Controlling and Optimizing Wafer Yields

Statistical investigation of how to produce uniform coating thickness of wafers

Student Name
Research Centre
College of Engineering
Swansea University
Swansea UK
e-mail address of Student

Abstract— Control engineers are having a hard time
manufacturing uniform wafers. Uniformity of a manufactured
wafer determines yield of the given wafer which is the
proportion of chips on the wafer that are acceptable for use.
Wafer production involves three process variables that interact
with each other to determine the thickness of the wafer at a
given point of production. A detailed statistical investigation
was carried out on data that based on experimentation that was
carried out at Swansea university where coating thickness of
each wafer in a sample of forty wafers was measured along
various locations of each of the wafer. The standard deviations
of these measurements represented of uniformity of coating
thickness of each wafer. As a result, a greater understanding of
the experimental data sets was achieved with regard to control
and optimization of wafer yields.
Keywords—wafer; response surface; parametric;
yield;nonparametric tests; multiple linear regression; variability;
semiconductor
I. INTRODUCTION
There is need to control wafer production process in order to
optimize wafer yield and as a result minimize semiconductor
production costs. A wafer is simply a substrate of
microelectronic devices. It can be defined as a thin slice of
highly pure, nearly defect free crystalline material such as
crystalline silicon which is used for fabrication of integrated
circuits(1). A wafer undergoes many microfabrication process
steps such as iron implantation or doping, etching and material
disposition, photolithographic patterning and finally separation
of the various micro circuits for packaging(2). During wafer
production, there are three process variables that determines the
thickness of the wafer during production. Uniformity of wafer
thickness determines wafer yield among other factors. When
the coating material thickness is uniform, yield is greatest.
Standard deviation of thickness of the wafer at different
locations of the wafer can be used as a measure of uniformity
of the wafer. Statistical analysis of such data entails the use of
statistical methods to determine variability in the data that may
exist when a given process variable is varied. They can also be
used to determine if a given process variable affects the
uniformity of the wafer thickness using parametric and
nonparametric tests. Statistical analysis also helps to determine
how the various process variable interact to determine
uniformity and which combination of these variables will
maximize yield. By using regression analysis methods, we can
fit the data to appropriate models for prediction of how the
various process variables will affect uniformity of wafers. With
this deeper understanding, better control and optimization of
wafer yield can be achieved.
II. OBJECTIVES
A. General objective
To carry out a detailed statistical investigation of data in order
to get a greater understanding of how to produce uniform
thickness of wafers and with an aim of achieving maximum
yield.
B. Specific objectives
Describe variability present in each set of data in the first
experiment and highlighting similarities and differences that
may exist between the two data sets.
Constructing parametric and nonparametric tests to evaluate the
claim that the coating thickness uniformity is different for both
speeds stating assumptions, advantages and disadvantages of
each test.
Estimation of 𝛽 parameters of a second-order response surface
model, using technique of multiple least squares and data set
collected in Experiment 2.
Derivation of simplified version of the model
III. METHOD
In order to get an understanding of how uniform thickness of
wafers can be produced, experimentation was carried out in
Swansea laboratories. The experimentation was done using
forty wafer samples which had been supplied by a given
company. It involved measuring of thickness at different
locations of each wafer in the sample. The standard deviation
of the coating thickness of each wafer was determined. The
standard deviation represented the uniformity in thickness of
each wafer in the sample. The experimentation was done in two
phases as outlined below.
A. Experiment 1 16 87.8 36 146.1
The first experiment involved measuring the thickness of the 17 88.9 37 161.4
wafers with respect to varying speed. The sample of forty
wafers was divided into two. Twenty of the wafers were 18 102.7 38 178.9
subjected to low speed. The other process variables were held 19 95.9 39 160.5
at low. The thickness at different locations of each wafer is
measured at this low speed and the standard deviation of the 20 95.5 40 142.2
thickness of each wafer is determined. The other twenty wafers The standard deviation of wafer coating thickness measured at
were subjected to high speeds and the standard deviations of the different test conditions of the combinations of low,
wafer thickness were obtained for each wafer. The data of medium and high amounts of the three process variables is
standard deviation for the forty wafers at the two different shown in the table below.
speeds was recorded in sheet1 of the Data Sheet.
Table 2
B. Experiment 2
This experiment was used to study the effect of all the three Speed, Pressure, Distance, Costing
process variables which were pressure, distance and speed on X1 X2 X3 thickness
the uniformity of coating thickness of a wafer. These variables
are represented by 𝑥1 , 𝑥2 and 𝑥3 respectively. Each of the
standard
variable has been given codes −,0 𝑎𝑛𝑑 + These codes signified deviation,
low, medium and high levels of the variables used during the Y.
process. The standard deviation(Y) in the coating thickness of −1 −1 −1 24
the wafer corresponding to the different test conditions were
recorded in sheet2 of the Data Sheet.
0 −1 −1 120.3
1 −1 −1 213.7
IV. RESULTS
−1 0 −1 86
The standard deviations for the forty wafers half at low speed
and half at high speed with distance and pressure fixed at a low 0 0 −1 136.6
value are shown in the table below: 1 0 −1 340.7
−1 1 −1 112.3
Table 1
0 1 −1 256.3
Distance and pressure are fixed at a low value 1 1 −1 271.7
while these 40 tests were being done. −1 −1 0 81
Sample Low Sample High 0 −1 0 101.7
number Speed number Speed
1 −1 0 357
1 74 21 151.1
−1 0 0 171.3
2 78.9 22 136.8
0 0 0 372
3 90.3 23 161.8
1 0 0 501.7
4 82.1 24 147
−1 1 0 264
5 89.4 25 154.7 0 1 0 427
6 90.9 26 143.1 1 1 0 730.7
7 90.2 27 150.2 −1 −1 1 220.7
8 69.2 28 150.3 0 −1 1 239.7
9 76.2 29 135.9 1 −1 1 422
10 82.2 30 141.1 −1 0 1 199
11 81.9 31 145.5 0 0 1 485.3
12 87.3 32 149.2 1 0 1 673.7
13 104.9 33 152.3 −1 1 1 176.7
14 74.4 34 168.7 0 1 1 501
15 87.7 35 152.9 1 1 1 1010
 Histogram and Box plots for Standard deviation of wafer
coating thickness at Low Speed are shown in figure three and
V. DISCUSSION figure four respectively:
From table one, it is evident that the standard deviation of
coating thickness increases with speed and was generally higher
for wafers which were subjected to higher speeds than for those
which were produced in low speed. Higher speed therefore
leads to less uniformity of the coating thickness of the wafer.
From the first experiment, we shall plot box plot and a
histogram for both the low speed and highspeed standard
deviation data of wafer coating thickness in MATLAB. Though
both can indicate the variability of data, a histogram is essential
as it helps to point out similarities and differences that may exist
between the data sets such as detecting symmetry that exist in
each data set which can’t be directly identified from the box
plots(3). Box plots have a great upside because one can be able
to identify definite measures of spread/variability and center
straight from the box plot. The following are histograms and
box plots for each of the given data set in Experiment two.
Histogram and Box plots for Standard deviation of wafer
Figure 3
coating thickness at Low Speed are shown in figure one and
figure two respectively:

Figure 4
Figure 1

From the plots of box plots, we can identify the actual

variability or spread of the standard deviation in after coating
thickness. The box plot contains equal four sections and each
section of the sections contain the same amount of data. The
sections are from minimum to lower quartile, lower quartile to
median, median to upper quartile, upper quartile to maximum.
The fact that the sections are unequal does not mean the sections
contain different size of data but rather means that the data
represented by the boxplot is spread out more. This indicates that
both standard deviations at both low and high speed has some
variability. Interquartile range of the is used as the measure of
variability. At low speed, the interquartile range of the standard
deviation data is calculated to be 10.2 . At high speed,
interquartile range of the data was calculated to be 13.3. We can
therefore deduce that the standard deviation of coating thickness
Figure 2
at high speed has more variability than that at low speed. The
histograms were plotted with appropriate number of 𝑛𝐵𝑖𝑛 being
approximately 5 according to Sturgis rule. From the histograms, 𝑋1 , 𝑋2 𝑋3 a𝑛𝑑 𝜀 is the speed, pressure, distance and the
we can see that there is standard deviation is nearly symmetric prediction error or residual respectively.
at low speed with median at 87.75. The standard deviation of
coating thickness at high speed is not symmetric but skewed to The excel data was imported to MATLAB. The variables 𝑋1 ,
the right with median at 150.25. We can infer from the 𝑋2 and 𝑋3 were imported into the MATLAB workspace as three
variability that, apart from low speeds leading to less standard separate tables with the data type as categorical MATLAB data
deviation and hence more uniformity in coating thickness, it type to represent finite set of discrete levels (−,0, +) . The
leads to more consistency in standard deviation of coating standard deviation column of the data was loaded as a table with
thickness. At high speeds we, can see there is presence of an number data type. The tables were converted to arrays and
outlier which means that high speeds may lead to more dataset array was created ds. 𝑋1 , 𝑋2 and 𝑋3 from the dataset
inconsistent standard deviation. were used as categorical predictors to the model and standard
deviation y as the response variable. The arguments to the 𝑓𝑡𝑙𝑚
We are going to use MATLAB construct parametric and function specified were quadratic argument to ensure the model
nonparametric tests to evaluate the claim that coating thickness contained constant, linear, squared and interaction terms as
uniformity is different for each speed. specified by the second order response surface model. The
t-test categorical variables were also defined(4). The script was run
T-test is a form of parametric statistical procedure. It and the Wilkinson Notation of the model is shown in equation
determines if a claim about a characteristic of a population is two with the results of the linear regression:
reasonable. In using t-test to test the claim, we assume that the Linear regression model:
standard deviation of coating thickness of the wafer is normally
distributed when both low speed and highspeed process y ~ 1 + X1*X2 + X1*X3 + X2*X3 (3)
variable is used. T-test was preferred to z-test since the standard
deviation of the standard deviation of wafer coating thickness Estimated Coefficients:
of whole population of wafers was not known. We are going to
test if the mean of standard deviations of coating thickness is Estimated SE tStat pValue
the same for both speeds. We therefore formulate a null ________ ______ _______ _______
𝐻0 : 𝜇𝑌𝐿 = 𝜇𝑌𝐻 where 𝜇𝑌𝐿 is mean of standard deviation at low _
speed 𝜇𝑌𝐻 is mean of standard deviation at high speed. We also
formulate an alternative hypothesis 𝐻𝐴 : 𝜇𝑌𝐿 ≠ 𝜇𝑌𝐿 . We test the (Intercept) 97.037 83.126 1.1674 0.27668
hypothesis using MATLAB. Upon defining the data sets, the
X1_0 -2.6889 104.45 -0.02574 0.98009
test significance level and the tail of the test, ttest2 function, the
script was run and the function returned the hypothesis as 1 X1_1 69.578 104.45 0.66612 0.52407
which means that the P-value which was 3.9531 × 10−22 was X2_0 -19.833 104.45 -0.18988 0.85413
much less than the significance level and the null hypothesis
X2_1 -48.978 104.45 -0.4689 0.65165
was there rejected in favor of the alternative hypothesis.
Therefore, the claim that coating thickness uniformity is X3_0 -1.9667 104.45 -0.01882 0.98544
different for each speed is true. X3_1 36.556 104.45 0.34997 0.73539
Mann-Whitney test
X1_0:X2_0 133.87 114.42 1.1699 0.2757
In order to validate the claim, Mann-Whitney test which is a
nonparametric test was used. It was assumption regarding the X1_1:X2_0 130.93 114.42 1.1443 0.28558
parameters of the test were made. However, the observations X1_0:X2_1 165.1 114.42 1.4429 0.18703
from both groups were assumed to be independent of each
X1_1:X2_1 264.13 114.42 2.3084 0.04981
other. The hypothesis was formulated similar to the t-test. The
test was done at a significance of 0.05. The parameters to the X1_0:X3_0 31.167 114.42 0.27238 0.79223
ranksum function were defined. The tail of the test was defined X1_1:X3_0 156.43 114.42 1.3672 0.20875
as ‘both’. The test returns 1 for the hypothesis with a p-value of X1_0:X3_1 112.9 114.42 0.9867 0.35269
6.7956 × 10−22 meaning it rejects the null hypothesis in favor
of alternative hypothesis. This validates the claim. X1_1:X3_1 301.83 114.42 2.6379 0.02981
The set of data collected from the second experiment and X2_0:X3_0 100 114.42 0.87396 0.40761
multiple least squares the technique was used to approximate the
X2_1:X3_0 199.9 114.42 1.747 0.11877
𝛽 𝑝𝑎𝑟𝑎𝑚𝑒𝑡𝑒𝑟𝑠 of the surface model shown in equation one
which is in second order. X2_0:X3_1 90.1 114.42 0.78744 0.45372
X2_1:X3_1 174.33 114.42 1.5236 0.16611
Number of observations: 27, Error degrees of freedom: 8
(1) Root Mean Squared Error: 99.1
R-squared: 0.942, adjusted R-Squared 0.81
Y is the standard deviation in coating thickness. F-statistic vs. constant model: 7.18, p-value = 0.00392
From these results the, model of standard deviation as a
function of the variable speed is shown in equation three below.
(2)
The given model has an R-squared value of 0.942. This value is
quite high which indicates that the model fits the data with a
high accuracy and it means that the model explains 94.2%
variability in standard deviation of the coating thickness. It is
also evident that the overall model is statistically significant
since the p-value of the model is 0.00392 which is below 0.05.
From the given model, it was assumed that the model should be
significant at 5% significance level. An added variable (scatter)
plot was obtained as given in figure five.
Figure 5
From the given variable plot, it is evident that the model is
significant because a horizontal line does not fit between the
two 95% confidence bounds.
The probability plot of the residuals is shown in figure 6.
Figure 6
From the plot, we can see that crosses are close to the 45° line
and are randomly distributed at both sides of the line which
indicates the model is a good fit of the predictor variables.
From the model we see that each variable has is converted to
two dummy variables(5). Though the model was defined with
squared terms as shown in the script in appendix, squared terms
were eliminated by the model as their significance were
extremely low. The reference level of any given dummy
variable was when the variable is low. The various coefficients
are given in the regression model equation three. 97.037 is the
intercept and represents the standard deviation of coating
thickness when all the parameter (speed, pressure and distance
are low) when all the variables were at low value. 2.6889 is the
decrease in standard deviation when speed is increased from
low to medium when the other variables were held at a low
value. 69.578 is the increase in standard deviation when speed
is increased from low to high value. 19.833 is the decrease in
standard deviation the pressure is increased from low value to
medium value. 48.978 is the decrease in standard deviation
when the pressure is increased from low value to high value.
1.9667 and 36.556 are the increase and the increase in
standard deviation when the distance is increased from low
value to medium value and from low value to high value
respectively. 133.87 is the increase in standard deviation when
both speed and pressure are changed from low value to medium
value while distance is held at low value. 130.93 is increase in
standard deviation when speed was changed from low value to
high value and pressure was changed from low value to medium
value. 165.1 is the increase in standard deviation when speed
was changed from low value to medium value and pressure was
changed from low value to high value while distance was held
at low. 264.13 is the increase when both speed and pressure are
changed from low value to high value while distance is held at
low. 31.167 is the increase in standard deviation when both
speed and distance are varied from low to medium while
pressure is held at low value and 156.43 is the increase when
speed is changed from low to high and distance from low to
medium while pressure is held at low etc.
From the results of the linear regression, all coefficients which
have a p-value which is less than 0.05 are statistically
insignificant at a significance level of 5%. P-value of the F-
statistic test on a given linear coefficient is the probability that
that coefficient is equal or not equal to zero. A high p-value
indicates that the coefficient is equal or nearly equal to zero at
5% significance. Therefore, the coefficients that are statistically
significant are the once for dummy variables X1_1:X2_1,
X1_1:X3_1 which are 0.049812 and 0.029811.
A model that had only relevant terms was created using
𝑠𝑡𝑒𝑝𝑤𝑖𝑠𝑒𝑙𝑚 function of MATLAB. This function removes
terms that are statistically insignificant while coming up the
model. The input to the function is similar to that of 𝑓𝑖𝑡𝑙𝑚 that
was earlier used. The following results were obtained from the
regression and the Wilkinson Notation of the model is shown in
equation four.
 Table 3

Linear regression model:

𝑦 ~ 1 + 𝑋1 + 𝑋2 + 𝑋3 (4)
Estimated Coefficients:
Estimate SE tStat pValue
______ ______ ______ ________
- 56.001 -1.959 0.064199
(Intercept) 109.71
X1_0 144.99 51.847 2.7965 0.011143
X1_1 354.02 51.847 6.8283 1.2283e-06
X2_0 131.8 51.847 2.5421 0.019403
X2_1 218.84 51.847 4.221 0.00041961
X3_0 160.53 51.847 3.0963
0.0056923
X3_1 262.94 51.847 5.0716 5.8316e-
05 Figure 7
From the results, r-squared was 0.82, RMSE was 110, there
were 27 observations and the p-value were 1.62e-06.

The simplified model obtained is shown inn equation five.

𝑦 = −109.71 + 144.99 𝑋10 + 354.02𝑋11 + 131.8𝑋20 +
218.84 𝑋21 + 160.53𝑋30 + 262.94𝑋31

From the regression, the r-squared value of the model is 0.82

which is lower than that which had been obtained earlier. This
means that this model explains 82% of the response compared
to earlier one which explained 95% of the response. Therefore,
the achievable degree of accuracy in predicting uniformity in
coating thickness lower in this model. The p-value F-test is less
than 0.05 which means that the model is overall significant.
The meanings attached to the various coefficients are:
−109.71 is the intercept and represents the standard deviation
of coating thickness when all the variables were at low
value.144.99 is the increase in standard deviation when speed
is increased from low to medium when pressure and distance Figure 8
were held at a low value. 354.02 is the increase in standard
deviation when speed is increased from low to high The 95% confidence intervals for the various coefficients in this
value. 131.8 is the increase in standard deviation the pressure model are shown in table three.
is increased from low value to medium value. 218.84 is the
increase in standard deviation when the pressure is increased Table 4
from low value to high value. 160.53 and 262.94 are the
Coefficient of: Lower CI Upper CI
increase in standard deviation when the distance is increased
from low value to medium value and from low value to high X1_0 -226.5230 7.1082
value respectively while speed and pressure are held at low
X1_1 36.8387 253.1391
value.
The scatter plot of the simplified model is shown in the figure X2_0 245.8720 462.1724
seven. From the scatter plot it evident that though the model is
X2_1 23.6498 239.9502
statistically significant as it fits between the 95% confidence
bounds, there are more crosses that outside the 95% confidence X3_0 110.6942 326.9947
bounds lines which indicates that the model is less accurate that
X3_1 52.3831 268.6835
the earlier model. The normal probability plot is shown in figure
eight. Indicates though the model is a good fit, it is less accurate X1_0 154.7942 371.0947
than the earlier model as more crosses are relatively far away
from the 45-degree line.
 VI. CONCLUSION APPENDIX
In experiment one, the standard deviation of the coating Matlab script for plotting histogram of standard deviaiton at
thickness of the wafer was found to be generally high at high low speed
speeds compared to low speeds. During statistical analysis, the clc
variability of each set of data was determined. The variability Lowspeed_sd=[74 78.9 90.3 82.1 89.4 90.9
of standard deviation at high speeds was more than that at low 90.2 69.2 76.2 82.2 81.9 87.3 104.9 74.4
speeds which means there is more spread in standard deviation 87.7 87.8 88.9 102.7 95.9 95.5];
at high speed that at low speed i.e. standard deviation varies figure(1);
more at high speed. There was also presence of an outlier at hist(Lowspeed_sd)
high speeds meaning the probability of more unpredictable title('Histogram of Standard deviation of
values of standard deviation of coating thickness. Coating Thickness at Low Speed');
Both parametric and nonparametric tests were found to xlabel('Standard deviation of Coating
Thickness');
augment the claim that the uniformity in thickness of coating is
ylabel('No. of wafers in sample');
different for each speed. The null hypothesis 𝐻0 : 𝜇𝑌𝐿 = 𝜇𝑌𝐻
where 𝜇𝑌𝐿 was mean of standard deviation at low speed 𝜇𝑌𝐻
was mean of standard deviation at high speed was rejected in Matlab script for plotting histogram of standard deviaiton at
high speed
favor of the alternative hypothesis.
clc
A linear model to fit the standard deviation in coating thickness
Highspeed_sd=[151.1 136.8 161.8 147 154.7
to speed, pressure and distance variables was formed using the 143.1 150.2 150.3 135.9 141.1 145.5 149.2
technique of multiple least squares. The 𝛽 parameters were 152.3 168.7 152.9 146.1 161.4 178.9 160.5
estimated and the meanings attached to each of them were 142.2];
described. A greater understanding on how well the model figure(2)
fitted the data was acquired through statistical analysis hist(Highspeed_sd)
methods. The variables which were statistically significant title('Histogram of Standard deviation of
were obtained. Coating Thickness at High Speed');
A simplified version of the model was derived through linear xlabel('Standard deviation of Coating
regression method. The meaning of the parameters was Thickness');
explained and the degree of accuracy achieved with the ylabel('No. of wafers in sample');
simplified model in predicting the thickness uniformity was
determined. Matlab code for plotting boxplot of standard deviaiton at low
speed
ACKNOWLEDGMENT (HEADING 5) %Standard deviation arranged in a row
The preferred spelling of the word “acknowledgment” Lowspeed_sd=[74 78.9 90.3 82.1 89.4 90.9
without an “e” after the “g”. Avoid the stilted expression, “One 90.2 69.2 76.2 82.2 81.9 87.3 104.9 74.4
of us (R. B. G.) thanks . . .” Instead, try “R. B. G. thanks”. Put 87.7 87.8 88.9 102.7 95.9 95.5];
sponsor acknowledgments in the unnumbered footnote on the %--------------------------------------
first page. % boxplot
Insert Any. Otherwise delete this part. % -------------------------------------
figure(3);
REFERENCES boxplot(Lowspeed_sd);
[1] Laplante PA. Comprehensive Dictionary of electrical title('Boxplot Standard deviation of
engineering. Second edition ed: CRC Press; 2005. Coating Thickness at Low Speed');
xlabel('Sample produced at Low Speed');
[2] HO J. Am Introduciton to Semicocductor Physics
ylabel('Standard deviation of Coating
2014[Available from:
Thickness');
https://www.anandtech.com/show/8223/an-
introduction-to-semiconductor-physics-technology- Matlab code for plotting boxplot of standard deviaiton at high
and-industry/3. speed
[3] Rumsey DJ. What a box plot can tell you about a %Standard deviation arranged in a row
statistical data set [Available from: Lowspeed_sd=[151.1 136.8 161.8 147 154.7 143.1 150.2
http://www.dummies.com/education/math/statistics/ 150.3 135.9 141.1 145.5 149.2 152.3 168.7 152.9 146.1 161.4
what-a-boxplot-can-tell-you-about-a-statistical-data- 178.9 160.5 142.2];
set/.
[4] Mathworks. Interpret Linear Regression Results.
2017. %--------------------------------------------------------------------
[5] Science PECo. Response Surface Methods and % boxplot
Designs. % --------------------------------------------------------------------
figure(4);
boxplot(Lowspeed_sd);
title('Boxplot Standard deviation of Coating Thickness at High
Speed');
xlabel('Sample produced at High Speed');
ylabel('Standard deviation of Coating Thickness');
Matlab script code for t-test
clc %clear command screen
%low speed standard deviation
%--------------------------------
Lowspeed_sd=[74 78.9 90.3 82.1 89.4 90.9
90.2 69.2 76.2 82.2 81.9 87.3 104.9 74.4
87.7 87.8 88.9 102.7 95.9 95.5];
%--------------------------------
%standard deviation data at speed
%--------------------------------
Highspeed_sd=[151.1 136.8 161.8 147 154.7
143.1 150.2 150.3 135.9 141.1 145.5 149.2
152.3 168.7 152.9 146.1 161.4 178.9 160.5
142.2];
%--------------------------------
alpha=0.05;%significance level
tail='both';%equal or not equal to
[h, p, ci, stats]=ttest2(Lowspeed_sd,
Highspeed_sd, alpha, tail)%two-side t-
test
Matlab script code for Mann Whitney test
clc %clear screen
%low speed standard deviation
%--------------------------------
Lowspeed_sd=[74 78.9 90.3 82.1 89.4 90.9
90.2 69.2 76.2 82.2 81.9 87.3 104.9 74.4
87.7 87.8 88.9 102.7 95.9 95.5];
%--------------------------------
%standard deviation data at speed
%--------------------------------
Highspeed_sd=[151.1 136.8 161.8 147 154.7
143.1 150.2 150.3 135.9 141.1 145.5 149.2
152.3 168.7 152.9 146.1 161.4 178.9 160.5
142.2];
%--------------------------------
[p,h,stat] = ranksum(Lowspeed_sd,
Highspeed_sd,'alpha',0.05,'tail','both')%
mann-whitney test function alpha is
significance level and tail is both
Matlab script code for second order multiple linear regression
%----------------------------------
X1=table2array(X1);
X2=table2array(X2);
X3=table2array(X3);
y=table2array(y);
%----------------------------------
%A sample dataset is created
%----------------------------------
X=dataset(X1,X2,X3,y);
%---------------------------------
%A second order multiple regression
fitting function is defined
%----------------------------------
mdl = fitlm(X,'y ~
X1+X2+X3+X1^2+X2^2+X3^2+X1*X2+X1*X3+X2*X3
')
%A variable plot of the model was created
%----------------------------------------
figure(5);
plot(mdl)
%A normal probability plot of the model
was created
%----------------------------------------
figure(6);
plotResiduals(mdl,'probability')
Matlab script code for simplified version of the model
%The different variables are imported in
MATLAB independetly.
%Speed,pressure and distance are imported
as categorical variables X1,X2
%and X3 and standard deviation as numeric
variable y
%The variables are converted to arrays
%----------------------------------
X1=table2array(X1);
X2=table2array(X2);
X3=table2array(X3);
y=table2array(y);
%----------------------------------
%A sample dataset is created
%----------------------------------
X=dataset(X1,X2,X3,y);
%---------------------------------
%A linear model is created with only
relevant/significant terms
%----------------------------------
mdls =stepwiselm(X,'y ~
X1+X2+X3+X1^2+X2^2+X3^2+X1*X2+X1*X3+X2*X3
')
%A variable plot of the model was created
%----------------------------------------
figure(7);
plot(mdls)
%A normal probability plot of the model
was created
%----------------------------------------
figure(8);
plotResiduals(mdls,'probability')