Aligner Manual

Brooks Automation
VWA 2 InLigner
Vacuum Wafer Aligner
(Single Axis)
User’s Manual
MN-001-2980-01 Revision 2.1

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Serial Number indicates date of construction of the InLigner. The first two characters are the year, next two
characters are the month, remaining characters are a unique identifier. If there is no Serial Number recorded
above this manual should be considered “generic” and not associated with a specific InLigner.
Information provided within this document is subject to change without notice, and although believed to be
accurate, Brooks Automation assumes no responsibility for any errors, omissions, or inaccuracies.
If you have any questions or comments about this manual, please complete the Reader’s Comment Form pro-
vided at the back of this manual and return it to the Technical Publications Dept. at Brooks Automation.
InLigner is a trademark of Brooks Automation.
All other trademarks are properties of their respective owners.
© Brooks Automation 1997, All Rights Reserved. The information included in this manual is Brooks Proprietary
Information and is provided for the use of Brooks’ customers only and cannot be used for distribution, reproduc-
tion, or sale without the express written permission of Brooks Automation. This information may be incorpo-
rated into the user’s documentation, however any changes made by the user to this information is the
responsibility of the user.
Revised: R. Surko
Brooks Automation, Inc.
15 Elizabeth Drive
Chelmsford, MA 01824-4185 USA
Phone (978) 262-2400
Fax (978) 262-2500
P/N MN-001-2980-01
July 17, 1997 Revision 2.1 Revised per EC #11081
This manual is available in standard printed, cleanroom printed, and on-line formats.
This manual is available in the following languages; English
Printed in the U.S.A.
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A. STATEMENT OF WARRANTY
1. PRODUCTS MANUFACTURED BY BROOKS AUTOMATION. BROOKS WARRANTS THAT
ALL PRODUCTS MANUFACTURED BY BROOKS WILL BE FREE FROM DEFECTS IN
MATERIAL AND WORKMANSHIP, AND WILL FUNCTION AND PERFORM IN ACCOR-
DANCE WITH SPECIFICATIONS PROVIDED BY BROOKS TO THE CUSTOMER FOR
SUCH PRODUCTS, FOR THE PERIOD PROVIDED IN THE WARRANTY, AND SUBJECT TO
THE OTHER TERMS AND CONDITIONS OF THE WARRANTY.
2. PRODUCTS SUPPLIED BUT NOT MANUFACTURED BY BROOKS AUTOMATION.
BROOKS WARRANTS THAT ALL PRODUCTS SOLD AND DELIVERED TO THE CUS-
TOMER BY BROOKS, BUT NOT MANUFACTURED BY BROOKS, WILL FUNCTION AND
PERFORM IN ACCORDANCE WITH THE MANUFACTURER’S SPECIFICATIONS PRO-
VIDED BY BROOKS AND THE CUSTOMER FOR SUCH PRODUCTS, FOR THE PERIOD OF
TIME PROVIDED IN THE WARRANTY, AND SUBJECT TO THE OTHER TERMS AND CON-
DITIONS OF THE WARRANTY.
B. PERIOD OF WARRANTY
THE PERIOD OF BROOKS’ WARRANTY FOR WARRANTED PRODUCTS IS THE TIME PERIOD
APPLICATION TO THE PARTICULAR PRODUCTS, AS ESTABLISHED BY THE WARRANTY
PERIOD SCHEDULE SET FORTH IN THE SUBSECTION “WARRANTY PERIOD SCHEDULE”
BELOW. ALL PRODUCTS SOLD BY BROOKS ARE WARRANTED UNDER A ONE YEAR WAR-
RANTY, EXCEPT FOR CONSUMABLE ITEMS SUCH AS LAMPS, FUSES, ETC. IN EACH CASE,
THE APPLICATION TIME PERIOD COMMENCES WITH THE DATE OF DELIVERY BY BROOKS OF
THE PLATFORM, SYSTEM, COMPONENT, OR MAJOR SUB-SYSTEM THEREOF OF THE CAR-
RIER FOR SHIPMENT TO THE CUSTOMER.
C. WARRANTY NOT TRANSFERABLE

THE WARRANTY IS EXTENDED BY BROOKS ONLY TO THE ORIGINAL CUSTOMER, OR IN THE
CASE OF THE CUSTOMER BEING AN ORIGINAL EQUIPMENT MANUFACTURER, TO THE INITIAL
END USER THROUGH THE BROOKS ORIGINAL CUSTOMER. IF THE BROOKS CUSTOMER IS
AN ORIGINAL EQUIPMENT MANUFACTURER, THE ON-SITE PORTION OF THE WARRANTY IS
AT THE BROOKS CUSTOMER SITE ONLY. ALL PARTS AT THE END USER ARE COVERED
UNDER WARRANTY (SEE SECTION D).
D. CONDITIONS OF THE WARRANTY

BROOKS' OBLIGATIONS UNDER THE WARRANTY ARE CONDITIONED UPON, AND THE WAR-
RANTY SHALL REMAIN IN EFFECT ONLY IF THE PRODUCTS ARE INSTALLED, MAINTAINED,
SERVICED, AND USED IN A CUSTOMARY AND NORMAL MANNER, AND FOR THE PURPOSES
AND USES FOR WHICH THEY WERE DESIGNED. IN ADDITION, THE WARRANTY SHALL BE
VOID IF DEFECTS OR FAILURES OF THE EQUIPMENT WERE CAUSED BY THE CUSTOMERS
NEGLIGENCE, MISUSE, ACCIDENT, UNAUTHORIZED REPAIR, ALTERATION, OR INSTALLA-
TION.
E. WARRANTY OBLIGATIONS OF BROOKS

IN THE EVENT THAT ANY WARRANTED PRODUCT OR COMPONENT PART THEREOF IS
DETERMINED BY BROOKS TO BE DEFECTIVE UNDER THE TERMS AND CONDITIONS OF THE
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WARRANTY, BROOKS WILL (SERVICE, ADJUST), REPAIR OR REPLACE THE DEFECTIVE PROD-
UCT OR COMPONENT PART, AT A LOCATION CHOSEN BY BROOKS. IN THE EVENT THAT ANY
SOFTWARE PRODUCT PROVES TO CONTAIN ANY DEFECT, FAILURE, OR ERROR, BROOKS
WILL MAKE A REASONABLE EFFORT TO CORRECT ANY SUCH DOCUMENTED DEFECT, FAIL-
URE OR ERROR REPORTED IN WRITING TO BROOKS BY THE CUSTOMER.
F. EXCLUSION OF OTHER WARRANTIES

IT IS THE SOLE AND EXCLUSIVE RESPONSIBILITY OF THE CUSTOMER TO DETERMINE THE
SUITABILITY OF ANY AND ALL PRODUCTS OF BROOKS FOR THE CUSTOMER’S INTENDED
APPLICATIONS.
THE WARRANTY IS THE SOLE AND EXCLUSIVE WARRANTY GIVEN BY BROOKS WITH
RESPECT TO ANY PRODUCTS SOLD OR PROVIDED BY BROOKS, AND BROOKS GIVES AND
MAKES NO REPRESENTATION OR WARRANTY OF ANY KIND, EXPRESS OR IMPLIED, OTHER
THAN THOSE EXPRESSLY SET FORTH IN THE WARRANTY. NO REPRESENTATIVE OF BROOKS
IS AUTHORIZED TO GIVE OR MAKE ANY OTHER REPRESENTATION OR WARRANTY OR TO
MODIFY THE WARRANTY IN ANY WAY. WITHOUT LIMITING THE GENERALITY OF THE FORGO-
ING, NO IMPLIED WARRANTY OR MERCHANTABILITY, NO IMPLIED WARRANTY OR FITNESS
FOR ANY PARTICULAR PURPOSE, AND NO IMPLIED WARRANTY ARISING BY USAGE OF
TRADE, COURSE OF DEALING, OR COURSE OF PERFORMANCE IS GIVEN OR MADE BY
BROOKS.
G. LIMITATION ON BROOKS’ LIABILITY

THE LIABILITIES AND OBLIGATIONS OF BROOKS, AND THE REMEDIES OF THE CUSTOMER,
UNDER OR IN CONNECTION WITH THE WARRANTY OR ANY PRODUCTS SOLD OR SUPPLIED
BY BROOKS, SHALL BE LIMITED EXCLUSIVELY TO THOSE SET FORTH IN THE SUB-SECTION
“WARRANTY OBLIGATIONS OF BROOKS”, ABOVE.
EXCEPT AS OTHERWISE SPECIFICALLY PROVIDED HEREIN, BROOKS SHALL HAVE NO LIABIL-
ITY, OBLIGATION, OR RESPONSIBILITY OF ANY KIND OR IN ANY WAY FOR ANY LOSSES,
COSTS, EXPENSES, OR OTHER DAMAGES (INCLUDING BUT NOT LIMITED TO ANY DAMAGES
RESULTING FROM LOSS OF PROFITS, USE, GOODWILL, OR DATA; DELAYS; INCONVENIENCE;
OR ANY SPECIAL, INDIRECT, INCIDENTAL, OR CONSEQUENTIAL DAMAGES) RESULTING
FROM ANY REPRESENTATION OR WARRANTY OF ANY KIND MADE BY BROOKS WITH
RESPECT TO BROOKS' PRODUCTS OR THE PERFORMANCE THEREOF, OR ARISING IN ANY
WAY OUT OF OR IN CONNECTION WITH THE PURCHASE BY OR USE OF BROOKS' PRODUCTS
BY THE CUSTOMER, EVEN IF BROOKS HAS BEEN ADVISED OF THE POSSIBILITY OF SUCH
DAMAGES; FURTHERMORE, IN NO EVENT WHATSOEVER SHALL BROOKS' LIABILITY UNDER
THE WARRANTY OR IN CONNECTION WITH BROOKS' PRODUCTS (OR THE CUSTOMERS PUR-
CHASE OR USE THEREOF) EXCEED THE AMOUNT WHICH HAS ACTUALLY BEEN RECEIVED
FROM THE CUSTOMER AND IS DIRECTLY ATTRIBUTABLE TO THE SPECIFIC PRODUCTS WITH
RESPECT TO WHICH ANY DAMAGES ARISE (INCLUDING, BUT NOT LIMITED TO ANY LIABILITY
FOR INFRINGEMENT OF ANY PATENT, COPYRIGHT, TRADEMARK, OR OTHER PROPRIETARY
RIGHTS; FOR NEGLIGENCE; OR FOR DAMAGES IN ANY SUCH ACTION BASED UPON CON-
TRACT OR TORT AND ARISING OUT OF, OR IN CONNECTION WITH SUCH PRODUCTS, OR THE
SALE OR USE THEREOF, OR ANY OTHER PRODUCT OR SERVICE PROVIDED BY BROOKS TO
THE CUSTOMER HEREUNDER, OR IN CONNECTION WITH ANY OF THE FOREGOING, OR OTH-
ERWISE).
H. WARRANTY PERIOD SCHEDULE FOR VACUUM COMPONENTS AND MAJOR SUB-SYSTEMS

REFER TO WARRANTY SUPPLIED WITH SALES ORDER.
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User’s Manual
12 Attached Drawings
Overview
This section provides an Illustrated Parts Catalog (IPC) and lists any additional documents pro-
vided with the VWA 2 InLigner. These documents are provided to allow service personnel to
identify specific parts within the VWA 2 InLigner. All additional documents are found at the
end of the manual.
&$87,21
All drawings and other related documents provided with this manual are
generic and may not reflect specific builds of the VWA 2 InLigner. To
obtain a complete and current set of drawings and documents contact
Brooks Customer Support.
Contents
Illustrated Parts Catalog:

VWA 2 InLigner Wafer Aligner (Single Axis) Assembly . . . . . . . . . . . . . . . . .12-3
VWA 2 InLigner Wafer Aligner Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-4
VWA 2 InLigner Wafer Aligner Chamber Assembly (Bottom View) . . . . . . . .12-6
Light Source Seal Assembly. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-8
InLigner Electronics Module Assembly (Rotated 180 degrees). . . . . . . . . . . . .12-10
Wafer Rotate Module (Sheet 1 of 2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-14
Wafer Rotate Module (Sheet 2 of 2) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-16
CCD Assembly . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .12-18
Drawings:
Schematic, Aligner with DC-DC Converter SD-001-2981-56
Schematic, Main Controller SC-001-1951-01
Schematic, Aligner SC-001-4051-01
Brooks Automation
Revision 2.0 12-1
Attached Drawings 9:$,Q/LJQHU9DFXXP:DIHU$OLJQHU6LQJOH$[LV
User’s Manual
This Page Intentionally Left Blank
Brooks Automation
12-2 Revision 2.0
9:$,Q/LJQHU9DFXXP:DIHU$OLJQHU6LQJOH$[LV Attached Drawings
User’s Manual Illustrated Parts Catalog
Illustrated Parts Catalog
Refer to Figure 12-2
Figure 12-1: VWA 2 InLigner Wafer Aligner (Single Axis) Assembly
Brooks Automation
Revision 2.0 12-3
Illustrated Parts Catalog User’s Manual
11
12 14
Refer to Figure 12-4 10 12
13
7
Refer to Figure
12-3
2 Refer to Figure 12-5
Figure 12-2: VWA 2 InLigner Wafer Aligner Assembly
Brooks Automation
12-4 Revision 2.0
Table 12-1: VWA 2 InLigner Wafer Aligner Assembly Parts List (Figure 12-2)
Item No. Part Number Description Qty.
1 001-3640-12 3” - 8” WAFER ALIGNER CHAMBER INTERMOUNT 1

ASSEMBLY
2 001-4130-03 INLIGNER ELECTRONICS MODULE ASSEMBLY 1
3 001-3627-02 WINDOW CLAMP 1
4 001-3008-01 DOCKING MODULE VIEWPORT 1
5 001-3628-01 VIEWPORT SPACER 1
6 880-5122-63 O-RING, VITON, 7-1/4” ID X 7-1/2” OD X 1/8” W 1
7 806-1025-00 SCREW, SHCS, M6 X 25mm, SST 14
8 806-0000-10 WASHER, M6 SPLIT LOCK, SST 14
9 806-0000-00 WASHER, M6 FLAT, SST 14
10 001-3012-06 LIGHT SOURCE SEAL ASSEMBLY 1
11 906-3204-00 SCREW, SHCS, 6-32 X 1/4”, SST 2
12 906-0000-10 WASHER, #6 LOCK, SST 6
13 001-3047-02 VIEWPORT EXTENDER ALIGNER COVER 1
14 906-3208-00 SCREW, SHCS, #6-32 X .5, SST 4
Brooks Automation
Revision 2.0 12-5
11
10
2 Refer to
Refer to
8 Figure 12-6
Figure 12-8
12
5
15
3
16
6
17
14
7
13
Figure 12-3: VWA 2 InLigner Wafer Aligner Chamber Assembly (Bottom View)
Brooks Automation
12-6 Revision 2.0
Table 12-2: VWA 2 InLigner Wafer Aligner Chamber Assembly (Bottom View) (Figure 12-3)
1 001-5098-01 INTERMODULE ALIGNER CHAMBER 1

2 001-2966-06 WAFER ROTATE MODULE ASSEMBLY 1
3 001-4023-01 WINDOW CLAMP 1
5 824-0000-10 WASHER, M4 LOCK, SST 4
6 001-4022-01 WINDOW 1
7 880-5120-39 O-RING, VITON, 2-3/4” ID X 2-7/8” OD X 1/16” W 1
8 001-3011-02 CCD ASSEMBLY 1
9 001-4433-01 CCD CABLE ASSEMBLY 1
10 001-4291-01 BOTTOM PLATE 1
11 806-1012-30 SCREW, SFHS, M6 X 12mm, SST 4
12 001-4289-01 SUPPORT POST 4
13 910-3208-30 SCREW, SFHS, #10-32 X .5, SST 4
14 001-4288-01 POST MOUNT 2
17 806-0000-00 WASHER, M6 FLAT, SST 4
Brooks Automation
Revision 2.0 12-7
Figure 12-4: Light Source Seal Assembly
Brooks Automation
12-8 Revision 2.0
Table 12-3: Light Source Seal Assembly Parts List (Figure 12-4)
1 001-3046-03 LED HOLDER 1

2 001-3065-01 LED ASSEMBLY 5
3 902-5606-00 SCREW, SHCS, #2-56 X 3/8”, SST 10
4 902-0000-10 WASHER, #2 SPLIT LOCK, SST 10
5 001-7329-01 PLASTIC CYLINDRICAL LENS 3
Brooks Automation
Revision 2.0 12-9
3
6
13
10
7
16
6
17
18
21
15
19
23
24
1
20 22
25
11
12 26
29
12
28
27
Figure 12-5: InLigner Electronics Module Assembly (Rotated 180 degrees)
Brooks Automation
12-10 Revision 2.0
Table 12-4: InLigner Electronics Module Assembly Parts List (Figure 12-5)
1 001-4121-01 CHASSIS 1
2 001-4128-01 TOP COVER 1
3 908-3206-40 SCREW, SBHS, #8-32 X 3/8”, SST 4
4 001-4051-01 ALIGNER VIDEO PCB ASSEMBLY 1
5 001-4126-01 BOARD SHIELD A/R
6 904-4004-40 SCREW, SBHS, #4-40 X 1/4”, SST 6
7 904-0000-50 WASHER, #4, NYLON 6
8 001-4123-01 MYLAR SHIELD 1
9 730-5082-20 STANDOFF, NYLON, 1/4” X 9/16” 3
10 001-1951-02 ALIGNER MAIN PCB ASSEMBLY 1
11 730-0006-19 STANDOFF, 1/4” HEX X 1-1/4”LG, #4-40, SST 2
12 904-4006-20 SCREW, FHS, #4-40 X 3/8”, SLOTTED, SST 9
13 904-4000-90 NUT, #4 HEX, SST 6
14 730-5082-21 STANDOFF, #4-40, SST 3
15 001-5104-02 DC-DC CONVERTER, watch PCB ASSEMBLY 1
16 906-3206-10 SCREW, PHS, #6-32 X 3/8”, SLOTTED, SST 4
17 906-0000-10 WASHER, #6 LOCK, SST 4
18 906-0000-00 WASHER, #6 FLAT, LARGE 4
19 001-4913-01 MCC3 BACKPLANE PCB CABLE ASSEMBLY 1
20 212-0010-03 JACK SOCKET KIT, #4-40 X 0.5”L, 0.19” STANDOFF 5 PR
21 001-4124-01 SPACER BLOCK 2
22 904-4004-20 SCREW, FHS, #4-40 X 1/4”, SLOTTED, SST 4
23 904-4004-10 SCREW, PHS, #4-40 X 1/4” SLOTTED, SST 2
25 001-4129-01 CONNECTOR CAP 2
26 001-4291-01 BOTTOM PLATE 1
27 908-3208-10 SCREW, PHS, #8-32 X 1/2”, SST 4
Brooks Automation
Revision 2.0 12-11
Table 12-4: InLigner Electronics Module Assembly Parts List (Figure 12-5)
29 908-0000-00 WASHER, #8 FLAT 4
Brooks Automation
12-12 Revision 2.0
Brooks Automation
Revision 2.0 12-13
3 Refer to
Figure 12-7
14
4
18
6
9
5 10 20
19
7
8
17
Refer to 16
24 Figure 12-7
13
12
11
13
23
22 15
21
25
10
13
Figure 12-6: Wafer Rotate Module (Sheet 1 of 2)
Brooks Automation
12-14 Revision 2.0
Table 12-5: Wafer Rotate Module (Sheet 1 of 2) Parts List (Figure 12-6)
1 001-3876-01 8” CHUCK ASSEMBLY (KALREZ) SHOWN, Refer to Sales 1

Order for Chuck Assembly Part Number
4 001-3035-01 CHUCK SUPPORT SHAFT 1
5 001-3007-01 MOTOR MOUNTING BLOCK TOP CAP 1
6 906-3204-29 SCREW. FHS, #6-32 X 1/4”, SLOTTED, SST, VENTED 3
7 880-5121-27 O-RING, VITON, 1-7/16”ID X 1-5/8”OD, X 3/32”W 1
8 001-4032-01 SEAL MOUNT BRAZING ASSEMBLY 1
9 908-3204-00 SCREW, SHCS, #8-32 X 1/4”, SST 4
10 908-0000-10 WASHER, #8 LOCK, SST 4
11 001-4001-01 MOUNTING PLATE ROTATE SEAL 1
12 910-3206-00 SCREW, SHCS, #10-32 X 3/8”, SST 4
13 910-0000-10 WASHER, #10 LOCK, SST 4
14 001-4003-01 MOTOR MOUNTING POST 4
15 910-3208-00 SCREW, SHCS, #10-32 X 1/2”, SST 4
16 910-000-00 WASHER, #10 FLAT, SST 4
17 001-4002-01 MOTOR MOUNTING PLATE 1
18 001-3039-02 FLYWHEEL
19 906-3208-00 SCREW, SHCS, #6-32 X 1/2”, SST 2
20 906-0000-10 WASHER, #6 LOCK, SST 2
21 001-4033-01 SCREW, CAPTIVE BLOCK MOUNTING, M6 X 40mm 4
23 806-0000-00 WASHER, M6 FLAT, SST 4
24 001-4004-01 SEAL MOUNTING POST 4
25 001-2979-01 ROTATE MOTOR ASSEMBLY 1
Brooks Automation
Revision 2.0 12-15
1
4
4 10
5
11
6
12
13
7
14
Figure 12-7: Wafer Rotate Module (Sheet 2 of 2)
Brooks Automation
12-16 Revision 2.0
Table 12-6: Wafer Rotate Module (Sheet 2 of 2) Parts List (Figure 12-7)
1 880-0013-04 SEAL, ELGLILOYLITE SPRING, 3/16”ID 2

2 730-0013-01 WASHER, THRUST, SST, 0.31”ID X 0.63”OD X 0.051THK 1
3 740-0002-04 WASHER, SPRING, WAVE, 0.440”ID X 0.618”OD, X 0.01”THK, 1
SST
4 710-6544-02 BEARING, BALL, DUPLEX, DEEP GROOVE 2
5 001-3004-01 SPACER, INNER RACE, ALIGNER MODULE 1
6 001-3005-01 SPACER, OUTER RACE, ALIGNER MODULE 1
7 740-0002-02 WASHER, SPRING, WAVE, 0.265”ID X 0.367”OD, X 2
0.015”THK, SST
8 720-0001-01 COLLAR, CLAMP, 0.25”ID X 3/16”OD 1
9 730-5900-03 SPACER, SHAFT, 1/4”ID X 3/8”OD X 1/8”THK 1
10 001-3018-01 SPACER, 3/16” SHAFT 1
11 720-5019-08 CLAMP, COLLAR, 0.4375” BORE, ALUMINUM 1
12 722-0006-01 BELLOWS COUPLING 1
13 001-3038-01 REWORK COLLAR 1
14 001-3019-01 SPACER, 8mm SHAFT 1
Brooks Automation
Revision 2.0 12-17
Figure 12-8: CCD Assembly
Brooks Automation
12-18 Revision 2.0
Table 12-7: CCD Assembly Parts List (Figure 12-8)
1 001-4053-01 SINGLE CCD CARRIER PCB ASSEMBLY 1

2 904-4012-10 SCREW, PHS, #4-40 X 3/4” 2
4 904-0000-00 WASHER, #4 FLAT, SST 2
5 001-4024-01 CCD MOUNT 1
6 001-4035-01 SCREW, CAPTIVE, M4 X 20mm 2
Brooks Automation
Revision 2.0 12-19
Brooks Automation
12-20 Revision 2.0
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Brooks Automation

MN-001-2980-01 Revision 2.1

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