Increasing miniaturization places continu- In the automotive industry, fuel injection
ously higher demands on the components systems driven by multilayer stack actuators used, and thus on the drives for microdosing are also microdosing valves systems as well. Piezoelectric elements pro- vide the solution here: They are reliable, fast Peristaltic Pumps, Jet Dispensers and precise in operation and can be shaped So-called peristaltic pumps are ideal in to fit into the smallest installation space. At cases where liquids or gases are to be the same time their energy consumption is dosed accurately and also as evenly and low, and they are small and low-cost. The with as little pulsing as possible. The dosing quantities range from milliliter, mi- external mechanical deformation of the tube croliter, nanoliter right down to the picoliter forces the medium to be transported range. through this tube. The pumping direction is determined by the control of the individual The fields of application for piezoelectric actuators. pumps are in laboratory technology and medical engineering, biotechnology, chemi- The drive element consists of flat piezo bend- cal analysis and process engineering which er elements, compact piezo chip actuators or frequently require reliable dosing of minute piezo stack actuators, depending on the amounts of liquids and gases. power and size requirements. Bender actua- tors are suitable mainly for applications with Micro-Diaphragm Pumps, low backpressure, e.g. for liquids with low Microdosing Valves viscosity. The drive for the pump consists of a piezo- Piezo actuators are better able to cope with electric actuator connected to a pump higher backpressure and are suitable for diaphragm, usually made of metal or silicon. dosing substances with higher viscosity, but The deformation of the piezo element require more space. changes the volume in the pump chamber, the drive being separated from the medium Piezoelectric Microdispensers, to be pumped by the diaphragm. Depending Drop-on-Demand on the drop size and the diaphragm lift thus Piezoelectric microdispensers consist of a required, and also the viscosity of the liquid-filled capillary which is shaped into medium, they can be driven directly with a nozzle and a surrounding piezo tube. piezo disks, piezo stack actuators or by means of levered systems. When a voltage is applied, the piezo tube contracts and generates a pressure wave in Their compact dimensions also make these the capillary. This means that individual dosing devices suitable for lab-on-a-chip drops are pinched off and accelerated to a applications. velocity of a few meters per second so that they can travel over several centimeters. Piezo drives are also used for opening and closing valves. The range here is from a The volume of the drop varies with the simple piezo element or bender actuator for properties of the medium transported, the a diaphragm valve, preloaded piezo stack dimensions of the pump capillaries and the actuators for large dynamics and force control parameters of the piezo actuator. through to piezo levers which carry out fine Micro-channels etched into silicon can also dosing even at high backpressure. be used as nozzles.