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Prp_Messgeraete_e_0703 22.03.

2007 11:40 Uhr Seite 2

Vacuum Gauges
Vacuum Measurement
Transmitter Operating
Instruments.
Technical Information 179.90.02
Prp_Messgeraete_e_0703 22.03.2007 11:40 Uhr Seite 3

Display and Center Line


Transmitter Display and Operating Instruments.

Frequently additional DISPLAY ONE CENTER ONE


Cost-effective, compact single channel CENTER TWO
display and operating display instrument for the transmitters
instruments are nee- of the THERMOVAC line CENTER THREE
Multipurpose single, respectively
ded for the purpose 2 digit display for the mantissa in the
range from 5 10-4 to 1 103 mbar
multi-channel operating instruments
of integration within 0 - 10 Volt chart recorder output
for active sensors from the CERAVAC,
IONIVAC, THERMOVAC, and
system controllers to accessible through plug-in screw PENNINGVAC lines.
terminals
provide the transmit- Display range from 1 10-10 to
The switching threshold for the 1500 mbar
ters with the neces- transmitters is looped through via
Depending on the pressure range,
sary supply voltage or connectors
automatic switching to exponential
to locally display the Indication either in mbar, Torr, Micron
or Pascal
indication of the measured values
measured values. The setup values for the transmitter
Indication either in mbar, Torr, Micron
or Pascal
switching thresholds can be
Adjustable switching threshold with
For such applications Oerlikon Leybold displayed by a single key press
variable hysteresis, floating change-
Vacuum offers different instruments Connectable sensors over contact and visual indication of
each designed for a specific range THERMOVAC the switching status on the display
of applications: TTR 211, TTR 216 S, TTR 90,
Zero correction of the display and
DISPLAY line TTR 90 S, TTR 91, TTR 91 S,
for the chart recorder output upon
TTR 96 S
CENTER line a single key press when using
These instruments supply the opera- CERAVAC transmitters
ting voltage and may be operated DISPLAY TWO / THREE Possibility of entering gas type
either as a benchtop instrument or Multichannel operating and display correction factors
within 19-in. racks. instrument for the transmitters of the
Separate 0 - 10 Volt chart recorder
THERMOVAC and PENNINGVAC lines.
output per measurement channel
All channels are displayed simulta-
neously. RS 232 C interface with adjustable
baud rate
Display range from 1 10-9 to
2000 mbar Relay output indicating malfunctions
Adjustable switching thresholds with Additional features of the Center Two
variable hysteresis, floating change- and Center Three
over contacts and visual indication 0 - 10 Volt chart recorder output
of the switching status through the programmable across several
display measurement channels
The entry of a gas correction factor Connectable sensors
for PENNINGVAC sensors is possible THERMOVAC
Indication either in mbar, Torr, Micron TTR 211, TTR 216 S, TTR 90,
or Pascal TTR 90 S, TTR 91, TTR 91 S,
TTR 96 S, TTR 100
Separate chart recorder outputs
0 to 10 V per measurement channel PENNINGVAC
PTR 90, PTR 225, PTR 237
Connectable sensors
THERMOVAC CERAVAC
TTR 211, TTR 216 S, TTR 90, CTR 91, CTR 100
TTR 90 S, TTR 91, TTR 91 S, IONIVAC
TTR 96 S, TTR 100, TTR 211S ITR 90, ITR 200
PENNINGVAC
PTR 90, PTR 225, PTR 237
2006 Austauschangebot TRIVAC B
Prp_Messgeraete_e_0703 22.03.2007 11:40 Uhr Seite 4

Transmitter
Precision Vacuum Measurement.

Oerlikon Leybold Vacuum transmitters


for vacuum pressure measurement
were specially developed for system
integration and are suited for all appli-
cations where the following criteria
apply:
Direct data transfer to PLC/compu-
ter through analog interface
Longer transmission distances
between measurement location and
processing station
Several measurement location which
need to be monitored constantly
Increased requirements regarding
electromagnetic compatibility (EMC)
Simple cost and space saving PTR 225, TTR 91, CTR 91, ITR 200, CTR 100, PTR 90 (from the left)
installation

CERAVAC Transmitter Measurement principle PENNINGVAC Transmitter


CTR 100, CTR 91 Hot cathode Bayard-Alpert ionization PTR 225/225 S, PTR 237
vacuum gauge combined with a
The CERAVAC transmitters offer excel- Pirani thermal conductivity gauge The PENNINGVAC transmitters are
lent measurement accuracy and repro- Measurement/Display range equipped with a rugged cold cathode
ducibility owing to their diaphragm 5 10-10 bis 1000 mbar sensor for integration within program-
made of a pure aluminium oxide cera- mable systems. They offer high repro-
mic material. ducibility combined with a low conta-
These transmitters are suited for multi- THERMOVAC Transmitter mination tendency even during argon
purpose pressure measurements in TTR 91/91 S, TTR 96 S operation.
the medium and rough vacuum range Operation of the THERMOVAC trans- Measurement principle
even for corrosive process gases. mitters is based on the Pirani thermal Penning cold cathode ionization
Measurement principle conductivity principle. Measurement/Display range
Ceramic capacitance gauge The THERMOVAC TTR 91 S and 1 10-9 to 1 10-2 mbar
Measurement/Display range TTR 96 S are equipped with an
1 Torr* / 1 10-4 - 1 Torr integrated relay. PTR 90
10 Torr / 1 10-3 - 10 Torr Measurement principle The PENNINGVAC PTR 90 sensor
100 Torr / 0.01 - 100 Torr Thermal conductivity after Pirani combines the cold cathode ionization
1000 Torr / 0.1 - 1000 Torr Measurement/Display range principle with the Pirani principle. The
5 10-4 to 1000 mbar PTR 90 can be operated with the new
IONIVAC Transmitter generation of Oerlikon Leybold Vacuum
TTR 100/100 S2 display and measuring instruments.
ITR 90, ITR 200
As a combined Pirani/capacitive vacu- Older units will possibly require a soft-
The IONIVAC ITR 90 permits as a ware modification. Please contact us.
um sensor, the THERMOVAC TTR 100
combined hot cathode ionization
offers superior gas type independent Measurement principle
sensor with a Pirani sensor vacuum
accuracy and pressure measurement Cold cathode inverted magnetron
measurements of non-ignitable gases
in the range of 100-1500 mbar. method combined with thermal
and gas mixtures within a wide mea-
The TTR 100 S2 is equipped with two conductivity after Pirani
surement range.
integrated relays. Measurement/Display range
If required, the dual cathode ITR 200
Measurement principle 5 10-9 to 1000 mbar
is available with an integrated display,
ProfiBus or DeviceNet. Pirani thermal conductivity combined
with capacitive pressure measurement
Measurement/Display range
2006 Austauschangebot SOGEVAC 5 10-4 to 1500 mbar
Prp_Messgeraete_e_0703 22.03.2007 11:40 Uhr Seite 1

Display and Operating Units.

IM 540
Precise UHV measurement

The 3-channel display and operating Connectable sensors


unit IONIVAC IM 540 offers, by
Bayard-Alpert sensor IE 414
combination of up to 4 different
principles of measurement Pirani, Extractor sensor IE 514
capacitive, Bayard-Alpert and in combination with
Extractor, complete coverage and THERMOVAC TTR 211, TTR 216 S,
control of the vacuum pressure in the TTR 90, TTR 91 and TTR 96 S
range between 10-12 mbar and atmos- CERAVAC CTR 90, CTR 91 and
pheric pressure. CTR 100

Display and Operating Instruments


for active sensors of the lines CTR ITR TTR PTR

Single, resp. multichannel display and operating instruments

DISPLAY ONE

DISPLAY TWO

DISPLAY THREE

CENTER ONE

CENTER TWO

CENTER THREE

IM 540

Types of Connection Cables


Display and Operating Instrument DISPLAY ONE DISPLAY TWO CENTER ONE IM 540
DISPLAY THREE CENTER TWO
CENTER THREE

THERMOVAC transmitter Type A Type A Type A Type A

PENNINGVAC transmitter Type A Type A

CERAVAC transmitter Type B Type B

IONIVAC transmitter Type C


Technical alterations reserved

Type A: BBoth ends FCC 68 (RJ45), 8-way shielded


Type B: Sub-D 15-way female to FCC 68 (RJ45), 8-way shielded
Type C: Sub-D 15-way female to Sub-D 15-way male, shielded
Printed in Germany on chlorine-free bleached paper
1.2.03.07 pe

Headquarter Germany
Oerlikon
Leybold Vacuum GmbH
BICOM_09088.02 179.95.02

Bonner Strasse 498


D-50968 Kln
T +49 (0) 221-347-0
F +49 (0) 221-347-1250
info.vacuum@oerlikon.com
www.oerlikon.com

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