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US006118097A

Ulllted States Patent [19] [11] Patent Number: 6,118,097


Kaga et al. [45] Date of Patent: *Sep. 12, 2000

[54] MACHINING HEAD AND LASER 5,111,021 5/1992 Jolys et al. ......................... .. 219/121.6
MACHINING APPARATUS 5,149,937 9/1992 Babel etal. 219/121.68
5,220,149 6/1993 Neidhardt ......................... .. 219/121.67
[75] Inventors: Kunihiko Kaga; Satoru Kotoh, both
of Hyogo; Shuji ()gawa; Masaru FOREIGN PATENT DOCUMENTS
Kanaka> both of Aichb an of Japan 4016200 11/1991 Germany .......................... .. 219/121.6
_ 60-054293 3/1985 Japan .............................. .. 219/121.72
[73] ASSlgIlGGZ Mitsubishi Denki Kabushiki Kaisha, 61_60757 12/1986 japan_
Tokyo, Japan 63-56389 3/1988 Japan .
63-76785 4/1988 Japan .
[*] Notice: This patent issued on a continued pros- 1-181991 7/1989 Japan .
ecutjon application under 2-263585 10/1990 Japan ................................ .. 219/121.6
153((1), and is Subject to the twenty year 3-142094 6/1991 Japan ................................ .. 219/121.6
patent term provisions of 35 U.S.C.
l54(a)(2)- Primary ExaminerGregory Mills
Attorney, Agent, or FirmBurns, Doane, SWecker &
[21] Appl. No.: 08/139,888 Mathis, LLP
[22] Filed: Oct. 22, 1993 [57] ABSTRACT
[30] Foreign Application Priority Data Arnachining head of a laser machining apparatus comprises
OCL 23, 1992 [JP] Japan .................................. .. 4-285801 8min assist gas no? at the? centgfr portion of the machin'
1ng head for supplying a main assist gas and one or more
[51] Int. Cl.7 ................................................... .. B23K 26/00 annular sub assist gas nozzles surrounding the main assist
[52] US. Cl. ................................ .. 219/121.s4; 219/1215; gas nozzle, Whose jet outlet of the innermost diameter is
372/109 larger or equal to the jet outlet of main assist gas. The jet
[58] Field of Search .......................... .. 219/121.51, 121.6, Outlet Ofthe main assist gas nozzle is Positioned at upstream
219/12163, 12167, 12172, 12184; 372/109, of said jet outlets of the respective sub assist gas noZZle.
701 According to the above construction, the jet gas pressure and
the jet gas velocity vary continuously at the assist gas jet
[56] References Cited outlet and the jet gas pressure and How velocity ?uctuation
of the main assist gas are increased.
U.S. PATENT DOCUMENTS
4,121,085 10/1978 Diemer et al. ................... .. 219/121.84 3 Claims, 19 Drawing Sheets

20
8a
p-_

__ 2b

Yum [Q Q)
U.S. Patent Sep. 12, 2000 Sheet 1 0f 19 6,118,097

20

V
f/
l / 1

X 2
2b
\ Mm 121
\_
I< D2>'
V V
2a 3
7/////////////////////////////////

FIG. 1
U.S. Patent Sep. 12,2000 Sheet 2 0f 19 6,118,097

(/PFPLURCpET%SAUI)ROEN

7///////////////////////////////A
FIG. 2

02 GAS FLOW

//////,
@E \v
@

FIG. 3
U.S. Patent Sep. 12,2000 Sheet 3 0f 19 6,118,097

(UVFGJEmLAOE/CIsSTWY)

7///////////////////////////////A

200
E:L

5
DJ
2[l1
5 100
(D
o

E
a
U
LI.
0
In
(I)
{11
g 0 I I
g 0 0.5 1.0 1.5
a PRESSURE FLUCTUATION VALUE p/P (%)
FIG. 5
U.S. Patent Sep. 12,2000 Sheet 4 0f 19 6,118,097

EUZHQ5AMT?J/ O0111 6.
A
B 1
0.
2

m/ a9
0. 25 3 0.

LASER OUTPUT POWER (kw)

FIG. 6A

SUMKZE~OHQY<I 106.423
0 6.
l 0.
W,
1.5 2.0

LASER OUTPUT POWER (kw)


2.5 3.0

FIG. 6B
U.S. Patent Sep. 12, 2000 Sheet 5 0f 19 6,118,097

7

9%
Z 1b 26
g/ f
D1 I
/
2b
121
V

H _ D2 :\2a
7////'///////////////////////////4
FIG. 7

1.0

(/VPFPLRAUpCE%TSU)IERON
0.5

I
5 10
DISTANCE BETWEEN IET OUTLETS L (mm)

FIG. 8
U.S. Patent Sep. 12,2000 Sheet 6 0f 19 6,118,097

//
/ /,
FIG. 9
U.S. Patent Sep. 12,2000 Sheet 7 0f 19 6,118,097

2a
FIG. 10A

FIG. 10B FIG. 10C


U.S. Patent Sep. 12,2000 Sheet 8 0f 19 6,118,097

FIG. 11A FIG. 11B

FIG. 12A FIG. 12B


U.S. Patent Sep. 12,2000 Sheet 9 0f 19 6,118,097

FIG. 13

IlI

2b

FIG. 14
U.S. Patent Sep. 12, 2000 Sheet 10 0f 19 6,118,097

0
DISTANCE r (mm)

FIG. 15

FIG. 16
U.S. Patent Sep. 12,2000 Sheet 11 0f 19 6,118,097
U.S. Patent Sep. 12,2000 Sheet 12 0f 19 6,118,097

1O

FIG. 18

11

10
FIG. 19A FIG. 19B
U.S. Patent Sep. 12,2000 Sheet 13 0f 19 6,118,097

FIG. 21
U.S. Patent Sep. 12, 2000 Sheet 14 0f 19 6,118,097

11
15

161" .6, LG) "I .6,

FIG. 22
U.S. Patent Sep. 12,2000 Sheet 15 0f 19 6,118,097

IIIIIII
III/III, O2

~O2

2a
FIG. 24
U.S. Patent Sep. 12, 2000 Sheet 16 0f 19 6,118,097

ASSIST
GAS
SOURCE

ASSIST
GAS
SOURCE

K20
? FLOW QUANTY
CONTROL
APPARATUS
_____|
SENSOR

FIG. 25

ASSIST
GAS
SOURCE

ASSIST
GAS
SOURCE
[-20
FLOW QUANTY
0,, , E19 __ APPARATUS
CONTROL
3
SENSOR

FIG. 26
U.S. Patent Sep. 12, 2000 Sheet 17 0f 19 6,118,097

OPERATIQN 21
f S F ggggggTLus J
r18 f 20
% FLOW
1 ~ $30000
APPARATUS
2 IASSIST
GAS 18
3 SOURCE ___,,

FIG. 27

/
22
2
1
1a

2a

FIG. 28
U.S. Patent Sep. 12,2000 Sheet 18 0f 19 6,118,097

22a 22b

FIG. 29A FIG. 29B

22

FIG. 30
U.S. Patent Sep. 12, 2000 Sheet 19 0f 19 6,118,097

ASSIST
GAS
SOURCE

FIG. 31
PRIOR ART