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NSERL Cleanroom Research Lab

Item # Room # Tool ID Tool Description Owner


1 1.422 TL01-1 TYSTAR LPCVD - Silicon Nitride Dep SR, BA
2 1.422 TL01-2 TYSTAR LPCVD - Poly-Silicon Dep SR, BA
3 1.422 TL01-3 TYSTAR LPCVD - Doped Poly-Silicon Dep SR, BA
4 1.422 TL01-4 TYSTAR LPCVD - Low Temp Oxide (LTO) SR, BA
5 1.422 TA01-1 THERMCO Minibrute - N-Type Diffusion SR, BA
6 1.422 TA01-2 THERMCO Minibrute - General use (metal annealing) SR, BA
7 1.422 TA01-3 THERMCO Minibrute - Si Only - forming gas metal annealing SR, BA
8 1.422 TA01-4 THERMCO Minibrute - Si Only - Oxidation SR, BA
9 1.422 TC01 Cambridge Atomic Layer Deposition RIEKENA
10 1.422 TR01 JETFIRST 200 jipelec RTA RIEKENA
11 1.422 TA02-5 TYSTAR Atmospheric Furnace - Oxidation SR, BA
12 1.422 TA02-6 TYSTAR Atmospheric Furnace - Oxidation SR, BA
13 1.422 TA02-7 TYSTAR Atmospheric Furnace - solid source doping P Type SR, BA
14 1.422 TA02-8 TYSTAR Atmospheric Furnace - solid source doping N Type SR, BA
15 1.422 TLBB01 CDO Burn Box for Thermal Bay SR, BA
16 1.422 TR02 Modular Process Technology RTP-600S RIEKENA
17 1.422 TR03 Modular Process Technology RTP-600S RIEKENA
18 1.422 TD03 Special Coating Systems Parylene Labcoter RIEKENA
19 1.432 LL01 Heidelberg DWL66 Laser Witer ROBBINS
20 1.432 CM01 ULTRATECH Mask Cleaner GOODNIGHT
21 1.432 DM01 Leica INM 200 Optical Microscope ROBBINS
22 1.432 LWED CPK Chrome Etch & Base Develop GOODNIGHT
23 1.432 LWSD CPK Solvent & Base Develop GOODNIGHT
24 1.432 HS02 Leatherwood Solvent Hood GOODNIGHT
25 1.432 LC01 Q-4000 Series Quintel Contact Printer ROBBINS
26 1.432 LS02 CEE Coat Spinner GOODNIGHT
27 1.432 TH02 Cole Parmer Tabletop Hotplate GOODNIGHT
28 1.432 TH03 Cole Parmer Tabletop Hotplate GOODNIGHT
29 1.432 TH04 TPS Digital Hotplate [exhausted enclosure] GOODNIGHT
30 1.432 TH05 TPS Digital Hotplate [exhausted enclosure] GOODNIGHT
31 1.432 TH06 TPS Digital Hotplate [exhausted enclosure] GOODNIGHT
32 1.432 TH07 TPS Digital Hotplate [exhausted enclosure] GOODNIGHT
33 1.432 TO02 HMDS Oven GOODNIGHT
34 1.432 TO03 Blue M Oven GOODNIGHT
35 1.432 TO04 Blue M Oven GOODNIGHT
36 1.432 TO05 Blue M Oven GOODNIGHT
37 1.432 TO06 Blue M Oven GOODNIGHT
38 1.432 TO07 Cole Parmer Oven GOODNIGHT
39 1.432 TV01 Vacuum Oven GOODNIGHT
40 1.432 LC03 Karl Suss Contact Printer ROBBINS
41 1.432 LS03 Headway Resist Spinner ROBBINS
42 1.430 ME03 Temescal e-gun Evaporator MAYNARD
43 1.430 ER01 Technics Series 85-RIE (table top RIE) GOODNIGHT
44 1.430 ME02 Cryo e-gun Evaporator MAYNARD
45 1.430 EA03 March PX250 Asher MAYNARD
46 1.430 ME04 Denton Vacuum Thermal Evaporator MAYNARD
47 1.430 MS03 AJA International ATC 1500-V Sputter System MAYNARD
48 1.430 PD01 Plasma-Therm 790 PECVD RIEKENA
49 1.430 MS04 AJA International ORION Sputter System MAYNARD
50 1.430 PE03 Plasma-Therm ICP metal etch SR, BA
51 1.430 PE04 Plasma-Therm DSE & dialectric etch BA, SR
52 1.430 PE05 Plasma-Therm III-V's etcher BA, SR
53 1.436 ME05 CHA 50 E-Gun Vac Evap MAYNARD
54 1.436 AB01 K&S Ball Wire Bonder GP / DS
55 1.436 AB02 K&S Chisel Wire Bonder GP / DS
56 1.436 CD02 Micro Tech Dual-stack Spin Rinse Dryer GOODNIGHT
57 1.436 CD03 Tousimis Supercritical Dryer (MEM structure release) ROBBINS
58 1.436 CO02 Samco UV-Ozone Stripper/Cleaner model UV-1 ROBBINS
59 1.436 HS01 Leatherwood General Solvent Hood GOODNIGHT
60 1.436 HA01 Leatherwood Manual Acid Hood GOODNIGHT
61 1.436 HB01 Leatherwood Manual Base Hood GOODNIGHT
62 1.436 HR01 Leatherwood RCA Acid Hood GOODNIGHT
63 1.436 TO01 Thermal Oven GOODNIGHT
64 1.436 DM08 Reichert-Jung Optical Microscope ROBBINS
65 1.440 DM05 Leica INM 100 Optical Microscope ROBBINS
66 1.440 DM07 LEO Supra40 FESEM w/ NPGS, EDAX & Nanomanipulator ROBBINS
67 1.440 EBL01 Raith 150-TWO E-Beam Litho ROBBINS
1.440 DT02 SENTECH SE800 Ellipsometer RIEKENA
68 1.440 DP03 Alessi 4-Point Probe MAYNARD
69 1.440 DP04 Prometrix Auto 4-Point Probe POLLACK
70 1.440 DS01 Toho FLX-2320-S Wavelength Stress Measurement GOODNIGHT
71 1.440 DT04 Veeco Dektak VIII Profilometer ROBBINS
72 1.440 DT05 Nanometrics Nanospec Film Thickness POLLACK
73 1.440 DA01 Thermo Electron FTIR Spectrometer ROBBINS
74 1.440 MS02 Hummer - SEM Sample Coater GOODNIGHT
75 1.440 LI01 Obducat Nano-Imprinter NIL-2.5" Imprint Tool ALBERT
76 1.440 DM09 Digital Instruments (Veeco) Dimension 5000 series SPM ROBBINS
77 1.440 Rame'-Hart Goniometer ROBBINS

Additional Support Equipment


1.422 Integrated Ozone Delivery System (ALD capability) RIEKENA
1.430 Residual Gas Analyzer (RGA) MAYNARD
1.440 Ge ATR Crystal (FTIR accessory) ROBBINS
1.440 Keithly 4200 Semiconductor Characterization System POLLACK
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Misc. Information

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