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. USOO5239440A
United States Patent [19] [11] Patent Number: 5,239,440
Merrill [45] Date of Patent: Aug. 24, 1993

[54] ELECTROSTATIC DISCHARGE cuit Reliability," New Electronics, Incorporating Elec-


PROTECTION FOR INTEGRATED tronics Today (Apr. 1985) 18(8):151-153.
CIRCUITS
Primary Examiner-Steven L. Stephan
[75] Inventor: Richard B. Merrill, Daly City, Calif. Assistant Examiner-D. R. Haszko
[73] Assignee: National Semiconductor Corporation, Attorney; Agent, or Firm-Townsend and Townsend
Santa Clara, Calif. Khourie and Crew
[21] Appl. No.: 930,492 [57] ABSTRACT
[22] Filed: Aug. 14, 1992 A circuit is disclosed for protecting an integrated circuit
or another circuit from damage due to electrostatic
Related U.S. Application Data discharge. The protection circuit includes a triggering
[63] Continuation of Ser. No. 452,879, Dec. 19, 1989, aban- circuit and a clamping circuit. In response to an electro-
doned. static discharge, the triggering circuit turns on the
clamping circuit to clamp a node of the protected cir-
[51) Int. C1.s H02H 9/04; H02H 3/22
cuit to both an upper and a lower potential. This allows
[52] U.S. C1 361/91; 361156
the electrostatic discharge to dissipate harmlessly to
[58] Field of Search 361156, 58, 91, 98,
3611111; 357/23.13 either potential source, depending upon its polarity.
Preferably, the triggering circuit consists of a resistor-
[56] References Cited capacitor network which generates the required control
U.S. PATENT DOCUMENTS signal every time power is supplied to the circuit being
protected, while the clamping circuit consists of a pair
4,870,530 9/1989 Hurst 361191
of transistors for connecting an input pin to both the
OTHER PUBLICATIONS high and low potential sources. Typically, one protec-
Q. Say, "Resistorless ESD Protection Device for High tion circuit is coupled to each input/output pin of the
Speed CMOS Circuits," Proc. o/the IEEE 1988 Custom integrated circuit being protected.
Integrated Circuits Conj, May 1988, pp. 27.2.1-27.2.4.
L. R. Avery, "ESD and the Effects on Integrated Cir- 13 Claims, 5 Drawing Sheets

10 15
20 18
110 I - -__- l PAD
BUFFER
----
Vss 26
Vee
PROTECTEO 20 18
CIRCUIT I/O t----t-"-l PAD
FUNCTIONS IlIFFER
26

B
t---.--I PAD

l();lC FOR 26
ESD
,.-----
I v...
.... I
I 'IN I
I 34 1,11
I - ,-J_ L_,
I I I
I I

,'36-T
I
, v.;..
L ' l - __
I
,
I
J

I .~ r- 24
L J
u.s. Patent Aug. 24, 1993 Sheet 1 of 5 5,239,440

I 10 l 15
I/O ,20 {I8
CONTROL
lOGIC
110
BUFFER {PAD 1
12) I- - - - ___ ------
lOGIC FOR .~VSS '""26
22.. ESD I
' Vee
,15
PROTECTED I/O
(20 (18
CIRCUIT CONTROL 110 1PAD I
FUNCTIONS lOGIC BUFFER
IiI 1------
lOGIC FOR
1-----

22.. YSS ...26
ESD 1

I
115 ~~Vee
I/O
,20 (18
CONTROL
lOGIC I/O
BUFFER
{PAD 1
12J -------
22... lOGIC FOR -:~V~-~26
ESD I
,..---- .... l~Vx
I
I
Vee 'I
I 34 ~ I,~
,
I -~
-~ I
r--- L - ..

II

~
I
36-
r , -
H-l>--J"'-!
___ L
I ___ !

I
I
V I

: VSS }"24
L J
u.s. Patent Aug. 24, 1993 Sheet 2 of 5 5,239,440

FlL2.
u.s. Patent Aug. 24, 1993 Sheet 3 of 5 5,239,440

_L....-_
18+ TO VSS

42
Vee TO Vss N· 18'
40
26 A p. -,
I
I
41 I
I
I

Vss~--
18- TO VSS
'----------T-·-----
'-8 .
1

/15
- I/O
CONTROl
TRIGGER
-
1-----4
LOGIC
u.s. Patent Aug. 24, 1993 Sheet 4 of 5 5,239,440

VCCE IBE+ TO YssI VCCI

N-
IBE 26E 261 401
p- .

50
VSSE VSSI
18E- TO VSSI p-
AG._SA.

VCCE 18E +TO VCCI VCCI

N-
18E 26E 261 401
p.

50
VSSE . VSSI
I8E- TO VCCI p-
FIG._6B.

VCCE + TO VSSI
VCCE _=::....a....;~

l- N-
40E
P- • 261
p-
401

VSSI
VCCE -TO VSSI
p- FIG._6C.
u.s. Patent Aug. 24, 1993 Sheet 5 of 5 5,239,440

VCCE t TO VCCI
~cr

2IiE 40I
IBE
p- .

VSSE VssI
VCCE - TO VCCl p.
SUB RES
FIG-SO.

N
I8E 4« 26E
p-

p_ CVSSE + Vssr VSSI


SUB RES
fIG._6E.

N-
I8E 40E 26E 261 40I
p- p-

VSSE VssI
VSSE - TO Veer p- VSSE +TO Vccr
SUB fES
fIG._~
5,239,440
1 2
the acceptability of previous electrostatic discharge
ELECTROSTATIC DISCHARGE PROTECTION protection techniques.
FOR INTEGRATED CIRCUITS
SUMMARY OF THE INVENTION.
This is a continuation of application Ser. No. 5 This invention provides electrostatic discharge pro-
07/452,879 flled Dec. 19, 1989, now abandoned. tection circuitry that allows circuit fabrication and anal-
ysis using common methods. In particular, the tech-
BACKGROUND OF THE INVENTION nique of this invention provides a low impedance
1. Field of the Invention switch which dissipates static electricity, yet is transpar-
This invention relates to electrostatic discharge pro- 10 ent to normal circuit operation. The circuit of the pre-
tection circuits. More particularly, the invention relates ferred embodiment satisfies military specifications, and
to an electrostatic discharge protection circuit used to is capable of protecting the newest substantially de-
protect field effect transistor circuits, especially those creased feature sizes of MOS integrated circuits, not
with features of one micron or smaller. heretofore possible. The invention also protects inte-
2. Description of the Prior Art 1S grated circuits prior to their installation on circuit
Integrated circuits employing field effect devices, boards.
commonly termed MOS integrated circuits, have a The invention provides a switch between the power
history of susceptibility to electrostatic discharge. supplies driving the integrated circuit, typically Vee
Given the decreasing size of circuit features with eve- and Vss, that is turned on only during the electrostatic
rimproving process technology, static electricity gener- 20 discharge event. Using this technique, an electrostatic
ated by daily activity alone can destroy or substantially discharge event of polarity that would. normally re-
harm many MOS circuits. The circuits most susceptible verse-bias the circuits input diodes now can be shunted
to damage are usually finished circuits which have been through forward-biased diodes and a short circuit be-
packaged, but not yet installed into a finished product. tween Vss and Vee.
Once installed, other means can protect the chip from 2S Additionally, electrostatic discharge events of a po-
damage. 1arity that tended to reverse-bias the input diodes tends
An electrostatic discharge typically occurs when the to supply power to VeelVss. This invention makes use
circuit is touched by an individual handling the circuit of the effect to provide power to the logic that controls
before installation; when a static discharge occurs as the the low impedance VeelVss switch.
packaged circuit slides on its pins across another sur- 30 In the cases of discharges during handling or when
face; or more generally, whenever the circuit is exposed not in place on a printed circuit board, the discharge
to static electricity. Overall, damage from electrostatic will power up the circuit causing the logic circuit to
discharges is the cause of over half of the devices re- operate to turn on the clamp. The clamp then allows the
turned by customers. electrostatic charge to dissipate through whatever ma-
One traditional method for protecting integrated 3S terial contacts the circuit pins.
circuit devices employing field effect transistors from The electrostatic discharge protection circuit of a
electrostatic discharge is to use diodes. These diodes are preferred embodiment is easily fabricated on a chip
coupled between the .input paths of the circuit and the using well known fabrication processes. The circuit is
pins to which the power supplies are connected. With small, and therefore integrates easily onto an integrated
electrostatic discharge events of one polarity the diodes 40 circuit chip with the normal circuitry otherwise pres-
are forward-biased, and with discharges of the opposite ent. Importantly, the protection circuit is transparent to
polarity they are reverse-biased. Normally the dis- the protected circuit's normal operation.
charge that causes the diodes to become reverse-biased
is the more problematic, because voltages and power BRIEF DESCRIPTION OF THE DRAWINGS
surges seen by the internal logic circuits are higher than 45 FIG. 1 is a block diagram of a preferred embodiment
for the forward-biased case. Other methods used for of the electrostatic discharge protection circuit illustrat-
protecting MOS circuits from electrostatic discharge ing its relationship with a circuit being protected.
damage are almost always variations on the diode FIG. 2 illustrates a typical circuit employed to acti-
clamping system described above. vate the electrostatic discharge protection circuit.
The traditional methods described above usually SO FIG. 3 illustrates the current paths for various dis-
function satisfactorily for circuits with large features. charge polarities between a pin or pins and power
As the features of integrated circuits, however, ap- supplies. .
proach one micron and smaller, lower voltages than FIG. 4 illustrates an alternative embodiment of the
those which damage larger features can destroy the electrostatic discharge protection circuit.
diodes and the circuit. A more serious problem with SS FIG. 5 illustrates a further alternative electrostatic
double diode clamps is that they are not readily subject discharge protection circuit.
to analysis by circuit simulation software. In other FIGS. 6A to6F depict current paths for discharge
words, it has typically been a "hit or miss" approach polarities in multiple supply circumstances.
with double diode clamps to protect circuits from elec-
trostatic discharge. This hit or miss approach inhibits 60 DETAILED DESCRIPTION OF THE
and delays product development, adding trial and error PREFERRED EMBODIMENTS
. design cycles to product release. FIG. 1 illustrates a preferred embodiment of the elec-
Another complication with electrostatic discharge trostatic discharge protection circuit in block form as
problems is the increasingly higher customer standards employed to protect another circuit. As shown in FIG.
in device reliability and performance. The military, in 65 1, a protected circuit 10 has a series of input/output
particular, by imposing standards such as Military Stan- nodes 12. For simplicity, only three such nodes are
dard 883C have significantly increased the product shown in the figure; however, it should be understood
performance standard over the old standard. This has that in a typical embodiment there may be hundreds of
5,239,440
3 4
such nodes. The protected circuit can have any func- FIG. 2 is a schematic diagram illustrating the extra
tion, but typically will be a digital logic circuit such as logic added in block 22 of FIG. 1 to provide electro-
a gate array or the like. Data, addresses, and other sig- static discharge protection. The circuit shown in FIG. 2
nals destined for the protected circuit are received at receives three input signals, a reset signal R from circuit
bonding pads 18, typically positioned around the pe- 5 24, a data signal D and a signal T. Under normal pro-
riphery of an integrated circuit on which all of the tected circuit conditions only D and T are active. In the
circuitry of FIG. 1 is formed. These signals then are event of an electrostatic discharge, however, R will go
supplied to input/output buffers 20 and to input/output to a low voltage to turn on the low impedance switch 26
control logic 15 before reaching the protected circuit. on the right-hand side of the circuit. The low impe-
Of course, in a similar manner, signals originating 10 dance switch connects Vee to Vss, discharging the
within the protected circuit, which are destined for electrostatic event.
circuits outside the integrated circuit being protected, FIG. 3 is a diagram illustrating .the discharge paths
are supplied from the protected circuit through the for several different electrostatic conditions. The circuit
control logic 15 and buffers 20 to bonding pads 18. of FIG. 3 includes a Vee rail and a Vss rail. The clamp
Importantly, in addition to the conventional circuitry 15 circuit 26 described in conjunction with FIG. 1 is illus-
described, the circuit shown in FIG. 1 includes some trated as a switch 26' in FIG. 3.
additional logic 22 for controlling or "triggering" the To explain the discharge paths, switch 26' is shown in
electrostatic discharge protection circuit 24, 30. This is a closed position as it would be after triggering by an
described below. electrostatic event. The diodes 41 and 42 shown in the
The electrostatic discharge circuit provides a clamp 20 figure are the input diodes associated with each bonding
26 which also acts as a switch, that is, by appropriate pad, while the large diode 40 represents the diode
means, such as logic 22 turned on between Vee and Vss, formed by the N conductivity type wells and P conduc-
during an electrostatic discharge event. This results in ~~~~t~~l~~~~:: ~/t~~;~~ ~~i~a::l~?rd~~~~~
the electrostatic discharge event being discharged in a 25 Vee or Vss is charged positively with respect to the
direction that would normally reverse-bias the input other, the dischar'ge would be dissipated through the
diod~s, the worst case in prior art de~ices. ~e event switch to the other rail.
thus IS shunted through the forward-biased diodes and On the other hand, if the electrostatic discharge
the .sho~ between Vss .and Vc~. B~cause an electro- causes Vee to be biased positively with respect to the
static dls~harge eve~~ m t~e dIr~ctlOn. that tends .to 30 bonding pad 18, the discharge will flow through switch
reverse-bias the tradltlOnal mput diodes ~s o~ a J?Olanty 26' and then through diode 41 to bonding pad 18. If pad
that ~ends to power up Vc.c and Vss, this circuit helps 18 is biased more positive than Vss, then the discharge
prOVide powe~ to the logiC 22 that controls the low is dissipated through a path from the bonding pad
Impedance sWitch.. .. . through diode 42, and thensthrough switch 26' to Vss.
In essence, the tngger CirCUit 24 shown m FIG. 1 35 Also illustrated in FIG. 3 is the pad-to-pad discharge
controls the clamps 26 to short V~c t? Vss, or power to path. If bonding pad 18 is biased by the electrostatic
ground, wh.ene.ver an electrostatic d1S~harge event o~- discharge event more positively than pad 18', then the
curs. By adJustmg the v~ues of the resistor and ca~acI- charge will be dissipated along path B. If pad 18' is
tor components of the tngger, shorter or lo~ger peno~s positive compared to pad 18, then the charge will be
~ay ?e en,tployed. In the preferred embodiment, lo~c 40 dissipated in a corresponding manner.
CirCUit 22 IS connected through a buffer 30 to the resls- FIG. 4 is an alternative embodiment in which the
tor-capacitor circuit 24: BU!fer circu~t ~ step~ the volt- control logic 15 is protected by a trigger circuit 35
age. up. fro~ the RC clrcul.t before It IS a~phed t? th.e driving a single large transistor 38, instead of the clamp
logiC CIrCUit 22. The capacitor 36 of the tngger CIrCUit discussed above. The source and drain of the transistor
is connected to Vss, while the resistor 34 is connected to 45 are coupled between Vcc and Vss. During an electro-
Vcc. static event, the trigger is activated, turning on transis-
In operation, the protection circuit uses some of the tor 38 for a short time to dissipate the excess charge to
voltage from the accumulating static electricity to en- the power supply, regardless of the polarity of the dis-
able the logic 22 to turn on the clamp 26 to dissipate the charge. Trigger 35 can employ any standard triggering
excess voltage. Because an electrostatic discharge event 50 technique. For example, in one embodiment it is acti-
occurs much faster than I microsecond, the RC bypass vated each time the circuit is tumed on by using an RC
circuit 24 is set so that the circuit time constant of resis- network such as network 24 in FIG. 1.
tor 34 and capacitor 36 are such that the low impedance A further embodiment of our invention is shown in
switch is on for a period of time in excess of the electro- FIG. 5, illustrating a different trigger circuit. As shown
static discharge event. A preferred time constant is 55 therein, a capacitor 40 is connected between Vee and a
about I microsecond, because it is slow enough to allow field effect transistor 42. The gate of field effect transis-
the discharge to power the logic circuit and enable the tor 42 is, in turn, connected to another field effect tran-
complementary transistors int eh low impedance sistor 43, while the source and drain are connected
switch. between Vee and ground. Transistor 43 is connected
The RC bypass circuit 24 is designed not to trigger 60 between the gate of transistor 42 and ground, with the
during normal power supply ramp-up. This is achieved gate of transistor 43 being coupled to an RC network
by setting the RC time constant greater than the ESD formed by resistor 4S and capacitor 47.
time constant and less than the circuit board's regular In operation, a voltage spike or discharge on Vcc will
power supply rise time. charge capacitor 40 turning on transistor 42 to short
Placing the clamp 26 in the I/O buffer 20, while 65 Vcc to ground whenever a spike occurs. The RC net-
placing the inverter at the logic output, effectively work has a time constant of about 2 microseconds and
shields the logic circuit from static electricity damage, prevents Vcc from being connected to Vss (not shown)
yet allows the logic circuit 15 to function normally. except during power up or during a pulse on Vcc. In the
5,239,440
5 6
preferred embodiment, capacitor 40 and 47 will each be test various components were manufactured in a man-
about 2 picofarads, and resistor 45 will be about I meg- ner which allowed the electrostatic discharge tech-
ohm. niques described herein to be selectively enabled and
FIGS. 6A-6F illustrate current paths for discharges disabled. Each part was "zapped" at 3 KeV in aeeor-
of various polarities in a multiple pin circumstance. For 5 dance with the military specification on a IMCS 3000
an integrated circuit to comply with military standards, ESO tester. All parts passed the test with the protection
it must be capable of dissipating an electrostatic charge circuit enabled, and all failed with the circuit disabled.
of any polarity applied to anyone of the multiple power An important advantage of all of the alternative em-
supplies used to drive a circuit. The dissipation of bodiments described above is their ability to be simu-
charge in these circumstances is shown in FIGS. 10 lated using conventional circuit simulation techniques.
6A-6F. Each of the figures depicts the input diodes, the Prior art techniques for protecting circuits from electro-
substrate N-well diode, and the clamp circuit described static discharge were difficult to simulate, and conse-
in conjunction with earlier figures herein. Correspond- quently circuits employing them often required modifi-
ing components have been given the same reference cation after fabrication of an integrated circuit employ-
numeral in each figure. Each figure also shows the 15 ing them. Of course, making significant changes to an
circuitry for each of two pins--pin E and pin I, each pin integrated circuit after its initial fabrication is extremely
driven by different power supplies. All pins on an inte- expensive and time consuming, often delaying shipment
grated circuit are effectively connected together of the protected product for a considerable period.
through a substrate resistance, and this resistance is Such delays are highly disadvantageous. In addition,
represented by a resistor SO shown between the electro- 20 circuits employing the protective techniques described
static discharge protection circuit for pin E and the herein satisfy military specifications. According to one
circuit for pin I. military specification,. no damage to a circuit must
In FIG. 6A two electrostatic discharge current paths occur if any or all pins are zapped to each of power and
are depicted. The first current path shows current flow ground, and also with respect to other pins.
for a circumstance in which the input pin 18E is biased 25 Although the foregoing has been a description of the
positively with respect to Vssl. In this circumstance, preferred embodiment of the invention, it will be obvi-
the currenrflow through the upper diode 42E to VeeE, ous to those of skill in the art that variations may be
then through clamp 26E and substrate resistor SO to made without departing from the scope of the inven-
Vssl. As also shown in FIG. 6A, if instead VssI is biased tion. For example, although in the preferred embodi-
negatively with respect to VssI, then current flow is 30 ment the protected circuit, the logic circuit implement-
through resistor SO and lower diode 41E to pad 18E. ing the electrostatic protection and the clamp circuit
FIG. 6B illustrates two current paths for circum- have all been described as employing field effect transis-
stances in which the input pin is biased positively and tors, bipolar transistors may be used instead. The scope
negatively with respect to VccI of another pin on the of the invention is set forth in the appended claims.
circuit. In the case in which the input pin 18E is biased 35 We claim:
positively with respect to VccI, then current flow is 1. A protection circuit for protecting a functional
through the upper diode 42E, the low impedance circuit from electrostatic discharge, the functional cir-
switch 26E, the substrate resistor 50, and fmally diode cuit having a power supply with a first potential, a low
401 to VccI. For the circumstance in which VccI is potential source with a potential lower than the first
biased more positively than the input pin 18E, then 40 potential, and an input node connected between the
current flow is through switch 261, substrate resistor SO, power supply and the low potential source, the protec-
and lower diode 41E to pad 18E. tion circuit comprising:
FIG. 6C depicts the circumstances in which VccE is a first node connected between the power supply and
biased positively and negatively with respect to VssI. In the input node;
the case of Vcc being more positive than VssI, the 45 a second node connected between the low potential
current flow is through switch 26E in substrate resistor source and the input node;
SO to Vssl. In the other circumstance, current flows triggering means for generating a control signal in
from VssI through the diode 40E to VccE. response to an electrostatic discharge; and
FIG. 60 illustrates circumstances in which VeeE and switch means connected to the triggering means for
VeeI are biased with by the electrostatic event opposite SO switchably connecting the first node to the second
polarities. As shown, the current paths are symmetrical. node in response to the control signal.
When VeeI is biased more positively than VeeE, cur- 2. A protection circuit as in claim 1 whereiI\. the
rent flows through switch 261, through su.bstrate resis- switch means comprises:
tor SO and through diode 40E to VeeE. If VccE is more a first transistor connected between the input node of
positive than VeeI, current flows in the opposite direc- ss the functional circuit and the first node, and
tion through switch 26E and diode 401. a second transistor connected between the input nbde
FIG. 6E illustrates a simple case in which VssE and and the second node.
VssI are biased by the electrostatic event with respect 3. A protection circuit as in claim 2 wherein each of
to each other. As shown, current simply flows from the the first and second transistors is connected to receive
more positively biased to the less positively biased 60 the control signal and in response connected to input
through the substrate resistor SO. node to the corresponding first and second nodes.
FIG. 6F illustrates the circumstance in which VccI 4. A protection circuit as in claim 3 wherein each of
and VssE are biased with respect to each other. In this the first and second transistors comprises a field effect
case, current flowing from VeeI passes through switch transistor.
261 and resistor SO. Current flowing in the opposite 65 5. A protection circuit as in claim 1 wherein the trig-
direction flows through resistor SO and diode 401. gering means comprises a resistor-capacitor network
The techniques described herein were tested to assure for triggering the switch means whenever an electro-
their compliance with Military Standard 883C. In one static discharge event occurs.
5,239,440
7 8
6. A protection circuit as in claim 5 wherein the resis- signals supplied to the connection nodes, the func-
tor-capacitor network comprises a serially connected tional circuit having a power supply with a first
resistor and capacitor between the first node and the potential, a low potential source with a potential
second node. lower than the fll"St potential, and at least a first
7. A protection circuit as in claim 6 wherein the resis- 5 connection node connected to the power supply
tor-capacitor network is chosen to have a time constant and a second connection node connected to the
greater than the duration of the electrostatic discharge. low potential source;
8. A protection circuit as in claim 1 wherein the a plurality of switch means, one connected to each of
switch means comprises a single transistor connected to the corresponding ones of the plurality of connec-
the frrst node and the second node. 10
tion nodes, each switch means for connecting that
9. A protection circuit as in claim 8 wherein the single
transistor comprises a field effect transistor having a connection node to both the first and second con-
control electrode connected to the trigger circuit. nection nodes in response to a control signal; and
10. A protection circuit as in claim 1 wherein the a triggering circuit for generating the control signal
triggering circuit comprises: 15 in response to an electrostatic discharge.
a transistor connected between the fll"St node and the 12. A protection circuit as in claim 11 wherein the
second node, whereby an electrostatic discharge triggering circuit also generates the control signal for a
on the frrst node will tum on the transistor to con- short time each time power is applied to the functional
nect the first node to ground. circuit is powered up.
11. An integrated circuit protected from electrostatic 20 13. An integrated circuit as in claim U wherein the
discharge comprising: triggering circuit is also connected between the frrst and
a functional circuit having a plurality of connection second connection node.
nodes for performing operations in response to • • • • •
25

30

35

40

45

50

55

60

65
UNITED STATES PATENT AND TRADEMARK OFFICE
CERTIFICATE OF CORRECTION

PATENT NO. : 5,239,440 Page 1 of 1


APPLICATION NO. : 07/930492
DATED : August 24,1993
INVENTOR(S) : Richard B. Merrill

It is certified that error appears in the above-identified patent and that said Letters Patent is
hereby corrected as shown below:

In Column 6, line 60, "connected to" should be --connects the--.

In Column 7, line 13, "trigger circuit" should be --triggering means--.

In Column 7, line 15, "circuit" should be --means--.

Signed and Sealed this

Eighteenth Day of December, 2007

JON W. DUDAS
Director ofthe United States Patent and Trademark Office

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