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TEM
The transmission electron microscope is a very powerful tool for material science. A
high energy beam of electrons is shone through a very thin sample, and the
interactions between the electrons and the atoms can be used to observe features
such as the crystal structure and features in the structure like dislocations and grain
boundaries. Chemical analysis can also be performed. TEM can be used to study
the growth of layers, their composition and defects in semiconductors. High
resolution can be used to analyze the quality, shape, size and density of quantum
wells, wires and dots.
The TEM operates on the same basic principles as the light microscope but uses
electrons instead of light. Because the wavelength of electrons is much smaller than
that of light, the optimal resolution attainable for TEM images is many orders of
magnitude better than that from a light microscope. Thus, TEMs can reveal the finest
details of internal structure - in some cases as small as individual atoms.
Fig 1 - General layout of a TEM describing the path of electron beam in a TEM
(Taken from JEOL 2000FX Handbook)
Fig 2 - A ray diagram for the diffraction mechanism in TEM
Imaging
The beam of electrons from the electron gun is focused into a small, thin, coherent
beam by the use of the condenser lens. This beam is restricted by the condenser
aperture, which excludes high angle electrons. The beam then strikes the specimen
and parts of it are transmitted depending upon the thickness and electron
transparency of the specimen. This transmitted portion is focused by the objective
lens into an image on phosphor screen or charge coupled device (CCD) camera.
Optional objective apertures can be used to enhance the contrast by blocking out
high-angle diffracted electrons. The image then passed down the column through the
intermediate and projector lenses, is enlarged all the way.
The image strikes the phosphor screen and light is generated, allowing the user to
see the image. The darker areas of the image represent those areas of the sample
that fewer electrons are transmitted through while the lighter areas of the image
represent those areas of the sample that more electrons were transmitted through.
Diffraction
Fig2. shows a simple sketch of the path of a beam of electrons in a TEM from just
above the specimen and down the column to the phosphor screen. As the electrons
pass through the sample, they are scattered by the electrostatic potential set up by
the constituent elements in the specimen. After passing through the specimen they
pass through the electromagnetic objective lens which focuses all the electrons
scattered from one point of the specimen into one point in the image plane. Also,
shown in fig 2 is a dotted line where the electrons scattered in the same direction by
the sample are collected into a single point. This is the back focal plane of the
objective lens and is where the diffraction pattern is formed.
Specimen Preparation
A TEM specimen must be thin enough to transmit sufficient electrons to form an
image with minimum energy loss. Therefore specimen preparation is an important
aspect of the TEM analysis. For most electronic materials, a common sequence of
preparation techniques is ultrasonic disk cutting, dimpling, and ion-
milling. Dimpling is a preparation technique that produces a specimen with a
thinned central area and an outer rim of sufficient thickness to permit ease of
handling. Ion milling is traditionally the final form of specimen preparation. In this
process, charged argon ions are accelerated to the specimen surface by the
application of high voltage. The ion impingement upon the specimen surface
removes material as a result of momentum transfer
References
Transmission electron microscopy, David B. Williams and C. Barry
Carter (Plenum, 1996)
Electron microscopy of thin crystals, Peter Hirsch (Butterworths, 1965)
https://www2.warwick.ac.uk/fac/sci/physics/current/postgraduate/regs/mpags/ex5/techniques/str
uctural/tem/
Transmission Electron Microscope
Uses In Microscopy
Advantages and Disadvantages
TEM History
Ernst Ruska developed the first electron microscope, a TEM, with the assistance of Max
Knolls in 1931. After significant improvements to the quality of magnification, Ruska
joined the Sieman’s Company in the late 1930s as an electrical engineer, where he
assisted in the manufacturing of his TEM.
An electron source
Thermionic Gun
Electron beam
Electromagnetic lenses
Vacuum chamber
2 Condensers
Sample stage
Phosphor or fluorescent screen
Computer
In a TEM, electrons replace photons, electromagnetic lenses replace glass lenses and
images are viewed on a screen rather than through an eyepiece.
TEM Imaging
Air needs to be pumped out of the vacuum chamber, creating a space where electrons
are able to move.
The electrons then pass through multiple electromagnetic lenses. These solenoids are
tubes with coil wrapped around them.
The beam passes through the solenoids, down the column, makes contact with the
screen where the electrons are converted to light and form an image.
The image can be manipulated by adjusting the voltage of the gun to accelerate or
decrease the speed of electrons as well as changing the electromagnetic wavelength via
the solenoids.
The lighter areas of the image represent the places where a greater number of electrons
were able to pass through the sample and the darker areas reflect the dense areas of
the object.
These differences provide information on the structure, texture, shape and size of the
sample.
To obtain a TEM analysis, samples need to have certain properties. They need to be
sliced thin enough for electrons to pass through, a property known as electron
transparency.
Samples need to be able to withstand the vacuum chamber and often require special
preparation before viewing.
TEM Applications
A Transmission Electron Microscope is ideal for a number of different fields such as life
sciences, nanotechnology, medical, biological and material research, forensic analysis,
gemology and metallurgy as well as industry and education.
The images allow researchers to view samples on a molecular level, making it possible to
analyze structure and texture.
This information is useful in the study of crystals and metals, but also has industrial
applications.
TEMs can be used in semiconductor analysis and production and the manufacturing of
computer and silicon chips.
Technology companies use TEMs to identify flaws, fractures and damages to micro-sized
objects; this data can help fix problems and/or help to make a more durable, efficient
product.
Colleges and universities can utilize TEMs for research and studies.
Although electron microscopes require specialized training, students can assist
professors and learn TEM techniques.
Students will have the opportunity to observe a nano-sized world in incredible depth and
detail.
Advantages
TEMs offer the most powerful magnification, potentially over one million times or more
TEMs have a wide-range of applications and can be utilized in a variety of different
scientific, educational and industrial fields
TEMs provide information on element and compound structure
Images are high-quality and detailed
TEMs are able to yield information of surface features, shape, size and structure
They are easy to operate with proper training
Disadvantages
Electron microscopes are sensitive to vibration and electromagnetic fields and must be
housed in an area that isolates them from possible exposure.
TEMs are manufactured by companies such as Zeiss, Jeol, Philips and Hitachi and are
extremely expensive.
Examples of prices for new TEM models include $95,000 for a Jeol 1200EXII, $95,000 for
a Philips EM10 and $100,000 for a Hitachi 7000.
A Transmission Electron Microscope produces images via the interaction of electrons
with a sample.
TEMs are costly, large, cumbersome instruments that require special housing and
maintenance.
They are also the most powerful microscopic tool available to-date, capable of producing
high-resolution, detailed images 1 nanometer in size.
http://www.microscopemaster.com/transmission-electron-microscope.html
Step-by-step procedures for using TEMs
Operating a TEM requires somewhat similar steps no matter what
machine is used. These involve the following:
The order of the steps may vary depending on the machine used and on
laboratory protocols. There may be additional steps required for
advanced machines including filling the liquid nitrogen Dewar. The
complexity of alignment will be greater for more advanced machines and
more demanding types of imaging (e.g. high magnification, diffraction and
dark field imaging).
http://www.ammrf.org.au/myscope/tem/practice/usingTEMs/