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Joel Voldman
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 1
Outline
> Review of last time
> Poiseuille flow
> Stokes drag on a sphere
> Squeezed-film damping
> Electrolytes & Electrokinetic separations
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 2
Last time
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 4
Poiseuille Flow
> Pressure-driven flow through a pipe
In our case, two parallel plates
> Velocity profile is parabolic
> This is the most common flow in microfluidics
Assumes that h<<W
y
h
W
high P low P
W
Ux
Umax
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 5
Solution for Poiseuille Flow
> Assume
U
Incompressible m + U U = P + U + ( U ) + m g
2
Steady t 3
Ux only depends on y
Ignore gravity
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 6
Solution for Poiseuille Flow
> Integrate twice to get solution
1
> Maximum velocity is at center Ux = y ( h y ) K
> Can get linear flowrate [m/s] and 2
volumetric flowrate [m3/s]
h2
> Can get lumped resistor using the fluidic U max = K
convention 8
Wh3
h
> Note STRONG dependence on h
Q = W U x dy = K
> This relation is more complicated when 0
12
the aspect ratio is not very high
y
P = effort = KL
h
12L
P = 3
Q
Wh
Ux
Umax 12L
Image by MIT OpenCourseWare.
RPois =
Wh 3
Adapted from Figure 13.5 in Senturia, Stephen D. Microsystem Design.
Boston, MA: Kluwer Academic Publishers, 2001, p. 329. ISBN: 9780792372462.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 7
Development Length
> It takes a certain characteristic length, called the
development length, to establish the Poiseuille velocity
profile
2 L
time * Re
L
U
LD (time)U Re L
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 8
A note on vorticity
> A common statement is to say
that laminar flow has no vorticity
= U
> What is meant is that laminar flow Vorticity
has no turbulence
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 9
Outline
> Review of last time
> Stokes drag on a sphere
> Squeezed-film damping
> Electrolytes & Electrokinetic separations
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 10
Stokes Flow
> Steady-state flow in which
inertial effects can be neglected,
Re0
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
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JV: 2.372J/6.777J Spring 2007, Lecture 15 - 11
Stokes drag on a sphere
> In creeping flow, one can solve for z
the flow field around a sphere
placed in an initially uniform flow
field
R
r
> This can be used to find the y
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 12
Stokes drag on a sphere
> This is strictly valid ONLY in a uniform
flow
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 13
Outline
> Review of last time
> Stokes drag on a sphere
> Squeezed-film damping
> Electrolytes & Electrokinetic separations
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 14
Squeezed-Film Damping
> This is how we will get our b (or R) for the parallel-plate actuator
> The result of motion against a fluid boundary
If the fluid is incompressible, there can be a large pressure rise, so
large back forces result
If the fluid is compressible, it takes finite motion to create a
pressure rise
> In either case, the dissipation due to viscous flow provides a
damping mechanism for the motion
> This is related to lubrication theory
Moveable
h(t)
Fixed
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 15
The Reynolds Equation
> Assumptions for compressible
isothermal squeezed-film
damping
One-dimensional pressure
gradient: P(r,t) = P(y,t) only
No pressure gradient in z or
along plate (x) ( Ph) h3 1 2 2
= P
Stokes flow t 12 2
Poiseuille flow profile in the plane
Ideal gas law
Isothermal (temperature rise due
to compression is small, and heat z
flow to the walls is rapid)
L
No-slip BCs y h
Rigid plate: h(r,t) = h(t) only x
W
Image by MIT OpenCourseWare.
> The result is a version of the Adapted from Figure 13.7 in Senturia, Stephen D. Microsystem Design. Boston,
MA: Kluwer Academic Publishers, 2001, p. 334. ISBN: 9780792372462.
Reynolds equation
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 16
Example: Rigid Plate Damping
> Now, assume small motions
Linearize
If we linearize:
h = h0 + h P = Po + P
z y P
Normalize: = p =
y
L W Po
h
x
W
p h02 Po 2 p h
Image by MIT OpenCourseWare.
=
t 12W 2 2
Adapted from Figure 13.7 in Senturia, Stephen D. Microsystem Design. Boston,
MA: Kluwer Academic Publishers, 2001, p. 334. ISBN: 9780792372462. ho
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 17
Suddenly Applied Motion
> We already solved a very 96 LW 3 1 1
similar problem F ( s) =
ho
4 3 4
sz ( s )
1+
n odd n
s
Impulse of heat into 1-D
resistor n
2
n ho Po
2 2
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 19
Electrokinetic Phenomena
> It is a coupled-domain problem in which electrostatic forces
result in fluid flow (and vice versa)
> Start with electrolytes, move into double layer, and finally show
how to manipulate the double layer
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 20
Electrolytes
> Electrolytes: liquids with
mobile ions Ion mobility (cm2/V-s)
Examples: water, PBS zi
Ni = ui Ci E Di Ci
zi
> Ions can move via Flux (cm-2-s-1)
concentration gradients
Valence Diffusivity (cm2/s)
(diffusion) or electric fields
(drift) Concentration (cm-3)
equation Ci ( x ) = Ci ,o e k BT
zi qe ( o )
1
Near the wall: 2 = e
2 =
zqC
i
i e i ,o e k BT
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 22
Diffuse Double Layer
zi qe
1
Express in terms of = 0 : 2 = zqC i ,o e k BT
i
i e
2
1 q
zi qeCi ,o +
2 e
z 2
Ci ,o
w i k BT i i
Assuming the reference region is charge neutral
1
2 = 2 For binary
LD
monovalent
= e D
z / L
w
electrolyte
LD (e.g., NaCl)
k BT i i i ,o B
LD ~ 1 LD=1 nm for
Ci ,o 0.1 M NaCl
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 23
Double-layer charge
w
T he charge density is
e
=
2
e = 2
LD
Total charge per unit area
LD in diffuse layer
w LD L
z
w
d = e dz = = w = e D
0
LD
DL charge/area wall charge/area
[C/cm2] [C/cm2]
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 24
Actual Double Layers
> The actual situation is MUCH more complicated
> Some ions are tightly or specifically adsorbed, forming the Stern layer
and screening the wall charge
> The rest distribute in a diffuse double-layer: the Gouy-Chapman layer
> This is an active area of research
Stern layer Gouy-Chapman layer
(up to ~0.2 nm) (~1-20 nm)
Shear boundary
Phase
Potential
boundary
(Nernst)
Gouy- potential
Zeta potential Chapman (up to several
potential hundred mV)
0
Distance from interface
Image by MIT OpenCourseWare.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 25
Electroosmotic Flow
> An axial electric field exerts a
force on the charge in the
diffuse double layer, which
drags the fluid down the pipe
Insulating solid
Insulating solid
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 26
Analysis of Electroosmotic Flow
> Assume
Creeping flow
One dimensional flow Ux(z)
No pressure drop
Electrical body force
LD
2
d Ux w LD
z
= e Ex
LD
2
dz
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 27
Analysis of Electroosmotic Flow
> This leads to a PLUG-FLOW d 2U x w LzD
= e Ex
profile
LD
2
dz
~3LD
Integrate twice, and use boundary conditions:
dU x
Ux ( z = ) = 0 ( ) = =0
Ux(z) dz h/2
w LD L
z
Ux = e e
L
Ex
D D
z
z
w LD L
z
( z ) = e D
Plug flow
~3LD Ux
Ux =
(
Ex )
Image by MIT OpenCourseWare.
U0
Adapted from Figure 13.12 in Senturia, Stephen D. Microsystem Design.
Boston, MA: Kluwer Academic Publishers, 2001, p. 344. ISBN: 9780792372462.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 28
Analysis of Electroosmotic Flow
> This leads to a PLUG-FLOW
profile
or LD x
It is what is measured for z > 3LD
experimentally
For h>>LD, one typically
assumes
=0
w =
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 29
Electrophoresis
> This is just electroosmosis
around a solid surface
> Each ionic species has its own U ep = E x = epE x
mobility
> Therefore, in an electrolyte in
which there is a net electric field,
ions will drift at various rates More
For a generally
> This is the basis of a separation large
technology called electrophoretic particle
separation
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 30
Electrokinetic separation
> This was THE original driver for micro-TAS
TAS = total analysis systems
> Create fully integrated microsystems that would
go from sample to answer
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 31
Electrokinetic separation
> We use a channel-crossing
structure to select a sample
plug
Ls = t sep EP ,1 EP , 2 E x
Separation time
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 32
Schematic Illustration
> The key discovery was that
V1 (+)
liquid samples could be VJ Injection
V2 < VJ
V1 < VJ
Slower component
V3 (+) V4 = 0
U0 U0
Faster component
ORNL movie V2 < VJ
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 33
Electrokinetic separation
> The macro technology is
conventional capillary
electrophoresis
Most notably used in the
human genome project
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 34
Electrokinetic separation
> Conventional capillaries Richard Mathies (UCB)
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
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JV: 2.372J/6.777J Spring 2007, Lecture 15 - 35
An aside on electrodes
> Current in the electrolyte is carried by ions
> Current in the wire is carried by electrons
> At the surface, something must happen to transfer
this current
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 36
Electrokinetics
> That is just the beginning
> Dielectrophoresis
Force on dipoles in non-uniform electric fields
Can use AC fields
Can hold things in place
> Other phenomena
Electrohydrodynamics
Electrowetting
Induced-charge electrophoresis/electroosmosis
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 37
Comparing EOF & pressure-driven flow
> If you are designing a chip that needs to move liquids
around, which method is best?
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 38
Comparing EOF & pressure-driven flow
> Flowrate
Water in rectangular SiO2 channel
h varies, W=1000 m, L=2 cm, =800, =50 mV
Drive with Ex=100 V/cm, P=5 psi
Wh3
U0 =
Ex Q= P
12 L
hW Q h2
Q = U 0 hW = Ex U0 = = P
A 12 L
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 39
Comparing EOF & pressure-driven flow
> Scaling
Pressure-driven flow
2
larger in large channels 10
Due to cubic 0
10
dependence of flow
resistance
-2
10
EO flow larger in small EO
Q (l/s)
channels -4
10
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 40
Comparing EOF & pressure-driven flow
> Other issues typically matter more
> Valving
EOF has built-in valving using E-fields
Poiseuille needs mechanical valves
> Liquid limitations
Poiseuille flow can pump any liquid
EOF ionic strength limits
Debye length depends on 1/C0
Increasing ionic strength decreases LD and thus
EOF
Typically use ~10-100 mM salt buffer
EOF pH limits
pH affects wall charge affects EOF
Typically use pH ~7 buffers
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 41
Comparing EOF & pressure-driven flow
> Materials issues
Poiseuille flow can use any material
EOF requires defined (and stable) surface charge
Best is silica (or at least glass)
Polymers are more difficult
Surface charge can change as molecules
adsorb, etc.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
OpenCourseWare (http://ocw.mit.edu/), Massachusetts Institute of Technology. Downloaded on [DD Month YYYY].
JV: 2.372J/6.777J Spring 2007, Lecture 15 - 42
Comparing EOF & pressure-driven flow
> Transport limitations
EOF
Will separate molecules as they are convected
downstream
Species in flow must tolerate E-fields (DNA/proteins
OK, cells not so good)
Plugs remain plugs
Poiseuille flow
Will not separate molecules
Objects in flow must tolerate shear/pressure
(DNA/proteins OK, cells OK depending on
shear/pressure)
Will distort plugs
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
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JV: 2.372J/6.777J Spring 2007, Lecture 15 - 43
Whats next
> We will discuss the behavior of the stuff in the liquids
> How to manipulate that stuff at the microscale
> And then we head into system-level issues
Feedback, Noise, etc.
Cite as: Joel Voldman, course materials for 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007. MIT
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JV: 2.372J/6.777J Spring 2007, Lecture 15 - 44