3rd Step Guide

WIRE BONDER
UTC-1000
NE00040-00
THIRD STEP GUIDE
(1)
Thank you for your purchase of our UTC-1000 full auto wire bonder.
This manual describes the maintenance methods by disassembly and adjustment for the purpose of
maintaining the performance of this machine.
You are, therefore, requested to read through this manual without fail and understand the cautions on
work, working methods, and safety items before starting the maintenance work of this machine for the
purpose of maintaining the performance of this machine and using the machine for a long time
without any danger.
If you should have found obscure points or questions in this manual, please
contact our Engineering Service Dept.
Caution
a.
No part of the contents of this manual can be reproduced or reprinted in any form without our
permission.
b.
If you should have found obscure points, errors, omissions of description, Incorrect collating,
missing pages, or other defects, please inform our Engineering Service Dept.
c.
Never operate the machine by the methods other than described in this manual, otherwise
unexpected troubles or accidents may occur.
You are requested to understand that our
company is not responsible even if a trouble should have occurred.

d.
You are requested to understand that our company is not responsible for any direct or indirect
damage caused by defects of this manual, machine, and/or software.
e.
Keep this manual without fail after reading. Read this manual again if a question has arisen
during operation of this machine or if a trouble should have occurred in the machine.
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UTC-1000 third step guide is divided into three volumes consisting of third step guide (1), third step
guide (2), and third step guide (3).
Third Step Guide (1)
THIRD STEP GUIDE
Chapter 1 Periodical inspection

1-1 Necessity of periodical inspection
1. Necessity of periodical inspection
2. Inspection and maintenance
records of machine
1-2 Jigs and tools necessary for
periodical inspection
1. Lubricating oils
2. Tools
3. Measuring tools
1-3 Periodical inspection recording
1. Periodical inspection recording
table
2. Maintenance record
1-4 Kinds of periodical inspection and
maintenance
1. Periodical inspection items
2. Routine inspection and
maintenance
3. Weekly inspection and
maintenance
4. Monthly inspection and
maintenance
5. Three-month intervals inspection
and maintenance
6. Six-month intervals inspection and
maintenance
7. Annual inspection and
maintenance
Chapter 2 Disassembly and adjustment
of each unit
2-1 Disassembly and adjustment of
bonding head
1. Bonding head specifications
2. Bonding head adjusting procedure
3. Linear sensor adjusting methods
4. Z-axis calibration method
5. Camera lens tube and ring
illumination adjusting methods
6. Torch electrode adjusting method
7. Loop control adjusting methods
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THIRD STEP GUIDE

of each unit
universal indexer
1. Specifications of universal indexer
2. Adjusting procedures of universal
indexer
3. Adjustment after assembling the
main body
2-3 Disassembly and adjustment of XY
table
1. Specifications of XY table
2. Adjusting procedure of XY table
3. Mounting method of NRS table
4. Adjusting method of linear sensor
THIRD STEP GUIDE

of each unit
loader and unloader
1. Loader and unloader specifications
2. Loader and unloader adjusting
procedures
3. Elevator magazine receiver
adjustment
2-5 Overall adjustment
1. Origin correction value setting
2. Air pressure adjustment
Chapter 3 Inspection and maintenance
records
3-1 Inspection and maintenance
records
1. Routine inspection
2. Weekly inspection
3. Monthly inspection
4. Three-month intervals inspection
5. Six-month intervals inspection
6. Annual inspection
1-1
Necessity of periodical inspection (Page 9 ~)
1-2
Jigs and tools necessary for periodical inspection (Page 13 ~)
1-3
Periodical inspection recording (Page 15 ~)
1-4
Kinds of periodical inspection and maintenance (Page 19 ~)
2-1
Disassembly and adjustment of bonding head (Page 51 ~)
Work icons
[Point][Caution] and [Tools employed] icons are indicated on each page as occasion demands.
+.,-/*
Work points are described every description of work as occasion demands.
You can understand the work point before starting work.
Caution
Cautions on work are described every description of work as occasion demands.
You can understand the cautions on work before starting work.
2mm
-1102+, /.2
Cap Screw Wrench
Tools and jigs necessary for work are illustrated every description of work.
Since necessary tools and jigs can be understood intuitively, the work efficiency is
improved.
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1-1
Necessity of periodical inspection ......................................................9
1. Necessity of periodical inspection ...................................................................................... 10

2. Inspection and maintenance records of machine ............................................................... 11
1-2
Jigs and tools necessary for periodical inspection .............................13
1. Lubricating oils.................................................................................................................... 14
2. Tools ................................................................................................................................... 14
3. Measuring tools .................................................................................................................. 14
1-3
Periodical inspection recording ..........................................................15
1. Periodical inspection recording table.................................................................................. 16

2. Maintenance record............................................................................................................ 17
1-4
Kinds of periodical inspection and maintenance ................................19
1. Periodical inspection items .................................................................................................20

2. Routine inspection and maintenance ................................................................................. 20
3. Weekly inspection and maintenance .................................................................................. 21
4. Monthly inspection and maintenance ................................................................................. 25
5. Three-month intervals inspection and maintenance........................................................... 28
6. Six-month intervals inspection and maintenance ............................................................... 31
7. Annual inspection and maintenance................................................................................... 42
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Chapter 2 Disassembly and adjustment of each

unit
2-1
Disassembly and adjustment of bonding head .................................. 51
1. Bonding head specifications ...............................................................................................52

2. Bonding head adjusting procedure .....................................................................................53
3. Linear sensor adjusting methods........................................................................................91
4. Z-axis calibration method....................................................................................................112
5. Camera lens tube and ring illumination adjusting methods ................................................134
6. Torch electrode adjusting method.......................................................................................191
7. Loop control adjusting methods..........................................................................................209
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For safe work

Please read through and understand [For safe work] before starting the maintenance by disassembly
and adjustment for the purpose of maintaining the performance of the machine.
Each illustrated symbol means as follow.
DANGER
WARNING
CAUTION
Caution
Never
disassemble
Indication
Wrong operation, if executed due to the negligence of this caution

may cause operators death or serious injuries.
may probably cause operators death or serious injuries.
may cause operators injuries or physical damage.
This symbol indicates an item to be careful when operating the machine.

carefully and operate the machine safely.
Please read the contents
Inhibition This symbol shows an inhibited item to be not executed. Please read the indicating contents
carefully and never execute any inhibited item.
Indication This symbol indicates an indicating item to be executed without fail.
indicating contents carefully and execute it without fail.
Please read the
Caution on use
Observe the following cautions for safety when using our machine.
WARNING
Be careful with an
electric shock accident
When touching the terminal board, etc. during maintenance work, make sure that a qualified trained
maintenance man (line keeper) has shut off the power supply without fail before starting the work. Negligence
of this confirmation may cause an electric shock accident, a fire, and/or troubles.
Be careful with an
Internal parts in the machines may remain charged even after turning off all power supplies. Make sure that
no voltage is applied to these parts by using a circuit tester or the like before starting the maintenance work.
Negligence of this confirmation may cause an electric shock accident, a fire, and/or troubles.
Be careful with an
Make sure that the breaker is turned off without fail for preventing an electric shock accident when
maintenance work is done in the vicinity of the main breaker of the machine.
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CAUTION
Be careful with a
strong magnetic field
Be careful with a
Be careful with a
Be careful with a
Never disassemble
The bonding head contains parts each having very strong magnetic force.
of iron.
Dont use any surface plate made
Dont put any metal close to the magnet in the fulcrum shaft unit, since this magnet has very strong magnetic
force.
The swing motor moving element is a powerful magnet.
it.
Dont put any iron or other magnetic bodies close to
The swing motor moving element is a powerful magnet. Use non-magnetic screws like stainless steel screws
without fail when fixing it to a jig.
Dont perform any adjustment or disassembly other than described in this manual, otherwise negligence of this
caution may cause personal injuries or the breakage of the machine.
The plate is fixed by a bonding agent. Never exfoliate it forcibly.
Inhibition
Dont strike the linear scale being bonded at the bond holder, otherwise it may be broken.
Inhibition
Dont click [YES] during adjustment, otherwise the capillary and reference pin may touch each other.
Inhibition
Indication
Execute routine inspection and periodical inspection of the machine without fail. Make sure before starting
every work that the machine is free of abnormal symptoms.
Indication
For maintenance, use tools conforming to the accuracy of the machine.

cause the machine to be broken.
Indication
Fasten the fixing screws with the specified tightening torque without fail and lock them with paint for preventing
them from being loosened.
Indication
Lock the upper-limit stopper by a hexagon nut and then, lock it with paint without fail for preventing it from being
loosened.
Indication
Lock the lower-limit stopper by a hexagon nut and then, lock it with paint without fail for preventing it from being
loosened.
A tool having poor accuracy may
Take an anti-static countermeasure without fail when adjusting electric units.

Indication
Lower the
temperature
Be careful with hot portions during maintenance work. For the maintenance of hot sections, turn off the heater
power supply and wait for a while until the temperature falls to be lower than 50 before starting the work for
the purpose of preventing a burn. A high temperature caution is indicated at hot portions where temperature
may exceed 50 inside the machine.
Wear protective gloves and safety shoes for preventing workers danger during maintenance work.
Indication
Shut off the air feed source without fail in advance for ensuring workers safety when units are adjusted.
Indication
OFF
ELB
Turn off
power supply
OFF
ELB
Turn off
power supply
Turn off [POWER] switch and shut off the main breaker without fail in advance for the purpose of preventing
workers danger when touching each circuit in the control unit during maintenance work, etc.
Turn off [POWER] switch and shut off the main breaker without fail in advance for the purpose of preventing
workers danger when replacing the machine fuse. Replace the fuse with a fuse having the specified capacity
without fail.
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UTC-1000 inspection and adjusting points
Disassembly and
Disassembly and adjustment
adjustment of XY table
(2) Page 147 ~ 221
of bonding head
(1) Page 051~ 221
Disassembly and
adjustment of loader
(3) Page 009~ 158
of unloader
(3) Page 009 ~ 158

of universal indexer
(2) Page 009~ 146
Fig. A001
For safety
Observe the cautions for safety during machine operation.
Store your various data (production data, frame data ,magazine data, configuration machine
data) into a CD-RW ,a floppy disk, or the like frequently.
We are not responsible even if the
storage contents in the hard disk cannot be recovered due to a trouble of the hard disk.
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1-1
Necessity of periodical inspection
1. Necessity of periodical inspection.......................................................................................10

(A) Periodical inspection of machine..................................................................................10
(B) Preparation of tools and jigs.........................................................................................10
2. Inspection and maintenance records of machine ...............................................................11
(A) Necessity of inspection and maintenance records .......................................................11
(B) Utilization of inspection and maintenance records .......................................................11
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1-1
Necessity of periodical inspection
1. Necessity of periodical inspection

(A) Periodical inspection of machine
The machine is manufactured on condition
that
its
maintenance
executed.
and
check
are
Its performance can be fully
displayed by executing the maintenance

and check.
As the machine is being
operated, many component parts may be

gradually
worn,
deteriorated,
and/or
Fig. A002
deformed.
By executing periodical inspection, proper maintenance and parts exchange, an operation stop
failure and accidents due to serious troubles can be prevented and the machine can be maintained
under the best condition.
Periodical inspection comprises weekly inspection, monthly inspection, three month intervals
inspection, three month intervals inspection, and annual inspection in addition to routine
inspection such as the inspection at the start of daily work. Perform inspection without fail as
routine work.
Caution
Indication
Execute routine inspection and periodical inspection of the machine without fail. Make sure before starting
each work that the machine is free of abnormal symptoms. If an unexpected accident occurred, perform
necessary check to treat it safely with due care.
(B) Preparation of tools and jigs

For the inspection and maintenance of the machine, tools, jigs, oil and grease, waste, protective
gloves, safety shoes, and other protectors are necessary. Keep them near the machine at all times.
A tool having poor accuracy may cause the damage of machine.
Jigs comprise exclusive jigs as attachments of the machine. Store them carefully so as not to lose
them.
The standards of oils, grease, adhesives, and other chemicals differ according to the
purposes of use. Use designated standard products without fail. Dont use any deteriorated
chemicals due to long-time storage.
Caution
Indication
For the maintenance, use tools conforming to the machine accuracy.

damage of the machine.
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10
A poor accuracy tool may cause the
2. Inspection and maintenance records of machine

(A) Necessity of inspection and maintenance records
It is important for executing the inspection and maintenance to grasp the present conditions of the
machine, referring to past inspection and maintenance data.
The inspection and maintenance records of the machine are recorded to show whether inspection
and maintenance have been executed properly or not.
Inspection, grease lubrication, coating of oils and grease, parts exchange, and other maintenance
records in the inspection and maintenance records serve as important information for executing
the inspection and maintenance.
(B) Utilization of inspection and maintenance records

Third step guide (3) Chapter 3 Inspection and maintenance records comprises UTC-1000
inspection and maintenance records. Copy and fill in these records whenever inspection and
maintenance were executed, and keep them in the vicinity of the machine to be able to see them
whenever necessary.
11
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12
1-2 Jigs and tools necessary for periodical inspection

1. Lubricating oils....................................................................................................................14
(A) Grease designated by our company ............................................................................14
(B) Lubricating oils designated by our company ................................................................14
2. Tools ...................................................................................................................................14
3. Measuring tools ..................................................................................................................14
13
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1-2
1.
Jigs and tools necessary for periodical inspection

Lubricating oils
(A) Grease designated by our company

Makers
Multi-purpose grease (MPG)
WYNNS
Multemp PS-2
Kyodo Oil Co.
Alvania 2
Showa Shell Oil Co.
EA2
Nihon Seiko Co.
(B) Lubricating oils designated by our company

Makers
2.
Mitsubishi Diamond Lub RO-32
Mitsubishi Oil Co.
Diamond Lub RO-32+HDCI mixed by 50%
Mitsubishi Oil Co., and WYNNS
Tools
Hexagon socket wrench set
Plus (+) screwdrivers
Minus (-) screwdrivers
Cotton swab
Absolute alcohol
3.
Measuring tools
Tool names
Digital tester
Uses
Standards
Voltage measurement
Makers
Shall be able to read in

units of 0.01V
Oscilloscope
PC board signal measurement
XY axes shall be
measurable
Torque gauge
XY axes rotating torque
600ATG
Tonichi
TSK
measurement
Gap gauge set
Gap measurement
No.65M
Scale (150mm)
Length measurement
Silver scale
Tension gauge
Load measurement
Shall be measurable in
(for verification)
units of 1gf
Load cell set
Force adjust
J772, J773
Diamond needle
Overall accuracy measurement J510
Microscope
Overall accuracy measurement 1m shall be measurable
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14
Shinkawa
Shinkawa
1-3 Periodical inspection recording

1. Periodical inspection recording table ..................................................................................16
2. Maintenance record ............................................................................................................17
15
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1-3
1.
Periodical inspection recording

Periodical inspection recording table
Periodical inspection recording table

Machine name
Delivery date
1st year
Inspectors name
Inspection date
Customers signature
Remarks
2nd year
Inspectors name
Inspection date
Customers signature
Remarks
3rd year
Inspectors name
Inspection date
Customers signature
Remarks
4th year
Inspectors name
Inspection date
Customers signature
Remarks
5th year
Inspectors name
Inspection date
Customers signature
Remarks
6th year
Inspectors name
Inspection date
Customers signature
Remarks
7th year
Inspectors name
Inspection date
Customers signature
Remarks
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16
2.
Maintenance record
This record can record provisional maintenance and maintenance execution conditions and their
results up to the next periodical inspection. This record serves as valuable data for executing
proper inspection and maintenance in the future. Fill in this record with executed maintenance
without fail.
Machine name
Delivery date
Execution record of provisional maintenance and maintenance

(Division contents : Trouble maintenance, trouble parts exchange, overhaul, lubrication, others)
Execution date
Maintenance contents
Division
Maintenance person in charge
Execution date
Division
Execution date
Division
Execution date
Division
Execution date
Division
Execution date
Division
Execution date
Division
Execution date
Division
Execution date
Division
Execution date
Division
Execution date
Division
Execution date
Division
Execution date
Division
Execution date
Division
17
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18
1-4 Kinds of periodical inspection and maintenance

1. Periodical inspection items .................................................................................................20
2. Routine inspection and maintenance..................................................................................20
(A) Routine inspection check points...................................................................................20
3. Weekly inspection and maintenance ..................................................................................21
(A) Bonding head ...............................................................................................................21
(B) Indexer .........................................................................................................................24
4. Monthly inspection and maintenance .................................................................................25
(A) Bonding head ...............................................................................................................25
(B) Universal indexer..........................................................................................................27
5. Three-month intervals inspection and maintenance ...........................................................28
(A) Loader stacker..............................................................................................................28
(B) All portions....................................................................................................................30
6. Six-month intervals inspection and maintenance ...............................................................31
(A) Bonding head ...............................................................................................................31
(B) X-Y drive unit ................................................................................................................32
(C) Loader stacker..............................................................................................................34
(D) Unloader stacker ..........................................................................................................35
(E) Universal indexer..........................................................................................................36
(F) ZUP board ....................................................................................................................41
7. Annual inspection and maintenance...................................................................................42
(A) Bonding head ...............................................................................................................42
(B) Loader stacker..............................................................................................................43
(C) Unloader stacker ..........................................................................................................44
(D) Power supply................................................................................................................45
19
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1-4
1.
Kinds of periodical inspection and maintenance

Periodical inspection items
Periodical inspection and maintenance comprises six kinds according to its execution time as shown
below.
(A) Routine inspection and maintenance
(C) Monthly inspection and maintenance
(E) Six-month intervals inspection and
maintenance
2.
(B) Weekly inspection and maintenance

(D) Three-month intervals inspection and
maintenance
(F) Annual inspection and maintenance
Routine inspection and maintenance

The machine wears and deteriorates gradually in the course of daily work. By executing routine
inspection and maintenance, wear, deterioration deformation, and other abnormal symptoms in the
machine can be detected in early stages to be able to avoid the breakage and troubles of the machine.
Routine inspection and maintenance is initial-stage diagnosis. By executing the inspection before
starting the daily work, one can keep track of the health conditions of the machine and one can avoid
serious diseases of the machine by executing appropriate preventive measures and diagnosis such as
the exchange of deteriorated or worn parts, maintenance, maintenance, and cleaning to enable the
machine to be working under sound conditions.
Make a practice of executing routine inspection and maintenance such as the inspection before
starting daily work, etc.
(A) Routine inspection check points

Peripheral units of bonding head
* Z-axis unit
* Cable holder
* Torch electrode
* Wire tensioner
* Transducer
* TV camera
* Camera lens tube

* Ring illumination
* Illumination unit
Wire guide cleaning

Wipe off the wire guide by cotton
swab or gauze moistened with
absolute alcohol.
Wire tensioner cleaning

Wipe off the wire guide by a cotton
swab or gauze moistened with
absolute alcohol.
Bonding head
XY table
* Working sound
* Odor
* Wiring
* Metallic
Be careful not to
drop the spacer when removing the

plate on this side.
Indexer
* Temperature
* Belt refuse
* Working sound
* Odor
* Metallic
Unloader
Loader
* Working sound
* Wiring
* Odor
* Metallic
* Working sound
* Odor
* Belt refuse
* Metallic
Fig. T001
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20
3.
Weekly inspection and maintenance

(A) Bonding head
(1) Cleaning of the clamp surface
Click [Help (H)]- [Maintenance manual] [Chapter 2 Adjustment and inspection of each unit]
[2-1 Bonding head], and refer to [Cleaning the clamper].
Fig. T002
Unnecessary
-1102+, /.2
(2) Cleaning of capillary clamp

a)
Move the bonding head operator side.
b)
Wipe the tip of a cleaning brush (example : interdental brush) with alcohol in small
quantities.
c)
Insert the cleaning brush from the lower side into the capillary mounting hole of the
transducer, and lightly rub the inside of the capillary mounting hole by moving the cleaning
brush up and down.
d)
Now, cleaning ends.
Transducer
Cleaning brush
RPS unit
Fig. T-003
Caution
Be careful not to drop dirt onto the RPS unit.
21
-1102+, /.2
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(3) Bonding force inspection by tension gauge

a)
Display the short-cut menu by right clicking and click [Enter chessman mode]. Move the
capillary into the bonding area by chessman.
b)
Display the short-cut menu again by right clicking and click [Exit chessman mode].
c)
Click [Tool]-[Output Check] from the menu.
Fig. T004
Unnecessary
-1102+, /.2
d)
A tool output dialog is displayed. Click [Bond Head].

Z: Press Touch down key to lower the Z level 3mm.
Lower 3mm
Z down key
Fig. T005
Unnecessary
-1102+, /.2
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22
e)
Set the bonding force to the present working load and press output (O) button.
Bond force setting
Fig. T006
Unnecessary
-1102+, /.2
f)
Apply the arm tip of the tension gauge to the lower part of the transducer tip as illustrated,
a lift the tension gauge slowly.
g)
Check the tension gauge value when the transducer tip has lifted slightly.
h)
Check if the Bonding force being set by the tool output check dialog approximately meets
the tension gauge.
(Tension gauge measurement is subjected to an individual difference. Grasp the individual
difference in advance.)
Tension gauge
Transducer
Fig. T007
-1102+, /.2
23
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(B) Indexer
(1) Cleaning of paddle adapter
Click [Help (H)] [Maintenance manual] [Chapter 2 Adjustment and inspection of each unit]
[2-4 Universal indexer] from the machine menu, and refer to [Cleaning the paddle adapter].
Fig. T008
Unnecessary
-1102+, /.2
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4.
Monthly inspection and maintenance

(A) Bonding head
(1) Cleaning of wire tensioner
[2-1 Bonding head] from the machine menu, and refer to [Cleaning the wire tension].
Fig. T009
Unnecessary
-1102+, /.2
(2) Cleaning of torch electrodes

[2-1 Bonding head] from the machine menu, and refer to [Cleaning and inspecting the torch
electrode].
Fig. T0010
Unnecessary
-1102+, /.2
25
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(3) Checking the position of the electrode

[2-l Bonding head] from the machine menu, and refer to [Cleaning and inspecting the torch
electrode].
Fig. T011
Unnecessary
-1102+, /.2
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26
(B) Universal indexer

(1) Greasing to index pincher up/down shaft
[2-4 Universal indexer] from the machine menu, and refer to [Greasing the index pincher
up/down shaft].
Fig. T012
Unnecessary
-1102+, /.2
27
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5.
Three-month intervals inspection and maintenance

(A) Loader stacker
(1) Grease the linear ways
[2-3 Loader stacker and unloader stacker] from the machine menu, and refer to [Greasing and
oiling the linear ways and drive screws (once every 3 months)].
Fig. T013
Unnecessary
-1102+, /.2
(2) Timing belt inspection

Check the timing belt for deterioration and tension condition.
Fig. T014
Unnecessary
-1102+, /.2
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(3) Lubricate the magazine up / down motion drive screw

[2-3 Loader stacker, unloader stacker] from the machine menu, and refer to [Greasing and oiling
the linear ways and drive screws (once every three months)].
Fig. T015
Unnecessary
-1102+, /.2
(4) Grease the magazine eject cylinder

Click [Help (H)] [Maintenance manual] Chapter 2 Adjustment and inspection of each unit]
[2-3 Loader stacker, unloader stacker] from the machine menu, and refer to [Greasing and oiling
the linear ways and drive screws (once every three months).
Fig. T016
Unnecessary
-1102+, /.2
29
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(B) All portions

(1) Pipe bending and curve check
Check if the air flow drops due to a breakage failure of pipe.
Fig. T017
Unnecessary
-1102+, /.2
(2) Pipe deterioration check

The wire tension pipe interlocks with the bonding head. Check if this pipe is free of damage,
deterioration, deformation, and other defects.
Wire tension pipe
Fig. T018
Unnecessary
-1102+, /.2
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6.
Six-month intervals inspection and maintenance

(A) Bonding head
(1) Mounting of camera lens tube and focus adjustment
Retighten four SUS CSB M4 x 12mm bolts with flat washers and spring washers which fix the
camera lens tube to the camera lens tube mounting base with the tightening torque of 1.5Nm
(approx. 1.5kgfcm).
For focus adjustment, click [Help (H)] [Operation manual] [Chapter 7 Product Type
comversion] [7-10 Adjusting the forcus of the camera lens tubes] from the machine menu, and
refer to [Adjusting method].
3mm
Fig. T019
-1102+, /.2
Cap Screw Wrench
(2) Inspection of the bonding force by load cell

Click [Help (H)] - [Program manual] [Chapter 4 Menu]- [4-6 Machine management]- [4-6-4
Machine management] [Machine specific] - [Z calibration] from the machine menu and refer to
the screen.
Fig.T020
Unnecessary
-1102+, /.2
31
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(B) X-Y drive unit

(1) Cleaning of the limit plate and photo sensor
[2-2 XY drive unit], and refer to [Cleaning the limit plates and photo sensors].
Fig. T021
Unnecessary
-1102+, /.2
(2) Replacing grease on X cross roller guide

[2-2 XY drive unit], and refer to [Replacing grease on the cross roller guide].
Fig. T022
Unnecessary
-1102+, /.2
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(3) Replacing grease on Y cross roller guide

[2-2 XY drive unit], and refer to [Replacing grease on the cross roller guide].
Fig. T023
Unnecessary
-1102+, /.2
33
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(C) Loader stacker

(1) Cleaning of the photo sensors
[2-3 Loader stacker and unloader stacker], and refer to [Cleaning the photo sensors].
Fig. T024
Unnecessary
-1102+, /.2
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(D) Unloader stacker

(1) Cleaning the photo sensors
[2-3 Loader stacker and unloader stacker], and refer to [Cleaning the photo sensors].
Fig. T025
Unnecessary
-1102+, /.2
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(E) Universal indexer

(1) Cleaning the photo sensors
[2-4 Universal indexer], and refer to [Cleaning the photo sensors and inside of the indexer].
Fig. T026
Unnecessary
-1102+, /.2
(2) Inspection of the timing belt

[2-4 Universal indexer], and refer to [Inspecting the timing belt].
Fig. T027
Unnecessary
-1102+, /.2
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(3) Replacing grease on the index pincher drive ball screw

[2-4 Universal indexer], and refer to [Replacing grease on the index pincher drive ball screw].
Fig. T028
Unnecessary
-1102+, /.2
(4) Greasing the ball screw guide

[2-4 Universal indexer], and refer to [Greasing the ball screw guide].
Fig. T029
Unnecessary
-1102+, /.2
37
NE00040-00
(5) Greasing the index pincher open/close lever cam

[2-4 Universal indexer], and refer to [Greasing the index pincher open/close lever cam].
Fig. T030
Unnecessary
-1102+, /.2
(6) Greasing the heater block up/down guide

[2-4 Universal indexer], and refer to [Greasing the heater block up/down guide].
Fig. T031
Unnecessary
-1102+, /.2
NE00040-00
38
(7) Greasing the lead clamper up/down guide

[2-4 Universal indexer], and refer to [Greasing the lead clamper up/down guide].
Fig. T032
Unnecessary
-1102+, /.2
(8) Greasing the heater block up/down cam and lead clamper up/down cam.
[2-4 Universal indexer], and refer to [Greasing the heater block up/down cam and lead clamper
up/down cam].
Fig. T033
Unnecessary
-1102+, /.2
39
NE00040-00
(9) Oiling the movable rail feed screw

[2-4 Universal indexer], and refer to [Oiling the movable rail feed screw].
Fig. T034
Unnecessary
-1102+, /.2
(10) Fastening the bolts and nuts

Check if fixing screws of rotary cam shaft, eccentric shaft, etc. are free of being loose. Fasten
them, if they should be loose.
Unnecessary
-1102+, /.2
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40
(F) ZUP board

(1) Ultrasonic oscillator voltage and current waveform phase check
a)
Connect the probe to ZUP-02A board. (Turn off the power supply for safety before starting
the connection work of the probe.)
b)
After connecting the probe, turn on the power supplies of the machine and oscilloscope, and
set the oscilloscope. (Setting of oscilloscope is not described here).
Item
Oscilloscope
Connection PC board
Terminal No.
GN terminal
US drive voltage
CH1
ZUP-02A
CT1
CT3
US drive current
CH2
ZUP-02A
CT2
CT3
-1102+, /.2
c) The following waveforms are displayed by executing 1 wire bonding after carrying the frame.
Make sure that the phases of these waveforms are the same. If not displayed normally,
repeat 1 bonding several times.
CH-1
US drive voltage
CH-2
US drive current
Fig. T036
-1102+, /.2
41
NE00040-00
7.
Annual inspection and maintenance

(A) Bonding head
(1) Inspection of mounting position and tilting of transducer
a)
Make sure that the dent profile produced due to the grounding of the capillary to a specimen
when the transducer has lowered to be horizontal is round and uniform. Perform this
confirmation work each time the capillary is replaced.
b)
Make sure that four SUS CSB M4 x 15mm and two SUS CSB M3 x 14mm which fix the
supporting base (#2)to unit frame (#1) are securely fastened.
SUS CSB M3 x 14mm (from the rear side)
SUS CSB M4 x 15mm
Fig. T036
2.5mm
Supporting base (#2)
-1102+, /.2
Cap Screw Wrench
3mm
Cap Screw Wrench
(2) Inspection of tightening torque of transducer

Mount the transducer by fastening four fixing screws (SUS CSB M2.6 x 16mm) together with
flat washers with the fastening torque of 588mNm (6kgfcm).
SUS CSB M2.6 x 16mm
4 pieces
Unit frame (#1)
Fig. T037
Supporting base (#2)
2mm
-1102+, /.2
NE00040-00
42
Cap Screw Wrench
(B) Loader stacker

(1) Fastening of bolts and nuts
Make sure that fastening screws of each unit are securely tightened without any looseness. If
loose, tighten them securely.
Unnecessary
-1102+, /.2
43
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(C) Unloader stacker

(1) Fastening of bolts and nuts
Make sure that fastening screws of each unit are securely tightened without any looseness.
If loose, tighten them securely.
Unnecessary
-1102+, /.2
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44
(D) Power supply

(1) Cleaning of fan motors
Clean the fans of the fan motors, if their metallic gauzes are dusty.
Fan motor
Fan motor
Fan motor
Fan motor
Fig. T038
Unnecessary
-1102+, /.2
(2) Cleaning of chassis interior

If control board and other component parts are dusty, remove the control board and clean the
back board and control board. After cleaning, mount the control board and cable as before.
Insert them securely.
Fig. T039
Unnecessary
-1102+, /.2
45
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(3) Voltage confirmation method

Voltage measurement by using a circuit tester.
+5V
GND
+3.3V
+5V
+5V
GND
-12V
Fig. T040
+12V
-1102+, /.2
(4) Voltage specification range
Voltage
Specified tolerance
+3.3V
+3.3V
0.05V
+5Vs
+5Vs
0.25V
+5V
+5.14
0.02V
+12V
+12V
0.6V
-12V
-12V
0.6V
+15V
+15V
0.2V
-15V
-15V
0.2V
+24V
+24V
0.2V
-1102+, /.2
NE00040-00
46
(5) Voltage check and adjusting points

a)
+15V, -15V, +24V check and adjustment

1)
The following figure shows the outer view with the front cover open.
Remove the black cover by loosening its five pan head screws M4 x 6mm.
Pan head screw M4 x 6mm
Fig. T041
2)
M4
-1102+, /.2
Cap Screw Wrench
Measure the measuring points of +24V, +15V, and -15V by using a circuit tester, and
make sure that the voltage is within the specified tolerance.
If the voltage is out of the specified tolerance, adjust the voltage by each voltage control
knobs (variable resistor).
The voltage increases when turning the control knob clockwise and it decreases when
turning the control knob counterclockwise.
-15v control knob
+15v control knob

+24v control knob
+24V adjustment
+15V adjustment
+24V
-15V adjustment
GND
GND
GND
-15V
+15V
Fig. T042
-1102+, /.2
47
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b)
+3.3V, +5V, +12V, -12V check and adjustment

1)
Remove two decorated screws M4 x 16mm which fix the EPU power supply.
Open the EPU power supply, and remove the rear cover by loosening seven pan head
screws M4 x 6mm.
Pan head screw M4 x 6mm
Decorated screw M4 x 6mm
Fig. T043
M4
-1102+, /.2
2)
Cap Screw Wrench
Measure the measuring points of +3.3V, +5V, +12V and -12V by using a circuit tester, and
make sure that the voltage is within the specified tolerance.
If the voltage is out of the specified tolerance, adjust the voltage by each voltage control
knob (variable resistor).
The voltage increases when turning the control knob clockwise and it decreases when
turning the control knob counterclockwise. Voltage 12V cannot be adjusted.
+5V
GND
+3.3V
+5V
+3.3V control knob
+5V
-12V
+5V control knob
+12V
GND
Fig. T044
-1102+, /.2
NE00040-00
48
c)
+5V check and adjustment

1)
Remove two decorated screws M4x 16mm which fix the EPU power supply.
Open the EPU power supply, and remove the rear cover by loosening seven pan head
screws M4 x 6mm.
Fig.T045
M4
-1102+, /.2
2)
Cap Screw Wrench
Measure check terminals CT6 (5V) and CT2 (GND) by a circuit tester.
Be careful since the connection of measuring terminals is very difficult.
Fig. T046
-1102+, /.2
49
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Rear side
Operator side
CT6(5V)
CT2(GND)
Red lamp
Fig.T047
-1102+, /.2
NE00040-00
50
Chapter 2 Disassembly and adjustment of each

unit
2-1
Disassembly and adjustment of bonding head
1. Bonding head specifications ...............................................................................................52

2. Bonding head adjusting procedure .....................................................................................53
(A) Removing method ........................................................................................................54
(B) Disassembly method ....................................................................................................58
(C) Assembly method.........................................................................................................67
(D) Mounting method..........................................................................................................87
3. Linear sensor adjusting methods........................................................................................91
(A) Z origin position adjustment .........................................................................................91
(B) Lissajous waveform adjustment...................................................................................98
4. Z-axis calibration method....................................................................................................112
(A) Z force fine ...................................................................................................................112
(B) Z motion ratio ...............................................................................................................122
(C) Z origin correction.........................................................................................................128
(D) Z force correction .........................................................................................................131
(E) Z force correction and Z motion ratio check .................................................................133
5. Camera lens tube and ring illumination adjusting methods ................................................134
(A) Camera lens tube mounting method ............................................................................134
(B) Camera focus adjustment ............................................................................................137
(C) Ring illumination adjustment ........................................................................................156
(D) RPS adjustment ...........................................................................................................162
6. Torch electrode adjusting method.......................................................................................191
(A) Mounting method of torch electrode.............................................................................191
7. Loop control adjusting methods..........................................................................................209
(A) Sensor amplifier sensitivity adjustment ........................................................................209
(B) Positioning of cable holder ...........................................................................................215
(C) Wire tension adjustment...............................................................................................218
51
NE00040-00
2-1
1.
Disassembly and adjustment of bonding head

Bonding head specifications
Model
Capillary stroke
BH-171
Effective stroke
-0.9 ~ +9.6mm
Stroke
10.5mm
Vertical move resolution
0.5m/pulse
Bonding force
30 ~ 2940mN 5mN/step
(3 ~ 300gf 0.5gf/step)
Wire diameter
15 ~ 38m (0.6 ~1.5Mil)

Attached units
Camera unit
Standard
CMU-28
CCD size
1/3
No. of pixels
Approx. 350,000 pixels
Effective No. of pixels
Approx. 330,000 pixels
Standard
MS-220
Low magnification
1.5X
Focal depth
0.75mm
Visual field
3.15 X 2.36mm
High magnification
6X
Focal depth
0.05mm
Viewing field
0.79 X 0.59mm
Wire tension unit
Standard
AS-004 (Manufactured by Adamand)
Clamper
Standard
CL-49
Drive system
Piezoelectric actuator
Output voltage
115V
Standard
UST-330A
Horn material
Ti (Titanium)
Frequency
118.5 ~ 121.5KHz
Tip material
Pt (platinum)
Body material
SUS304 (stainless steel)
Camera lens tube
Transducer
Torch electrode
Electric parts
Drive motor
Linear motor
MD-12
Yasukawa Electric Co
21610242
Linear sensor
Linear scale unit
ST142B
Mitsutoyo
20028916
NE00040-00
52
2.
Bonding head adjusting procedure

The bonding head is an important section to connect the dies to the external lead frame.
It
functions delicately at high speed. Finely adjust the linear sensor, Z-axis, torch electrode, and loop
control and calibrate them precisely.
Bonding head
Fig. B001
UTC-1000
Bonding head maintenance tools and jigs
Tools
L-type wrench (Cap Screw Wrench) M2.M2.5.M2.6.M3.M4.M5.M6
Wrench M4.M2.5
Screwdriver (-)
Meters
Torque wrench
Block gauge 33.45mm40.10mm45.80mm
Square
Oscilloscope
Others
Grease
Multi-purpose
Bonding agent
Cemedine super X
53
Jigs
Jig J501
Jig J503
Jig J685
Jig J705
Jig J706
Jig J708
Jig J709
Jig J710
Jig J712
Jig J753
Jig J772
Jig J773
Jig J775
Gap gauge 0.095mm

Gap gauge 0.15mm
Capillary removing jig
Torque driver
Hex socket
Capillary height adjusting jig
Work bench and
arm leveling jig (1)/(2)
Leaf spring (Plate spring)
assembly jig
BH height adjusting jig
Tilting adjusting jig
Force adjusting jig set
Height adjusting jig
Assembly jig
(stay, adjusting screw)
NE00040-00
Removal
(A) Removing method
Remove the bonding head BH-171 from the wire bonder UTC-1000 main body according to the
following procedure.
(1) Remove the wiring connectors from JBP board

(2) Remove the rear cover of the bonding head
(3) Remove the torch electrode
(4) Remove the camera lens tube mounting base (#13)
(5) Remove linear scale bundled wires
(6) Remove the bonding head main body
Profile of bonding head BH-171
Fig.B002
NE00040-00
54
(1) Removal of wiring connectors from JBP board
(2) Removal of rear cover (#19) from
Removal
(1) Removal of wiring connectors from JBP board

Remove PJ1 (XY), PJ4 (EFU), PJ5 (SPOOL) wiring connectors from JBP-315 (JBP board).
PJ4
PJ5
PJ1
JBP-315
[Front of machine]
Fig. B004
Fig. B003
Unnecessary
-1102+ ,/.2
(2) Removal of rear cover (#19) from bonding head main body
Remove two SUS CSB (Cap Screw Bolt) M3 x 6mm which fix right and left wiring. The nylon
clamp and clamp are fastened together. The rear cover (#19) is removed together with clamp.
SUS CSB M3 x 6mm
Nylon clamp
Clamp
(NK-5N)
Rear cover (#19)
[Rear face of machine]
Fig. B005
2.5mm
-1102+ ,/.2
55
Cap Screw Wrench
NE00040-00
Removal
(3) Removal of torch electrode
(4) Removal of camera lens tube mounting base (#13)
(3) Removal of torch electrode

Remove the torch electrode for preventing it from being broken by removing one fixing screw
SUS CSB M2.6 x 8mm (#9).
Fixing screw SUS CSB M2.6 x 8mm
(#9)
Fig.B006
Torch electrode
Fig.B007
2mm
-1102+ ,/.2
Cap Screw Wrench
(4) Removal of camera lens tube mounting base (#13)

Remove the camera lens tube mounting base (#13) from the bonding head by removing four SUS
CSB M5 x 10mm.
Dont remove the camera lens tube body, because it is fixed after positioning by using its jig.
The bonding head main body is provided with positioning pins for mounting the camera lens
tube, so that it can easily be mounted again.
The removed camera lens tube mounting base (#13) is provided with bundled wires.
Put it on the Y motor.
SUS CSB M5 x 10mm
Camera lens tube
mounting base (#13)
This figure shows the removed condition of

camera lens tube body for the purpose of
showing the positions of the bolts to be removed.
Fig. B008
4mm
-1102+ ,/.2
NE00040-00
56
Cap
Cup Screw Wrench
(5) Removal of linear scale bundled wires
Removal
(6) Removal of bonding head main body
(5) Removal of linear scale bundled wires

Disconnect the linear sensor wiring which connects the main body and bonding head to each
other from the rear side of the machine.
Linear sensor connector

(male)
Linear sensor connector

(female)
Fig.B009
Unnecessary
-1102+ ,/.2
(6) Removal of bonding head main body

Remove the bonding head main body from XY table by removing four SUS CSB M5 x 20mm with
flat washers and spring washers. Since the positioning guide is mounted on the XY table side,
the bonding head can easily be positioned when mounting it.
SUS CSB M5 x 20mm
Fig.B010
4mm
-1102+ ,/.2
57
Cap Screw Wrench
NE00040-00
Disassembly
(B) Disassembly method
This section describes the disassembly method of the pivot shaft (fulcrum shaft) leaf spring (Plate
spring) of the bonding head and the disassembly method until the linear sensor is removed.
Remove the bonding head from the machine main body according to (A) Removing
methods (pages 54 ~57) and put it on a work bench. The bonding head main body is provided
with parts each having powerful magnetic force. Dont use any steel surface plate as a work
bench.
(1) Removal of cable holder
(10) Disassembly of pivot unit (fulcrum unit)
(2) Removal of cable clamp
(11) Removal of pivot shaft (fulcrum shaft) movable
(3) Removal of transducer

(4) Removal of bond holder (#5)
part
(12) Removal of leaf spring (plate spring) for fulcrum
movable unit
(5) Removal of pivot shaft (fulcrum shaft)
(6) Removal of JBP board
(7) Removal of linear sensor
(8) Removal of sensor mounting plate
Caution
Be careful with a
The bonding head contains parts having very strong magnetic force. Dont use any steel surface plate as a
work bench.
Profile of bonding head BH-171
Fig.B011
NE00040-00
58
Disassembly

Remove the cable holder from the bonding head by removing one SUS CSB M2 x 8mm which
connects the grounding wire and two SUS CSB M2 x 6mm.
SUS CSB M2 x 6mm
Insulation bush
Insulation plate
Bond holder
Transducer
SUS CSB M2 x 8mm

Fig.B012
cable holder
1.5mm
-1102+ ,/.2
Cap Screw Wrench

Remove the cable clamp of grounding wire, etc., by removing two SUS CSB M2 x 5mm.
A bolt hole is provided with an insulation bush (blue), and an insulation plate (white) is provided
between the bonding head and the cable holder. Store them so as not to lose them. Disconnect
the cable holder connector while taking care so as not to be caught, since the transducer and
bonding head are spaced narrow.
SUS CSB M2 x 5mm
cable clamp
Fig.B013
1.5mm
-1102+ ,/.2
59
Cap Screw Wrench
NE00040-00
Disassembly

Remove the transducer from the bonding head by removing four SUS CSB M2.6 x 16mm.
SUS CSB M2.6 x 16mm
Fig. B014
Transducer
2mm
-1102+ ,/.2
Cap Screw Wrench

Remove bond holder (#5) from the bonding head by removing four SUS CSB M3 x 8mm. The
holes for receiving the positioning pins on the bonding head side are provided on the right and
left sides of the rear panel of the bond holder.
Draw out the bond holder after
lifting it once.
A glass linear
scale is bonded to the rear end

of the bond holder (#5).
Be
SUS CSB M3 x 8mm
careful with the handling of this

glass linear scale so as not to
strike it, otherwise it may be
broken.
Fig. B015
Bond holder (#5)
Caution
Never
disassemble
NE00040-00
Dont strike the linear scale being bonded at the rear of the bond holder, otherwise
it may be broken.
60
2.5mm
-1102+ ,/.2
Cap Screw Wrench
Disassembly

a)
Remove four SUS CSB M4 x 15mm mounted on the right and left sides of the front panel of
pivot shaft (fulcrum shaft) unit and one upper-limit stopper SUS HSB M4 x 12mm together
with SUS lock nut M4mm.
Upper-limit stopper
Pivot shaft (fulcrum shaft) unit
Fig. B016
SUS HSB M4 x 12mm
-1102+ ,/.2
SUS CSB M4 x 15mm
b)
2mm
Cap Screw Wrench
3mm
Cap Screw Wrench
Remove one SUS CSB M3 x 14mm from the JBP board side and also remove one SUS CSB
M3 x 14mm from the opposite side, or, 2 pieces in total.
JBP board (JBP-315)
SUS CSB M3 x 14mm
Fig. B017
2.5mm
-1102+ ,/.2
61
Cap Screw Wrench
NE00040-00
Disassembly
c)
Mount the stay (jig 775) and adjusting screws (jig 775) at the front of the pivot shaft
(fulcrum shaft) unit. Since the pivot shaft (fulcrum shaft) unit magnet has very powerful
magnetic force, remove the pivot shaft (fulcrum shaft) unit by using the stay and adjusting
screws. Screw in both right and left adjusting screws while pressing the stay by hand.
Adjusting screw
Pivot shaft (fulcrum
shaft) unit
Adjusting screw
Fig. B018
Stay
-1102+ ,/.2
d)
Jig J775
Jig J775
Stay
Adjusting screw
Remove the pivot shaft (fulcrum shaft) unit by pulling the stay when the space between the
pivot (fulcrum) stay unit and the bonding head has become approx. 3 ~ 4mm. Pull the stay
straight this side without fail when pulling it. If the stay is pulled curvedly in the lateral
or longitudinal direction, it may be bent.
Adjusting
screw
Adjusting
screw
Stay
Fig. B019
Caution
Be careful with a
NE00040-00
Pivot shaft (fulcrum shaft) unit magnet has very strong magnetic force.
Dont put any metallic part close to the magnet.
62
-1102+ ,/.2
Jig J775
Jig J775
Stay
Adjusting screw
Disassembly

Remove one SUS CSB M2.6 x 4mm of the hexagonal stay spacer which fixes the relaying plate
cover (made of transparent resin). Remove two lower SUS CSB M2.6 x 4mm which fix the
hexagonal stay (spacer BSB-2606) and JBP board. Then, remove the JBP board from the
bonding head unit.
SUS CSB M2.6 x 4mm
Relaying plate cover

(#24)
Hexagonal stay
(spacer : BSB 2606)
Fig. B021
JBP board
(JBP-315)
Fig. B020
2mm
-1102+ ,/.2
Cap Screw Wrench

Remove the linear sensor from the bonding head unit by removing four SUS CSB M4 x 8mm
which fix the linear sensor.
SUS CSB M4 x 8mm
Bonding head unit
[Rear of bonding head unit]

Fig. B022
Linear sensor unit
3mm
-1102+ ,/.2
63
Cap Screw Wrench
NE00040-00
Disassembly

Remove the sensor mounting plate from the linear sensor unit by removing four SUS CSB M3 x
8mm which fix the sensor mounting plate (#9) to the linear sensor unit.
Linear sensor
Sensor mounting plate (#9)
Linear sensor unit
Fig. B023
SUS CSB M3 x 8mm
Linear sensor unit
Fig. B024
Linear sensor

Fig. B025
2.5mm
-1102+ ,/.2
NE00040-00
64
Cap Screw Wrench
(9) Removal of linear senso
(9)
Disassembly
(10) Disassembly of pivot (fulcrum) unit
Removal of linear sensor
Remove the linear sensor from the sensor mounting plate by removing two SUS CSB M2.6
x6mm which fix the linear sensor to the sensor mounting plate (#9).
SUS CSB M2.6 x 6mm
Fig. B026
Linear sensor
Fig. B027
2mm
-1102+ ,/.2
Cap Screw Wrench
(10) Disassembly of pivot (fulcrum) unit

Remove two chrome-plated CSB M4 x 10mm (for preventing Z-axis from lowering) from the
front panel of the pivot shaft (fulcrum shaft) unit. Then, remove one SUS CSB M2.6 x 6mm
which fixes the cable clamp and plate from the right side of the black shaft. A collar is mounted
below the cable clamp. Store it so as not to lose it.
SUS CSB M2.6 x 6mm
Plate
Collar
Pivot shaft (fulcrum shaft) unit
Fig. B028
Chrome-plated CSB M4 x 10mm
Caution
Never
disassemble
The plate is fixed by a bonding agent. Dont peel it off forcibly.
65
2mm
-1102+ ,/.2
Cap Screw Wrench
3mm
Cap Screw Wrench
NE00040-00
Disassembly
(11) Removal of pivot shaft movable part (swing motor movable element)
(12) Removal
(11) Removal of pivot shaft (fulcrum shaft) movable part (swing motor movable element)
The swing motor movable element is supported by four leaf springs (Plate spring) (#16) to the
pivot (fulcrum) mounting base (#2). Remove four SUS CSB M2.6 x 6mm from the rear face and
lower face on the swing motor movable
SUS CSB M2.6 x 6mm
element side.
(without
Pressure plates 2 (#18)
positioning
pin
holes)
are
mounted between four SUS CSB M2.6 x

6mm and the leaf springs (Plate spring).
Store them so as not to lose them.
Pivot shaft (fulcrum shaft)

movable unit (swing motor
movable device)
Pivot (fulcrum) mounting base

(#2)
Pressure plate 2 (#18)
(without fixing pin hole)
Fig. B029
2mm
-1102+ ,/.2
Cap Screw Wrench
(12) Removal of leaf spring (Plate spring) plates for pivot shaft (fulcrum shaft) movable unit
After removing the swing motor movable unit from the pivot (fulcrum) mounting base (#2),
remove the leaf springs (Plate spring) by removing four SUS CSB M2.6 x 6mm which fix the leaf
springs (Plate spring) (#16).
SUS CSB M2.6 x 6mm
Pressure
plates 1 (#17) (with positioning pin holes)

are mounted between four SUS CSB2.6 x
6mm and the leaf springs (Plate spring).
Store them so as not to lose them.
Pivot (fulcrum) mounting base (#2)

(with fixing pin hole)
Leaf (plate) spring (#16)
Now, disassembly work of BH-171 bonding head ends.

Fig. B030
2mm
-1102+ ,/.2
NE00040-00
66
Cap Screw Wrench
Assembly
(C) Assembly method
This paragraph describes the assembly method of the bonding head.
(1) Mounting of the spring for pivot (fulcrum) movable unit

(2) Assembly of pivot (fulcrum) movable unit (swing motor movable device)
(3) Mounting of pivot shaft (fulcrum shaft) unit
(4) Horizontal and vertical adjustment of bond holder
(5) Mounting of transducer
(6) Adjustment of stopper screw
(7) Mounting of each part
Completion of assembly of bonding head BH-171
Fig. B031
67
NE00040-00
Assembly
(1) Mounting of the leaf spring (plate spring) for pivot (fulcrum) movable unit
a)
Positioning pins are protruded from the leaf spring (plate spring) mounting part of the pivot
(fulcrum) supporting base of the switching motor movable device, so that the mounting
direction of the leaf spring (plate spring) is predetermined.
Positioning pin
Positioning pin
Positioning pin
Positioning pin
Fig. B032
Unnecessary
-1102+ ,/.2
b)
Mount the leaf springs (plate spring) (#16) in the sequence starting with the vertical
direction.
The leaf spring (plate spring) (#16) has the front and rear faces.
The
chamfered face of each leaf spring (plate spring) (#16) is the front surface. The front and
rear faces of leaf spring (plate spring) (#16) are lubricated with a thin coat of Multipurpose
grease for preventing them from being rusted. After setting the front face of leaf spring
(plate spring) (#16) to the pivot (fulcrum) mounting base (#2) side, determine the
longitudinal position of leaf spring (plate spring) (#16) by aligning the leaf spring (plate
spring) (#16) hole with the positioning pin of the pivot (fulcrum) mounting base (#2) with
the front face of the leaf spring (plate spring) (#16) being set to the pivot (fulcrum) mounting
base (#2) side. Press the leaf spring (plate spring) (#16) against the reference plane of
pivot (fulcrum) mounting base (#2) to keep free of any gap between pivot (fulcrum)
mounting base (#2) and leaf spring (plate spring) (#16).
Positioning pin
Horizontal direction
Leaf spring (plate spring) (#16)
Positioning pin
Fig. B033
Grease
Pivot (fulcrum)
mounting base (#2)
NE00040-00
68
-1102+ ,/.2
Multipurpose
Assembly
c)
Mount pressure plate 1 (#17) by pressing it against the reference plane of pivot (fulcrum)
mounting base (#2) after aligning the pressure plate (#17) hole with the positioning pin of
pivot (fulcrum) mounting base (#2) in the same way as in leaf spring (plate spring) (#16).
Pressure plate 1, if used once, has tightening scars of screw.
Accordingly, mount the
pressure plate to apply the same face to the screw so as not to press the entire leaf spring
(plate spring) (#16) by flaws of tightening scars.
Positioning pin
Positioning pin
Fig. B034
Unnecessary
-1102+ ,/.2
d)
Fasten the pressure plate 1 (#17) with the tightening torque of 78Ncm (8Kgfcm) by SUS
CSB M2.6 x 6mm with spring washers so as not to move the leaf spring (plate spring) (#16).
Mount two horizontal leaf springs (plate spring) (#16) in the same way as in mounting the
vertical leaf springs (plate spring) (#16). Fasten two SUS CSB M2.6 x 6mm with spring
washers with the tightening torque of 78Ncm (8Kgfcm).
SUS CSB M2.6 x 6mm with spring washers
Fig.B035
Vertical direction
Vertical direction

Leaf spring (plate spring)
(#16)


Leaf spring (plate spring)
(#16)
Pivot (fulcrum) mounting
base (#2)
Caution
Indication
Fasten the fixing screws with the specified tightening torque and lock it with paint
without fail for preventing them from being loosened.
69
2mm
-1102+ ,/.2
Cap Screw Wrench
NE00040-00
Assembly
Fig. 036
Pivot shaft (fulcrum shaft) movable unit

(Swing motor movable device)
Jig J710
Fig. 037
Caution
Jig J710
The swing motor movable device is a powerful magnet. Dont put any magnetic
substance like iron to be close to it.
Be careful with a
a)
-1102+ ,/.2
Attach the pivot shaft (fulcrum shaft) movable unit (swing motor movable device) closely to
the fit face of jig (J710) without any gap, and fix it by two non-magnetic CSB M3 x 14mm.
Mounting screws are used for fixing the jig.
They shall be 3mm screws, and their length is
Non-magnetic CSB M3 x 14mm
optional. Since the pivot shaft (fulcrum shaft)

movable
unit
is
powerful
magnet,
use
non-magnetic screws like stainless steel screws.

Dont use any magnetic screws made of iron,
otherwise a dangerous accident may occur.
Jig J710

(swing motor movable device)
Fig. B038
Caution
Jig J710
Be careful with a
NE00040-00
The swing motor movable device is a powerful magnet. Use non-magnetic

screws like stainless steel screws when fixing them to the jig.
70
-1102+ ,/.2
2.5mm
Cap Screw Wrench
Assembly
b)
Mount the pivot (fulcrum) movable unit (swing motor movable device) being fixed to jig
(J710) to the pivot (fulcrum) mounting base (#2).
Set the front left face of the pivot
(fulcrum) bearing unit stand to meet the face of the pivot shaft (fulcrum shaft) movable unit
(swing motor movable device) while displacing the pivot shaft (fulcrum shaft) movable unit
rightward or leftward, and fix it by one SUS CSB M4 x 14mm.
SUS CSB M4 x 14mm

Jig J710
Pivot (fulcrum) bearing unit stand
Jig J710
Fig. B039
3mm
-1102+ ,/.2
c)
Cap Screw Wrench
Adjust the gap between the pivot (fulcrum) mounting base (#2) and pressure plate 2 (#8) of
leaf spring (plate spring) (#16) to a uniform space of 0.27mm by using a 0.27mm gap gauge
being attached to Jig J775.
Jig J710
Pivot (fulcrum) shaft movable unit


Gap gauge (0.27mm)

(#2)
Fig. B040
Jig J775
-1102+ ,/.2
71
Jig J710
0.27mm
Gap Gauge
NE00040-00
Assembly
d)
After the gap between the pivot (fulcrum) mounting base (#2) and pressure plate 2 (#8) of
leaf spring (plate spring) (#16) has been adjusted to a uniform space of 0.27mm,fasten two
SUS CSB M2.6 x 6mm with spring washers with the tightening torque of 78Ncm (8kgfcm)
for fixing two horizontal leaf springs (plate spring).
Be careful since the mounting
direction of pressure plate 2 (#18) of leaf spring (plate spring) (#16) is predetermined.
SUS CSB M2.6 x 6mm with spring washer

Jig J710
Fig. B041
2mm
-1102+ ,/.2
e)
Cap Screw Wrench
Remove jig (J710) from the pivot shaft (fulcrum shaft) movable unit (swing motor movable
device) by removing one SUS CSB M4 x 14mm and two non-magnetic CSB M3 x 14mm
which fix the jig (J710). After turning the jig (J710) by 180(upside down), fix it to pivot
(fulcrum) mounting base by one SUS CSB M4 x 14mm.
SUS CSB M4 x 14mm

Jig J710
(#2)
Fig. B042
Jig J710
3mm
-1102+ ,/.2
NE00040-00
72
Cap Screw Wrench
(2) Assembly of pivot movable unit (swing motor movable device)
f)
Assembly
(3) Mounting of pivot
Adjust the gap between the pivot (fulcrum) mounting base (#2) and pressure plate 2 (#18) of
leaf spring (plate spring) (#16) to a uniform space of 0.27mm by using a 0.27mm gap gauge
being attached to jig J775. After the gap has been adjusted to an even space of 0.27mm,
fasten SUS CSB M2.6 x 6mm with spring washers with the tightening torque of 78Ncm
(8kgfcm) for fixing two vertical leaf springs (plate spring) (#16). Be careful since the
mounting direction of pressure plate 2 (#18) of leaf spring (plate spring) (#16) is
predetermined.
SUS CSB M2.6 x 6mm with spring washer

Pivot (fulcrum) mounting base (#2)
Jig J775
2mm
Fig. B043
-1102+ ,/.2
Cap Screw Wrench
0.27mm
Gap Gauge

a)
Mount the adjusting screws of jig J775 and stay to the pivot shaft (fulcrum shaft) unit to
which the pivot shaft (fulcrum shaft) movable unit (swing motor movable device) has been
assembled. Set two right and left adjusting screws in such a way as their threads come out
of the pivot shaft (fulcrum shaft) unit by approx. 4 ~ 5mm.
Fix the bonding head unit to
the work bench of jig J709 by using four SUS CSB M5 x 20mm.
SUS CSB M5 x 20mm
Threads come out of the fulcrum shaft unit by approx. 4 ~ 5mm
Pivot (fulcrum) shaft unit

Adjusting screw
(Jig J775)
Stay (Jig J775)

Adjusting screw
(Jig J775)
Bonding head
Work bench
(Jig 709)
Fig. B044
Jig J709
Jig J775
Jig J775
Work bench
Stay
Adjusting screw
4mm
-1102+ ,/.2
73
Cap Screw Wrench
NE00040-00
Assembly
b)
Mount the pivot shaft (fulcrum shaft) unit (fulcrum unit to which the pivot shaft (fulcrum
shaft) movable unit has been assembled) to the bonding head. Support the stay of the
pivot shaft (fulcrum shaft) unit strongly so as not to allow the pivot shaft (fulcrum shaft)
unit and bonding head collide with each other due to the strong magnetic force of the pivot
shaft (fulcrum shaft) unit. Loosen the right and left adjusting screws (jig J775) of the pivot
shaft (fulcrum shaft) unit gradually until the convex part of the boning head is engaged
with the concave part of the pivot shaft (fulcrum shaft) unit. It is recommended to insert a
0.5mm thick plate below the pivot shaft (fulcrum shaft) unit during assembly work, and
they can be assembled with each other without any contact of the convex and concave parts.
Bonding head
Adjusting screw (Jig J775)

Fulcrum shaft unit
Stay (Jig J775)
Adjusting screw (Jig J775)
Fig. B045
Work bench (Jig J709)
Caution
The pivot shaft (fulcrum shaft) unit magnet has very strong magnetic force.
Dont put any metal to be close to it.
Be careful with a
c)
-1102+ ,/.2
Jig J775
Jig J775
Stay
Adjusting screw
After mounting the pivot shaft (fulcrum shaft) unit (fulcrum unit to which the pivot shaft
(fulcrum shaft) movable unit has been assembled) to the bonding head, remove right and
left adjusting screws (Jig J775) and stay (Jig J775). Fix the pivot shaft (fulcrum shaft)
unit temporarily by four SUS CSB M4 x 15mm and two SUS CSB M3 x 14mm with spring
washers.
SUS CSB M3 x 14mm with spring washer
Fig. B046
SUS CSB M4 x 15mm
NE00040-00
74
2.5mm
-1102+ ,/.2
Cap Screw Wrench
3mm
Cap Screw Wrench
Assembly
d)
Mount the bond holder (#5) to the pivot shaft (fulcrum shaft) unit (fulcrum unit to which the
pivot shaft (fulcrum shaft) movable unit has been assembled) of the bonding head. A glass
linear scale is bonded to the tail of the bond holder.
Be careful not to scratch it nor
contaminate it with fingerprints or the like. Be careful with its handling so as not to break
it.
Linear scale
Bond holder (#5)
Fig. B047
Caution
Never
disassemble
Be careful not to strike the linear scale which is bonded to the tail of the bond holder.
c)
Unnecessary
-1102+ ,/.2
The bond holder (#5) is provided with bonding head side positioning pin receiving holes on
the rear right and left sides. Mount the notched face of the bond holder (#5) without any
gap in the pivot shaft (fulcrum shaft) movable unit. Fasten it with the tightening torque of
147Ncm (15Kgfcm) by using four SUS CSB M3 x 8mm.
SUS CSB M3 x 8mm
Bonding head
Pivot shaft (fulcrum shaft)

movable unit
Fig. B048
Bond holder
2.5mm
-1102+ ,/.2
75
Cap Screw Wrench
NE00040-00
Assembly

a)
Adjust the shaft of BH (bonding head) tilting adjusting jig (J753) to be vertical by using a
square. Check if it is vertical in two directions at least.
Square
Shaft
Tilting adjusting jig (J753)
Fig. B049
Jig J753
-1102+ ,/.2
b)
BH tilting
adjusting jig
Square
Mount BH (bonding head) tilting adjusting jig (J753) to the bond holder. Push it until its
pin on the front right side of the jig touches the bond holder at the longitudinal position, and
press it against the front right side face in the lateral direction.
Fasten it with the
tightening torque of 59Ncm (6Kgfcm) by four SUS CSB M2.6 x 16mm.

SUS CSB M2.6 x 16mm
Fig.050
Bond holder (#5)

Pin
BH tilting adjusting jig
(J753)
Shaft
Pivot shaft
(fulcrum shaft) unit
Fig.051
Jig J753
-1102+ ,/.2
NE00040-00
76
BH tilting
adjusting jig
2mm
Cap Screw Wrench
Assembly
c)
Fix the BH (bonding head) arm horizontal jig (1) on both right and left sides of the pivot
shaft (fulcrum shaft) unit of the bonding head by using SUS CSB M5 x 12mm on each, 2
pieces in total and also fix BH (bonding head) arm horizontal leveling jig (2) on the right and
left sides of the work bench (jig J709) by using SUS CSB M3 x 10mm, one each, or two
pieces in total.
SUS CSB M5 x 12mm
Bonding head
BH tilting adjusting jig (J753)
BH arm horizontal leveling jig (1)


Fig. B052
2.5mm
-1102+ ,/.2
d)
Cap Screw Wrench
SUS CSB M3 x 10mm

Jig
Jig
4mm
Cap Screw Wrench
Jig J753
BH tilting
adjusting jig
Jig J709
Work bench
Put a 40.1mm block gauge below BH tilting adjusting jig (J753), and press down the bond
holder.
Block gauge (40.1mm)
Fig. B053
-1102+ ,/.2
77
40.1mm
Block gauge
NE00040-00
Assembly
e)
Adjust the BH tilting adjusting jig (J753) shaft to be vertical by adjusting SUS CSB M3 x
12mm of right and left BH arm horizontal jigs (1) under the closely attached condition of BH
tilting adjusting jig (J753) and block gauge.
SUS CSB M3 x 12mm
Weight
Bond holder (#5)
Shaft
Block gauge (40.1mm)
Square
Work bench (Jig 709)
Fig. B054
Jig
2.5mm
-1102+ ,/.2
f)
Cap Screw Wrench
Jig J753
BH tilting
adjusting jig
X (lateral) direction adjustment of BH tilting adjusting jig (J753).

Set a square to the lateral direction of the shaft, and adjust the adjusting SUS CSB M3 x
12mm of right and left BH arm horizontal jig (1) so that no gap exists between the shaft and
square.
SUS CSB M3 x 12mm
Bond holder (#5)

Shaft
Square
Fig. B055
Jig
2.5mm
-1102+ ,/.2
NE00040-00
78
Cap Screw Wrench
Jig J753
BH tilting
adjusting jig
Assembly
g)
Y (longitudinal) direction adjustment of BH tilting adjusting jig (J753). Set a square to the
longitudinal direction of the shaft, and adjust the adjusting SUS CSBM3 x 12mm of right
and left BH arm horizontal jig (1) so that no gap exists between the shaft and square.
SUS CSB M3 x 12mm
Bond holder (#5)

Shaft
Square
Fig. B056
Jig
2.5mm
-1102+ ,/.2
h)
Cap Screw Wrench
After adjusting the BH tilting adjusting jig (J753) shaft, fasten the stay with the tightening
torque of 198Ncm (20kgfcm) by using four SUS CSB M4 x 15mm from the front face, and
fix it with the tightening torque of 98Ncm (10kgfcm) by using two SUS CSB M3 x 14mm
having spring washers from the opposite side. After fixing, remove the right and left BH
arm horizontal leveling jig (1) (SUS CSB M5 x 12mm), right and left BH arm horizontal
leveling jig (2) (SUS CSB M3 x 10mm), and BH tilting adjusting jig (J753) (SUS CSB M2.6 x
16mm).
SUS CSB M3 x 14mm with spring washer
SUS CSB M4 x 15mm
SUS CSB M2.6 x 16mm
CSB M5 x 12mm
CSB M3 x 10mm
Bond holder (#5)

Shaft
Fig. B057
2mm
-1102+ ,/.2
79
Cap Screw Wrench
2.5mm
Cap Screw Wrench
3mm
Cap Screw Wrench
4mm
Cap Screw Wrench
NE00040-00
Assembly

a)
The transducer contains the upper and lower faces.
The upper scribed face is the
mounting face (upper face).
Mounting face (upper face)

indication scribing
Mounting face (upper face)
Transducer
Fig. B058
Unnecessary
-1102+ ,/.2
b)
Mount the transducer to the bond holder (#5). Lead the transducer wiring to the outside
by fixing it with the white plastic wire clamp after passing it through the hole on the upper
face of the bond holder. Set the notched front face of the bond holder (#5) to meet the front
face of the transducer as the longitudinal mounting position of the transducer. Bring the
lateral position rightward. After mounting, fix the transducer with the tightening torque
of 59Ncm (6Kgfcm) by four SUS CSB M2.6 x 16mm.
SUS CSB M2.6 x 16mm
Bond holder (#5)

Transducer
Fig B059
2mm
-1102+ ,/.2
NE00040-00
80
Cap Screw Wrench
Assembly

a)
Fix two SUS CSB M4 x 10mm for preventing Z from lowering to the pivot (fulcrum)
mounting base with the tightening torque of 196Ncm (20Kgfcm).
SUS CSB M4 x 10mm
Bonding head
Bond holder (#5)
Transducer
Capillary
Pivot shaft
(fulcrum shaft) unit
Fig.B060
3mm
-1102+ ,/.2
b)
Cap Screw Wrench
Mount the capillary to the transducer

Set the mounting height of the capillary by capillary height adjusting jig (J708) and
capillary mounting/dismounting jig (J685).
Capillary mounting /
dismounting jig (J685)
Capillary height
adjusting jig (J708)
Fig. B061
-1102+ ,/.2
81
Jig J708
Jig J685
Capillary height adjusting
Capillary
mounting / dismounting jig
NE00040-00
Assembly
c)
Adjustment of upper-limit stopper

Mount upper-limit stopper SUS HSB M4 x 12mm and hexagon nut M4 to the pivot
(fulcrum) mounting base. Put a 45.8mm block gauge below the transducer having the
capillary. Adjust the upper limit stopper SUS HSB M4 x 12mm to the position where a
slight gap exists between the capillary and the block gauge. Set the maximum lifting
position of the capillary to 45.8mm. Lock the upper-limit stopper SUS HSB M4 x 12mm by
hexagon nut M4.
SUS HSB M4 x 12mm hexagon nut M4
Bond holder (#5)

Transducer
Capillary
Block gauge
Upper-limit stopper
Fig. B062
Caution
Lock the upper-limit stopper by hexagon nut M4 and then, lock it
with paint for preventing it from being loosened.
Indication
d)
-1102+ ,/.2
2mm
Cap Screw Wrench
45.8mm
Block gaug
Adjustment of lower-limit stopper

Mount lower-limit stopper SUS HSB M4 x 16mm and hexagon nut M4 to the bonding head.
Put a 33.45mm block gauge below the transducer having the capillary. Adjust the lower
limit stopper SUS HSB M4 x 16mm to the position where a no gap exists between the
capillary and the block gauge.
Set the maximum lifting position of the capillary to
33.45mm. Lock the lower-limit stopper SUS HSB M4 x 16mm by lock nut hexagon nut M4.
SUS HSB M4 x 16mm hexagon nut M4
Lower-limit stopper
Bonding head
Bond holder (#5)
Transducer
Capillary
Block gauge
Pivot (fulcrum) shaft unit
Fig. B063
Caution
Indication
NE00040-00
Lock the lower-limit stopper by hexagon nut M4 and then, lock it

with paint for preventing it from being loosened.
82
-1102+ ,/.2
2mm
Cap Screw Wrench
33.45mm
Block gauge
Assembly

a)
Assembly of linear sensor

1)
Mount the linear sensor to the sensor mounting plate (#9). Attach the sensor closely in
such a way as no gap exists between the sensor lower side and the stepped notched face of
the sensor mounting plate and also between the right side of the sensor and the
positioning pin, and then, fix the sensor by two SUS CSB M2.6 x 6mm.
SUS CSB M2.6 x 6mm
Linear sensor

Positioning pin
Stepped notched face
Fig. B064
2mm
-1102+ ,/.2
2)
Cap Screw Wrench
Fix the sensor mounting plate (#9) to which the linear sensor has been mounted to the
linear sensor unit temporarily by four SUS CSB M3 x 8mm. Mount the eccentric pin.
SUS CSB M3 x 8mm
Linear sensor
Eccentric pin
Linear sensor unit
Fig. B065
2.5mm
-1102+ ,/.2
83
Cap Screw Wrench
NE00040-00
Assembly
3)
Fix the linear sensor unit to the bonding head temporarily by four SUS CSB M4 x 8mm.
Mount the eccentric pin.
SUS CSB M4 x 8mm
Bonding head
Eccentric pin
Linear sensor unit
Fig. B066
3mm
-1102+ ,/.2
b)
Cap Screw Wrench
Mounting of JBP board

Mount the JBP board (JBP-315) to the bonding head by two SUS CSB M2.6 x 4mm and
hexagonal stay (spacer : SUS BSB-2606). Fix the relaying plate cover by SUS CSB M2.6x
4mm.
SUS CSB M2.6 x 4mm
Hexagonal stay (spacer)

SUS BSB2606
Relaying plate cover
JBP board (JBP-315)

Bonding head
Fig. 067
SUS CSB M2.6 x 4mm
-1102+ ,/.2
NE00040-00
84
2mm
Cap Screw Wrench
Assembly
c)
Mounting of cable holder

1)
Draw the cable holder connector (PJ-3) out of the cable holder bundled wire hole between
bond holder (#5) and transducer.
SUS CSB M2 x 5mm

Cable clamp
Bond holder (#5)

Cable holder bundled wire hole
Insulating bush
Connector (PJ-3)
Transducer
GND wire
Fig. 068
Insulating plate
cable holder
1.5mm
-1102+ ,/.2
2)
Cap Screw Wrench
Mount the cable holder to bond holder (#5)

Insert the insulating plate between the cable holder and bond holder (#5) and fix the
cable holder to the bond holder (#5) by two SUS CSB M2 x 6mm with flat washer and
spring washer (having resin insulating bush) and one SUS CSB M2 x 8mm with flat
washer and spring washer (having resin insulating bush). Fasten the GND wire (white
wire with crimp style terminal) from connector (PJ-3) to CSB M2 x 8mm. Then, fix the
wire from the cable holder and GND wire to the bond clamper by SUS CSB M2 x 5mm
using the cable clamp.
SUS CSB M2 x 8mm with flat washer and spring washer
GND wire
cable holder
Transducer
Fig B069
1.5mm
-1102+ ,/.2
85
Cap Screw Wrench
NE00040-00
Assembly
d)
Mounting of plate (#30)

Plate (#30) is bonded to the right side of pivot shaft (fulcrum shaft) movable unit. Bond it
again if it was exfoliated when the pivot (fulcrum) unit was disassembled. Remove oil
component of plate (#30) by alcohol or the like, apply a thin coat of bonding agent to the
bonding face and leave it as it is for approx. 5 minutes. Insert collar (#31) into the plate
(#30) hole. Fasten the plate (#30) to which collar (#31) has been inserted to the resin cable
clamp and pivot shaft (fulcrum shaft) movable unit together SUS CSB M2.6 x 6mm. The
bonding agent starts hardening in approx. 1 ~ 2 hours, and then, fully hardened in approx.
24 hours. The bonding agent should be coated uniformly between plate (#30) and pivot
shaft (fulcrum shaft) movable unit and the metallic face of plate (#30) should not directly
touch the pivot shaft (fulcrum shaft) movable unit. Dont fasten the bolts strongly, but fix
them by the bonding agent instead of fixing by the bolts. Bonding agent Cemedyne
Super X (black)
SUS CSB M2.6 x 6mm
Cable clamp
Plate
Bonding agent
Fig. B070
-1102+ ,/.2
Completion of assembly of bonding head BH-171
Fig. B071
NE00040-00
86
2mm
Cap Screw Wrench
Cemedyne
Super X
Black
Mounting
(1) Longitudinal position adjustment
(D) Mounting method

Mount the bonding head by reversing its disassembly method basically.
Mount the bonding head to the XY table. The XY table is provided with three positioning pins for
mounting the bonding head.
Fig. B072
Unnecessary
-1102+ ,/.2
(1) Longitudinal position adjustment

Put the bonding head main body on the XY table. In this case, the XY table Y-axis linear sensor
head is inserted into the lower part of the bonding head. Mount the bonding head main body
without any gap by pressing two positioning pins mounted on the rear side of the XY table.
The table face of the XY table is not fixed. Mount the bonding head while fixing the table face
by pressing it by hand.
Rear positioning pin
Fig. B073
Unnecessary
-1102+ ,/.2
87
NE00040-00
Mounting
(2) Lateral face adjustment
(3) Mounting of camera lens tube
(2) Lateral face adjustment

Mount the bonding head to the XY table positioning pins on the left side of the front face of the
machine without any gap. Fix the bonding head by four SUS CSB M5 x 20mm with flat washer
and spring washer.
[Front face of machine]

Positioning pin
Fig. 074
4mm
-1102+ ,/.2
Cap Screw Wrench

Connect the bonding head linear sensor cable (shielded cable) to the linear sensor connector
before mounting the camera lens tube. Mount the camera lens tube (#13) without any gap
between the camera lens tube positioning pin of the bonding head and the guide.
Guide
Camera lens tube (#13)
Camera lens tube
positioning pin
Guide
Linear sensor
Linear sensor cable
connector is present
inside this section.
Fig. B075
Unnecessary
-1102+ ,/.2
NE00040-00
88
Mounting
(4) Bundling of wires
(4) Bundling of wires

a)
Bundle wires by the nylon clamp and fix them by one SUS CSB M3 x 5mm and two SUS
CSB M4 x 8mm.
SUS CSB M4 x 8mm
SUS CSB M3 x 5mm
Nylon clamp
(NK-7N)
Nylon clamp
Nylon clamp
(NK-3N)
(NK-5N)
Fig. B076
2.5mm
-1102+ ,/.2
b)
Cap Screw Wrench
3mm
Cap Screw Wrench
Bundle wires by the nylon clamp and fix them by two SUS CSB M3 x 6mm. Fix PJ5
(Spool) wire to the rear side of the side illumination cable by using the cable tie for
preventing it from being disconnected.
SUS CSB M3 x 6mm
PJ5 (spool) wire

Cable tie
Side illumination cable
Cable tie
Nylon clamp
Metal clamp
(NK-5N)
Fig. B077
2.5mm
-1102+ ,/.2
89
Cap Screw Wrench
NE00040-00
Mounting
(5) Connector connection
(5) Connector connection

Connect three connectors for wiring from PJ4 (EFU), PJ5 (SPOOL), and XY table to board
JBP-315 on the right side of the bonding head.
Nylon clamp
(NK-3N)
Nylon clamp
(NK-3N)
PJ4 (EFU)
PJ5 (SPOOL)
JBP board
(JBP-315)
PJ1 (XY)
Fig. B078
Unnecessary
-1102+ ,/.2
NE00040-00
90
Adjustment
(1) Preparation work
3. Linear sensor adjusting method

(A) Z origin position adjustment
For adjusting the electric unit, use an oscilloscope conforming to the following standard at least.
Required standard of oscilloscope for adjustment

Sampling cycle (rate) 100ms/s or over
Input frequency
Higher than 100MHz
XY waveform
Measurable
Channel
2 channels at least
Caution
Take an anti-static electric measure without fail when adjusting the electric unit.
-1102+ ,/.2
Indication

By removing the left side cover of the machine body, X-axis, Y-axis, and Z-axis linear sensor
amplifiers are accessible. Adjust the Z-axis linear amplifier. Turn on the POWER ON switch
of the machine body.
X-axis linear amplifier

Y-axis linear amplifier
Z-axis linear amplifier
Fig. B079
Caution
Adjust the Z-axis linear sensor amplifier.
Be careful not to take X-axis
or Y-axis linear sensor amplifier for Z-axis linear sensor amplifier.
91
Unnecessary
-1102+ ,/.2
NE00040-00
Adjustment
(2) Adjustment work
(2) Adjustment work

a)
Perform basic adjustment by using an oscilloscope. Adjust the output voltage of the linear
sensor amplifier to be able to display at the center of the monitor screen of the oscilloscope.
If the waveform cannot be seen easily, the setting range may be changed.
Setting of oscilloscope for adjustment
Caution
Time setting
10ms/div
Voltage setting
500mV
Scan mode
DC mode
Trigger
Auto mode
For stabilizing the output voltage, wait for approx. 5 minutes after turning
on the power supply before starting the adjustment work.
b)
-1102+ ,/.2
After removing the Z-axis linear sensor cover, connect the probe of an oscilloscope. (Use
CH1 and CH2.) Connect the probe to TP1 (Vref) and also connect GND to TP6 (GND).
Adjust CH1 and CH2 in the same way.
Fig. B080
Note) Connector is not connected for imaging.
-1102+ ,/.2
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92
(2) Adjustment work
c)
Adjustment
(3) Origin adjustment
Make sure that the voltage is approx. 2.5V, and adjust the waveform to be displayed at the
center of the screen by OFFSET setting of the oscilloscope. The waveform at the center of
the screen serves as the reference waveform. The reference waveform is the reference
setting position for origin adjustment and Lissajous waveform.
Fig. B081
Caution
Set the waveform to the center position without fail by OFFSET setting.
Dont set the position by POSITION setting, otherwise precise origin
adjustment becomes impossible.
-1102+ ,/.2
(3) Origin adjustment

Adjust the origin position output signal of the bonding head. The Z-axis origin position height
is decided mechanically, and it cannot be adjusted. Perform trigger setting of the oscilloscope.
Trigger setting
Trigger mode
SINGLE
Trigger CH
CH1
Trigger level
2.5V
If the waveform can be confirmed by trigger

AUTO, AUTO is applicable without any trouble.
-1102+ ,/.2
93
NE00040-00
Adjustment
(4) Probe connection position change

a)
Connect CH1 to TP4 (Z phase) and connect TP1 (Vref) to CH2. Connect GND of both CH1
and CH2 to TP6.
CH1
TP4
TP6
Fig. B082
TP1
CH2
Note) Connector is not connected for imaging
-1102+ ,/.2
b)
The waveform shown in Fig.B083is displayed on the oscilloscope.
Fig. B083
-1102+ ,/.2
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94
Adjustment
c)
By moving the Z-axis of the bonding head manually to the upper-limit and lower-limit, the
origin waveform is displayed in CH1 in the vicinity of the stroke center.
Higher than 0.4V
Higher than 0.4V
Fig. B084
-1102+ ,/.2
d)
Waveform standard
The ratio at point a and point b of origin signal shall be within a range of 0.9 ~ 1.1 to the
reference waveform. (a/b =0.9 ~ 1.1)
A voltage of higher than 0.4V shall be output with reference to the reference waveform.
(0.4Va, b)
Example; Defective waveform
Ratio 1.539 does not

conform to the standard.
Fig. B085
-1102+ ,/.2
95
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Adjustment
Example: Normal waveform
Ratio 0.96 conforms

to the standard.
Fig.B086
Caution
Perform adjustment if a defective waveform appears.

-1102+ ,/.2
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96
Adjustment
(5) Adjusting method
(5) Adjusting method

a)
Mechanical adjustment
Adjust the space between the linear scale and the linear sensor in the bonding head.
Loosen four SUS CSB M4 x 8mm which fix the sensor block. Adjust the space between the
linear sensor and the linear scale by turning the eccentric pin 3 (#12).
Perform this
adjustment while monitoring the origin waveform on the oscilloscope until the waveform
conforms to the standard.
SUS CSB M4 x 8mm
The linear scale is

mounted on the
opposite face
Sensor block
Eccentric pin3 (#12)
Linear sensor
Fig. B087
3mm
-1102+ ,/.2
b)
Cap Screw Wrench
Electric adjustment
Perform this electric adjustment when the output voltage output at points and b is higher
than 0.4V with reference to the reference waveform in mechanical adjustment. Adjust the
signal output by turning the VR5 control knob of the linear sensor amplifier. By turning
the VR5 control knob of the linear sensor amplifier, the ratio at points a and b changes.
Perform the mechanical adjustment again. After the end of adjust SUS CSB M4 x 8mm.
VR5 control knob
Fig. B088
Caution
Be careful since Z-axis adjustment differs from X-axis and Y-axis

3mm
adjustment.
-1102+ ,/.2
97
Cap Screw Wrench
NE00040-00
Adjustment
(B) Lissajous waveform adjustment

For adjusting the electric unit, use an oscilloscope conforming to the following standard at least.
Required standard of oscilloscope for adjustment

Sampling cycle (rate) 100ms/s or over
Input frequency
Higher than 100MHz
XY waveform
Measurable
Channel
2 channels at least
Caution
Take an anti-static electric measure without fail when adjusting the electric unit.
-1102+ ,/.2
Indication

By removing the left side cover of the machine body, X-axis, Y-axis, and Z-axis linear sensor
amplifiers are accessible. Adjust the Z-axis linear amplifier. Turn on the POWER ON switch
of the machine body.
X-axis linear amplifier

Y-axis linear amplifier
Z-axis linear amplifier
Fig. B089
Caution
Adjust the Z-axis linear sensor amplifier.
Be careful not to take X-axis
or Y-axis linear sensor amplifier for Z-axis linear sensor amplifier.
NE00040-00
98
Unnecessary
-1102+ ,/.2
Adjustment
(2) Adjustment work
(2) Adjustment work

a)
Perform basic adjustment by using an oscilloscope. Adjust the output voltage of the linear
sensor amplifier to be able to display at the center of the monitor screen of the oscilloscope.
If the waveform cannot be seen easily, the setting range may be changed.
Setting of oscilloscope for adjustment
Caution
Time setting
10ms/div
Voltage setting
500mV
Scan mode
DC mode
Trigger
Auto mode
For stabilizing the output voltage, wait for approx. 5 minutes after
turning on the power supply before starting the adjustment work.
b)
-1102+ ,/.2
After removing the Z-axis linear sensor cover, connect the probe of an oscilloscope. Use CH1
and CH2. Connect the probe to TP1(Vref) and also connect GND to TP6 (GND). Adjust
CH1 and CH2 in the same way.
TP6 (GND)
TP1(Vref)
Fig. B090
Note) Connector is not connected for imaging.
-1102+ ,/.2
99
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Adjustment
c)
(2) Adjustment work
(3) Lissajous waveform adjustment
Make sure that the voltage is approx. 2.5V, and adjust the waveform to be displayed at the
center of the screen by OFFSET setting of the oscilloscope. The waveform at the center of
the screen serves as the reference waveform. The reference waveform is the reference
setting position for origin adjustment and Lissajous waveform.
Fig. B091
Caution
Set the waveform to the center position without fail by OFFSET setting.
Dont set the position by POSITION setting, otherwise precise origin
adjustment becomes impossible since the precise Lissajous waveform
-1102+ ,/.2
origin is deviated.
The Lissajous waveform is the linear sensor output waveform of the Z-axis of bonding head. If
the Lissajous waveform is not adjusted properly, an abnormal Z sound and a Z count error occur.
a)
Oscilloscope setting change

Change the waveform display to the X-Y waveform (X-Y format).
-1102+ ,/.2
NE00040-00
100
Adjustment
b)
Probe connection position change

1)
Connect CH1 to TP2 (A) and also connect CH2 to TP3 (B). Connect both GND to
TP6 (GND).
Fig. B092
-1102+ ,/.2
2)
By moving the Z-axis of the bonding head vertically by hand, a waveform (Lissajous
waveform) is displayed near the oscilloscope screen center.
Fig. B093
-1102+ ,/.2
101
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Adjustment
(4) Coarse adjustment of Lissajous waveform

Coarse adjustment of Lissajous waveform is done by mechanically adjusting the horizontal and
parallel positions of the linear scale and linear sensor of the bonding head for rounding the
waveform being displayed on the oscilloscope.
a)
Moire angle adjustment

1)
Moire angle is adjusted for adjusting the waveform size. The waveform is maximized
when the moir angle is adjusted in such a way as the scale line of the linear scale
becomes parallel to the linear sensor.
Linear sensor
Sensor base (#10)
Fig. B094
Caution
Move the Z-axis up and down by hand, otherwise the Lissajous

waveform cannot be measured by an oscilloscope.
2)
-1102+ ,/.2
Moire angle : Small
Fig.B095
-1102+ ,/.2
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102
Adjustment
3)
Moire angle : Large
Fig. B096
-1102+ ,/.2
4)
Loosen four SUS CSB M3 x 8mm which fix the sensor mounting plate (#9) of sensor base
(#10). Adjust the waveform to be the maximum by turning the eccentric pin 2 (#26) for
adjusting the moire angle by using a precise screwdriver ().
SUS CSB M3 x 8mm
Eccentric pin 2 (#26) for

adjusting moire angle.
Fig. B097
2.5mm
-1102+ ,/.2
103
Cap Screw Wrench
()
Driver
NE00040-00
Adjustment
5)
When turning the eccentric pin 2 (#26) for adjusting moire angle once, a peak point
(maximum point) appears twice or so. Adjust the moire angle to the maximum position.
Fix four SUS CSB M3 x 8mm which fix the sensor mounting plate (#9) of the sensor base
(#10).
SUS CSB M3 x 8mm

adjusting moire angle
Fig.B098
2.5mm
-1102+ ,/.2
b)
Cap Screw Wrench
()
Driver
Roll angle adjustment

The roll angle is used to adjust an elliptic waveform to be a true circle. A Lissajous
waveform becomes a true circle when the linear scale and linear sensor are adjusted to be
horizontal.
1)
Roll angle : Left tilting (left elliptic)
Fig.B099
-1102+ ,/.2
NE00040-00
104
Adjustment
2)
Roll angle : Right tilting (right elliptic)
Fig. B100
-1102+ ,/.2
3)
Loosen four SUS CSB M3 x 10mm which fix the sensor base (#10), and adjust the
waveform to be a true circle by turning the roll angle by means of a precise screwdriver
().
SUS CSB M3 x 10mm

adjusting the roll angle
Fig B101
2.5mm
-1102+ ,/.2
105
Cap Screw Wrench
()
Driver
NE00040-00
Adjustment
4)
When turning eccentric pin 1 (#25) for adjusting the roll angle by using a precise
screwdriver (-), the waveform tilts rightward or leftward. Adjust the roll angle until the
waveform becomes a true circle.
Fig. B102
-1102+ ,/.2
5)
()
Driver
After the end of roll angle adjustment, fix four SUS CSB M3 x 10mm which fix the sensor
base (#10).
SUS CSB M3 x 10mm

adjusting the roll angle
Fig. B103
2.5mm
-1102+ ,/.2
NE00040-00
106
Cap Screw Wrench
Adjustment
(5) Fine adjustment of Lissajous waveform

After mechanical adjustment, the center voltage and amplitude voltage of a waveform are
deviated, and fine adjustment is necessary.
a)
Initialize the machine by turning on DRIVE switch.
When a circular waveform is
displayed near the oscilloscope screen center, the origin return can be done.
If not
displayed, recheck the mechanical adjustment.
-1102+ ,/.2
b)
Click [Tool] [Output check] of the menu. Select [Bond head] of [Output check] dialog box
and lower the Z-axis to 90050m horizontal level by [Z move (Z) switch]. In this case,
lower the Z-axis at the position where it does not touch the heat block or load clamper.
Fig.B104
Unnecessary
-1102+ ,/.2
107
NE00040-00
Adjustment
c)
By turning on [Z Lissajouss waveform], a Lissajous waveform is displayed on the

oscilloscope screen.
The Lissajous waveform is a waveform of 1V (2Vp-p) from the
oscilloscope screen center.
Z Lissajous ON switch
Down switch
Fig.B105
-1102+ ,/.2
d)
Control knobs
VRl : Abscissa (phase A) size
(Vp-p amplitude voltage) adjustment
X-axis voltage changes
VR2 : Abscissa (phase A) position (Vdc center voltage) adjustment
X-axis moves.
VR3 : Ordinate (phase B) size
(Vp-p amplitude voltage) adjustment
Y-axis voltage changes
VR4 : Ordinate (phase B) size
(Vdc center voltage) ) adjustment
Y-axis moves
VR2
VR1
VR4
VR3
Fig. B106
-1102+ ,/.2
NE00040-00
108
(6) Lissajous waveform standard
Adjustment
(7) Waveform standard measuring method
(6) Lissajous waveform standard
Fig. B107
Measuring position
90050m
(Horizontal level)
Amplitude voltage
Center voltage
2050~1910mV
50mV
Mutual difference of
amplitude voltage
Within 60mV
-1102+ ,/.2
Center
voltage
Center
voltage
Amplitude voltage B
(7) Waveform standard measuring method
Amplitude voltage A B
= mutual difference of amplitude voltage
Amplitude voltage A
Fig.B108
-1102+ ,/.2
109
NE00040-00
Adjustment
(8) Lissajous waveform check

a)
Check the Lissajous waveform by the Z-axis position (height) at 2 points. Click [Tool]
[Output check] from the menu.
Fig. B109
-1102+ ,/.2
b)
Select [Bond head] tab of [Output check] dialog box, and perform measurement by changing
the Z-axis to the following measuring position. Since the linear scale moves circularly, the
Lissajous waveform profile changes as the Z position changes to cause a standard change.
Set Z-axis to the following measuring value by [Z-axis move (Z) switch], and check the
Lissajous waveform by turning on [Z Lissajous adjustment].
Fig B110
Mutual difference of
Measuring position
Amplitude voltage
Amplitude voltage
260050m (1 lifting)
2080~1880mV
50mV
Within 60mV
960050m (5 lifting)
2150~1800mV
80mV
Within 120mV
NE00040-00
110
amplitude voltage
-1102+ ,/.2
c)
Adjustment
The linear scale control knob is adjusted when the measuring value is 90050m
[horizontal level]. The other measuring positions are not adjusted but checked only. If
this setting cannot be done within the standard, perform mechanical adjustment of moire
angle and roll angle again. After adjustment, fix four SUS CSB M3 x 8mm for fixing the
moir angle and four SUS CSB M3 x 10mm for fixing the roll angle, and then, lock them
with screw lock painting.
2.5mm
-1102+ ,/.2
111
Cap Screw Wrench
NE00040-00
Calibration
(1)
4. Z-axis calibration method

(A) Z force fine
(1)
a)
Loosen two SUS CSB M6 x 12mm which fix the operation panel (SWU-182).
SUS CSB M6 x 12mm
Operation panel (SWU-182)
Fig. B111
5mm
-1102+ ,/.2
b)
Cap Screw Wrench
Operation panel move

1)
Move the operation panel (SWU-182) from normal fixed position of operation panel to
fixed position of operation panel during maintenance.
Normal fixed position of operation panel

Fixed position of operation panel during
maintenance
Fig. B112
Unnecessary
-1102+ ,/.2
NE00040-00
112
Calibration
(1)
2)
Fixed position of operation panel (SWU-182) during maintenance.
Fixed position of operation

panel during maintenance
Fig. B113
Unnecessary
-1102+ ,/.2
c)
Remove the loader side cover by removing one SUS hexagon socket head countersunk bolt
(screw) M3 x 4mm and two SUS CSB M3 x 8mm. Remove the unloader side cover by
removing one SUS hexagon socket head countersunk bolt (screw) M3 x 4mm and two SUS
CSB M3 x 8mm.
SUS hexagon socket head countersunk bolt (screw) M3 x 4mm

SUS CSB M3 x 8mm
Fig. B114
2mm
-1102+ ,/.2
113
Cap Screw Wrench
2.5mm
Cap Screw Wrench
NE00040-00
Calibration
d)
(1)
Removal of fixing bolts of universal indexer (UF-79A)

1)
Remove two CSB M6 x 20mm which fix the universal indexer (UF-79A) to the loader side.
CSB M6 x 20mm
Fig. B115
5mm
-1102+ ,/.2
2)
Cap Screw Wrench
Remove two CSB M6 x 20mm which fix the universal indexer (UF-79A) to the unloader
side.
CSB M6 x 20mm
Fig. B116
5mm
-1102+ ,/.2
NE00040-00
114
Cap Screw Wrench
Calibration
(1)
e)
Remove the vacuum piping.
Vacuum piping
Fig. B117
Unnecessary
-1102+ ,/.2
f)
Move the universal indexer (UF-79A) forward up to the position shown in Fig. B118.
Fig. B118
Unnecessary
-1102+ ,/.2
115
NE00040-00
Calibration

a)
Click [Machine management] [Machine specific] [Z calibration] from the menu. The
adjustment indicated in [Z calibration] dialog box is done in the sequence of [Z force fine].[Z
motion ratio], [Z origin correct], and [Z force correction].
Fig. B119
Unnecessary
-1102+ ,/.2
b)
Select [Z force fine], and click [Next].
Fig. B120
Unnecessary
-1102+ ,/.2
NE00040-00
116
Calibration
c)
Prepare the BH leveling jig (J712) which sets the measuring point of load cell to 200mm
from the lower side and the force adjustment jig set (J772) including the load cell.
Bonding force adjustment jig set

(J772) load cell
BH leveling jig (J712)
Bonding force adjustment jig set

(J772) amplifier
Fig. B121
-1102+ ,/.2
d)
Jig J712
Jig J772
BH leveling jig
Force adjustment jig set
Set BH leveling jig (J712) to the position between the XY table and the universal indexer.
Display the short cut menu by right click, and click [Enter Chessman Mode]. Set the
capillary to the load cell center by Chessman while gradually lowering Z by the arrow on the
monitor screen.

Capillary
Load cell
Fig. B122
Caution
Stop the capillary just before touching the load cell without
grounding to the load cell.
-1102+ ,/.2
117
Jig J712
Jig J772
BH leveling jig
NE00040-00
Calibration
e)
Display the short cut menu by right click, and then, click [Exit chessman Mode]. Click
[Next].
Fig. B123
-1102+ ,/.2
f)
Jig J712
Jig J772
BH leveling jig
Amplifier 0 adjustment
1)
Adjust 0 by pressing [ZERO] key of the amplifier of Bonding force adjusting jig set
(J772).
[ZERO] KEY
Fig. B124
-1102+ ,/.2
NE00040-00
118
Jig J712
Jig J772
BH leveling jig
Calibration
2)
0 adjustment ends.
Fig.B125
-1102+ ,/.2
g)
Jig J712
Jig J772
BH leveling jig
Measured data input

1)
Ground the capillary to the load cell by clicking the Z move arrow, then, lower it until the
load meter is kept constant. Input the fixed value to [Measured data]. The load meter
indicates 20.3.
Fig. B126
-1102+ ,/.2
119
Jig J712
Jig J772
BH leveling jig
NE00040-00
Calibration
2)
Input 20.3 to [Measured data]. After setting, click [Next].
Fig. B126
-1102+ ,/.2
h)
Jig J712
Jig J772
BH leveling jig
Jig J712
Jig J772
BH leveling jig
200g load measurement

1)
The load meter indicates 213.4.
Fig. B127
-1102+ ,/.2
NE00040-00
120
Calibration
2)
Input 213.4gt to [Measured data].
Fig. B128
-1102+ ,/.2
i)
Jig J712
Jig J772
BH leveling jig
Perform the work of (2)-g)-1~ 2) work in the same way as in 20g setting. After the screen
in Fig. B129 has been displayed, click [Finish]. Repeat the work in (2)-f)-1~ j) 3 times and
finish the Z force fine.
Fig. B129
-1102+ ,/.2
121
Jig J712
Jig J772
BH leveling jig
NE00040-00
Calibration
(1)
(2)
(B) Z motion ratio

(1) Click [Machine management] [Machine specific] [Z calibration] from the menu. Select [Z
motion ratio] of [Z calibration] dialog box, and click [Next].
Fig. B131
Unnecessary
-1102+ ,/.2
(2) Set BH leveling jig (J712) before the XY table, and click [Next].
Fig. B132
-1102+ ,/.2
NE00040-00
122
Jig J712
Jig J772
BH leveling jig
Calibration
(3)
(3)
a)
Display the short cut menu by right-click and click [Enter chessman Mode].
Set the
capillary to be grounded to the higher stage of BH leveling jig ( J712) by chessman.
Capillary
Load cell
Fig. B133
-1102+ ,/.2
b)
Jig J712
Jig J772
BH leveling jig
Display the shirt cut menu by right-click and click [Exit chessman Mode]. Click [Next].
Fig. B134.
-1102+ ,/.2
123
Jig J712
Jig J772
BH leveling jig
NE00040-00
Calibration
c)
(3)
If a message Measurement was not performed correctly appears after the end of
measuring operation, check the positional relation between the BH leveling jig (J712) and
the bonding head. Click [Back] and perform measurement again.
Fig. B135
-1102+ ,/.2
d)
Jig J712
Jig J772
BH leveling jig
When a message [Measurement was completed successfully] appears after the end of
measuring operation, click [Next].
B136
-1102+ ,/.2
NE00040-00
124
Jig J712
Jig J772
BH leveling jig
Calibration
(4)
(4)
a)
Display the short cut menu by right-click, and [Enter Chessman Mode]. Set the capillary
to be grounded to the lower stage of BH leveling jig (J712) by chessman.
Capillary
Load cell
Fig. B137
-1102+ ,/.2
b)
Jig J712
Jig J772
BH leveling jig
Fig. B138
-1102+ ,/.2
125
Jig J712
Jig J772
BH leveling jig
NE00040-00
Calibration
c)
(4)
If a message Measurement was not performed correctly appears after the end of
measuring operation, check the positional relation between the BH leveling jig (J712) and
the bonding head. Click [Back] and perform measurement again.
Fig. B139
-1102+ ,/.2
d)
Jig J712
Jig J772
BH leveling jig
When a message [Measurement was completed successfully] appears after the end of
measuring operation, click [Next].
Fig. B140
-1102+ ,/.2
NE00040-00
126
Jig J712
Jig J772
BH leveling jig
Calibration
(5)
(5) [Z motion ratio] is calculated by measuring two points in the higher and lower stages of BH
leveling jig (J712). After calculation, click [Finish].
Fig. B141
-1102+ ,/.2
127
Jig J712
Jig J772
BH leveling jig
NE00040-00
Calibration
(1)
(2)
(C) Z origin correct

(1) Click [Machine management]-[Machine specific] [Z calibration] from the menu. Select [Z
origin correct] of [Z calibration] dialog box, and click [Next].
Fig. B142
Unnecessary
-1102+ ,/.2
(2) Set the BH leveling jig (J712) to the position before the XY table, and click [Next].
Fig. B143
-1102+ ,/.2
NE00040-00
128
Jig J712
Jig J772
BH leveling jig
Calibration
(3)
(3)
a)
Display the short cut menu by right-click, and click [Enter Chessman Mode]. Set the
capillary to be grounded to the lower stage of BH leveling jig (J712) by Chessman.
Capillary
Load cell
Fig. B144
-1102+ ,/.2
b)
Jig J712
Jig J772
BH leveling jig
The transducer lowers to execute measuring operation.
Fig. B145
-1102+ ,/.2
129
Jig J712
Jig J772
BH leveling jig
NE00040-00
Calibration
(4)
(4) When the screen shown in Fig.B146 is displayed after the end of measuring operation, click
[Finish]. Remove the BH leveling jig (J712), and terminate [Z origin correct] by clicking [OK] of
[UTC-1000] dialog box.
Fig. B146
-1102+ ,/.2
NE00040-00
130
Jig J712
Jig J772
BH leveling jig
(1)
Calibration
(2)
(D) Z force correction

(1) Click [Machine management]-[Machine specific] [Z calibration] from the menu. Select [Z
force correction] of [Z calibration] dialog box, and left-click [Next].
Fig. B147
Unnecessary
-1102+ ,/.2
(2) Make sure that no obstacle exists below the capillary. If any, remove it or move the capillary by
[Chessman move] or [Move mode]. Click [Next].
Fig. B148
Unnecessary
-1102+ ,/.2
131
NE00040-00
Calibration
(3)
(3) When the screen shown in Fig. B149 has been displayed after the correction operation, click
[Finish]. Now, [Z force correction] ends.
Fig. B149
Unnecessary
-1102+ ,/.2
NE00040-00
132
(1)
(2)
(3)
(4)
(5)
(6)
(7)
Calibration
(E) Z force fine and Z motion ratio check

(1) After the end of 4 items [(A) Z force fine], [(B) Z motion ratio], [(C) Z origin correct], and [(D) Z force
correction], select [(A) Z force fine] again for confirmation.
(2) [(2) Lissajous waveform check] of [(A) Z force fine] -- See a) and higher items.
(3) [(2) Lissajous waveform check] of [(A) Z force fine]. -- In g)-3), 20.3g was input. Perform
measurement again, and input the measured value if it is not within the range of 201g. When
the measured value is within the range of 201g, click [Next] as it is.
(4) [(2) Lissajous waveform check] of [(A) Z force fine]. -- In h), perform the same procedure as in (3)
above.
(5) [(2) Lissajous waveform check] of [(A)Z force fine]. -- In j), click [Finish].
(6) Perform (1) ~ (4) of [(B) Z motion ratio] again. After the end of (4) in [(B) Z motion ratio], check the
bottom measured value.
Check if the value is within a range of 9001m.
Proceed to [Finish] when the value is within a range of 9001m.
Proceed to [Finish] too when the value is not within a range of 9001m.
In this case, perform [Z origin correct]- [Z force correction]-[Z force fine (Force check)]- [Z motion
ratio (low level 9001m)].
When the Z motion ratio has entered the range of 9001m on the bottom face, the operation
ends after [Z origin correct]- [Z force correction]-[Z force fine (Force check)].
Standard value of Z force fine

Set value
Actual load
20g
201g
200g
2001g
Standard value of Z motion ratio

Bottom side measured value 9001m
Caution
Make sure that the bottom side measured value of [Z motion ratio] is within a range of
9001m and [Z force fine] is within a range of the standard value.
133
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Mounting
(1) Mounting of camera tube lens positioning Jig
5. Camera lens tube and ring illumination unit adjusting methods

(A) Camera lens tube mounting method
(1) Mounting of camera tube lens positioning Jig (J713)
Press the camera tube lens positioning (J713) pin against the camera lens tube mount, and fix
the camera lens tube positioning jig (J713) to the camera lens tube base by one SUS CSB M3 x
6mm.
SUS CSB M3 x 6mm
Camera lens tube positioning jig

(J713)
Camera lens tube mount
Pin
Fig. B150
Caution
Mount the camera lens tube positioning jig without any gap between its
2.5mm
-1102+ ,/.2
pin and the camera lens tube mount.
Cap Screw Wrench

Mount the camera lens tube (MS-220) to the position of the camera lens tube positioning jig
(J713) of the camera lens tube mount. After setting the camera lens tube (MS-220) to the
reference plane of camera lens tube positioning jig (J713), fix it with the tightening torque of
1.5Nm (approx. 15Kgfcm) by four SUS CSB M4 x 12mm with flat washers and spring
washers.
Positioning by
applying to l plane
Camera lens tube
positioning jig (J713)
Positioning by
applying to 2 planes
Fig. B151
Caution
Camera lens tube (MS-220)
The camera lens tube is positioned by the jig.
The camera lens position
may be readjusted by the mounting condition of the RPS unit.
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134
3mm
-1102+ ,/.2
Cap Screw Wrench
Mounting
(3) Mounting of ring illumination
(3) Mounting of ring illumination

a)
Fix the ring illumination to the illumination holder (#21) of the camera lens tube mount by
two SUS M3 x 10mm with flat washers and spring washers.
Illumination holder (#21)

Tube
Ring illumination
Fig. B152
2.5mm
-1102+ ,/.2
b)
Cap Screw Wrench
A heat haze preventive tube is inserted between the camera lens tube ring illumination.
Insert the heat haze preventive tube securely to the tapered face on the tube camera lens
tube side and the tapered face on the ring illumination side.
Camera lens tube

Camera lens tube tapered face
Tube
Ring illumination side tapered
Ring illumination
Fig. B153
Caution
The tube is a thin and soft material. Mount it without bending it.
Unnecessary
-1102+ ,/.2
135
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Adjustment
(4) Mounting of center lamp
(4) Mounting of center lamp

a)
Insert the fiber wire of the center lamp into the innermost of the camera lens tube unit and
fix it by one CSB M3 x 10mm.
CSB M3 x 10mm
Fiber wire
Fig. B154
2.5mm
-1102+ ,/.2
b)
Cap Screw Wrench
Adjust the ring illumination position under a projected condition of a sample on the monitor
screen. For this adjustment, refer to (C) Ring illumination adjustment.
Fig. B155
Unnecessary
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136
Adjustment
(B) Camera focus adjustment
The bonding head is provided with two CCD cameras for high magnification and low magnification.
The high magnification camera is indicated as H and the low magnification camera is indicated
as L. For focus adjustment, H (high magnification) and L (low magnification) are indicated
on the camera lens tube.
High magnification CCD camera

High magnification focusing pin
Low magnification CCD camera
Low magnification focusing pin
Fig. B156
Unnecessary
-1102+ ,/.2
Check an image by projecting a sample on the monitor screen. By selecting [Edit]-[Live image
set] from the menu, the image position, [High], and [Low] can easily be selected.
Center (C), side (S) control knob

Low magnification- high
magnification selector switch
High magnification screen
Fig.B157
Unnecessary
-1102+ ,/.2
137
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Adjustment
(1) Correction of high magnification camera oblique display
By clicking *1 icon, setting of [Edit] and [Live image] is displayed in *2.
*1
*2
Low magnification screen
Fig. B158
Unnecessary
-1102+ ,/.2

If a sample image is displayed obliquely on the monitor screen, it is caused by oblique mounting
of the CCD camera.
Fig. B159
An image when the CCD camera is mounted obliquely
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138
Adjustment
If oblique mounting of CCD camera is adjusted referring to die (chip), the CCD camera may be
inclined according to the inclination of die if the die is mounted obliquely. For adjusting the
oblique mounting of CCD camera, set the CCD camera to meet the end face of island of the
frame without fail.
Fig. B160
An image when CCD camera is mounted normally
Unnecessary
-1102+ ,/.2
a)
Adjustment of mounting angle of CCD camera

Display the short-cut menu by [Chess] switch on the operation panel or by right-clicking
Chessman on the monitor screen, and select [Enter Chessman Mode]. Bring the cross
mark (yellow+) at the center of the monitor screen to meet the end face of island of the
frame. For the screen brightness, select [Edit] [Live image set] from the menu, and
change the setting of the light.
*2
*1
*5
*4
*3
*6
Fig. B161
Unnecessary
-1102+ ,/.2
139
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Adjustment
*1 By licking the icon, a [live image] dialog is displayed.

*2 Adjust the end face of island of the frame to be easy-to-see by the adjustment of [Center
(C)] and [Side (S) of [Illumination] control knob.
*3 The end face of Island of the frame is the green box position in *3.
*4 This is displayed by right-clicking the chessman switch.
*5 Cross mark (yellow line).
*6 The green box position shows the actual image position.
Unnecessary
-1102+ ,/.2
b)
Display the move direction limit on the monitor screen by right-clicking. Chessman again in
the monitor screen, and set the X direction. The move limit is normally set in the XY direction.
By right-clicking chessman in the chessman mode, *1 is displayed.
*1
Fig. B162
Unnecessary
-1102+ ,/.2
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140
Adjustment
c)
Positioning of CCD camera

1)
Loosen and adjust one CSB M3 x 8mm which fixes CCD camera so that the end face of
island of the frame is displayed in parallel on the monitor screen by moving chessman
in the X direction (Chessman does not move in the Y direction).

(Bring the image to be in parallel by turning clockwise or counterclockwise.)
Fig. B163
2.5mm
-1102+ ,/.2
2)
Cap Screw Wrench
Move the monitor screen rightward or leftward by chessman.
Fig B164
Unnecessary
-1102+ ,/.2
141
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Adjustment
3)
Position the CCD camera so that the end face of the island of the frame is displayed in
parallel with the cross mark.
Island end face
Cross mark
Fig. B165
Unnecessary
-1102+ ,/.2
d)
Fixing of CCD camera

After positioning the CCD camera, fix it by one CSB M3 x 8mm.
SUS CSB M3 x 8mm
Mount in the with out gap

Fig. B166
2.5mm
-1102+ ,/.2
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142
Cap Screw Wrench
(2) Correction of oblique display of low magnification camera
Adjustment
Fig.B167
An image when CCD camera is mounted obliquely
Unnecessary
-1102+ ,/.2
Fig.B168
An image when CCD camera is mounted normally
Unnecessary
-1102+ ,/.2
143
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Adjustment
a)
Adjustment of the mounting angle of CCD camera

Position the CCD camera so that the end face of island of the frame is displayed in parallel
with the cross mark in the same way as in the adjustment of the mounting angle of the high
magnification CCD camera.

(Place the image in parallel by turning this knob clockwise or counterclockwise.)
Fig. B169
Unnecessary
-1102+ ,/.2
Fig.B170
Unnecessary
-1102+ ,/.2
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144
Adjustment
Island end face
Cross mark
Fig.B171
Unnecessary
-1102+ ,/.2
b)
Fixing of CCD camera

Fix CCD camera by one CSB M3 x 8mm after positioning the CCD camera.
CSB M3 x 8mm
Mount CCD camera without any gap

Fig. B172
2.5mm
-1102+ ,/.2
145
Cap Screw Wrench
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Adjustment
c)
After positioning the CCD camera, display the short cut menu by right-clicking*1, and
reset [Move direction limit] of chessman mode to [XY direction].
*1
Fig. B173
Unnecessary
-1102+ ,/.2
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146
Adjustment
(3) Out focus (Out of focus)
High magnification out focus (out of focus)
Fig. B174
Unnecessary
-1102+ ,/.2
High magnification in focus (just focused)
Fig. B175
Unnecessary
-1102+ ,/.2
147
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Adjustment
Low magnification out focus (out of focus)
Fig. B176
Unnecessary
-1102+ ,/.2
Low magnification in focus (just focused)
Fig. B177
Unnecessary
-1102+ ,/.2
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148
Adjustment
a)
Focusing
1)
After loosening the CSB M3 x 6mm one each, or two in total, which fix high magnification
focus and low magnification focus respectively, adjust the focus by moving the focusing
pin longitudinally.
CSB M3 x 6mm

Fig. B178
2.5mm
-1102+ ,/.2
2)
Cap Screw Wrench
After the end of focus adjustment, fix CSB M3 x 6mm one each, or two in total, which fix
high magnification focus and low magnification focus respectively with the torque of
0.6Nm (approx. 6kgfcm) by using the torque driver (J705) as the camera lens tube focus
adjusting jig and hex socket (J706).
CSB M3 x 6mm
Fig. B179
Jig J705
-1102+ ,/.2
149
Jig J706
Hex. Socket
NE00040-00
Adjustment
b)
Camera calibration
1)
After focusing the CCD cameras, click [Machine management] [Machine specific]
[Camera calibration] from the menu.
Fig. B180
Unnecessary
-1102+ ,/.2
2)
Make sure that numeric RY1 and RX2 are within 03 at both high magnification and
low magnification as a result of camera calibration.
Fig. B181
Unnecessary
-1102+ ,/.2
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150
Adjustment
3)
If the numeric exceeds 03, it is caused by oblique mounting of CCD camera.

Perform (1) Correction of oblique display of high magnification camera or (2) Correction of
oblique display of low magnification camera.
Low magnification screen
Within 03
Fig.B182
Jig J705
Jig J706
2.5mm
-1102+ ,/.2
c)
Hex. Socket
Cap Screw Wrench
Camera offset adjustment

1)
After calibrating the CCD cameras, click [Machine management] [Machine specific]
[Camera offset ] from the menu.
Fig. B183
Unnecessary
-1102+ ,/.2
151
NE00040-00
Adjustment
2)
The reference values in camera offset/tool offset adjustment at low magnification and
high magnification are -10000500m in X offset and 0500m in Y offset.
Make sure that the numeric values

are within the reference values
Fig. B184
Unnecessary
-1102+ ,/.2
3)
If the numeric values are not within the reference values, the camera lens tube is not
mounted correctly. Check if the camera lens tube or camera lens tube mount is mounted
correctly.
Make sure that the numeric values

are within the reference values
Fig.B185
Unnecessary
-1102+ ,/.2
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152
Adjustment
(4) Camera lens tube and cautions

a)
Camera lens tube specifications
Depth of field of camera lens tube

(Focused range)
H : 0.05mm
L : 0.75mm
Viewing field
(Screen range)
H : 0.790.59mm
L : 3.152.39mm
Unnecessary
-1102+ ,/.2
b)
Items to be confirmed before starting focusing

1)
Check if [pre heater][main heater], and [after heater] are heated.

Adjust the focus at actual bonding temperature.
If focusing is done at normal
temperature, the universal indexer thermally expands to cause out of focus when the pre
heater, main heater and after heater are operated and heated.
Temperature check
Fig. B186
Unnecessary
-1102+ ,/.2
153
NE00040-00
Adjustment
2)
Check if frame, setting and thickness meet those of actual frame.

The heat block height changes automatically according to the thickness of the frame.
Focus may be deviated when [thickness] setting is changed later.
Frame thickness check
Fig. B187
Unnecessary
-1102+ ,/.2
3)
Check if the size of actual bonding die (chip) of actual product meets the size of dummy
die. High magnification die (chip) is normally used. Since the depth of focus (focused
range) is shallow, the focus becomes out of focus when the height changes.
Unnecessary
-1102+ ,/.2
NE00040-00
154
Adjustment
4)
The horizontal height of the bonding head is adjusted to 900m.

The indexer height (heat block height) is set to meet the above value and the 2nd bond
height (lead bond) is set to 90050m as the reference value. (If it does not meet this
reference value, it is adjusted automatically by [Machine management] [Machine
specific] [Indexer adjustment].)
2nd bond level check
Fig.B188
Unnecessary
-1102+ ,/.2
5)
If the bond level is out of the reference value, heat block height must be set again.
Click [Machine management] [Machine specific] [Indexer adjustment] from the menu
and set the heat block height again according to the setting wizard.
Reset if out of the reference value
Fig. B189
After re-setting, measure the bond level again to make sure that it meets the reference
value (90050m).
Unnecessary
-1102+ ,/.2
155
NE00040-00
Adjustment
(C) Ring illumination adjustment (side lamp)
Finely adjust the side illumination that has been mounted in (A) Camera lens tube unit mounting
method. Transfer a raw frame without die (chip) to the bonding position.
Ring illumination
Raw frame
Fig.B190
Unnecessary
-1102+ ,/.2
After displaying the island of the raw frame on the monitor screen, set [low magnification (*2)] by
[Edit] [Live image set (*1)] (Running screen) (Live image adjusting icon). Set the center lamp
to 0(*3) to light the side illumination only.
*3
*1
*2
Fig. B191
Unnecessary
-1102+ ,/.2
NE00040-00
156
Adjustment
Adjust the brightness of side illumination while checking it on the monitor screen to such an
extent as the circular shade can be confirmed (*1). Make sure that the monitor screen center is
shaded circularly.
*1
Fig. B182
Unnecessary
-1102+ ,/.2
Side illumination fibers are bundled to be a ring-profiled to illuminate just below, so that the
center becomes dark to be donut-profiled illumination due to the structure. In case of a low
magnification image, the center dark portion only is displayed. Set the camera image center to
meet the side illumination center by placing the dark portion (shadow portion) to meet the cross
mark.
Unnecessary
-1102+ ,/.2
157
NE00040-00
Adjustment
(1) Adjustment when circular shadow exists on either right or left side
a)
If the circular shade is not displayed at the center but displaced rightward or leftward, the
side illumination is deviated rightward or leftward.
Fig. B193
Unnecessary
-1102+ ,/.2
b)
Loosen two SUS CSB M3 x 12mm with spring washers and flat washers for adjusting the
illumination holder (#21) of the camera lens tube mount.
Move the side illumination
rightward or leftward to display the circular shadow at the center of the monitor screen.
SUS CSB M3 x 12mm with spring washer and flat washer
Side illumination
Move rightward or leftward.
Fig.B194
2.5mm
-1102+ ,/.2
NE00040-00
158
Cap Screw Wrench
Adjustment
c)
After adjusting to display the circular shadow at the center of the monitor screen, fix the
illumination holder (#21) of the camera lens tube mount by two SUS CSB M3 x 12mm with
spring washers and flat washers.
Ring illumination
Move rightward or leftward.
Fig. B195
2.5mm
-1102+ ,/.2
159
Cap Screw Wrench
NE00040-00
Adjustment
(2) Adjustment when the circular shadow exists at the upper or lower part
a)
If the circular shadow is not present at the center but deviated upward or downward, the
side illumination is deviated longitudinally.
Fig. B196
Unnecessary
-1102+ ,/.2
b)
Loosen two SUS CSB M3 x 10mm with spring washers and flat washers for adjusting the
illumination holder (#21) of the camera lens tube mount.
Move the side illumination
forward or backward to display the circular shadow at the center of the monitor screen.
Side illumination
Move rightward
or leftward.
Fig. B197
2.5mm
-1102+ ,/.2
NE00040-00
160
Cap Screw Wrench
c)
Adjustment
After adjusting to display the circular shadow at the center of the monitor screen, fix the
illumination holder (#21) of the camera lens tube mount by two SUS CSB M3 x 10mm with
spring washers and flat washers.
Side illumination
Fig. B198
2.5mm
-1102+ ,/.2
161
Cap Screw Wrench
NE00040-00
Adjustment
(1) RPS (reference unit) adjustment
(D) RPS adjustment

Terminate the adjustment of the camera offset before starting RPS adjustment.
Click
[Machine management] [Machine specific] [Camera offset] from the menu.
Fig. B199
Caution
RPS adjustment is done to correct the capillary position with reference to

the camera offset.
a)
Initialize the camera offset precisely.
Unnecessary
-1102+ ,/.2
Initialization
1)
Click [Machine management]-[Machine specific] [Hardware composition] from the

menu.
Fig. B200
Caution
RPS(reference system) means the automatic calibration system for

Unnecessary
capillary.
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-1102+ ,/.2
162
Adjustment
2)
Select [Reference system] [2-axes](*1) of [Hardware composition] dialog box. Setting

cannot be done if [No] is selected. Dont set [1-axes].
*1
Fig. B201
Unnecessary
-1102+ ,/.2
b)
By clicking [RPS] (*1), program input can be done in wizard format. Perform RPS setting.
*1
Fig. B202
Unnecessary
-1102+ ,/.2
163
NE00040-00
Adjustment
c)
Reference setting 1/8

1)
By clicking [RPS] (*1), last stored data are displayed.
Fig. B203
Unnecessary
-1102+ ,/.2
2)
Click[Next], and CCD camera of the bonding head moves to the position above the pin
hole of the RPS unit.
Bonding head
CCD camera
Pin hole of the RPS unit
Fig. B204
Unnecessary
-1102+ ,/.2
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164
Adjustment
d)

1)
Set the reference pin (upper). The pin hole of the reference unit is displayed on the
monitor screen and the reference pin is provided at the center of the pin hole.
Before positioning
Fig. B205
Unnecessary
-1102+ ,/.2
2)
If the reference pin is not projected on the monitor screen, enter the [Chessman mode]
and relocate the CCD camera. Bring the reference pin to meet the center of the cross
mark at the center of the monitor screen.
After positioning
Fig.B206
Unnecessary
-1102+ ,/.2
165
NE00040-00
Adjustment
3)
When the CCD camera is set to a high magnification, the visual field narrows to difficult
to find the reference pin. By adjusting the illumination, the outer circumference of the
reference pin, etc. are seen. Find the pin center.
Unnecessary
-1102+ ,/.2
4)
If the CCD camera is not focused to the reference pin, the pin tip profile is not clear to
cause poor detection accuracy of RPS.
Before focusing
Fig. B207
Unnecessary
-1102+ ,/.2
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166
Adjustment
After focusing
Fig. B208
Unnecessary
-1102+ ,/.2
5)
Loosen two SUS CSB M3 x 8mm for fixing the upper face focus of the RPS unit mounted
to the universal indexer.
SUS CSB M3 x 8mm
Fig. B209
2.5mm
-1102+ ,/.2
167
Cap Screw Wrench
NE00040-00
Adjustment
6)
Perform focusing by turning the focusing screw by a precise screwdriver (-).
After
focusing, fix the focusing screw by two SUS CSB M3 x 8mm, and click [Next]. Now, the
pin is detected to store the reference pin position into memory.
SUS CSB M3 x 8mm
Fig. B210
Focusing screw
2.5mm
-1102+ ,/.2
e)
Cap Screw Wrench
()
Driver

1)
The monitor screen changes to a low magnification image.
The machine enters
Chessman mode and the CCD camera position is relocated by Chessman. Position the
CCD camera so that the pin is projected to the center of the cross mark located at the
center of the monitor screen.
Fig.B211
Unnecessary
-1102+ ,/.2
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168
Adjustment
2)
The position may be deviated more or less due to a difference between high magnification
CCD camera and low magnification CCD camera. Position the CCD camera so that the
pin is positioned at the center of the cross mark. After adjustment, click [Next].
Deviated from the center
Fig.B212
Unnecessary
-1102+ ,/.2
f)
1)
is displayed on the monitor screen.
Fig. B213
Unnecessary
-1102+ ,/.2
169
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Adjustment
2)
The capillary of the bonding head moves to the position above the pin hole of RPS unit.
Bonding head
RPS unit
Capillary
Fig. B214
Unnecessary
-1102+ ,/.2
3)
By clicking [YES]*1), the capillary lowers automatically and stops at the last stored
position.
*1
Fig. B215
Caution
Never
disassemble
NE00040-00
Dont click [YES] during adjustment, otherwise the capillary and reference pin may
touch each other.
170
Unnecessary
-1102+ ,/.2
Adjustment
4)
Click [NO] (*1), and the capillary lowers every step in setting [Z move] of the next item.
*1
Fig. B216
Unnecessary
-1102+ ,/.2
g)

A lateral image of the reference pin is displayed on the monitor screen by the prism in RPS
unit.
Fig. B217
Unnecessary
-1102+ ,/.2
171
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Adjustment
h)
When the reference pin is not seen;

1)
The reference pin may not be seen depending upon the mounting method of the CCD
camera lens tube.
Fig. B218
Unnecessary
-1102+ ,/.2
2)
Set the CCD camera to low magnification, and adjust [Illumination] control knob (*1)
until the profile of reference pin is seen clearly.
Before illumination adjustment
*1
Fig. B219
Unnecessary
-1102+ ,/.2
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172
Adjustment
After illumination adjustment
Fig. B220
Unnecessary
-1102+ ,/.2
3)
Loosen four SUS CSB M4 x 12mm which fix the camera lens tube.
SUS CSB M4 x 12mm
Fig.B221
3mm
-1102+ ,/.2
173
Cap Screw Wrench
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Adjustment
4)
Coarse adjustment
Set the reference pin to the center of the cross line by moving the camera lens tube while
monitoring the monitor screen.
Fig. B222
Unnecessary
-1102+ ,/.2
5)
Fine adjustment
After switching the CCD camera to high magnification, move the camera lens tube until
the reference pin enters the blue frame. By setting the Offset detection camera] selector
switch (*1) to [X direction], put the reference pin into the blue frame.
*1
Fig. B223
Unnecessary
-1102+ ,/.2
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174
Adjustment
6)
By setting [Offset detection camera] selector switch (*1) to [Y direction], put the reference
pin into the blue frame. If the reference pin does not enter the blue frame by the above
adjustment, adjust the RPS unit again.
*1
Fig. B224
Unnecessary
-1102+ ,/.2
7)
Fix four SUS CSB M4 x 12mm fixing the camera lens tube with the torque of 1.47Nm
(15Kgfcm) by using a torque wrench.
SUS CSB M4 x 12mm
Fig. B225
-1102+ ,/.2
175
NE00040-00
Adjustment
8)
After clicking [Cancel], perform the following setting again. By clicking [Cancel], the
information on the position relation being intended to store into memory is canceled.
[Machine management] [Machine specific] [Camera calibration]
[Machine management] [Machine specific] - [Camera offset]
The distance between the monitor screen angle and the capillary finely changes as a
result of the move of the camera lens tube unit, and resetting is necessary.
Unnecessary
-1102+ ,/.2
9)
After the end of resetting, start RPS setting. Perform resetting c) Reference system 1/8
~ g) Reference system 4/8. Make sure that the reference pin is put in the blue frame.
If not, perform this adjustment again by moving the camera lens tube.
Fig. B226
Unnecessary
-1102+ ,/.2
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176
Adjustment
10) Set CCD camera to [Low] (*1).
*1
Fig. B227
Unnecessary
-1102+ ,/.2
11) Coarse adjustment of capillary tip position

Lower the capillary by [Z move] switch (*1) until a gap is produced between the capillary
tip and the reference pin.
Fig. B228
*1
Gap
Caution
Be careful not to allow the capillary tip to touch the reference pin.
Unnecessary
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177
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Adjustment
12) Setting of [Z move (Z)] switch
Lifting switch : Lifts every 100m step

Lifting switch : Lifts every 0.5m step
Lowering switch : Lowers every 0.5m step
Lowering switch : Lowers every 100m step
Fig. B229
Unnecessary
-1102+ ,/.2
13) Set CCD camera to [High] (*1).
*1
Fig. B230
Unnecessary
-1102+ ,/.2
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178
Adjustment
14) Adjust the illumination control knob (*1) until the capillary tip and reference pin profile
are seen clearly and the capillary tip turns black in a white background. Calibration
cannot be done if the illumination is too bright or too dark.
*1
Fig.B231
Unnecessary
-1102+ ,/.2
15) Fine adjustment of capillary tip

Lower the capillary by [Z move] switch so that the capillary tip becomes 1/3 of the monitor
screen in size. After adjustment, click [Next)](*2). The lowering position of capillary is
stored into memory when clicking [Next] (*2).
*1
1/3 of the
monitor screen
*2
Fig. B232
Unnecessary
-1102+ ,/.2
179
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Adjustment
i)
Reference system setting 5/8

1)
Offset camera adjusting results (*1) are displayed on the monitor screen.
Execute
calibration by clicking [Start] (*2).
*1
*2
Fig. B233
Unnecessary
-1102+ ,/.2
2)
Display (*1) appears on the monitor screen during the execution of calibration.
*1
Fig. B234
Unnecessary
-1102+ ,/.2
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180
Adjustment
3)
Calibration in X direction and Y direction (*1) and reference pin position (lateral) are
detected automatically. By setting the reference pin to [2-axes], the X and Y directions
are detected.
*1
Fig. B235
Unnecessary
-1102+ ,/.2
4)
After the end of reference system setting 5/8, calibration results of [offset detect camera]
are displayed on the monitor screen. Make sure that the calibration results of [offset
detect camera] conform to the specified values.
RX specified value : 100~108

RXB specified value : 140~206
RY specified value : 100~108
RYB specified value : 140~206
Fig.B236
Unnecessary
-1102+ ,/.2
181
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Adjustment
5)
If the calibration results of [offset detect camera] are deviated from the specified values,
check the following items.
Illumination setting check

Reference pin position check in X direction
Reference pin position check in Y direction
Check if the distance between the reference pin and capillary tip is too far
Check if the distance between the reference pin and the capillary tip is too close
Reference pin check for dirt
Capillary check for dirt
After the end of [offset detect camera] (calibration), click [Next] to store. [offset detect
camera] setting and [reference pin position (lateral)] into memory.
Unnecessary
-1102+ ,/.2
j)

1)
Capillary lowering position is set automatically. By clicking [Auto set](*1), the capillary
moves to the optimum detection position. Click [Next] (*2).
*1
*2
Fig. B237
Caution
No problem occurs during installation even if automatic setting is not

Unnecessary
executed.
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182
Adjustment
k)

1)
Set the offset value. For [Offset value] [Auto set] (*1), and [Tool imprint] [Tool
imprint] (*2), the actual capillary position is detected by RPS unit and a calibration value
(offset value) of the detection position and actual bonding position is set.
*1
*2
Fig. B238
Unnecessary
-1102+ ,/.2
2)
By [Offset value](*1) [Auto set] (*2), the capillary is detected automatically to input an
offset value (*3) automatically.
*1
*3
*2
Fig. B239
Unnecessary
-1102+ ,/.2
183
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Adjustment
3)
[Tool imprint] (*1) [Tool imprint]] (*2)

Perform bonding after the capillary has been detected actually, measure the deviation
quantity by the indentations of the capillary, and input an offset value (Recommendable
setting).
*1
*2
Fig. B240
Unnecessary
-1102+ ,/.2
4)
By clicking [Tool imprint]](*1), bonding is done at the cross mark position to mark an
indentation.
*1
Fig. B241
Unnecessary
-1102+ ,/.2
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184
Adjustment
5)
Move the center of indentation to [set mark] (*2) by either chessman or [XY move] (*1).
For precise setting, circularize [set mark] (*2) and then, change the size to the same size
as the indentation size.
*1
*2
Fig.B242
Unnecessary
-1102+ ,/.2
6)
After setting the [set mark] (*2) to the center position of indentation by either chessman
or [XY move] (*1), click [Position determine] (*3) to store [offset value] (*4) into memory.
After inputting [offset value] (*4), click [Next(N)] (*5).
*1
*2
*3
*4
*5
Fig. B243
Caution
In automatic offset setting, the accuracy becomes approx. 2 ~ 3m.

For obtaining the accuracy more precisely, select an indentation bond.
185
Unnecessary
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Adjustment
1)
Reference system 8/8

The contents that have been input until now are displayed on the monitor screen. Click
[Finish](*1) to terminate the RPS setting.
*1
Fig. B244
Unnecessary
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186
Adjustment
(2) RPS offset adjustment

a)
If the bonding point (pad center) and bonding position (indentation ball) position are
deviated from each other during the bonding installation by executing the reference system,
correct it by RPS offset.
Fig. B245
Caution
If the reference system is not set, correct the above deviation by the
-1102+ ,/.2
camera offset.
b)
Unnecessary
Setting method
1)
Click [Machine management] [Machine specific] [RPS offset] from the menu.
Fig. B246
Unnecessary
-1102+ ,/.2
187
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Adjustment
2)
Display the setting screen on the monitor by clicking [RPS offset]. In this screen, the
cross mark center at the center of the screen does not meet the center of the actually
bonded ball center. When the cross mark meets the ball center, it is not offset deviation.
Check the bonding position and position detection.
Fig. B247
Unnecessary
-1102+ ,/.2
3)
Circularize the match mark to be a bonding ball size.
Adjust the brightness by
[Illumination](*1) if the monitor screen is too bright or too dark.
*1
Fig.B248
Unnecessary
-1102+ ,/.2
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188
Adjustment
4)
Set the bonding ball to the matching ball by either chessman or [XY move](*1). The
offset value changes automatically. Adjustment is completed by clicking [OK] (*2).
*1
*2
Fig. B249
Caution
By clicking [OK], [offset value] is stored into memory.
If [Cancel] is
Unnecessary
clicked, the [offset value] is not stored into memory.

5)
-1102+ ,/.2
Make sure that the bonding point (pad center) meets the bonding position by bonding
using the icon of [1 wire bonding] (*1)of the step bond.
After confirmation, start a
continuous run.
*1
Fig. B250
Unnecessary
-1102+ ,/.2
189
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Adjustment
6)
The reference system does not operate unless [Capillary auto Calibration] is selected by
[Machine management] [Running condition] [Capillary auto Calibration] from the
menu.
Fig. B251
Unnecessary
-1102+ ,/.2
7)
The reference system does not operate unless [Calibrate] is selected when the bonding
has been started.
Fig. B252
Unnecessary
-1102+ ,/.2
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190
Adjustment
(1) Preparation for adjustment
6.
Adjusting method of torch electrode unit

(A) Mounting method of torch electrode
a)
Click [Edit]-[Bond level set] from the menu.
Fig. B253
Caution
Adjust the torch electrode unit when the machine is ready for bonding
-1102+ ,/.2
after the end of all setting.

b)
Unnecessary
Make sure that the lead side (2nd) [Bond level setting value] is within the standard of 900
50m (*1).
*1
Fig. B254
Unnecessary
-1102+ ,/.2
191
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Adjustment
c)
Click [Machine management] [Machine Composition] [Hardware composition] from the

menu.
Fig.B255
Unnecessary
-1102+ ,/.2
d)
Set [Pre heater], [Main heater], and [Post heater] to [None] (*1) for preventing a burn or
injuries, and start work after the heaters have cooled down.
*1
Fig. B256
Caution
Lower the
temperature
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Wait for a while until the temperature has become lower than 50 after turning off
the heater power supply before starting the maintenance of hot sections for the
purpose of preventing a burn.
192
Unnecessary
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Adjustment
e)
Clamp the frame by the lead clamper. Click [Frame feed] (*1) on the monitor screen to
transfer one frame to the bonding stage.
Fig. B257
*1
Unnecessary
-1102+ ,/.2
f)
The lead clamper height differs by the frame thickness according to whether a frame exists
or not. Adjust the height under the clamped condition (*1) of a frame by the lead clamper
without fail.
*1
Fig. B258
Unnecessary
-1102+ ,/.2
193
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Adjustment
(2) Mechanical adjustment of torch position

a)
Set the eccentric pins of lateral move and vertical move of the torch electrode to meet the
eccentric center.
Loosen two SUS CSB M2.6 x 14mm of the eccentric pin for vertical
adjustment, and bring the pin to meet the eccentric center. Eccentric quantity : 1.4mm
SUS CSB M2.6 x 14mm
Eccentric pin for lateral adjustment
Fig. B259
2mm
-1102+ ,/.2
b)
Cap Screw Wrench
Eccentric pin for lateral adjustment. Loosen two SUS CSB M2.6 x 14mm of the eccentric
pin for lateral adjustment, and bring the pin to meet the eccentric center.
Eccentric
quantity : 0.5mm
SUS CSB M2.6 x 14mm
Eccentric pin for vertical adjustment
Fig. B260
2mm
-1102+ ,/.2
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194
Cap Screw Wrench
Adjustment
c)
Mounting of torch electrode

1)
The main body shaft of torch electrode is made of stainless steel (2mm) and the
discharge section having a bend tip is made of platinum (Pt : 0.4mm).
Torch
Shaft
Fig. B261
Unnecessary
-1102+ ,/.2
2)
Mount the electrode holder to the torch electrode and fasten it temporarily by SUS CSB
M2.6 x 6mm.
Fix it after the position and angle of the torch electrode have been
completed.
SUS CSB M2.6 x 6mm
Electrode holder
Torch electrode
Fig. B262
2mm
-1102+ ,/.2
195
Cap Screw Wrench
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Adjustment
3)
Fix the electrode holder to the torch unit by one fixing screw SUS CSB M2.6 x 8mm (#9).
Fixing screw SUS CSB M2.6 x 8mm (#9)
Electrode holder
Fig. B263
Caution
The torch electrode tip is made of platinum to be easily scratched or bent.

Dont bring it contact with the capillary, load clamper, illumination, etc.
d)
2mm
-1102+ ,/.2
Cap Screw Wrench
Positioning of torch electrode

1)
Click [Tool]-[Output check]- [Bond head] from the menu.
Fig. B264
Unnecessary
-1102+ ,/.2
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196
Adjustment
2)
Lower the Z-shaft by [Lowering switch](*2) of [Z move] (*1) on the monitor screen.
*1
*2
Fig. B265
Unnecessary
-1102+ ,/.2
3)
[Z move(Z)], [Lifting switch] and [Lowering switch] of the monitor screen.
[Z move]
[Lifting switch]
[Lowering switch]
Lowers every 0.5m step
[Lowering switch]
Lowers every 100m step
Fig. B266
Unnecessary
-1102+ ,/.2
197
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Adjustment
4)
Lower the Z shaft so that the torch electrode tip comes to the outer diameter of capillary
(straight part of shank) so as not to allow the capillary and torch electrode to touch each
other.
Capillary
Torch electrode
Fig. B267
Unnecessary
-1102+ ,/.2
5)
Adjust the gap between the torch electrode and the outer profile of capillary to 0.1 ~
0.15mm. Adjust the eccentric pin for lateral adjustment of the torch electrode by using
the gap gauge (Jig J501 : t= 0.095mm) and gap gauge ( jig J503 : t= 0.15mm).
Coarse adjustment of lateral position by

turning the electrode holder position
Coarse adjustment of longitudinal position by

displacing the torch electrode longitudinally
Dont lay down the tip
Capillary
Fig. B268
-1102+ ,/.2
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198
Jig J501
Jig J503
t:0.095mm
Gap gauge
t:0.15mm
Gap gauge
Adjustment
6)
After loosening two SUS CSB M2.6 x 14mm, adjust the eccentric pin for vertical
adjustment by turning it using a precise screwdriver (-).
SUS CSB M2.6 x 14mm
Lateral position fixing screw
Eccentric pin for lateral adjustment
(SUS HSB M3 x 3mm)
Electrode holder
Longitudinal position holder
(SUS CSB M2.6 x 6mm)
Fig. B269
-1102+ ,/.2
7)
2mm
Cap Screw Wrench
()
Driver
Adjust the gap between the torch tip and the outer profile of the capillary in such a way
as the gap gauge (jig J501 : t= 0.095mm) enters smooth but the gap gauge (jig J503 : t=
0.15mm) does not enter. The portion between the torch and the capillary is not seen
from the front. Check the gap by using the mirror face of jig (J773).
Jig J503
Jig J501
Fig. B270
-1102+ ,/.2
199
Jig J501
Jig J503
Jig J773
t:0.095mm
Gap gauge
t:0.15mm
Gap gauge
Height
adjusting gauge
NE00040-00
Adjustment
8)
Check the capillary and torch electrode from the front right 45position with the
capillary as the center. When the center position of the capillary tip meets the center
position of the torch electrode, the torch electrode is adjusted at the normal position.
Torch electrode and capillary tip meets each other.
Fig. B271
Unnecessary
-1102+ ,/.2
e)
Torch electrode height adjustment

1)
Put jig (J773) on the load clamper. Adjust the eccentric pin for vertical adjustment by
bringing the bottom point of the torch electrode tip (bending face at the tip) contact with
the rubber labeling face of jig (J773).
Jig J773
Fig. B272
Jig J773
-1102+ ,/.2
NE00040-00
200
Height
adjusting gauge
Adjustment
2)
After loosening two SUS CSB M2.6 x 14mm, adjust the eccentric pin for vertical
adjustment by turning it using a precise screwdriver (-) to such an extent as it touches the
rubber face of jig (J773).
SUS CSB M2.6 x 14mm
Jig J773
Fig. B273
Caution
Dont allow the torch electrode tip to press against the

jig (J773) strongly, otherwise the tip bending may be
Jig J773
-1102+ ,/.2
2mm
Cap Screw Wrench
()
Driver
Height
adjusting gauge
deformed.
3)
After the end of torch electrode height adjustment, check the gap between the torch
electrode and the capillary. When the eccentric pin is adjusted, the gap between the
torch electrode and the capillary may change. After the end of adjustment and check,
fasten the bolts at each part additionally. Each part may be displaced by retightening
the bolts at each part. Check the position of each part. After the end of adjustment,
click [Z move] [Original position] [Switch] to reset the capillary to its original position.
2mm
-1102+ ,/.2
201
Cap Screw Wrench
NE00040-00
Adjustment
(3) Program setting of torch level

a)
Click [Machine management] [Machine specific] [Torch level] from the menu.
Fig. B274
Unnecessary
-1102+ ,/.2
b)
The last set [Torch level] is displayed. Start setting by clicking [Torch level].
Fig. B275
Unnecessary
-1102+ ,/.2
NE00040-00
202
Adjustment
c)
If no frame is present at the bonding position, carry a frame by display icon (*1). This
frame conveyance is not necessary if adjustment is done continuously from mechanical
adjustment. Click [Next] (*2).
*1
*2
Fig. B276
Unnecessary
-1102+ ,/.2
d)
Put jig (J773) on the load clamper, and set it in such a way as the stepped portion of jig
(J773) (torch level measuring face) comes just below the capillary.
Torch level measuring face

Fig. B277
Jig J773
-1102+ ,/.2
203
Height
adjusting gauge
NE00040-00
Adjustment
e)
Repeat the torch position adjustment (mechanical adjustment) if the torch electrode touches
the rubber face of jig (J773) and the jig position cannot be adjusted. The bonding head
position (entire torch unit) can be moved by [XY move] switch.
Unnecessary
-1102+ ,/.2
f)
After the end of adjustment using jig (J773), click [Next] (*1), and the capillary lowers
automatically to measure the height of the stepped portion (torch level measuring face) of
jig (J773).
*1
Fig. B279
Unnecessary
-1102+ ,/.2
NE00040-00
204
Adjustment
g)
The measuring result (torch level) is displayed.
Fig. B280
Unnecessary
-1102+ ,/.2
h)
Terminate the torch level setting by clicking [Finish], and the torch level is stored into
memory. A message [Check whether a jig is detached] (*1) is displayed on the monitor
screen.
Remove jig (J773) from the load clamper.
Click [OK] (*2) to terminate this
processing.
*1
*2
Fig. B281
Unnecessary
-1102+ ,/.2
205
NE00040-00
Adjustment
(4) Torch level
(4) Torch level

The torch level is an important adjusting item to decide the position (distance) of the torch
electrode and capillary. If this adjustment is incomplete, the free air ball (initial ball) after
torch electrode sparking becomes unstable and the bonding ball diameter does not become
constant after bonding.
Unnecessary
-1102+ ,/.2
a)
The torch level setting determines the reference of the spark height. The spark height of
actual bonding head is obtained by subtracting the values of [Tail length] and [Spark gap] of
[Edit] [Bond parameter] from the torch level.
Fig. B282
Unnecessary
-1102+ ,/.2
NE00040-00
206
Adjustment
(4) Torch level
b)
Spark position (height) = Torch level (tail length + spark gap)
Tail length
Spark gap
Fig. B283
Unnecessary
-1102+ ,/.2
c)
Generally, the distance from the torch electrode tip to the capillary tip is approx. 1mm ~
1.5mm. A value obtained by adding the spark gap to the tail length becomes 1000 ~
1500m as a reference for this setting.
1~1.5mm
Fig. B284
Shinkawa standard setting : Tail length
500m
Spark gap
800m
Unnecessary
-1102+ ,/.2
207
NE00040-00
Adjustment
d)
(4) Torch level
(5) Torch electrode
The setting value of torch level is within 4700.0 ~ 10700.0m. When this setting value is
large, the distance from the bonding position to the torch spark height becomes long to
cause slow bonding speed. When the setting value is small, on the contrary, the distance to
the load clamper becomes short, the bonding becomes fast, but the torch electrode may
touch the load clamper, etc. Adjust the torch electrode height by putting the jig (J773) to
the load clamper face under the clamped condition of a frame without fail.
Unnecessary
-1102+ ,/.2
(5) Torch electrode

When a new torch electrode is used, the bonding ball diameter is dispersed in the first approx.
5000 wire, because the discharge position at the torch electrode tip remains unstable. As the
discharge position changes, the distance between the electrode and the wire at the capillary tip
changes to cause the discharge resistance to change.
The free air ball (initial ball) does not become a stable size. For stable bonding, execute the
wire bonding to the dummy chip 5000 ~ 10000 times before using for production. After 5000 ~
10000 times wire bonding, a spark trace attaches at one position at the torch electrode tip.
Since discharge is done from this spark trace, the free air ball (initial ball) profile becomes
stable.
Unnecessary
NE00040-00
208
-1102+ ,/.2
Adjustment
(1) Sensitivity adjustment of the wire presence detection sensor and wire terminal
7.
Loop control adjusting method

(A) Sensor amplifier sensitivity adjustment
(1) Sensitivity adjustment of the wire presence detection sensor and wire terminal detection
sensor
a)
Wire presence detection (FEED) sensor detects the wire so that the wire spool rotates to
draw out the wire during bonding work. If the sensitivity is not adjusted properly, the
rotation of the wire spool becomes unstable.
As a result, the wire lead-out quantity
becomes too long or short to cause an error frequently.
Wire presence detection sensor

Wire spool
Wire
Unnecessary
Fig. B285
b)
-1102+ ,/.2
If the wire of the wire spool runs short halfway, the machine stops running halfway in the
course of bonding to cause samples to be defective. Wire terminal detection (END) sensor
stops running the machine before the wire runs short.
Wire terminal detection sensor

Wire spool
Wire
Fig. B286
Unnecessary
-1102+ ,/.2
209
NE00040-00
Adjustment
c)
The sensor amplifier sensitivity is adjusted under the bonding condition after the end of
wire threading.
By turning on the WIRE TENSION pushbutton switch of the loop
control unit, air is discharged from the air tension device to apply the air tension to the
wire.
WIRE TENSION switch
Wire spool
Wire
Wire tension
Fig.B287
Unnecessary
-1102+ ,/.2
d)
Click [Tool] [Input check] [Spool] from the menu.
Fig.B288
Unnecessary
-1102+ ,/.2
NE00040-00
210
Adjustment
e)
Move the air tension wire to the detection range of the sensor by turning the wire spool by
hand.
Wire spool
Wire tension
Wire presence sensor (FEED)

Wire terminal sensor (END)
Wire
Fig. B289
Unnecessary
-1102+ ,/.2
211
NE00040-00
Adjustment
(2) Automatic sensitivity adjustment of sensor amplifier

a)
Select the mode selector switch of sensor amplifier (SUNX : FX-Al) from RUN to SET.
Operation indicator lamp (orange)

Stability indicator lamp (green)
Indicator lamp (green)
Mode selector switch
Center
Fig. B290
Unnecessary
-1102+ ,/.2
b)
2-point teaching method

Press jog switch of the sensor amplifier once (within 3 seconds) to input the luminous
energy detected by the wire. If jog switch is pressed for longer than 3 seconds, the
green indicator lamp flickers fast and the 2-point switching method is switched to the full
auto teaching system. The full auto teaching system is not used.
If the system has been
switched to the full auto switching system by continuously pressing the jog switch for longer
than 3 seconds, press the jog switch within 3 seconds again to read the luminous energy
detected by the wire.
c)
Remove the air tension wire from the detection range of the sensor by turning the wire spool
by hand again.
d)
Press the jog switch of the sensor amplifier again to read the luminous energy without wire.
e)
Reset the sensor amplifier mode selector switch from SET to RUN and terminate the
sensitivity adjustment.
f)
After the end of adjustment, stability indicator lamp (green) lights when the sensor does
not detect any wire and both stability indicator lamp(green) and operation indicator lamp
(orange) light when the sensor detects a wire.
g)
If stability indicator lamp (green) does not light when the sensor does not detect any wire,
it shows that the sensitivity is unstable. Adjust the sensitivity again.
Unnecessary
-1102+ ,/.2
NE00040-00
212
h)
Adjustment
If the sensor detection section is dirty, stability indicator lamp (green)does not light.
Clean the sensor detection section by using alcohol or the like. After cleaning, make sure
that stability indicator lamp (green) lights again.
i)
A numeric value of the indicator indicates the sensitivity. The sensitivity can be adjusted
by turning the jog switch. However, the automatic sensitivity setting is recommended.
j)
Dont change the mode of the mode selector switch, since it has been set.
k)
For setting again due to parts exchange, etc., execute the initializing method of the sensor
amplifier.
Unnecessary
-1102+ ,/.2
213
NE00040-00
Adjustment
(3) Initialization of sensor amplifier
(3) Initialization of sensor amplifier

a)
Select the mode selector switch of the sensor amplifier (SUNX FX-Al) from RUN to
MODE.
Operation indicator lamp (orange)

Stability indicator lamp (green)
Indicator lamp (green)
Mode selector switch
Center
Unnecessary
Fig. B291
-1102+ ,/.2
b)
Output operation setting

1)
Lighting setting when a light enters the sensor

Adjust the sensor by turning the jog switch toward [+] or [-] so that L-ON flickers. By
pressing the jog switch, the setting is stored into memory, and changed to the next
setting.
2)
Setting of projection light frequency (interference preventive function)

Adjust the projection light frequency by turning the jog switch toward [+] or [-] so that
FR-1flickers.
(Projection light frequency 1 setting)
By pressing the jog switch, the setting is stored into memory, and changed to the next
setting.
c)
Setting of timer
1)
Adjust the timer by turning the jog switch toward [+] or [-] so that NON flickers.
(No-timer setting) By pressing the jog switch, the setting is stored into memory, and
changed to the next setting.
d)
After the end of setting, set the mode selector switch to RUN.
Unnecessary
-1102+ ,/.2
NE00040-00
214
Adjustment
(1) Adjustment of the mounting position of cable holder
(B) Positioning of cable holder

a)
If the cable holder is not mounted at the center of the capillary, wire bending or
off-centering occurs. Slightly loosen two SUS CSB M2 x 6mm and one SUS CSB M2 x
8mm which mount the cable holder to the bond holder. Adjust the position by loosening
the fixing bolts.
SUS CSB M2 x 6mm
SUS CSB M2 x 8mm
Cable holder
Bond holder
Fig. B292
b)
Thread a wire to be ready for bonding.
1.5mm
-1102+ ,/.2
Cap Screw Wrench
The wire may be bent in the course of wire
threading. After threading a wire, try bonding 3 ~ 4 times. Indicate [Pause bond] (*1) by
icon pause.
*1
Fig. B293
Unnecessary
-1102+ ,/.2
215
NE00040-00
Adjustment
c)
Position the cable holder in such a way as the wire is positioned at the clamp face center of
cable holder through the capillary center when the capillary has grounded to the lead bond
point.
Check from the front
Wire
Fig. B294
Unnecessary
-1102+ ,/.2
Check from the side
Wire
Fig. B295
Unnecessary
-1102+ ,/.2
NE00040-00
216
Adjustment
d)
If this confirmation is difficult, use the microscope. Focus to the upper hole of the capillary.
Adjust the mounting position of the cable holder so that the wire comes out of the center of
the capillary.
Wire
Transducer
Capillary
Fig. B296
Unnecessary
-1102+ ,/.2
e)
Fix two SUS CSB M2 x 6mm and one SUS CSB M2 x 8mm which mount the cable holder to
the bond holder.
SUS CSB M2 x 6mm
SUS CSB M2 x 8mm
Cable holder
Bond holder
Fig. B297
Caution
A resin insulation bush is inserted between the transducer and fixing

bolts.
The insulating bush may be broken if bolts are fastened strongly.
217
-1102+ ,/.2
M2
Cap Screw Wrench
NE00040-00
Adjustment
(1) Adjustment of the mounting position of wire tension
(C) Wire tension adjustment

a)
If the wire tension is not mounted at the correct position, excessive tension is applied to the
wire during wire looping to cause a loop profile failure. Adjust the longitudinal position of
the wire tension after loosening one SUS CSB M2 x 6mm, and also adjust the lateral
position and angle after loosening one SUS CSB M2.5 x 6mm.
SUS CSB M2.5 x 6mm
SUS CSB M2 x 6mm
Wire tension
Fig. B298
b)
Thread a wire to be ready for bonding.
1.5mm
-1102+ ,/.2
Cap Screw Wrench
2mm
Cap Screw Wrench
The wire may be bent in the course of wire
threading. After threading a wire, try bonding 3 ~ 4 times. Indicate [Pause bond] (*1) by
icon pause.
*1
Fig. B299
Unnecessary
-1102+ ,/.2
NE00040-00
218
Adjustment
c)
Position the cable holder in such a way as the wire is positioned at the center of capillary
and the clamp face center of cable holder through the center of the capillary when the
capillary has grounded to the lead bond point.
Confirm it in two front and side directions.
Check from the front
Wire
Fig. B300
Unnecessary
-1102+ ,/.2
Check from the side
Wire
Fig. B301
Unnecessary
-1102+ ,/.2
219
NE00040-00
Adjustment
d) Since the distance from the wire tension to the capillary is long, adjust the mounting
position of the wire tension so that the wire is perpendicular to the lead bonding point by
visual check. It can be checked by using a square or the like when the Z-axis position is
horizontal (Z position : 90050m).
Since the Z-axis operates circularly, the capillary
position is deviated backward when the Z-axis lifts or lowers from the horizontal position.
Unnecessary
-1102+ ,/.2
e)
Fix one SUS CSB M2 x 6mm with flat washer and one SUS CSB M2.5 x 6mm which fix the
wire tension.
SUS CSB M2.5 x 6mm
SUS CSB M2 x 6mm
Wire tension
Fig. B302
1.5mm
-1102+ ,/.2
NE00040-00
220
Cap Screw Wrench
2mm
Cap Screw Wrench
WIRE BONDER
UTC-1000
THIRD STEP GUIDE (1)
August 1, 2004 issue
Not for sale
Version 1
Issue
SHINKAWA LTD. Engineering Service Dept.

2-51-1 Inadaira Musashimurayama-shi,
Tokyo 208-8585, Japan
Edit
Masao Ogawa
Toshiyuki Gomi
Nobuyuki Mitui
Hideki Izaki
C
SHINKAWA LTD 2004. All rights reserved
NE00040-00
(Doc#2018-1)

3rd Step Guide

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WIRE BONDER

THIRD STEP GUIDE

contact our Engineering Service Dept.

You are requested to understand that our

company is not responsible even if a trouble should have occurred.

Third Step Guide (1)

THIRD STEP GUIDE

Chapter 1 Periodical inspection

Third Step Guide (2)

THIRD STEP GUIDE

Chapter 2 Disassembly and adjustment

Third Step Guide (3)

THIRD STEP GUIDE

Chapter 2 Disassembly and adjustment

Necessity of periodical inspection (Page 9 ~)

Jigs and tools necessary for periodical inspection (Page 13 ~)

Periodical inspection recording (Page 15 ~)

Kinds of periodical inspection and maintenance (Page 19 ~)

Disassembly and adjustment of bonding head (Page 51 ~)

Cap Screw Wrench

Chapter 1 Periodical inspection

Necessity of periodical inspection ......................................................9

1. Necessity of periodical inspection ...................................................................................... 10

Jigs and tools necessary for periodical inspection .............................13

Periodical inspection recording ..........................................................15

1. Periodical inspection recording table.................................................................................. 16

Kinds of periodical inspection and maintenance ................................19

1. Periodical inspection items .................................................................................................20

Chapter 2 Disassembly and adjustment of each

Disassembly and adjustment of bonding head .................................. 51

1. Bonding head specifications ...............................................................................................52

For safe work

Each illustrated symbol means as follow.

Wrong operation, if executed due to the negligence of this caution

This symbol indicates an item to be careful when operating the machine.

Please read the contents

Please read the

Dont use any surface plate made

Dont put any iron or other magnetic bodies close to

For maintenance, use tools conforming to the accuracy of the machine.

A tool having poor accuracy may

Take an anti-static countermeasure without fail when adjusting electric units.

UTC-1000 inspection and adjusting points

Disassembly and adjustment

We are not responsible even if the

Chapter 1 Periodical inspection

Necessity of periodical inspection

1. Necessity of periodical inspection.......................................................................................10

Necessity of periodical inspection

1. Necessity of periodical inspection

Its performance can be fully

displayed by executing the maintenance

As the machine is being

operated, many component parts may be

(B) Preparation of tools and jigs

For the maintenance, use tools conforming to the machine accuracy.

A poor accuracy tool may cause the

2. Inspection and maintenance records of machine

(B) Utilization of inspection and maintenance records

Chapter 1 Periodical inspection

1-2 Jigs and tools necessary for periodical inspection

Jigs and tools necessary for periodical inspection

(A) Grease designated by our company