Pressure
center
VFS5500 VFS5510 12 16 0.23 3.9 16 0.22 4.1 300 55 or less 1.14
34 18 0.25 4.6 17 0.22 4.3
38 9.0 — — 9.0 — —
Double VFS5600 VFS5610 12 60 or less 1.99
9.0 — — 9.0 — — 180
check 34 9.0 — — 9.0 — —
Note 1) Based on JIS B 8375 (once per 30 days) for the minimum operating frequency. Note 2) Based on JIS B8375-1981. (The value at supply pressure 0.5 MPa.)
Note 3) The figures in the above list are without sub-plate. In the case of with plug-in sub-plate and, with non plug-in sub-plate add Rc 3/8, 1/2—0.744 kg, Rc
3/4—0.966 kg and Rc 3/8, 1/2—0.577 kg, Rc 3/4—0.823 kg respectively.
Note 4) “Note 1) ” and “Note 2) ” are with controlled clean air.
Standard Specifications
Compact yet provides a large flow capacity Fluid Air/Inert gas
Valve specifications
1202
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 21
How to Order
Port size
Porting Nil Without sub-plate
Body type Electrical entry specifications
03 Rc 3 8
O: Plug-in type F: Plug-in type Nil Side ported
04 Rc 1 2
sub-plate conduit terminal B∗ Bottom ported
06 Rc 3 4
∗ In the case of
external pilot
(Option), bot- Thread type
tom piping is
not available. Nil Rc CE-compliant
N∗ NPT
Nil —
T∗ NPTF
F∗ G
Q CE-compliant SJ
∗ Option
SY
Plug-in VFS5 1 0 0 2 F 04
SV
Non plug-in VFS5 1 1 0 5 D 06 SYJ
Pilot valve SZ
Option Manual override
Nil
Z
None
With light/surge voltage suppressor
Nil: Non-locking push type
(Flush)
VP4
P∗ Non-rotating DIN terminal
Light/Surge Voltage Suppressor S0700
ZP∗
Non-rotating DIN terminal
∗ Type “P”, “ZP” is available for DIN VQ
type only.
Symbol A∗: Non-locking push type
2 position single 3 position pressure center Electrical entry (Extended)
VQ4
1 5 E: Grommet terminal D: DIN terminal
VQ5
2 position double 3 position double check VQC
2 6
B∗: Locking type VQZ
(Tool required)
3 position closed center
3 SQ
Coil rated voltage
3 position exhaust center 1 100 VAC, 50/60 Hz
VFS
4 2 200 VAC, 50/60 Hz
C∗: Locking type VFR
3∗ 110 to 120 VAC, 50/60 Hz (Lever)
Body type 4∗ 220 VAC, 50/60 Hz
5 24 VDC VQ7
1: Non plug-in type 6∗ 12 VDC
sub-plate
7∗ 240 VAC, 50/60 Hz
9∗ Other
∗ Option
∗ Option
Pilot type
Nil Internal pilot
R∗ External pilot
∗ Option
∗ Option ∗ Option
∗∗ Refer to page 1224
for voltage conversion.
1203
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1204
Series VFS5000
Conditions
Series CS1
Tube bore x Length SGP20A x 1 m
VFS5100-06 Speed controller AS500-06
Silencer AN500-06
1204
261-VFS.qxd 11.3.15 9:03 AM Page 1
Construction
2 position single 2 position double
SJ
SY
SV
SYJ
SZ
VP4
3 position closed center/exhaust center/pressure center S0700
Closed center
VQ
VQ4
Exhaust center
VQ5
VQC
Pressure center
VQZ
SQ
VFS
VFR
VQ7
10 Gasket NBR —
11 Hexagon socket head screw Steel — Part no. for mounting bolt and gasket
12 Detent assembly — — BG-VFS5000-1
13 Pilot valve assembly — —
∗ Refer to “How to Order Pilot Valve Assembly” on page 1203.
1205
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1206
Series VFS5000
Pilot valve
manual override With light/surge
voltage suppressor
( ): Rc 3 4
2 x ø7 mounting
hole
With light/surge
voltage suppressor
Pilot valve
manual override
With light/surge
voltage suppressor Direct manual
override
Pilot valve
manual override
G 1/2 G 1/2
electrical entry electrical entry
( ): Rc 3 4 ( ): Rc 3 4
1206
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1207
Non Plug-in — 2 Position single/Double/3 Position closed center/Exhaust center/Pressure center/Double check
2 position single: VFS5110-E, VFS5110-D
2 x ø7 mounting hole
Rc 3/4: 3(R2), Rc 1/2: 5(R1)
SJ
G 1 2
SY
Applicable cabtire cable O.D. SV
ø8 to ø10
Pilot valve
SYJ
manual override
SZ
VQ7
Applicable cabtire cable O.D.
ø8 to ø10
Pilot valve
Applicable cabtire cable O.D. manual
ø8 to ø10 override
Pilot valve
manual
override
Direct manual
override
Direct manual
override
( ): Rc 3/4 ( ): Rc 3/4
1207
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 22
Series VFS5000
Manifold Specifications
Plug-in Type: With Terminal Block
• Since lead wires of solenoid valve
are connected with the terminals VV5FS5 01T 06 1 04
on upper surface of terminal block, CE-compliant
corresponding lead wires from Series VFS5000 Stations Nil —
power source can be wired at the Manifold 02 2 stations Q CE-compliant
bottom of terminal
···
···
block. Plug-in type Thread type
with terminal block 10 10 stations Port size Nil Rc
Symbol P, R1, R2 A, B N∗ NPT
Symbol 04 Rc 1 2 T∗ NPTF
Rc
Symbol
Passage Porting
specifications 06 34 Rc 3 4 F∗ G
P R1, R2 (A, B) M Mixed ∗ Option
1 Side ∗ For bottom ported,
Common Common
2 Bottom∗ ∗ Option Rc 1 2 is only avail-
able.
U side
···
Plug-in Type: With D-sub Connector (Wiring specifications: Refer to page 1227.)
···
···
1208
1-2-16-VFS1000.qxd 09.8.3 5:06 PM Page 5
SYJ
Manifold Option Parts Assembly Manifold Option
SZ
Individual SUP spacer Throttle valve spacer With exhaust cleaner
Plug-in type/Non plug-in type
An individual SUP spacer set on manifold Needle valve set on the manifold block can VP4
block can form SUP port for every valve. control cylinder speed by throttling exhaust. • Valve exhaust noise dampening: 35 dB
or more.
Body type Plug-in type Non plug-in type Body type Plug-in type Non plug-in type
• Oil mist collection: Rate of collection S0700
Part no. VVFS5000-P-04-1 VVFS5000-P-04-2 Part no. VVFS5000-20A-1 VVFS5000-20A-2 99.9% or more.
• Piping process reduced. VQ
VQ4
Blanking plate
It is used by attaching on the manifold block
EXH block plate SUP block plate
for being prepared for removing a valve for
maintenance reasons or planning to mount a
spare valve, etc.
Body type Plug-in type Non plug-in type
Part no. VVFS5000-10A
1209
P1111-P1228-E.qxd 08.9.2 2:55 PM Page 1210
Series VFS5000
U side
Direct manual override
Pilot valve
manual override
P = 51
Pitch
Stations
D side
( ): 2(B)/4(A) port Rc 3 4
Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station
Stations
D side
DIN terminal
Applicable cabtire
VV5FS5-10- Station cable O.D. (External pilot)
2- Port size ø8 to ø10 (External pilot)
(Pilot EXH)
(Pilot EXH)
Stations
Formula for manifold weight M = 0.811n + 1.231 (kg) n: Station
L 2 3 4 5 6 7 8 9
Formula 10
L1 194 245 296 347 398 449 500 551 602 L1 = 51 x n + 92
L2 212 263 314 365 416 467 518 569 620 L2 = 51 x n + 110 ( ): 2(B)/4(A) port Rc 3 4
1210
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1211
Pilot valve
manual override
SJ
SY
P = 51
SV
Pitch
SYJ
Stations
SZ
D side VP4
Plug assembly VVFS2000-30A-
Plug-in type with D-sub connector: VV5FS5-01FD- Station 1- Port size , VV5FS5-01FU- Station 1- Port size VQZ
SQ
VFS
Pilot valve manual override U side
Direct manual override
VFR
VQ7
P = 51
Pitch
Stations
D side
VV5FS5-01 FD
FU - Station 2- Port size (Pilot EXH)
Stations
L 2 3 4 5 6 7 8 Formula
L1 194 245 296 347 398 449 500 L1 = 51 x n + 92
( ): 2(B)/4(A) port Rc 3 4
L2 212 263 314 365 416 467 518 L2 = 51 x n + 110
1211
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 23
Series VFS5000
How to Order
Plug-in type
Exhaust cleaner VV5FS5 10 06 1 04 CD
(Option)
U side
Series VFS5000
CE-compliant
Manifold
Nil —
Base type/Electrical Q CE-compliant
entry
Plug-in type Exhaust cleaner
01T with terminal block mounting direction
Plug-in type Exhaust cleaner
01C Symbol
with multi-connector mounting direction
D side
Non plug-in type Plug-in type CD D side D side mounting
Exhaust cleaner 01F with D-sub connector
CU U side U side mounting
(Option)
10 Non plug-in type
Thread type
Connector mounting direction Nil Rc
Symbol With connector Applicable base N∗ NPT
Nil None 01T, 10 T∗ NPTF
D D side mounting F∗ G
01C, 01F
U U side mounting ∗ Option
···
Rc
10 10 stations 06 34 Rc 3 4
M Mixed
Base type 01T, 10: 2 to 10 stations
Base type 01C, 01F: 2 to 8 stations ∗ For bottom ported, Rc 1 2
is only available.
Symbol
Passage Porting
Symbol specifications
P R1, R2 (A, B)
1 Side
Common Common
2 Bottom∗
∗ Option
U side
Direct manual
override
Pilot valve
manual override
D side
SJ
SY
SV
Stations
SYJ
D side
SZ
Exhaust cleaner
(Option)
VP4
D side mounting S0700
U side
VQ
Electrical entry U side mounting VQ4
VQ5
( ): 2(B)/4(A) port Rc 3/4
VQC
Stations
D side
≅
U side mounting
n: Stations
Stations
L 2 3 4 5 6 7 8 9 10
Formula
( ): 2(B)/4(A) port Rc 3/4
L1 194 245 296 347 398 449 500 551 602 L1 = 51 x n + 92
L2 212 263 314 365 416 467 518 569 620 L2 = 51 x n + 110
1213
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1214
Made to Order
Serial Transmission Kit Manifold: EX123/124 Integrated Type (For Output)
Serial Transmission System
How to Order
How to Order Manifold
1 2 3 4 5 6 7 8 9 1 2 3 4 5 6 7 8 9 10
Double
Double
Double
Double
Double
Double
Double
Single
Single
Single
Single
Single
Single
Single
Single
Single
Single
SI unit
SI unit
AB AB AB AB AB AB AB AB AB AB A A A AB A AB A
01 23 45 67 8 9 10 11 12 13 14 15 01 23 4 5 6 78 9 10 11 11
∗ Mixed wiring is available as an option. Use the manifold specification sheet to specify this.
How to Order Valves
VFS5 00 5F
Symbol Pilot valve manual override
1 2 position single Nil Non-locking push type (Flush)
2 2 position double A Non-locking push type (Extended)
3 3 position closed center B Locking type (Tool required)
4 3 position exhaust center C Locking type (Lever)
5 3 position pressure center
6 3 position double check Option
Nil None
Pilot type Z With light/surge voltage suppressor
Nil Internal pilot
R External pilot
Coil rated voltage
Nil None
24 VDC
1214
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1215
Serial Transmission Kit Manifold: EX123/124 Integrated Type (For Output) Serial Transmission System
VV5FS5-01S Mounting position Model - Stations Symbol - Port size Thread -X199
4 x Rc 1/8
SI unit
(Pilot EXH port: PE)
L2
2 x G 1 1/4 L1
Electrical entry 2 x Rc 1/8
(External pilot port)
SY
103.5
EA
103
A A
A A A
61
60
SMC
174.5
SV
SERIAL UNIT
37
FG
244
200
240
DG
STATION NO.
DB
223
207
SMC
DA
P
B RATE
24G
MODEL
RD
LRUN
+24V
37
SD
PW
SYJ
43
SV
LERR.
0V
60
24V
(SI No.EX124U-SMJ1)
72
111.5
B B
B B B
PE
SZ
EB
11
SMC
31
.5
SMC SMC SMC
R5
50
VP4
67
81
D side n U side
S0700
Stations 1 2 3 4 5 6 7
6 x Rc 3/4
VQ
Manual override
1(P), 5(R1), 3(R2) port
VQ4
SMC VQ5
24(23)
VQC
179
167
B B B B B B B
132
70(71.5)
VQZ
91
20
SQ
A A A A A A A
1215
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1216
Series VFS5000
Individual
SUP
spacer
Double check
spacer
Interface
Individual regulator
EXH
spacer
Interface
regulator
Block plate
mounting position
Interface
regulator
Throttle valve
spacer
1216
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1217
Replacement Parts: Sub Assembly Note) Manifold Base/Construction: Plug-in type with terminal block.
No. Description Assembly part no. Component parts Applicable manifold base
Manifold block !0, Metal joint q, w,
VVFS5000-1A-1- 04
06 Plug-in type
10 Manifold block assembly Terminal i, O-ring e, r, t, y, u, Receptacle assembly
VVFS5000-1A-2- 04
06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type
VVFS5000-2A-1 End plate (U) !1, Metal joint q, w Plug-in type
11 End plate (U side) assembly
VVFS5000-2A-2 End plate (U) !1, Metal joint q, w Non plug-in type
VVFS5000-3A-1 End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u Plug-in type
12 End plate (D side) assembly
VVFS5000-3A-2 End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type
1217
016-VFS.qxd 11.4.22 9:23 AM Page 9
Model
Model Flow characteristics Max.
(1)
(2)
Port (3)
Type of 1 4/2 (P A/B) 4/2 5/3 (A/B R1/R2) operating Response Mass
size cycle time (kg)
actuation Plug-in Non plug-in C C (ms)
Rc [dm3/(s·bar)] b Cv [dm3/(s·bar)] b Cv (cpm)
34
2 position
Single VFS6100 VFS6110 29 0.10 6.8 38 0.10 9.0 180 160 or less 2.5
1
34
Double VFS6200 VFS6210 29 0.10 6.8 38 0.10 9.0 180 60 or less 2.75
1
Note 1) Based on JIS B 8375-1981 (once per 30 days) for the min. operating frequency.
Note 2) According to JIS B 8375-1981. (The value at supply pressure 0.5 MPa.)
Note 3) The figures in the above list are for without sub-plate. In case of with sub-plate, add 1.65 kg for Rc 3/4 and 1.5 kg for RC 1 respectively.
Note 4) “Note 1)” and “Note 2)” are with controlled clean air.
Note 5) The flow characteristics is for the port size Rc 4/3.
Standard Specifications
Compact yet provides a large flow capacity Fluid Air/Inert gas
Valve specifications
Option Specifications
Double Pilot type External pilot Note)
Manual override Main valve Direct manual override
110 to 120, 220, 240 VAC (50 Hz/60 Hz)
Coil rated voltage
12, 100 VDC
Porting specifications Bottom ported
Option With light/surge voltage suppressor, Non-rotating DIN terminal
Note) Operating pressure: 0 to 1.0 MPa
Pilot pressure: 0.1 to 1.0 MPa
1218
1-02-16-VFS1000.qxd 09.11.2 1:31 PM Page 24
How to Order
Porting Port size
specifications Nil Without sub-plate
Nil Side ported 06 Rc 3 4
10 Rc 1
Body type Electrical entry
Thread type
O: Plug-in type F: Plug-in type
Nil Rc
sub-plate conduit terminal
N∗ NPT
T∗ NPTF
F∗ G
∗ Option
SJ
CE-compliant SY
Nil —
Q CE-compliant SV
Plug-in VFS6 1 0 0 5 F Z 10 SYJ
SZ
Non plug-in VFS6 1 1 0 5 D Z 10 VP4
Option S0700
Nil None
Z With light/surge voltage suppressor
VQ
Electrical entry
Symbol
E: Grommet terminal D: DIN terminal
VQ4
2 position single
1 VQ5
1219
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1220
Series VFS6000
Conditions
Series CS1/CS2
Tube bore x Length SGP25A x 1 m
VFS6100-10 Speed controller AS600-10
Silencer AN600-10
Construction
2 position single 2 position double
1220
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1221
SJ
SY
(A, B port)
VQ4
VQ5
G 1/2 electrical entry Rc 1/8 external pilot port
2 x Rc 1/8 pilot EXH port (VFS6100R) VQC
VQZ
2 position double: VFS6200-F
SQ
VFS
VFR
VQ7
1221
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1222
Series VFS6000
4 x ø9 mounting hole
Pilot valve manual override Solenoid valve mounting bolt
(Hexagon socket head cap screw)
4 x M8 x 80 with SW
Applicable cabtire cable O.D.
ø8 to ø10
(A, B port)
external pilot port
2 x Rc 1/8 pilot EXH port (VFS6110R)
4 x ø9 mounting hole
Solenoid valve mounting bolt
(Hexagon socket head cap screw)
4 x M8 x 80 with SW
Applicable cabtire cable O.D.
ø8 to ø10
(A, B port)
1222
016-VFS.qxd 11.4.22 9:23 AM Page 10
Series VFS2000
How to Order
1222-1
016-VFS.qxd 11.4.22 9:23 AM Page 11
Series VFS3000
How to Order
Pilot type
Nil Internal pilot
R∗ External pilot
∗ Option
∗ Option
1222-2
016-VFS.qxd 11.4.22 9:23 AM Page 12
Series VFS4000
How to Order
Port size
Symbol Nil Without sub-plate
2 position single 3 position pressure center 03 Rc 3 8
04∗ Rc 1 2
1 5
∗ EA, EB: Rc 3 8
Pilot type
Nil Internal pilot
R∗ External pilot
∗ Option
∗ Option
1222-3
016-VFS.qxd 11.4.22 9:23 AM Page 13
Series VFS5000
How to Order
1222-4
016-VFS.qxd 11.4.22 9:23 AM Page 14
Series VFS6000
How to Order
Option
Body type
Nil None
1: Non plug-in type Z With light/surge voltage suppressor
sub-plate
Electrical entry
D: DIN terminal
Body option
0 Standard
1∗ Direct manual override
Coil rated voltage
∗ Option
1 100 VAC, 50/60 Hz
Pilot type
2 200 VAC, 50/60 Hz
Internal pilot
Nil 3∗ 110 to 120 VAC, 50/60 Hz
R∗ External pilot
4∗ 220 VAC, 50/60 Hz
∗ Option 5 24 VDC
6∗ 12 VDC
7∗ 240 VAC, 50/60 Hz
∗ Option
1222-5
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1223
Series VFS
Specific Product Precautions 1
Be sure to read before handling.
Refer to front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port
Solenoid Valve Precautions.
Caution
Light/Surge Voltage Suppressor, Electrical Entry Single unit
Body Ported
Series VFS1000/2000/3000 Base Mounted Series VFS2000
Exchange of pilot valve (Voltage exchange)
Light/Surge Voltage Suppressor Light/Surge Voltage Suppressor • When changing rated voltage and electrical
AC and 100 VDC With indicator light
• In the case of surge voltage suppressor, entry etc., pilot valve assembly can be
Terminal no. 1 (+) surge voltage absorption device ZNR is changed. But in case of a plug-in type with
attached to AC power. light/surge voltage suppressor, pilot valve SJ
Single AC and 100 VDC assembly cannot be changed for changing
Varistor With indicator light
Lead wire, red rated voltage. SY
Terminal no. 2 (–) With indicator light Pilot valve assembly
B side Terminal no. 1 (+) A side Single
Varistor SV
Double Varistor Varistor Black With indicator light Pilot valve assembly
Series VFS
Specific Product Precautions 2
Be sure to read before handling.
Refer to front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port
Solenoid Valve Precautions.
Caution
Light/Surge Voltage Suppressor, Electrical Entry Single unit
Base Mounted Series VFS3000/4000/5000/6000
Light/Surge Voltage Suppressor Lead Wire Connection
In the case of surge voltage suppressor, DIN terminal block type Plug-in type (With terminal)
surge voltage absorption element is • Male pin terminal of DIN terminal block • If the junction cover (1) of the sub-plate is
attached to terminal block on body area. board of solenoid valve and wires as removed, you can see the plug-in type terminal
100 VAC/DC or more shown below. Connect to corresponding block (2) mounted inside the sub-plate.
Light/Surge voltage terminal block on the connector. (2) (1)
absorption element SOL
Varistor With indicator light
24 VDC or less
SOL
Varistor With indicator light
DIN terminal (Wiring)
Note) There is no polarity. Ground
1 A side
How to Exchange 2 B side • The following markings are on the terminal
Solenoid valve 3 COM block. Connect with corresponding power
• Loosen set screw and take solenoid valve Ground side.
out vertically, otherwise it may cause • There is no polarity. Solenoid A side Solenoid B side
damage to the solenoid valve. Never Terminal block A B
remove a valve at an angle. 100 VAC/DC or more
marking +– +–
• When mounting solenoid valve onto the
• Applicable terminal:
base, plug pin assembly (base side) into Varistor VFS3000: 1.25-3, 1.25-3S, 1.25Y-3N,
receptacle assembly (body side) vertically. Single
1.25Y-3S
With indicator light VFS4000: 1.25-3.5M, 1.25Y-3L, 1.25Y-3M
VFS5000: 1.25-4, 1.25-4M
VFS6000: 1.25-3.5M, 1.25Y-3L, 1.25-3M
Varistor Varistor • There is no polarity.
Double • Tightening torque for terminal: 0.6 N·m
With indicator light
Non plug-in type (With terminal)
• Remove cover (1), over terminal block (2)
Pilot valve 24 VDC or less attached to the inside of body. Connect
• When changing the rated voltage, electrical Single with corresponding power side. For a type
entry, etc., pilot valve assembly can be ex- with indicator light and surge voltage
Varistor
changed easily since this is plug-in type. suppressor, pull out the light and surge
Then, when changing the rated voltage voltage suppressor substrate (3) in a
with indicator light/surge voltage suppres- With indicator light straight direction and then connect them.
sor, change of indi- (1)
cator light/surge
voltage suppressor Varistor Varistor
Double (3)
substrate is also
needed. So, order With indicator light
(2)
together with pilot
valve assembly.
• Heavy-duty cord
VFS3000/4000/5000 Applicable cable O. D.: ø8 to ø10
• Applicable terminal
Applicable terminal on block board: 3
Pilot cover (kinds)
1.25Y-3L, 1.25-3.5S, 1.25-4M A side B side
• Connector/Clamping torque
Set screw 0.6 N·m
Terminal screw 0.6 N·m A side B side
Pilot valve assembly
• Incorrect common (DIN terminal no. 3)
Mounting screw causes damage on power side circuit.
VFS6000 A side B side
Series VFS
Specific Product Precautions 3
Be sure to read before handling.
Refer to front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port
Solenoid Valve Precautions.
Caution Interface Regulator Specifications
Maintenance Interface regulator ARBF2000 ARBF3050 ARBF4050 ARBF5050
(3)
M5 2.8 to 5
ARBF5050-00-P ARBF5050-00-A
Outlet pressure (MPa)
1225
P1111-P1228-E.qxd 08.9.2 2:56 PM Page 1226
Series VFS
Specific Product Precautions 4
Be sure to read before handling.
Refer to front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port
Solenoid Valve Precautions.
Caution
Lead Wire Connection Manifold/Plug-in
Type 01 Insert Plug with Lead Wire Type 01 with Terminal Block
Series VFS2000 (Insert plug with lead wire is not available for Series VF3000, 4000, and 5000.) Series VFS2000
How to remove junction cover (Type 01) How to Use Insert Plug • Remove junction cover of manifold,
Turn the knob (2) of junction cover (1) on the • When removing insert plug (1) from exposing terminal block attached to the
manifold block side by hand or slotted manifold base, push the lever area (2) of manifold block. Lead wires from solenoid
screwdriver to the C → O direction inset plug downward with thumb and pull valve are connected with the terminals on
(counterclockwise) 90°. While holding the it together with the lead wire (3) outward. upper side of terminal block. (On the
knob and upper part of junction cover, pull terminal block, lead wire is connected with
outward to remove junction cover. both A and B sides of solenoid valve in
When reassembling, do the opposite. accordance with the corresponding
markings A and B on the block.) Connect
each lead wire of power side
(2) corresponding to respective solenoid valve
(2) on the lower terminal block.
VFS2000 has the marking + COM on the
(1)
(1) block board, but – COM specification is
also available.
Terminal block marking
Model A COM B
VFS2100 A side COM
VFS2200 A side COM B side
(3)
VFS2 34 00 A side COM B side
• Applicable terminal: 1.25-3, 1.25-3S,
Wiring • When placing the inset plug (1) into the 1.25Y-3N, 1.25Y-3S
The insert plug (1) is attached to the manifold base, push the lever area of • Plugging COM bridge (part no. AXT625-73:
manifold block and lead wire is plugged in inset plug with thumb and plug it in its 5 stations) in between each + COM on the
with valve side as shown in the following list. place in the receptacle housing (4) block board will make the specifications of
horizontally. all the stations + COM and enables you to
(Single solenoid: AXT624-52A-S-1
Double solenoid: AXT624-52A-D-1 ( After plugging, pull lead wire out a little bit
to ensure that insert plug is secure.
understand the wiring process.
Connect with corresponding power side. • There is no polarity.
• Tightening torque for terminal: 0.6 N·m
Power supply Valve model Solenoid A Solenoid B
AC Single solenoid Red, Black —
DC Double solenoid Red, Black Brown, White
(4)
∗ There is no polarity. Connection
∗ Lead wire length is 1 m. Marking
(1)
(1)
Series VFS3000
Terminal block marking
Model A COM B
VFS3100 A side COM
VFS3200 A side COM B side
3
VFS3 4 00 A side COM B side
• Applicable terminal:
1.25-3.5M, 1.25Y-3L, 1.25-3M
• There is no polarity.
• VFS 3000 has the marking + COM on the
block board, but – COM specification is
also available.
• Tightening torque for terminal: 0.6 N·m
Series VFS4000/5000
Terminal block marking
Model A+ A– B+ B–
VFS 45 100 A side A side
VFS 45 200 A side A side B side B side
VFS4 34 00
A side A side B side B side
VFS5 34 00
• Applicable terminal:
1.25-3.5M, 1.25Y-3L, 1.25Y-3M
• There is no polarity.
• Tightening torque for terminal: 0.6 N·m
1226
1-02-16-VFS1000.qxd 10.1.26 2:02 PM Page 2
Series VFS
Specific Product Precautions 5
Be sure to read before handling.
Refer to front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port
Solenoid Valve Precautions.
Caution
Lead Wire Connection Manifold/Plug-in
Type 01C Circular Connector Type 01F D-sub Connector
1 station station 1
Control unit
1 station station
Pressure switch
2 station
2 Connector
terminal no.
Pressure switch VQ5
station 2
2 station station
VQC
3 station 3 station
3 station 3 station
VQZ
4 station 4 station 4 station 4 station
SQ
Connector terminal no. 5 station 5 station 5 station 5 station
VFS
6 station 6 station
6 station 6 station
VFR
7 station
7 station 7 station 7 station
VQ7
Max. Max.
Max. Max. 8 stations 8 stations
8 stations 8 stations
Cable Color List of Each Terminal No. Cable Color List of Each Terminal No.
Terminal no. 1 2 3 4 5 6 7 8 9 10 11 12 Terminal no. 1 2 3 4 5 6 7 8 9 10 11 12 13
Lead wire color Orange Orange Black Black Green Green Red Red Blue Blue Yellow Yellow Lead wire color Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange
Dot marking — Yes — Yes — Yes — Yes — Yes — Yes Dot marking — — — — — — — White Black Black Red Red Red
Dot marking — Yes — Yes — Yes — Yes — Yes — Yes Dot marking Black Black White — — Black White White Red Red White —
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