MEMS Lab Manual-Final

MEMS
Lab Manual
INSTITUTION: Bits Pilani Dubai
*The COMSOL logo solely belongs to the company COMSOL AB. We do not claim any ownership.
S.No. Experiment Page No.
1 Design a MEMS Cantilever Beam and compare between 1

Point Load & Surface Load
2 Design a MEMS Cantilever Beam having Multilayers 11
3 Detection of HIV virus by Micro-Cantilever 15
4 MEMS Capacitance 20
5 Microgripper 24
6 Joule Heating of Microactuator 37
7 Microresistor Beam 42
8 Pressure Sensor 55
9 MEMS Comb Drive Actuator 59
I
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LAB 1: MEMS CANTILEVER
AIM:
To model a MEMS Poly-Silicon cantilever using COMSOL and simulate the stress
and deflection caused due to:
Boundary load
Point Load
Modeling Instructions
A. To Simulate Boundary Load
1. At COMSOL start-up screen, select: Model Wizard 3D (Space

Dimension).
2. Select Physics: Structural Mechanics Solid Mechanics (solid) Select

Study Stationary.
1
3. Select Geometry and change Length unit to m (micrometer).
4. Right Click Geometry Select Block.
2
5. Enter the Block Dimensions Click Build Selected / Build All Objects. **
Width 20 m
Depth 100 m
Height 5 m
*Build Selected* builds and displays the current geometrical object in consideration along with all the objects above it in the
Geometry list.
*Build All Objects* builds all the geometrical objects added to the model and displays them.
6. To add material for our geometrical component: Select Add Materials

from top ribbon menu or Right click Materials under Model Builder panel
and select Add Materials MEMS Semiconductors Poly-Si
Add to Component 1.
3
7. Right-click Solid Mechanics Fixed Constraint. Click Boundary 2 or
rotate block and select Boundary 5. Here we proceed by selecting
Boundary 5 of the block.
(Or)
8. After selecting Boundary 5 click the symbol shown below, to get default
view back.
4
9. Solid MechanicsBoundary LoadSelect top surface of block
(Boundary 4).
10. Enter the value of force = 10 Newton
We fill the row for z-axis as: -10

[The negative sign implies that force is acting downwards]
5
11. Build Mesh.
12. Compute and youll get Stress Plot.
6
13. To get Displacement Plot : In Model Builder, under Results right click
Stress and click Surface Youll see Surface 2 : Click Replace
Expression Solid Mechanics Displacement Total Displacement
Click Plot
7
Change color of legend to distinguish between plots.
** If you want separate plots and not on same Graphic display, then dont create Surface 2 rather Replace Expression in
Surface 1 itself.
Case:
Keep the force constant and vary the Depth to 150, 175 and 200. Note
down the stress and displacement in each case.
B. To Simulate Point Load

Same us above with a few added steps:
After creating Block 1 (blk1), right click Geometry select More Primitives
click Point.
We want to position the Point (i) along the center [x-axis] (ii) near the end
of the block [y-axis] and (iii) exactly on the surface [z-axis]. So accordingly
enter the coordinate values in the Point settings window.
x 10 m x: 10 m = Half of Width
y 5 m
z: 5 m = Height of Block
z 5 m
8
Right click Solid Mechanics Points select Point Load.
Zoom in the block and select the point created i.e. select Point 5.
Select this point
In the Point Load settings window, locate Force, Fp. In the z edit field
type -10.
Repeat above steps in To Simulate Boundary Load to get displacement

and stress plots.
Expected Result for point load stress:
9
BRIEF REPORT
To generate report of your simulation: Under Model Builder panel right click
Report and select Brief Report.
In the Report settings window, change Output format from HTML to
Microsoft Word.
Click Browse to choose your destination path. After entering desired filename
click Save.
In the Report settings window, click Write
Write
Change to Microsoft Word
10
LAB 2: MEMS CANTILEVER WITH MULTILAYERS
AIM:
To model a MEMS cantilever having more than one layer
Figure 1: Multilayered Cantilever Geometry.
Figure 2: Meshed Final Geometry
11
Expected Result:
Figure 3: Surface von Mises stress Figure 4: Surface Total displacement
From the File menu, choose New.
NEW
1 In the New window, click the Model Wizard button.
MODEL WIZARD
1 In the Model Wizard window, click the 3D button.
2 In the Select physics tree, select Structural Mechanics>Solid Mechanics (solid).
3 Click the Add button.
4 Click the Study button.
5 In the tree, select Preset Studies>Stationary.
6 Click the Done button.
GEOMETRY 1
1 In the Model Builder window, under Component 1 (comp1) click Geometry 1.
2 In the Geometry settings window, locate the Units section.
3 From the Length unit list, choose m.
Block 1 (blk1)
1 In the Model Builder window, under Component 1 (comp1)> right click Geometry 1 and add
Block.
2 In the Block settings window, locate the Size section.
3 In the Width edit field, type 20.
4 In the Depth edit field, type 100.
5 In the Height edit field, type 3.
12
6 Click the Build All button.
7 Click the Zoom Extents button on the Graphics toolbar.
Block 2 (blk2)
1 Right click Block 1 and click Duplicate.
4 Locate the Position section. In the z edit field, type 3 (3 is the height of Block 1, you want to place
Block 2 exactly on the surface of Block 1, so enter the height of Block 1 as z coordinate for
Block 2) .
6 Click the Zoom Extents button on the Graphics toolbar
Block 3 (blk3)
3 In the Height edit field, change the value to 1.
4 Locate the Position section.
5 In the z edit field, type 5 (Height of Block 1 + Height of Block 2 = 5).
The model geometry is now complete.
13
SOLID MECHANICS (SOLID)
Fixed Constraint 1
1 In the Model Builder window, under Component 1 (comp1)> right click Solid Mechanics (solid)
and add Fixed Constraint.
2 Select Boundaries 11, 12, 13 only.
Boundary Load 1
and add Boundary Load.
2 Select Boundary 10 only.
3 In the Boundary Load settings window, locate Force. In the FA z edit field, type -10.
Then in the Home toolbar click Build Mesh and then click Compute to get Stress plot. Then obtain
Displacement plot under Results.
14
LAB 3: HIV SENSOR
AIM:
To model a MEMS cantilever that detects the presence of HIV virus using COMSOL.
HIV virus is roughly spherical with a diameter of about 126 nm. The total force to be applied
on the surface of cantilever can be made by calculating the volume and substituting the
density value. By Newtons law, total force produced by one HIV F= 9.8x10-18 Newton.
Figure 1: HIV Virus Detector Geometry.
15
Expected Result:
Figure 3: Surface Total displacement
NEW
MODEL WIZARD
GEOMETRY 1
Work Plane 1 (wp1)

1 On the Geometry toolbar, click Work Plane.
16
This gives a default work plane aligned with the xy-plane at z = 0.
Rectangle 1 (r1)
1 In the Model Builder window, under Component 1 (comp1)>Geometry 1>Work Plane 1 (wp1)
- right-click Plane Geometry and choose Rectangle.
2 In the Rectangle settings window, locate the Size section.
5 Locate the Position section. In the xw edit field, type -50.
6 Click the Build Selected button.
Rectangle 2 (r2)
8 Right-click Plane Geometry and choose Rectangle.
13 In the yw edit field, type 900.
Bzier Polygon 1 (b1)

1 In the Model Builder window, under Component 1 (comp1)>Geometry 1>select Work Plane 1
(wp1)
2 On the Work Plane toolbar click Line and trace the outline of the T-shape by left- clicking
from corner to corner till you reach the starting point (start and end at the same point). Now right
click anywhere on the Graphics window.
3 Youll notice Bezier Polygon 1 (b1) under Component 1 (comp1)>Geometry 1>select Work
Plane 1 (wp1).
4 Now disable Rectangle (r1) & Rectangle (r2).
5 Click the Build All button. A continuous T-shaped 2D cantilever is formed.
17

Extrude 1 (ext1)
1 On the Geometry toolbar, click Extrude.
2 In the Extrude settings window, locate the Distances from Plane section.
3 In the table, enter the following settings:
Distances (m)
4
5 Click the Go to Default 3D View button on the Graphics toolbar.
6 Zoom Extents button on the Graphics toolbar.
18
MATERIALS
On the Home toolbar, click Add Material.
ADD MATERIAL
1 Go to the Add Material window.
2 In the tree, select MEMS>Semiconductors>Poly-Si.
3 In the Add material window, click Add to Component.
Fixed Constraint 1
Boundary Load 1
6 In the Boundary Load settings window, locate Force and choose Load type as Total force.
7 In the Ftot - z edit field enter 9.8e-18 (negative sign indicates downward force along z- axis.)
Then in the Home toolbar click Build Mesh and then click Compute. Then obtain Displacement plot
under Results.
Case: Increase paddle length from 500 m to 1000 m and observe if theres improvement in
displacement (i.e. improvement in detection)
Paddle length = 500 m Paddle length = 1000 m
19
LAB 4: MEMS PARALLEL PLATE CAPACITOR
AIM:
To simulate capacitance of a MEMS parallel plate capacitor using COMSOL.
Figure 1: Parallel Plate Capacitor Geometry.
20
Expected Result:
Figure 3: Surface Capacitance
NEW
MODEL WIZARD
2 In the Select physics tree, select AC/DC>Electrostatics (es).
GEOMETRY 1
21
Block 1 (blk1)
Block.
Block 2 (blk2)
2 In the Block settings window, locate the Position section.
3 In the z edit field, type 10.
Block 3 (blk3)
3 In the Height edit field, change the value to 8.
22
MATERIALS
ADD MATERIAL
2 In the tree, select MEMS>Semiconductors>Si Polycrystalline Silicon.
3 In the Add material window, click Add to Selection.
4 Select Domains 1 & 3 only (i.e. the capacitor plates)
5 In the tree, select Built-In>Air.
6 In the Add material window, click Add to Selection.
7 Select Domain 2 only (i.e. the dielectric).
ELECTROSTATICS (ES)
Terminal 1
1 In the Model Builder window, under Component 1 (comp1)> right click Electrostatics (es) and add
Terminal.
2 Select the entire upper plate as terminal i.e. Boundaries 7, 8, 9, 10, 13, 16.
3 Locate Terminal type and select Voltage. In the Voltage edit field, type 5 (applying 5 volts).
Ground 1
Ground.
2 Select the entire upper plate as ground i.e. Boundaries 1, 2, 3, 6, 11, 14.
Then in Home toolbar click Build Mesh and then click Compute to obtain Results.
RESULTS
Surface 1
1 In the Model Builder window, under Results> Electric Potential> right click Multislice and choose
disable.
2 Under Results>right click Electric Potential>add Surface.
3 In the Surface settings window locate and click this symbol. Type in the search bar capacitance and
add es.C11 Capacitance from the options in the list. Click Plot to obtain Capacitance plot.
Change the dielectric material from Air to Glass (or any other desired medium) and note down the
change in capacitance.
23
LAB 5: MICROGRIPPER
AIM & INTRODUCTION:
To model a piezoelectrically actuated microgripper with mechanical contact. The

microgripper contains a piezoelectric actuator that operates in the longitudinal
mode. Elongation in the longitudinal direction creates a lifting movement to the
structure. Simultaneous contraction in the transversal direction closes the gripper
and allows it to move objects, Ref. 1.
Model Definition
The model geometry is shown

Figure
in 1.
Figure 1: Microgripper geometry. The part in the middle represents the piezoelectric
actuator.
The actuator is made of lead zirconate titanate (PZT-5A), and the gripper itself
consists of polycrystalline silicon (poly-Si). Both materials are available in
COMSOL Multiphysics material libraries. The material properties are prescribed
using the rotated coordinate system shown in Figure 2.
24
Figure 2: Orientation of the coordinate system for the material.
The gripper is operated by applying an electric potential difference at the

piezoelectric actuator ends. When the arms come together, a mechanical contact
is modeled including the contact pressure computations.
Results and Discussion
The applied voltage gradually increases from zero to the value of 6000 V. This
causes the gripper arms to close up and eventually come in contact with each
other.
The final distributions of the stress and displacement magnitude in the deformed
microgripper are shown in Figure 3 and Figure 4, respectively.
25
Figure 3: Logarithm of the von Mises stress in the gripper for V0 = 6000 V
Figure 4: Total displacement distribution at V0 = 6000 V.
26
The resulting contact pressure at the end surfaces is shown in Figure 5.
Figure 5: Contact pressure at V0 = 6000 V.
Notes About the COMSOL Implementation
In this example you learn how to model a piezoelectric material aligned in a user-
defined coordinate system and how to include contact modeling.
You create the geometry within COMSOL Multiphysics. First, draw a 2D footprint
as shown in Figure 6, and then apply extrusion to create the final 3D geometry.
Use a swept mesh as shown in Figure 7.
You set up a contact pair for two end surfaces of the gripper arms and obtain the
solution via a parametric sweep over the applied voltage V0.
Figure 6: Intermediate 2D geometry
27
Figure 7: Meshed final geometry.
NEW
MODEL WIZARD
8 In the Select physics tree, select Structural Mechanics>Piezoelectric Devices (pzd).
GEOMETRY 1
Work Plane 1 (wp1)

28
Rectangle 1 (r1)
1 In the Model Builder window, under Component 1 (comp1)>Geometry 1>Work Plane 1
(wp1) right-click Plane Geometry and choose Rectangle.
5 In the yw edit field, type -1.
Rectangle 2 (r2)
Rectangle 3 (r3)
Rectangle 4 (r4)
5 In the yw edit field, type 19.5.
29
Fillet 1 (fil1)
1 On the Work plane toolbar, click Fillet.
2 On the object r4, select Point 3 only.
3 In the Fillet settings window, locate the Radius section.
4 In the Radius edit field, type 0.2.
Next, use the Bezier Polygon as instructed below. Alternatively, you can use the Draw line tool and
click on the top-left and top-right corners of r3 and the bottom-right and bottom-left corners of fil1.
Much faster and better way than following the below steps of Bzier Polygon 1 (b1).
By Draw Line tool method

1 Right-click Plane Geometry and choose Bzier Polygon.
2 In the Bzier Polygon settings window, locate the Polygon Segments section.
3 Find the Added segments subsection. Click the Add Linear button.
4 Find the Control points subsection. In row 1, set xw to -6.
5 In row 1, set yw to 15.
6 In row 2, set xw to -5.
10 In row 2, set yw to 19.5.
16 Click the Close Curve button.
30
Mirror 1 (mir1)
1 On the Work plane toolbar, click Mirror.
2 Select the objects fil1, r3, and b1 only.
3 In the Mirror settings window, locate the Input section.
4 Select the Keep input objects check box.
Extrude 1 (ext1)
Distances (m)
2

31
GLOBAL DEFINITIONS
Parameters
1 On the Home toolbar, click Parameters.
2 In the Parameters settings window, locate the Parameters section.
Name Expression Value Description

V0 6000[V] 6000 V Applied voltage
This is a stacked actuator, and V0 corresponds to the number of layers multiplied by the applied
potential of the layer.
DEFINITIONS
Rotated System 2 (sys2)

1 On the Definitions toolbar, click Coordinate Systems and choose Rotated System.
2 In the Rotated System settings window, locate the Settings section.

3 Find the Euler angles (Z-X-Z) subsection. In the edit field, type 90[deg].
This coordinate system defines the orientation of the piezoelectric material's main polarization axis.
4 On the Definitions toolbar, click Pairs and choose Contact Pair.
5 Select Boundaries 21 and 27 only.
6 In the Pair settings window, locate the Destination Boundaries section. Select Boundaries 30 and
37 only.
32
MATERIALS
ADD MATERIAL
MATERIALS
ADD MATERIAL
2 In the tree, select Piezoelectric>Lead Zirconate Titanate (PZT-5A).
MATERIALS
Lead Zirconate Titanate (PZT-5A) (mat2)

1 In the Model Builder window, under Component 1 (comp1)>Materials click Lead Zirconate
Titanate (PZT-5A) (mat2).
2 Select Domain 5 only.
All other domains use polysilicon as the material.
PIEZOELECTRIC DEVICES (PZD)
Piezoelectric Material 1
1 In the Model Builder window, expand the Component 1 (comp1)>Piezoelectric Devices (pzd)
node, then click Piezoelectric Material 1.
2 In the Piezoelectric Material settings window, locate the Coordinate System Selection section.
3 From the Coordinate system list, choose Rotated System 2 (sys2).
Linear Elastic Material 1

1 On the Physics toolbar, click Domains and choose Linear Elastic Material.
2 Select Domains 14 and 68 only.
Ground 1
1 On the Physics toolbar, click Boundaries and choose Ground.
Electric Potential 1
1 On the Physics toolbar, click Boundaries and choose Electric Potential.
3 In the Electric Potential settings window, locate the Electric Potential section.
4 In the V0 edit field, type V0.
33
Fixed Constraint 1
1 On the Physics toolbar, click Boundaries and choose Fixed Constraint.
Contact 1
1 On the Physics toolbar, click Pairs and choose Contact.
2 In the Contact settings window, locate the Pair Selection section.
3 In the Pairs list, select Contact Pair 1.
MESH 1
Free Triangular 1
1 In the Model Builder window, under Component 1 (comp1) right-click Mesh 1 and choose Free
Triangular.
2 Select all boundaries on top of the geometry.
Size 1
1 Right-click Component 1 (comp1)>Mesh 1>Free Triangular 1 and choose Size.
2 In the Size settings window, locate the Element Size section.
3 From the Predefined list, choose Extra fine.
Swept 1
In the Model Builder window, right-click Mesh 1 and choose Swept.
Distribution 1
1 In the Model Builder window, under Component 1 (comp1)>Mesh 1 right-click Swept 1 and choose
Distribution.
2 In the Distribution settings window, locate the Distribution section.
3 In the Number of elements edit field, type 2.
STUDY 1
Step 1: Stationary
1 In the Model Builder window, expand the Study 1 node, then click Step 1: Stationary.
2 In the Stationary settings window, click to expand the Study extensions section.
3 Locate the Study Extensions section. Select the Auxiliary sweep check box.
4 Click Add.
Auxiliary parameter Parameter value list

V0 range(0,600,6000)
34
Solver 1
On the Study toolbar, click Show Default Solver.
Before setting up the solver, define a plot to display while solving.
RESULTS
3 D Plot Group 1
1 On the Home toolbar, click Add Plot Group and choose 3D Plot Group.
2 In the Model Builder window, under Results right-click 3D Plot Group 1 and choose Surface.
3 Right-click Results>3D Plot Group 1>Surface 1 and choose Deformation.
4 In the Deformation settings window, locate the Scale section.
5 Select the Scale factor check box.
STUDY 1
Step 1: Stationary
1 In the Model Builder window, under Study 1 click Step 1: Stationary.
2 In the Stationary settings window, click to expand the Results while solving section.
3 Locate the Results While Solving section. Select the Plot check box.
Solver 1
1 In the Model Builder window, expand the Study 1>Solver Configurations>Solver 1>Dependent
Variables 1 node, then click Electric potential (comp1.V).
2 In the Field settings window, locate the Scaling section.
3 From the Method list, choose Manual.
4 In the Scale edit field, type 1000.
5 In the Model Builder window, under Study 1>Solver Configurations>Solver 1>Dependent

Variables 1 click Contact pressure, contact pair p1 (comp1.pzd.Tn_p1).
7 In the Scale edit field, type 1e6.
8 In the Model Builder window, under Study 1>Solver Configurations>Solver 1>Dependent

Variables 1 click Displacement field (Material) (comp1.u).
10 In the Scale edit field, type 1e-6.
11 On the Home toolbar, click Compute.
RESULTS
3 D Plot Group 1
Compare the finished displacement-field plot with that in Figure 4.
Follow the steps below to reproduce the plot in Figure 3.
3 D Plot Group 2
35
1 In the Model Builder window, under Results right-click 3D Plot Group 1 and choose Duplicate.
2 In the Model Builder window, expand the 3D Plot Group 2 node, then click Surface 1.
3 In the Surface settings window, locate the Expression section.
4 In the Expression edit field, type log10 (pzd.mises+1).
On the 3D plot group toolbar, click Plot.

Next, reproduce the plot in Figure 5 of the contact pressure at the end surfaces as follows.
Data Sets
1 On the Results toolbar, click More Data Sets and choose Surface.
3 D Plot Group 3
2 In the 3D Plot Group settings window, locate the Data section.
3 From the Data set list, choose Surface 1.
4 Right-click Results>3D Plot Group 3 and choose Surface.
5 In the Surface settings window, locate the Expression section.
6 Click Contact pressure, contact pair p1 (pzd.Tn_p1) in the upper-right corner of the section. On
the 3D plot group toolbar, click Plot.
Finally, add a coordinate system plot to verify that the piezoelectric material has the correct
orientation.
3 D Plot Group 4
2 On the 3D plot group toolbar, click More Plots and choose Coordinate System Volume.
3 In the Coordinate System Volume settings window, locate the Coordinate System section.
4 From the Coordinate system list, choose Rotated System 2 (sys2).
5 On the 3D plot group toolbar, click Plot.
Compare the resulting plot with that in Figure 2.
36
LAB 6: JOULE HEATING OF MICROACTUATOR
AIM:
To model Joule heating of microactuator using COMSOL Joule Heating Module.
Figure 1: Microactuator geometry.
37
Expected Result:
Figure 3: Surface Temperature
NEW
MODEL WIZARD
2 In the Select physics tree, select Heat Transfer>Electromagnetic Heating>Joule Heating.
38
GEOMETRY 1
Work Plane 1 (wp1)

Rectangle 1 (r1)
- right-click Plane Geometry and choose Rectangle.
Rectangle 2 (r2)
Rectangle 3 (r3)
5 Locate the Position section. In the xw edit field, type 30.
39
Extrude 1 (ext1)
Distances (m)
5
6 Zoom Extents button on the Graphics toolbar.
MATERIALS
ADD MATERIAL
4 In the Model Builder window, under Component 1 (comp1)>Materials choose Poly-Si (mat1).
5 In Materials settings windows, locate Electrical Conductivity and enter value = 5e4.
40
ELECTRIC CURRENTS (EC)
Ground 1
3 In the Electric Potential settings window, locate the Electric Potential section.
4 In the V0 edit field, type 5 (Applying 5 volts).
HEAT TRANSFER IN SOLIDS (HT)
Heat Flux 1
1 In the Model Builder window, under Component 1 (comp1) right click Heat Transfer in Solids (ht)
and add Heat Flux.
2 Under heat flux settings, select Inward heat flux and enter Heat transfer coefficient h = 0.04,
External temperature Text = 293.15[K].
3 Select all Boundaries.
Temperature 1
1 In the Model Builder window, under Component 1 (comp1) right click Heat Transfer in Solids (ht)
and add Temperature.
2 Select all Boundaries except that of ground and potential (i.e. boundary 1 & boundary 6).
Then in Home toolbar click Build Mesh and then click Compute to obtain Temperature (ht) plot
under Results.
Case:
Vary the applied voltage to 10V, 15V and 20V. Plot and note down the Temperature for each case.
41
LAB 7: MICRORESISTOR BEAM
AIM & INTRODUCTION
This example illustrates the ability to couple thermal, electrical, and structural
analysis in one model. This particular application moves a beam by passing a
current through it; the current generates heat, and the temperature increase leads
to displacement through thermal expansion. The model estimates how much
current and increase in temperature are necessary to displace the beam.
Although the model involves a rather simple 3D geometry and straightforward
physics, it provides a good example of multiphysics modeling.
Model Definition
Figure 1: Microbeam geometry.
A copper microbeam has a length of 13 m with a height and width of 1 m. Feet

at both ends bond it rigidly to a substrate. An electric potential of 0.2 V applied
between the feet induces an electric current. Due to the materials resistivity, the
current heats up the structure. Because the beam operates in the open, the
generated heat dissipates into the air. The thermally induced stress loads the
material and deforms the beam.
As a first approximation, you can assume that the electrical conductivity is
constant. However, a conductors resistivity increases with temperature. In the
case of copper, the relationship between resistivity and temperature is
approximately linear over a wide range of temperatures:
= 0(1 + (TT0)) (1)
42
is the temperature coefficient. You obtain the conductors temperature
dependency from the relationship that defines electric resistivity; conductivity is
simply its reciprocal ( = 1/).
For the heat transfer equations, set the base boundaries facing the substrate to a
constant temperature of 323 K. You model the convective air cooling in other
boundaries using a heat flux boundary condition with a heat transfer coefficient, h,
of 5 W/(m2K) and an external temperature, Tinf, of 298 K. Standard constraints
handle the bases rigid connection to the substrate.
Results and Discussion
Figure 2 shows the temperature field on the microbeam surface when solving the
model using a temperature-dependent resistivity as in Equation 1. Based on the
color scale, the maximum temperature is about 710 K.
Figure 3 shows the microbeams deformation. The displacement for the
temperature-dependent case is 48 nm compared to the maximum displacement
for constant electrical conductivity, which is 88 nm (the plot scales the deformation
by a factor of around 20).
Figure 2: Surface temperature with temperature-dependent electrical conductivity.
Figure 3: Microbeam deformation with temperature-dependent electrical conductivity.
43
Notes About the COMSOL Implementation
In this example you create the 3D geometry by starting with two 2D work planes.
The first one views the geometry from above, and the second does so from the
side. You create cross sections on the work planes, which you then extrude into
3D. As the final step you create the resistor beam geometry as the intersection of
the extruded objects. You can also skip the step-by-step instructions for the
geometry creation and import the ready-made geometry directly from the Model
Library.
By using the Joule Heating and Thermal Expansion predefined multiphysics
interface you automatically add the equations for three physics including the
necessary multiphysics couplings. In this case the physics equations describe the
current and heat conduction and structural mechanics problems. The interface
also provides suitable defaults for the solver.
NEW
1 In the New window, click Model Wizard.
MODEL WIZARD
1 In the Model Wizard window, click 3D.
2 In the Select physics tree, select Structural Mechanics>Joule Heating and Thermal
Expansion.
3 Click Add.
4 Click Study.
5 In the Select study tree, select Preset Studies for Selected Physics Interfaces>Stationary.
6 Click Done.
44
DEFINITIONS
Parameters
1 On the Model toolbar, click Parameters.
2 In the Settings window for Parameters, locate the Parameters section.
Name Expression Value Description

V0 0.2[V] 0.20000 V Applied voltage
T0 323[K] 323.00 K
Text 298[K] 298.00 K External temperature
k 5[W/(m^2*K)] 5.0000 Heat transfer coefficient

W/(mK)
GEOMETRY 1
2 In the Settings window for Geometry, locate the Units section.

1 On the Work plane toolbar, click Primitives and choose Bzier Polygon.
2 In the Settings window for Bzier Polygon, locate the Polygon Segments section.
3 Find the Added segments subsection. Click Add Linear.
4 Find the Control points subsection. In row 2, set xw to 5.
12 Find the Control points subsection. In row 2, set yw to 4.
45
22 Find the Control points subsection. Click Close Curve.
23 On the Work plane toolbar, click Build All.
Extrude 1 (ext1)
2 In the Settings window for Extrude, locate the Distances from Plane section.
Distances (m)
3
4 Click the Build All Objects button.

46
Work Plane 2 (wp2)
2 In the Settings window for Work Plane, locate the Plane Definition section.
3 From the Plane type list, choose Face parallel.
4 Find the Planar face subsection. Select the Active toggle button.
5 On the object ext1, select Boundary 6 only.
6 In the Offset in normal direction text field, type -1.5.
7 Select the Reverse normal direction check box.
Plane Geometry
click Plane Geometry.
2 In the Settings window for Plane Geometry, locate the Visualization section.
3 Clear the Intersection (cyan) check box.
4 Clear the Coincident entities (blue) check box.

1 On the Work plane toolbar, click Primitives and choose Bzier Polygon.
2 In the Settings window for Bzier Polygon, locate the Polygon Segments section.
4 Find the Control points subsection. In row 1, set xw to -11.5.
5 In row 1, set yw to -1.5.
6 In row 2, set xw to -6.3.
7 In row 2, set yw to -1.5.
9 Find the Control points subsection. In row 2, set yw to 0.5.
11 Find the Control points subsection. In row 2, set xw to 6.3.
13 Find the Control points subsection. In row 2, set yw to -1.5.
20 Find the Control points subsection. In row 2, set xw to -6.5.
22 Find the Control points subsection. Click Close Curve.
47
Fillet 1 (fil1)
1 On the Work plane toolbar, click Fillet.
2 On the object b1, select Points 4 and 6 only.
3 In the Settings window for Fillet, locate the Radius section.
4 In the Radius text field, type 0.3.
5 On the Work plane toolbar, click Build All.
Extrude 2 (ext2)
2 In the Settings window for Extrude, locate the Distances from Plane section.
Distances (m)
4
Intersection 1 (int1)
1 On the Geometry toolbar, click Booleans and Partitions and choose Intersection.
2 Select the objects ext1 and ext2 only.
48
Form Union (fin)
1 In the Model Builder window, under Component 1 (comp1)>Geometry 1 right-click Form Union
(fin) and choose Build Selected.
DEFINITIONS
Add a set of selections that you can use later when applying boundary conditions.
Explicit 1
1 On the Definitions toolbar, click Explicit.
2 In the Model Builder window, under Component 1 (comp1)>Definitions right-click Explicit 1 and
choose Rename.
3 In the Rename Explicit dialog box, type connector1 in the New label text field.
4 Click OK.
5 Settings window for Explicit, locate the Input Entities section.
6 From the Geometric entity level list, choose Boundary.
Explicit 2
choose Rename.
3 In the Rename Explicit dialog box, type connector2 in the New label text field.
4 Click OK.
5 In the Settings window for Explicit, locate the Input Entities section.
Explicit 3
choose Rename.
3 In the Rename Explicit dialog box, type connectors in the New label text field.
4 Click OK.
5 In the Settings window for Explicit, locate the Input Entities section.
7 Select Boundaries 1 and 13 only.
ADD MATERIAL
1 On the Model toolbar, click Add Material to open the Add Material window.
3 In the tree, select MEMS>Metals>Cu - Copper.
49
4 Click Add to Component in the window toolbar.
5 On the Model toolbar, click Add Material to close the Add Material window.
MATERIALS
Cu - Copper (mat1)
1 In the Model Builder window, under Component 1 (comp1)>Materials click Cu - Copper
(mat1).
2 Settings window for Material, locate the Material Contents section.
Property Name Value Unit Property group

Relative epsilonr 1 1 Basic
permittivity
4 Click to expand the Material properties section. Locate the Material Properties section. In
the Material properties tree, select Electromagnetic Models>Linearized
Resistivity>Reference resistivity (rho0).
5 Click Add to Material.

6 Locate the Material Contents section. In the table, enter the following settings:
Property Name Value Unit Property group

Reference rho0 1.72e-8[ohm*m] m Linearized
resistivity resistivity
Resistivity alpha 0.0039[1/K] 1/K Linearized
temperature resistivity
coefficient
Reference Tref 293[K] K Linearized
temperature resistivity
Current Conservation 1
1 In the Model Builder window, under Component 1 (comp1)>Electric Currents (ec) click Current
Conservation 1.
2 In the Settings window for Current Conservation, locate the Conduction Current section.
3 From the list, choose Linearized resistivity.
Before solving the two-way coupled model with a temperature-dependent resistivity, use a constant
resistivity for later comparison:
4 From the list, choose User defined. Keep the default zero value for
50
Ground 1
2 In the Settings window for Ground, locate the Boundary Selection section.
3 From the Selection list, choose connector2.
2 In the Settings window for Electric Potential, locate the Electric Potential section.
3 In the V0 text field, type V0.
4 Locate the Boundary Selection section. From the Selection list, choose connector1.
MULTIPHYSICS
1 In the Model Builder window, under Component 1 (comp1)>Multiphysics click Thermal
Expansion 1 (te1).
2 In the Settings window for Thermal Expansion, locate the Thermal Expansion Properties section.
3 In the Tref text field, type Text.
HEAT TRANSFER IN SOLIDS (HT)

On the Physics toolbar, click Electric Currents (ec) and choose Heat Transfer in Solids (ht).
Initial Values 1
1 In the Model Builder window, under Component 1 (comp1)>Heat Transfer in Solids (ht) click
Initial Values 1.
2 In the Settings window for Initial Values, locate the Initial Values section.
3 In the T text field, type T0.
Heat Flux 1
1 On the Physics toolbar, click Boundaries and choose Heat Flux.
2 In the Settings window for Heat Flux, locate the Boundary Selection section.
3 From the Selection list, choose All boundaries.
Select all boundaries for simplicity; next you will add a node that overrides this boundary condition
for the connectors.
4 Locate the Heat Flux section. Click the Convective heat flux button.
5 In the h text field, type k.
6 In the Text text field, type Text.
Temperature 1
1 On the Physics toolbar, click Boundaries and choose Temperature.
2 In the Settings window for Temperature, locate the Temperature section.
3 In the T0 text field, type T0.
4 Locate the Boundary Selection section. From the Selection list, choose connectors.
51
Fixed Constraint 1
1 On the Physics toolbar, click Boundaries and choose Fixed Constraint.
2 In the Settings window for Fixed Constraint, locate the Boundary Selection section.
3 From the Selection list, choose connectors.
MESH 1
Size
1 In the Model Builder window, under Component 1 (comp1) right-click Mesh 1 and choose Free
Tetrahedral.
2 In the Settings window for Size, locate the Element Size section.
3 From the Predefined list, choose Finer.
4 In the Model Builder window, right-click Mesh 1 and choose Build All.
STUDY 1
You can use the default solver settings for this model.
1 On the Model toolbar, click Compute.
RESULTS
Stress (solid)
The first default plot presents a surface plot of the von Mises stress. Modify it to show the
displacement magnitude.
1 In the Model Builder window, right-click Stress (solid) and choose Rename.
2 In the Rename 3D Plot Group dialog box, type Displacement - Study 1 in the New label text field.
3 Click OK.
Displacement - Study 1
1 In the Model Builder window, expand the Results>Displacement - Study 1 node, then click
Surface 1.
2 In the Settings window for Surface, click Replace Expression in the upper-right corner of the
Expression section. From the menu, choose Model>Component 1>Solid
Mechanics>Displacement>solid.disp - Total displacement.
3 Locate the Expression section. From the Unit list, choose nm.
52
As the color legend shows, the maximum displacement is roughly 88 nm with a constant resistivity.
Temperature (ht)
The second default surface plot shows the temperature field. Note the maximum temperature of
roughly 1048 K.
Now restore the temperature-dependence of the resistivity that you temporarily disabled and then add
a new study and solve the model again.

On the Physics toolbar, click Solid Mechanics (solid) and choose Electric Currents (ec).
Current Conservation 1
1 In the Model Builder window, under Component 1 (comp1)>Electric Currents (ec) click Current
Conservation 1.
2 In the Settings window for Current Conservation, locate the Conduction Current section.
3 From the list, choose From material.
53
ADD STUDY
1 On the Model toolbar, click Add Study to open the Add Study window.
2 Go to the Add Study window.
3 Find the Studies subsection. In the Select study tree, select Preset Studies>Stationary.
4 Click Add Study in the window toolbar.
5 On the Model toolbar, click Add Study to close the Add Study window.
STUDY 2
Step 1: Stationary
On the Model toolbar, click Compute.
RESULTS
Temperature (ht) 1
As you can see from the plot, using the more realistic material model with a temperature-dependent
resistivity has a significant effect on the solution. The maximum temperature is now almost 340 K
lower.
Stress (solid)
1 In the Model Builder window, under Results right-click Stress (solid) and choose Rename.
2 In the Rename 3D Plot Group dialog box, type Displacement - Study 2 in the New label text field.
3 Click OK.
Displacement - Study 2
1 In the Model Builder window, expand the Results>Displacement - Study 2 node, then click
Surface 1.
2 In the Settings window for Surface, click Replace Expression in the upper-right corner of the
Expression section. From the menu, choose Model>Component 1>Solid
Mechanics>Displacement>solid.disp - Total displacement.
3 Locate the Expression section. From the Unit list, choose nm.
Similarly, the maximum displacement has been reduced from 88 nm to around 50 nm.
54
LAB 8: PRESSURE SENSOR
AIM:
To model a MEMS pressure sensor using COMSOL.
Figure 1: Pressure Sensor geometry.
55
Expected Result:
Figure 3: Surface Temperature
NEW
MODEL WIZARD
56
GEOMETRY 1
Cylinder 1 (cyl1)
Cylinder
2 In the Cylinder settings window, locate the Size and Shape section.
3 In the Radius edit field, type 100.
MATERIALS
ADD MATERIAL
57
Fixed Constraint 1
2 Select only the curved surface of the cylinder i.e. Boundary 1, 2, 5, 6 only.
Boundary Load 1
3 In the Boundary Load settings window, locate Force and choose Load type as Pressure.
4 In the Pressure edit field enter p = 100e-6 (i.e. 100 micro Pascals)
Then under Home click Build Mesh and then click Compute to obtain Displacement plot under
Results.
Case:
Keep Height constant (=10) and compute displacement for Radius = 150, 175 & 200 m.
Keep Radius constant (=100) and compute displacement for Height = 12, 16 & 20 m.
58
LAB 9: MEMS COMB-DRIVE ACTUATOR
AIM:
To model a MEMS Comb-Drive Actuator using COMSOL.
Figure 1: Comb-Drive Actuator Geometry.
59
Expected Result:
Figure 3: Surface Total Displacement (m)
NEW
MODEL WIZARD
2 In the Select physics tree, select Structural Mechanics>Solid Mechanics (solid) and click
Add. Then select AC/DC>Electrostatics (es).
60
GEOMETRY 1
Block 1 (blk1)
Block.
7 In the z edit field, type -4.
Block 2 (blk2)
1 Right click Geometry 1 and add Block.
Block 3 (blk3)
7 In the y edit field, type -10.
61
Block 4 (blk4)
Block 5 (blk5)
7 In the y edit field, type 20.
Block 6 (blk6)
7 In the y edit field, type 120.
8 In the z edit field, type -4
62
MATERIALS
ADD MATERIAL
2 In the tree, select MEMS>Semiconductors>Si Polycrystalline Silicon.
4 In the tree, select Built-In>Air.
63
MATERIALS
Air (mat2)
1 In the Model Builder window, under Component 1 (comp1)>Materials click Air (mat2).
2 Select Domain 1 only.
All other domains use Si Polycrystalline Silicon as the material.
Material: Air Material: Si Silicon
ELECTROSTATICS (ES)
Electric Potential.
2 Select Boundaries 22 & 23 only and in the Electric Potential edit field, type 50 (applying 50 volts).
Ground 1
Ground.
Force Calculation 1
Force Calculation.
2 Select Domains 2, 3, 4, 5, 6 only (i.e. only block of air is excluded).
3 In the Force Calculation settings window, locate Force name edit field and type fes.
64
1 In the Model Builder window, under Component 1 (comp1)> select Solid Mechanics (solid).
2 In the Solid Mechanics settings window, delete domain 1. Domain 1 is the block of air and air is not
a solid, so it cannot be included in the Physics of Solid Mechanics.
Fixed Constraint 1
2 Select Boundaries 6, 9, 12, 31 only.
Boundary Load 1
2 Select Boundaries 7, 14, 19, 20, 21, 22, 23 only.
3 In the Boundary Load settings window, locate Force and select FA as User defined.
4 In the x edit field, type es.nTx_fes.
5 In the y edit field, type es.nTy_fes.
6 In the z edit field, type es.nTz_fes.
Then under Home toolbar click Build Mesh and then click Compute to obtain Results.
RESULTS
Surface 1
1 In the Model Builder window, under Results>Stress (solids)> select Surface 1
2 In the Surface settings window locate and click this symbol and choose Solid Mechanics>
Displacement>solid.disp Total Displacement. Click Plot to obtain Displacement plot.
Scale Factor: As seen in the Graphics window, the two combs appear to intersect each other. To
handle this we need to change the Scale Factor so the combs just touch each and not appear to
cross.
3 In Results>Stress (solids)>Surface 1> select Deformation.
4 Under Deformation settings window, locate and tick Scale factor.
5 In the Scale factor edit field, type 18000. This value may vary from user to user. For this
simulation, by trial and error, value of 18000 was found to be appropriate.
Before Scaling After Scaling
65
Player 1
1 On the Results toolbar, choose Player.
2 In the Player settings window, locate Animation Editing and choose Sequence type: Dynamic
data extension and Cycle type: Linear.
3 Locate Playing and tick Repeat.
4 In the Graphics window, click Play to play animation and click Stop to stop animation.
Player Frame: 0 (yz plane)
Player Frame: 25 (yz plane)
66

MEMS Lab Manual-Final

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MEMS

INSTITUTION: Bits Pilani Dubai

1 Design a MEMS Cantilever Beam and compare between 1

2 Design a MEMS Cantilever Beam having Multilayers 11

3 Detection of HIV virus by Micro-Cantilever 15

6 Joule Heating of Microactuator 37

9 MEMS Comb Drive Actuator 59

A. To Simulate Boundary Load

1. At COMSOL start-up screen, select: Model Wizard 3D (Space

2. Select Physics: Structural Mechanics Solid Mechanics (solid) Select

4. Right Click Geometry Select Block.

6. To add material for our geometrical component: Select Add Materials

10. Enter the value of force = 10 Newton

We fill the row for z-axis as: -10

12. Compute and youll get Stress Plot.

B. To Simulate Point Load

Select this point

Repeat above steps in To Simulate Boundary Load to get displacement

Expected Result for point load stress:

Change to Microsoft Word

To model a MEMS cantilever having more than one layer

Figure 1: Multilayered Cantilever Geometry.

Figure 2: Meshed Final Geometry

Figure 3: Surface von Mises stress Figure 4: Surface Total displacement

From the File menu, choose New.

2 In the Select physics tree, select Structural Mechanics>Solid Mechanics (solid).

3 Click the Add button.

4 Click the Study button.

5 In the tree, select Preset Studies>Stationary.

6 Click the Done button.

2 In the Geometry settings window, locate the Units section.

3 From the Length unit list, choose m.

3 In the Width edit field, type 20.

4 In the Depth edit field, type 100.

5 In the Height edit field, type 3.

7 Click the Zoom Extents button on the Graphics toolbar.

2 In the Block settings window, locate the Size section.

3 In the Height edit field, type 2.

6 Click the Zoom Extents button on the Graphics toolbar

2 In the Block settings window, locate the Size section.

3 In the Height edit field, change the value to 1.

4 Locate the Position section.

5 In the z edit field, type 5 (Height of Block 1 + Height of Block 2 = 5).

6 Click the Build All button.

7 Click the Zoom Extents button on the Graphics toolbar

The model geometry is now complete.

Figure 1: HIV Virus Detector Geometry.

Figure 2: Meshed Final Geometry

Figure 3: Surface Total displacement

From the File menu, choose New.

8 In the Select physics tree, select Structural Mechanics>Solid Mechanics (solid).

9 Click the Add button.

10 Click the Study button.

11 In the tree, select Preset Studies>Stationary.

12 Click the Done button.

5 In the Geometry settings window, locate the Units section.

6 From the Length unit list, choose m.

Work Plane 1 (wp1)

4 In the Height edit field, type 1000.

5 Locate the Position section. In the xw edit field, type -50.

6 Click the Build Selected button.

7 Click the Zoom Extents button on the Graphics toolbar.

9 In the Rectangle settings window, locate the Size section.