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PICMA Multilayer Actuators with Long Lifetime

Automatic soldering machine with PICMA actuators

The internal electrodes and the ceramic of outgassing and high bake-out temperatures.
PICMA multilayer actuators are sintered PICMA piezo actuators even operate in the
together (co-firing technology) to create a cryogenic temperature range, albeit at redu-
monolithic piezoceramic block. This process ced travel. Every actuator is constructed
creates an encapsulating ceramic layer exclusively of non-ferromagnetic materials,
which provides protection from humidity giving them extremely low residual magne-
and from failure caused by increased tism of the order of a few nanotesla.
leakage current. PICMA actuators are there-
fore far superior to conventional, polymer- Low Operating Voltage
insulated multilayer piezo actuators in terms
In contrast to most commercially available
of reliability and lifetime. The construction
multilayer piezo actuators, PICMA actuators
with ceramic encapsulation also gives rise to
achieve their nominal displacement at
a high resonance frequency, making the
operating voltages far below 150 V. This
actuators ideal for high-dynamic operation.
characteristic is achieved by using a partic-
Large Temperature Range Optimum ularly fine-grained ceramic material which
UHV Compatibility Minimal Outgas- means the internal layers can be thin.
sing Neutral in Magnetic Fields The PICMA actuators are at least partially
The particularly high Curie temperature of protected by the following patents:
320 C gives PICMA actuators a usable German Patent No. 10021919
temperature range of up to 150 C, far German Patent No. 10234787
beyond the 80 C limit of conventional mul- German Patent No. 10348836
tilayer actuators. This and the exclusive use German Patent No. 102005015405
of inorganic materials provide the optimum German Patent No. 102007011652
conditions for use in ultra-high vacuums: No US Patent No. 7,449,077

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PIEZOTECHNOLOGY

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