ReadMe for Interactive ITRS Files

February 16, 2015: The ITRS website (www.itrs.net) 1 is in redesign. All links to this site or sub sites within these files may not be active until the
website redesign is completed.

To use the interactive links within the 2011 ITRS chapters, tables, and table summaries you will need to establish the relationships among the files
to match the hyperlink paths:

2011ITRS
\2011Chapters
\2011Tables
\Chapter Links
\Yield

1. Create your file structure on your personal computer

a. On your harddrive, create a file path of folders and subfolders as follows:
C:\Links\2011ITRS\2011Chapters
C:\Links\2011ITRS\2011Tables
C:\Links\2011ITRS\Chapter Links\Yield

2. Download all the files to their corresponding path as follows:

a. From the folder named 2011Chapters
download all chapter files into the 2011Chapter folder just created on your computer hard drive.

b. From the folder named 2011Tables

download all table files into the 2011Tables folder just created on your computer hard drive.

c. In the Chapter LInks folder, from the folder named Yield,

download all files into the Chapter Links\Yield folder just created on your computer hard drive.

1
Source: Semiconductor Industry Asso. The International Technology Roadmap for Semiconductors, 2013 Edition. Albany:SEMATECH, 2013.