C O O K S O N E L E C T R O N I C S E Q U I P M E N T

OPTIONAL SPINCOAT SYSTEM FEATURES

G3-8 G3P-8 G3P-12 G3P-15
Chucks X X X X
Internal Vaucuum Pump X X X X
External Vacuum Pump X X X X
PC Interface Software X X X
Dispense Bar and Syringe X X X
Dispensing Unit* X X X
Foot Pedal X X X
Fume Exhaust Adapter X X X
*Third generation Dispensing unit availabe 2Q, 2003

SPINCOAT SYSTEM SPECIFICATIONS

Program Storage…………….......... Non-Programmable 8-inch models (single step profile); Programmable 8-inch, 12-inch and 15-inch
models - up to 30 programs with 20 steps each
Bowl Size………………….............… 8-inch, 12-inch, and 15-inch models
Chuck Rotation Speed………....... 0-9,999 RPM in 1 RPM increments (0-4,000 RPM for 15-inch model)
Acceleration/Deceleration…....... 0.1 to 25.5 seconds, 0.1 second increments (with inertial limitations)
Dwell Time………………................ 0-999 seconds in 1 second increments
Dispense Time…......................... 1 to 25.5 seconds in 0.1 second increments
Power Input…………………............ 115VAC/230VAC, 50/60Hz, single phase 300VA
Vacuum Input………………............ Min. 17 in. Hg (430 mm Hg), 0.25 in./.635 mm O.D. fitting

Purge Input………………............... 0.55 CFM @ 5 psi (14.15 CLM @ 0.35 kg/cm2) air or nitrogen (with optional internal vacuum: 2.2
CFM, 60 psi).
Dimensions…………………............ Small Cabinet - Non-Programmable (8-inch model) 10.5" H x 12" W x 15.4" D
Small Cabinet - Programmable (8-inch model) 11.9" H x 12" W x 16.5" D
Medium Cabinet - Programmable (12-inch model) 11.9" H x 16" W x 20.5" D
Large Cabinet - Programmable (15-inch model) 11.9" H x 19" W x 23.5" D

S C S G 3 S P I N C O A T S E R I E S

SCS WORLD HEADQUARTERS 7645 Woodland Drive, Indianapolis, IN 46278 • Tel: (800) 356-8260 or (317) 244-1200, Fax: (317) 240-2073
www.scscookson.com

WORLDWIDE COATING SITES AND OFFICES

SCS EUROPE Cookson Electronics, Forsyth Road, Sheerwater, Woking, GU21 5RZ, United Kingdom • Tel: (44) 01483 758400, Fax: (44) 01483 758410
SCS SINGAPORE Cookson Electronics Assembly Materials, 14 Tuas Avenue, Singapore 639138 • Tel: (65) 861 1977, Fax: (65) 861 1670
SCS SINGAPORE OFFICE Cookson Electronics Equipment, 150 Kampong Ampat, KA Centre #05-08, Singapore 368324 • Tel: (65) 6286 6635, Fax (65) 6289 9411
SCS GERMANY OFFICE Cookson Electronics Equipment, IM Gefierth 14, D 63303 Dreieich, Germany • Tel: (49) 0 6103 8320, Fax (49) 0 06103 832 299
PARYLENE JAPAN K.K. 480-1, Suwa-Machi, Hachioji-shi, Tokyo 193 Japan • Tel: (81) 426 52 2422, Fax: (81) 426 52 2421

COOKSON ELECTRONICS EQUIPMENT

WORLD HEADQUARTERS 16 Forge Park, Franklin, MA 02038 • Tel: (508) 520-0083; Fax: (508) 520-2288

043 12/02 5M © Copyright 2002 Specialty Coating Systems. All rights reserved. Covered by patent rights issued and/or pending.
S C S G 3 S P I N C O A T F E A T U R E S
SPINCOAT SYSTEM PROFILING
O f f e r P r e c i s i o n a n d P r o g r a m F l e x i b i l i t y

The illustrated profile is a representative example of a coat-

Ramp 1
3 secs
Ramp 2
2.5 secs
Ramp 3
2 secs
Ramp 4
4 secs
ing cycle that can be easily and quickly programmed,
The SCS G3 family of precision spincoat systems from Specialty Coating saved, and executed. Only one profile is available in the
Systems accurately applies liquid coating materials such as photoresists, Time 1
3 secs
Time 2
2 secs
Time 3
10 secs non-programmable model. Each dwell portion of a cycle
polyimides, metallo-organics, dopants and silica films on planar substrates. 200 RPM 1200 RPM 6000 RPM can be defined in the range of 0 - 9,999 RPM (4,000 RPM
The G3 Spincoat series sets new standards in operating precision and max for 15-inch models), with ramp times from 0.1 to 25.5
programming flexibility, with a high level of rotation accuracy and repeatability, seconds. A single step may have a dwell time of up to 999
along with precise acceleration and deceleration control. seconds, and coating cycles are interruptible by the opera-

Rate
• Available with 8-inch, 12-inch and 15-inch bowls, in four compact enclosure sizes
tor at any time. Ramp-up time is dependent on the chuck
size and substrate weight.
• Fast, simple programming by means of microprocessor-based control, using Dwell
front panel LCD display and keypad
• Closed loop servomotor control for precise speed regulation
• 8-inch units are available as programmable and non-programmable models SPINCOAT SYSTEM PROGRAM CONTROL SPECIFICATIONS
• 12-inch and 15-inch units are available as programmable models only
• Communication port for external control using optional PC interface software
Programmable
for programming, profile storage, PID, diagnostics, vacuum on/off, slow Characteristic Range Tolerance
Spincoat Unit
speed centering, and programmable home position
Rotational Speed 0-9,999 RPM* in 1 RPM increments ± 1-3 RPM Full Scale
• Capacity to store and execute up to 30 programs, with up to 20 steps each,
Acceleration/Deceleration Time** 0.1 to 25.5 seconds in 0.1 sec increments ± 0.05 sec
on programmable models (unlimited with optional software)
Dwell Time 0 to 999 seconds in 1 sec increments ± 0.05 sec
• Spin profiles adjustable in 1.0 rpm rotation increments, 0.1 second timing
increments, and 1.0 second increments for dwell time, with precise Dispense Time (optional feature) 10 to 25.5 seconds in 0.1 sec increments ± 0.05 sec
repeatability from cycle-to-cycle
Acceleration/Deceleration Linearity ± 0.1 %
• Encoder allows vacuum chuck to be stopped at a Home position on
programmable models * 4,000 RPM maximum for the 15-inch bowl unit ** Size and weight of substrate will affect acceleration values
• Chemically-resistant Teflon® coated bowl includes an integral drain on pro
grammable unit
• Customer evaluations yielded thickness uniformity in the range of ±3.0%
Non-Programmable
VACUUM CHUCKS
Spincoat Unit
• Interlocking hinged cover is standard on all models and features a safety glass
window on programmable models Accessory chucks for SCS Spincoat Systems are available in several materials including stainless steel (stan-
dard), hard anodized aluminum, DELRIN® and Teflon®. Chuck size is specified by the user according to sub-
All three SCS Spincoat bowl sizes feature compact housing for convenience
strate dimension requirements. Chuck components are machined to close tolerances for flatness and rigidity,
when using in fume hoods. Programmable spincoat models have an optional
and a cross pattern to distribute vacuum across mounting surfaces. A chuck size 1/4-inch to 1-inch less than
integrated dispense arm, optional exhaust adapter, and are equipped to control
the substrate diameter is recommended. Fragile substrates should be supported across the entire surface.
solenoid operation of an optional dispensing unit. All models operate on
115VAC or 230VAC, 50/60 Hz power, and conform to NFPA and CE standards.
Type CS - Flat Surface Cross Type L - O-ring Vacuum
BACK PANEL FEATURES and Scroll Design Holding Chuck with
Used to hold a thin, planar Mechanical Locating Fingers
All models have an integrated power cord socket, fuse and on/off switch surfaced substrate such as Designed for heavy, large or
assembly on the rear panel. Programmable models have connections for a foot silicon, glass or germanium unsymmetrical substrates.
on a spinning shaft for Guide fingers assist in
pedal and dispensing unit, and for the optional external computer interface.
maximum rotational speed. positioning and holding
Back Panel of
Has cross and scroll design. substrates. An O-ring seal
Programmable Unit is also provided.
CONTROL PANEL FEATURES
Type H - O-ring Vacuum Type R - Recessed Fixture
Programmable Non-Programmable Holding Chuck Chuck (Custom Manufactured to
Recipe Number Speed Used to hold relatively heavy Precise User Specified Dimensions)
substrates such as glass, This chuck features a custom
Speed Remaining Process Time quartz, ceramic and metal. milled recess for square or
Features O-ring vacuum seal. rectangular substrates,
Remaining Process Time Message Line
providing uniform coating
Message Line across the substrate.
Up/Down Arrows for:
Right, Left, Up & Down Arrows Ramp Up/Down & Dwell
Control Panel of Mode, Clear, Enter, Start & Stop Buttons Start & Stop Buttons
Programmable Unit
S C S G 3 S P I N C O A T F E A T U R E S
SPINCOAT SYSTEM PROFILING
O f f e r P r e c i s i o n a n d P r o g r a m F l e x i b i l i t y

The illustrated profile is a representative example of a coat-

Ramp 1
3 secs
Ramp 2
2.5 secs
Ramp 3
2 secs
Ramp 4
4 secs
ing cycle that can be easily and quickly programmed,
The SCS G3 family of precision spincoat systems from Specialty Coating saved, and executed. Only one profile is available in the
Systems accurately applies liquid coating materials such as photoresists, Time 1
3 secs
Time 2
2 secs
Time 3
10 secs non-programmable model. Each dwell portion of a cycle
polyimides, metallo-organics, dopants and silica films on planar substrates. 200 RPM 1200 RPM 6000 RPM can be defined in the range of 0 - 9,999 RPM (4,000 RPM
The G3 Spincoat series sets new standards in operating precision and max for 15-inch models), with ramp times from 0.1 to 25.5
programming flexibility, with a high level of rotation accuracy and repeatability, seconds. A single step may have a dwell time of up to 999
along with precise acceleration and deceleration control. seconds, and coating cycles are interruptible by the opera-

Rate
• Available with 8-inch, 12-inch and 15-inch bowls, in four compact enclosure sizes
tor at any time. Ramp-up time is dependent on the chuck
size and substrate weight.
• Fast, simple programming by means of microprocessor-based control, using Dwell
front panel LCD display and keypad
• Closed loop servomotor control for precise speed regulation
• 8-inch units are available as programmable and non-programmable models SPINCOAT SYSTEM PROGRAM CONTROL SPECIFICATIONS
• 12-inch and 15-inch units are available as programmable models only
• Communication port for external control using optional PC interface software
Programmable
for programming, profile storage, PID, diagnostics, vacuum on/off, slow Characteristic Range Tolerance
Spincoat Unit
speed centering, and programmable home position
Rotational Speed 0-9,999 RPM* in 1 RPM increments ± 1-3 RPM Full Scale
• Capacity to store and execute up to 30 programs, with up to 20 steps each,
Acceleration/Deceleration Time** 0.1 to 25.5 seconds in 0.1 sec increments ± 0.05 sec
on programmable models (unlimited with optional software)
Dwell Time 0 to 999 seconds in 1 sec increments ± 0.05 sec
• Spin profiles adjustable in 1.0 rpm rotation increments, 0.1 second timing
increments, and 1.0 second increments for dwell time, with precise Dispense Time (optional feature) 10 to 25.5 seconds in 0.1 sec increments ± 0.05 sec
repeatability from cycle-to-cycle
Acceleration/Deceleration Linearity ± 0.1 %
• Encoder allows vacuum chuck to be stopped at a Home position on
programmable models * 4,000 RPM maximum for the 15-inch bowl unit ** Size and weight of substrate will affect acceleration values
• Chemically-resistant Teflon® coated bowl includes an integral drain on pro
grammable unit
• Customer evaluations yielded thickness uniformity in the range of ±3.0%
Non-Programmable
VACUUM CHUCKS
Spincoat Unit
• Interlocking hinged cover is standard on all models and features a safety glass
window on programmable models Accessory chucks for SCS Spincoat Systems are available in several materials including stainless steel (stan-
dard), hard anodized aluminum, DELRIN® and Teflon®. Chuck size is specified by the user according to sub-
All three SCS Spincoat bowl sizes feature compact housing for convenience
strate dimension requirements. Chuck components are machined to close tolerances for flatness and rigidity,
when using in fume hoods. Programmable spincoat models have an optional
and a cross pattern to distribute vacuum across mounting surfaces. A chuck size 1/4-inch to 1-inch less than
integrated dispense arm, optional exhaust adapter, and are equipped to control
the substrate diameter is recommended. Fragile substrates should be supported across the entire surface.
solenoid operation of an optional dispensing unit. All models operate on
115VAC or 230VAC, 50/60 Hz power, and conform to NFPA and CE standards.
Type CS - Flat Surface Cross Type L - O-ring Vacuum
BACK PANEL FEATURES and Scroll Design Holding Chuck with
Used to hold a thin, planar Mechanical Locating Fingers
All models have an integrated power cord socket, fuse and on/off switch surfaced substrate such as Designed for heavy, large or
assembly on the rear panel. Programmable models have connections for a foot silicon, glass or germanium unsymmetrical substrates.
on a spinning shaft for Guide fingers assist in
pedal and dispensing unit, and for the optional external computer interface.
maximum rotational speed. positioning and holding
Back Panel of
Has cross and scroll design. substrates. An O-ring seal
Programmable Unit is also provided.
CONTROL PANEL FEATURES
Type H - O-ring Vacuum Type R - Recessed Fixture
Programmable Non-Programmable Holding Chuck Chuck (Custom Manufactured to
Recipe Number Speed Used to hold relatively heavy Precise User Specified Dimensions)
substrates such as glass, This chuck features a custom
Speed Remaining Process Time quartz, ceramic and metal. milled recess for square or
Features O-ring vacuum seal. rectangular substrates,
Remaining Process Time Message Line
providing uniform coating
Message Line across the substrate.
Up/Down Arrows for:
Right, Left, Up & Down Arrows Ramp Up/Down & Dwell
Control Panel of Mode, Clear, Enter, Start & Stop Buttons Start & Stop Buttons
Programmable Unit
 C O O K S O N E L E C T R O N I C S E Q U I P M E N T

OPTIONAL SPINCOAT SYSTEM FEATURES

G3-8 G3P-8 G3P-12 G3P-15
Chucks X X X X
Internal Vaucuum Pump X X X X
External Vacuum Pump X X X X
PC Interface Software X X X
Dispense Bar and Syringe X X X
Dispensing Unit* X X X
Foot Pedal X X X
Fume Exhaust Adapter X X X
*Third generation Dispensing unit availabe 2Q, 2003

SPINCOAT SYSTEM SPECIFICATIONS

Program Storage…………….......... Non-Programmable 8-inch models (single step profile); Programmable 8-inch, 12-inch and 15-inch
models - up to 30 programs with 20 steps each
Bowl Size………………….............… 8-inch, 12-inch, and 15-inch models
Chuck Rotation Speed………....... 0-9,999 RPM in 1 RPM increments (0-4,000 RPM for 15-inch model)
Acceleration/Deceleration…....... 0.1 to 25.5 seconds, 0.1 second increments (with inertial limitations)
Dwell Time………………................ 0-999 seconds in 1 second increments
Dispense Time…......................... 1 to 25.5 seconds in 0.1 second increments
Power Input…………………............ 115VAC/230VAC, 50/60Hz, single phase 300VA
Vacuum Input………………............ Min. 17 in. Hg (430 mm Hg), 0.25 in./.635 mm O.D. fitting

Purge Input………………............... 0.55 CFM @ 5 psi (14.15 CLM @ 0.35 kg/cm2) air or nitrogen (with optional internal vacuum: 2.2
CFM, 60 psi).
Dimensions…………………............ Small Cabinet - Non-Programmable (8-inch model) 10.5" H x 12" W x 15.4" D
Small Cabinet - Programmable (8-inch model) 11.9" H x 12" W x 16.5" D
Medium Cabinet - Programmable (12-inch model) 11.9" H x 16" W x 20.5" D
Large Cabinet - Programmable (15-inch model) 11.9" H x 19" W x 23.5" D

S C S G 3 S P I N C O A T S E R I E S

SCS WORLD HEADQUARTERS 7645 Woodland Drive, Indianapolis, IN 46278 • Tel: (800) 356-8260 or (317) 244-1200, Fax: (317) 240-2073
www.scscookson.com

WORLDWIDE COATING SITES AND OFFICES

SCS EUROPE Cookson Electronics, Forsyth Road, Sheerwater, Woking, GU21 5RZ, United Kingdom • Tel: (44) 01483 758400, Fax: (44) 01483 758410
SCS SINGAPORE Cookson Electronics Assembly Materials, 14 Tuas Avenue, Singapore 639138 • Tel: (65) 861 1977, Fax: (65) 861 1670
SCS SINGAPORE OFFICE Cookson Electronics Equipment, 150 Kampong Ampat, KA Centre #05-08, Singapore 368324 • Tel: (65) 6286 6635, Fax (65) 6289 9411
SCS GERMANY OFFICE Cookson Electronics Equipment, IM Gefierth 14, D 63303 Dreieich, Germany • Tel: (49) 0 6103 8320, Fax (49) 0 06103 832 299
PARYLENE JAPAN K.K. 480-1, Suwa-Machi, Hachioji-shi, Tokyo 193 Japan • Tel: (81) 426 52 2422, Fax: (81) 426 52 2421

COOKSON ELECTRONICS EQUIPMENT

WORLD HEADQUARTERS 16 Forge Park, Franklin, MA 02038 • Tel: (508) 520-0083; Fax: (508) 520-2288

043 12/02 5M © Copyright 2002 Specialty Coating Systems. All rights reserved. Covered by patent rights issued and/or pending.